Ballistic field-effect transistors based on Bloch resonance and methods of operating a transistor
11133409 · 2021-09-28
Assignee
Inventors
Cpc classification
H03B1/02
ELECTRICITY
H01L29/7786
ELECTRICITY
H01L29/778
ELECTRICITY
H03B28/00
ELECTRICITY
H01L29/24
ELECTRICITY
International classification
H01L29/778
ELECTRICITY
H03B1/02
ELECTRICITY
Abstract
A semiconductor device includes a source, a drain, and a channel electrically connected to the source and the drain. The channel has a channel length from the drain to the source which is less than or equal to an electron mean free path of the channel material. A first gate has two arms, each extending between the drain and the source (i.e., at least a portion of the distance between the source and the drain). Each arm of the first gate is disposed proximate to a corresponding first and second edge of the channel. Each arm of the first gate has a periodic profile along an inner boundary, wherein the periodic profiles of each arm are offset from each other such that a distance between the arms is constant. A Bloch voltage applied to the first gate will reduce the effective channel with such that Bloch resonance conditions are met.
Claims
1. A semiconductor device, comprising: a source; a drain spaced apart from the source; a channel electrically connected to the drain and the source, and having a length from the drain to the source which is less than or equal to an electron mean free path () of the channel; a first gate comprising two arms, each arm extending between the drain and the source and the arms disposed proximate to a first and second edge of the channel, respectively, and wherein each arm of the first gate has a periodic profile along the corresponding edge of the channel and the periodic profiles of each arm are offset from each other such that a distance between the arms is constant.
2. The semiconductor device of claim 1, wherein the profiles of the arms of the first gate have a period of distance a and the profile of an arm is offset from the profile of the other arm by a distance of a/2.
3. The semiconductor device of claim 1, wherein the channel comprises a two-dimensional electron gas (“2DEG”).
4. The semiconductor device of claim 1, wherein the first gate is configured such that a negative bias voltage applied to the first gate will reduce an effective channel width, d.
5. The semiconductor device of claim 4, wherein a Bloch voltage, V.sub.Bloch, applied to the first gate will reduce the effective channel width such that Bloch resonance conditions are met.
6. The semiconductor device of claim 1, wherein the first and second edges of the channel are straight and parallel to one another.
7. The semiconductor device of claim 1, wherein the first and second edges of the channel each have a periodic profile configured such that the channel generates Bloch resonance when no bias voltage is applied to the first gate.
8. The semiconductor device of claim 7, wherein the periodic profiles of the first and second edges corresponds to the periodic profiles of the arms of the first gate.
9. The semiconductor device of claim 1, wherein the periodic profiles of the arms of the first gate are sinusoidal, triangular, or rectangular.
10. The semiconductor device of claim 1, further comprising a second gate in series with the first gate along the length of the channel, the second gate comprising two arms disposed proximate to the first and second edges of the channel, respectively, and wherein each arm of the second gate has a periodic profile adjacent to the corresponding edge of the channel and the periodic profiles of each arm of the second gate are different from the periodic profiles of the arms of the first gate.
11. The semiconductor device of claim 10, wherein the periodic profiles of the arms of the second gate are not offset from each other such that the distance between the arms of the second gate varies in relation to the profiles.
12. The semiconductor device of claim 1, wherein the arms of the first gate include a second periodic profile interdigitated with the first periodic profile and the gate is configured for selective application of a bias voltage to the first periodic profile and/or the second periodic profile.
13. The semiconductor device of claim 12, wherein the profiles of the arms of the first gate have a period of distance a and the profile of an arm is offset from the profile of the other arm by a distance of a/2, and where the periodic profiles of each arm of the second gate are not offset from each other.
14. A method for operating a transistor, comprising: providing a semiconductor device according to claim 1; applying a negative bias voltage to the first gate so as to reduce the effective channel width such that Bloch resonance conditions are met to stop a flow of electrons between the drain and the source.
15. A method for operating a transistor, comprising: providing a semiconductor device according to claim 1; applying a negative bias voltage to the first gate such that a Fermi level, E.sub.F, is substantially the same as the energy of a Dirac point, E.sub.Dirac.
16. A method for operating a transistor, comprising: providing a semiconductor device according to claim 1; applying a negative bias voltage to the first gate such that a Fermi level, E.sub.F, is within 75 meV of the energy of a Dirac point, E.sub.Dirac.
17. A method for operating a transistor, comprising: providing a semiconductor device according to claim 7; applying a negative bias voltage to the first gate so as to increase the effective channel width and allow a flow of electrons between the drain and the source.
18. An oscillator, comprising a semiconductor device of claim 10.
Description
DESCRIPTION OF THE DRAWINGS
(1) For a fuller understanding of the nature and objects of the disclosure, reference should be made to the following detailed description taken in conjunction with the accompanying drawings, in which:
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(23) .sub.c=2500 nm.
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DETAILED DESCRIPTION OF THE DISCLOSURE
(26) In a first aspect, the present disclosure may be embodied as a semiconductor device 10 (a lateral-gate ballistic Bloch field-effect transistor or “BBFET”) having a source 22 and a drain 24 spaced apart from the source 22 (see, e.g., of the material from which the channel is made (as further described below). In this way, the channel 30 has a ballistic electron transport-resulting in the BBFET as a ballistic transistor. Depending on channel 30 conditions (as further described below), electrical current may flow from a positive potential on the drain 24 to a negative potential on the source 22.
(27) As stated above, the channel 30 of the BBFET may be made of a 2DCL material. Suitable 2DCLs include, for example, graphene, molybdenum disulfide MoS.sub.2, and a high mobility 2-dimensional electron gas (2DEG), for example, a 2DEG at GaAs/AlGaAs or InAs/InGaAs heterostructure interfaces, and many others. In embodiments of the BBFET, it is advantageous for the selected 2DCL material to have a large electron mean free path , for example, at a sub-micrometer scale, in order to have
approximately equal to the channel length L. In a non-limiting example, a 2DEG in an InGaN heterostructure may be selected and provides room temperature ballistic transport and an electron mean free path
=75 nm. An electron concentration in such a 2DEG is n≈10.sup.13 cm.sup.−2. A suitable channel length for a BBFET made from such a 2DEG would be L≤75 nm (the length of the channel from the drain to source). A suitable width is, for example, W≈10 nm.
(28) The device 10 further includes a first gate 40 having two arms 42, 44. The arms 42, 44 may be electrically connected to each other. Each arm extends between the source 22 and the drain 24. By extending between the source and the drain, the arms may or may not extend the entire distance between the source and the drain. The arms 42, 44 are arranged to be proximate to a first edge 32 and a second edge 34 of the channel 30, respectively. In an exemplary embodiment, wherein the channel is a 2DEG, the arms of the first gate may be disposed on the channel, each arm proximate to (i.e., adjacent) a corresponding one of the first or second edges of the channel. For example,
(29) Each arm 42, 44 of the first gate 40 has a periodic profile along the corresponding edge 32, 34 of the channel 30. In other words, each arm has a periodic profile along an inner boundary of the arm (an edge of the arm which faces the opposing arm of the gate). For example, in some embodiments, the arms 42, 44 have a sawtooth (e.g., triangular), rectangular, or sinusoidal profile. The profile of a first arm 42 is offset from the profile of a second arm 44 such that a distance between the arms is constant. For example, the profiles may have a shape with a period of a, and the offset of the profiles may then be a/2 (see, e.g.,
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(for sinusoidal-shaped boundary profiles), where p and n are quantum numbers of energy states shown in
(31) In some embodiments (for example, as depicted in
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(34) In other embodiments, such as the device 100 depicted in
(35) In some embodiments, a device 200 further includes a second gate 250 in series with the first gate 240 along the length of the channel 230 (see, e.g.,
(36) In some embodiments, such as the device 300 depicted in
(37) Quantitative Description of BBFET Operation in Terms of Physics and Practical Parameters of the 2D Conducting Layer.
(38) When the periodic potential configuration satisfies the condition of Bloch resonance, and Fermi energy coincides with a position of the Bloch gap in the electron energy spectrum, the electron transport through the channel would be blocked—corresponding to an OFF state of the BBFET. Additional detail regarding Bloch resonance and Bloch gaps is found in V. A. Pogrebnyak and E. P. Furlani, Tunable Bloch Wave Resonances and Bloch Gaps in Uniform Materials with Reconfigurable Boundary Profiles, Phys. Rev. Lett. 116, 206802 (2016), which is incorporated herein by this reference. Reducing the gate potential would return the transistor to an ON state. A position of the gap as well as the Fermi level can be adjusted by varying a potential on the gate, thus changing the effective width d of the channel. A distance a between two adjacent teeth on a sawtooth-shape gate should satisfy Bloch resonance conditions
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where p and n are quantum numbers of energy states shown in =75 nm. The ON/OFF ratio increases as L/a increases. For example, in a 10-tooth gate this ratio could reach up to 10.sup.9 as the simulation shows.
(40) When a voltage is applied to the gate, the effective width d of the channel reduces (
(41) The above-described BBFET operation refers to volatile OFF-state of the transistor—i.e., when a voltage is required to maintain an OFF state. The configuration of the BBFET can be easily modified to have a non-volatile OFF-state, potentially providing energy savings in some applications. In this case, the 2DEG may be patterned initially to have a periodic shape corresponding to the periodic profile of the gate arms with parameters d and a satisfying the conditions for Bloch resonance. In this case, at V.sub.g=0, the transistor is in an OFF state. Applying a small voltage to the gate would break the conditions for Bloch resonance, and the transistor would be at an ON state. In many electronics applications, the non-volatile OFF state operation is preferable and common.
(42) It is noted that modern semiconductor technology is developing very fast, and a new type of 2DCL is reported in the literature regularly. The 2DEG in InGaN heterostructure discussed above is only one example of a 2DCL suitable for the BBFET. Other suitable materials (such as graphene, etc.) will be apparent in light of the present disclosure.
(43) Exemplary Modes of Operation
(44) The 1.sup.st State—ON
(45) A first state, the non-volatile ON state, is as described above where V.sub.g=0 and current is able to flow in the rectangular 2DEG channel (see, e.g.,
(46) The 2.sup.nd State—OFF
(47) A second state is the OFF state, where V.sub.g≈−V.sub.bias, and the negative gate potential forms a periodic shape of the channel, thereby generating the energy bandgap as described above (see, e.g.,
(48) The 3.sup.rd State—ON
(49) A third state may be an ON state when the Fermi level of the 2DEG E.sub.F coincides with a Dirac point at the energy diagram (in the energy diagram, a tip of E(k) at k=π/a) (see, e.g.,
(50) The 4.sup.th State—ON
(51) A fourth state may be two ON states in the vicinity of a Dirac point, where the Fermi level varies with ±ΔE.sub.F (see, e.g.,
(52) A BBFET as a DC-to-AC Voltage Convertor—a BBFET Oscillator
(53) The bandgap engineering in the BBFET opens doors to designing a device that directly converts DC voltage into AC voltage due to the achievements in synthesis of new materials with excellent ballistic transport.
(54) The 2DEG channel with periodic boundary profile in the BBFET has a fundamental property—the physical parameters of the BBFET (including energy and velocity v) depend periodically on the wave vector k. When a DC electric field is applied to the transistor, an electron momentum ℏk and energy E(k) increase. The variation of the energy and velocity with time happen in accordance with the energy band diagram E(k) that is a periodic function. To produce oscillations, the ballistic electrons should traverse in the k-space through the first Brillouin zone from one boundary to another. Electrons bounce between the two boundaries in the k-space and correspondingly between the drain and source in a transistor. The electron velocity, as the derivative of E(k), would produce oscillations of different waveforms depending on shape of E(k) that is controlled by the gate voltage. For example, the interdigitated BBFET oscillator (
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(56) It is noted that the threshold energy ΔE.sub.th is approximately equal to the energy between two subsequent resonant quantum states described, for example, in
(57) Therefore, such a BBFET oscillator can reach THz-range frequencies.
(58) Validation of the BBFET Concept
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(60) Advantages of Embodiments of the BBFET
(61) 1) BBFET is a ballistic transistor that by definition is a fast transistor for THz applications with a minimal power dissipation.
(62) 2) In a ballistic transistor, shrinking the size of the transistor improves its ballistic transport. In other words the smaller transistor, the better its operation.
(63) 3) In BBFET concentration of electrons in the channel remains constant upon switching transistor between ON/OFF states, while MOSFET operation is based on a sharp change in electron concentration that produces a delay. BBFET has not such delay on switching.
(64) 5) The simplicity of the transistor.
(65) 6) The BBFET may be made from as few as two materials: metal (aluminum, gold, etc.) for contacts and the gate, and a strip of a 2D-conduction layer.
(66) 7) The BBFET lateral gate with repelling electron potential does not require fabrication of a dielectric layer between the gate and channel in contrast to a MOSFET structure.
(67) 8) The simplicity described above significantly simplifies fabrication of the BBFET and therefore significantly reduces the price of a transistor, a chip, a computer, and of electronics in general. Now semiconductor companies spend 70%-80% of the total effort to produce transistor on fabrication the thin oxide film separating the gate and channel in MOSFET. The BBFET does not require the fabrication of such oxide layer.
(68) Unique aspects of the presently-disclosed BBFET include:
(69) 1. The periodic shape of BBFET 2DEG channel configuration that meets Bloch resonance condition.
(70) 2. The mechanism of BBFET operation based on creating a gap in the electron energy spectrum of a 2D conducting layer by applying a voltage to the lateral periodically-shaped split-gate. The gap results in ON/OFF switching while the electron concentration in the channel remains almost constant.
(71) 3. The periodic shape of 2DEG channel producing OFF state: relation between d, a, E.sub.F, the Bloch resonance condition, and E(Fermi)˜E(gap)—the relations underlying the mechanism of the BBFET OFF state.
(72) 4. The mechanism underlying the BBFET Dirac state with the maximum small effective electron mass.
(73) 5. The mechanism underlying the BBFET two ON states with opposite directions of electron velocity upon varying the Fermi level±ΔE.sub.F in vicinity of Dirac point.
(74) 6. The BBFET with an interdigitated upper arm of the split-gate for electronic switching of the shift the in lateral gate periodicity: Δx=0 and Δx=a/2.
(75) 7. The BBFET with two sets of split-gates with different shifts between the upper and lower channel boundary periodic profiles (Δx=0 and Δx=a/2) which produce two different field-effect electronic energy bandgaps (heterostructure) along the 2DEG channel with a uniform chemical composition.
(76) 8. The BBFET oscillator configuration, the underlying mechanism of its oscillation state and method of Bloch-FET oscillator operation.
(77) Although the present disclosure has been described with respect to one or more particular embodiments, it will be understood that other embodiments of the present disclosure may be made without departing from the spirit and scope of the present disclosure. Hence, the present disclosure is deemed limited only by the appended claims and the reasonable interpretation thereof.