MEASURING SYSTEM, MEASURING ARRANGEMENT AND METHOD FOR DETERMINING MEASURING SIGNALS DURING A PENETRATION MOVEMENT OF A PENETRATION BODY INTO A SURFACE OF A TEST BODY

Abstract

The invention relates to a measuring System, a measuring arrangement and a method for detecting measuring signals during a penetration movement of a penetration body (41) into a surface of a test body (14), in particular for hardness measurement or for determining the Scratch resistance of the surface of the test body (14), or for detecting measuring signals during a scanning movement of the penetration body (41) on the surface of the test body (14), in particular for determining the surface roughness, comprising a housing (47) provided with a power generating device (44) which is operatively connected to a penetration body (41) for generating a displacement movement of the penetration body (41) along a displacement axis (48) of the penetration body (41) and which actuates a penetration movement of the penetration body (41) into the surface to be examined of the test body (14), or which positions the penetration body (41) on the surface of the test body (14) for scanning, and further comprising at least one first measuring device (78) for measuring the penetration depth in the surface of the test body (14) or a displacement movement of the penetration body (41) along its displacement axis (48) during a scanning movement on the surface of the test body (14), wherein the power generating device (44) actuates the displacement movement of the penetration body (41) by means of a magnetic force.

Claims

1-39. (canceled)

40. A measuring device for detecting measuring signals during a penetration movement of an indenter into a surface of a specimen, for measuring the hardness, or for determining the scratch resistance of the surface of the specimen or for detecting measuring signals during a scanning movement of the indenter on the surface of the specimen, with a housing comprising a force-generation means which is operatively-connected with an indenter for generating a displacing movement of the indenter along a travel axis of the indenter, and which drives a penetrating movement of the indenter into the surface to be tested of the specimen or which positions the indenter on the surface of the specimen for scanning, and with at least one first measuring means for measuring the penetration depth into the surface of the specimen or for measuring a displacing movement of the indenter along its travel axis during a scanning movement of the indenter on the surface of the specimen, wherein the force generation means comprises a drive device and a magnetic transmission device and the magnetic transmission device comprises a first magnetic pole and a second magnetic pole, which are arranged at a distance to one another and which are oriented with the same poles to one other, wherein the first magnetic pole is connected with the drive device that drives a displacing movement of the first magnetic pole along a travel axis, which is located in the axis of the penetration movement of the indenter or parallel thereto, or which is located perpendicular to the axis of the penetration movement of the indenter, the second measuring pole of the transmission device is provided on a transmission element which receives the indenter on the opposite end thereof, wherein the transmission element is displaceably guided inside the housing along a travel axis, which axis preferably is perpendicular to a base plate of the housing or is located in the axis of the penetrating movement of the indenter, and a travel movement driven by the drive device is transmitted on to the indenter by means of a magnetic force of the magnetic transmission device.

41. The measuring device according to claim 40, wherein by a displacing movement of the first magnetic pole in the direction towards the second magnetic pole, the displacing movement of the indenter in the direction towards the specimen for a penetration force into the specimen or a contact force on the specimen for scanning the surface of the specimen is adjustable.

42. The measuring device according to claim 40, wherein the transmission element is displaceably accommodated in the housing by means of a guide arranged on a holding device, and the guide comprises at least two resilient elements spaced from one another, which displaceably guide the transmission element in the travel axis of the drive device and wherein the guide is releasably held in the holding device, or that the guide is integrally connected with the holding device, wherein the holding device and the leaf-spring elements integrally arranged thereon.

43. The measuring device according to claim 40, wherein the housing comprises a base plate with a recess, and the displacing movement of the indenter is aligned with the longitudinal axis of the recess, and the indenter, which is provided at the lower end of the transmission element, is positionable, from an initial position inside the recess or inside an attachment ring arranged in the recess, with respect to an outer side of the base plate in a drive position protruding with respect to an outer side of the base plate and wherein the guide holds the transmission element with the indenter arranged thereon in an initial position, in which the indenter is arranged set-back inwardly with respect to a lower side of the housing that is oriented towards the specimen.

44. The measuring device according to claim 40, wherein the first measuring means is provided on the baseplate of the housing adjacent to the indenter, which means comprises a measuring probe which is assigned to an internal end of the indenter.

45. The measuring device according to claim 40, wherein the drive device is provided on a cover element of the housing, which comprises at least one drive element displaceable along the travel axis, which is located in the travel axis of the indenter or in parallel to the travel axis of the indenter, and the drive element receives the first magnetic pole at an end directed towards the transmission element.

46. The measuring device according to claim 45, wherein the drive element is guided, as a drive spindle with a guide provided on the housing, in a manner secured against rotation, or that the drive element is configured as a telescopic spindle and that the drive element is connected with a rotary drive driven by a drive motor.

47. The measuring device according to claim 40, wherein the travel axis of the drive element is oriented perpendicular to the travel axis of the indenter, and the drive element drives a simultaneous displacing movement of two or more permanent magnets forming the first magnetic pole, which are transferrable to a partially overlapping position or to a congruent position with respect to a corresponding number of permanent magnets forming the second magnetic pole, and the transmission element comprises a receiving device, which, at the same distance to the travel axis of the transmission element, receives at least two permanent magnets for forming the second magnetic pole.

48. The measuring device according to claim 47, wherein the drive element is formed by a pair of toothed racks, which is actuatable with a rotary drive perpendicular to the travel axis of the indenter and which is displaceable along guide rails, and respectively one permanent magnet for forming the first magnetic pole is provided in a manner facing the opposite toothed rack.

49. The measuring device according to claim 45, wherein a drive movement of the drive element is monitored by a third measuring means and a fourth measuring means, is provided between the drive element and the first magnetic pole arranged thereon.

50. The measuring device according to claim 40, wherein a vibration damping device is assigned to the second magnetic pole arranged on the transmission element and wherein the vibration damping device is formed as an enclosure made of a ferromagnetic material, which surrounds the second magnetic pole and, in an initial position of the indenter, the second magnetic pole is at least partially plunged in the enclosure.

51. The measuring device according to claim 40, wherein a compensating element is provided between the two leaf spring elements spaced in parallel from one another, which element is pivotably mounted on the holding device and the compensating element protrudes into the transmission element with an end thereof, on which a leaf spring element is provided that extends in the direction towards an end of the transmission element that receives the magnetic pole and is fixed thereto.

52. The measuring device according to claim 51, wherein the compensating element is mounted on the holding device by means of a clamping means.

53. The measuring arrangement for detecting a penetration depth in a surface of a specimen, for detecting the scratch resistance of a surface of a specimen, or for detecting a surface roughness of a surface of a specimen, comprising a measuring table for receiving the specimen, a handling means for transferring a measuring device from an initial position into a measuring position, a base body, on which at least the measuring table and the handling means is provided, a control for driving and performing a measurement with the measuring device on the specimen, which drives at least a placing movement of an indenter of the measuring device on to the specimen with the handling device, wherein the penetration movement of the indenter into the surface of the specimen or the scanning movement of the indenter on the surface of the specimen is provided with the measuring device according to claim 1.

54. The measuring arrangement according to claim 53, wherein the optical detection means is arranged adjacent to the measuring device on the base body, wherein the measuring table is displaceable between the measuring device and the optical detection means, or the measuring device and the optical detection means are displaceable relative to the measuring table and wherein a displacing movement of the measuring table along an axis located in the plane of the surface of the specimen, is driven by the control.

55. A method for detecting measuring signals during a penetration movement of an indenter into a surface of a specimen of a measuring device, or during a scanning movement of an indenter on a surface of a specimen, in which the specimen is positioned on a measuring table and the measuring device is placed on to the specimen, in an initial position, in which the penetrating movement or the scanning movement of the indenter is driven with the force generation means, which comprises a drive device and a magnetic transmission device, wherein the magnetic transmission device comprises a first magnetic pole and a second magnetic pole, which are arranged at a distance to one another and which are oriented with the same poles to one other, in which a feed movement of the driven device, using the magnetic force, is driven for the penetrating movement of the indenter into the specimen, or in which the feed movement of the driven device, using a magnetic force, is driven for the scanning movement of the indenter on the specimen.

56. The method according to claim 55, wherein for measuring the hardness of the surface of the specimen, in a first method step, the measuring device is moved towards the specimen, that when placing the measuring device on to the specimen, the feed movement is immobilized, that a displacing movement of the indenter is driven until the indenter rests on the surface of the specimen, and this position is forwarded to the control as a zero position for the subsequent hardness measurement or wherein for scratch-resistance measurement of the surface of the specimen, in a first method step, prior to the measuring device being placed on to the surface of the specimen, the indenter is applied with a displacing movement, so that the indenter freely protrudes with respect to a lower side of the housing, that the measuring device is moved towards the specimen and is immobilized when the indenter is placed on to the specimen, and this position is forwarded to the control as a zero position for the subsequent scratch resistance measuring and that during the penetration movement of the indenter in the specimen, driven by the magnetic force for the scratch-resistance measurement, the measuring table is displaced in a direction perpendicular to the penetrating movement of the indenter and a scratch is introduced into the surface of the specimen, and via the measuring signals of the first measuring means for the penetration depth and the measuring signals of at least one further, second measuring means assigned to the indenter, a deflection of the indenter along the displacement direction of the specimen as well as the calculated force by the detected feed movement of the drive element with the third measuring means or the detected measuring signals of the fourth measuring means are detected and evaluated.

57. The method according to claim 55, wherein the force generation means is applied with a testing force and that a penetrating movement of the indenter into the surface of the specimen is detected at least with a first measuring means.

58. The method according to any one of claim 55, wherein the force from the feed movement that acts on the indenter, which is detected by third measuring means, is calculated, or detected by a fourth measuring means, and that the penetration depth of the indenter into the specimen is detected by the first measuring mean, and that the hardness of the surface of the specimen is determined from the calculated or detected penetration force by the third or fourth measuring device and the detected penetration depth through the first measuring means depending on the geometry of the indenter.

59. The method according to claim 56, wherein prior to the introduction of the scratch in the specimen, the measuring device is placed on to the surface of the specimen and is displaced in a direction perpendicular to the place-on movement of the specimen, and the measuring signals detected by the first measuring means are detected and stored as pre-scratch profile data and/or wherein the after the introduction of the scratch into the specimen, the measuring device is placed in the scratch, and the intender with the measuring device is displaced in a direction perpendicular to the place-on movement of the specimen, and the signals detected by the measuring device are detected along the displacing movement of the indenter in the scratch, and are stored as post-scratch profile data.

Description

[0051] The invention, as well as other advantageous embodiments and further developments thereof, are described in greater detail and explained in the following by means of the examples illustrated in the drawings. The features that can be taken from the description and the drawings can be used individually or in plural in any combination, according to the invention. Shown are in:

[0052] FIG. 1 a schematic view of a measuring arrangement according to the invention having a measuring device,

[0053] FIG. 2 a first perspective view of the measuring device of FIG. 1,

[0054] FIG. 3 a further perspective view of the measuring device according to FIG. 2,

[0055] FIG. 4 a schematic side view of the measuring device according to FIG. 2,

[0056] FIG. 5 a schematic, enlarged view of a lower part of the measuring device according to FIG. 2 with a first measuring means,

[0057] FIG. 6 a schematic, enlarged view of an upper part of the measuring device according to FIG. 2 with a third measuring means,

[0058] FIG. 7 a further schematic side view of the upper part of the measuring device according to FIG. 6,

[0059] FIG. 8 a schematic, enlarged view of the measuring device with a second measuring means,

[0060] FIG. 9 a schematic sectional view of an alternative embodiment of a lower part of the measuring device according to FIG. 5,

[0061] FIG. 10 a perspective view onto a leaf spring element,

[0062] FIG. 11 a perspective view onto an alternative embodiment of leaf spring element with a holding device for the measuring device according to FIG. 2,

[0063] FIG. 12 a schematic side view of an alternative embodiment of the measuring device according to FIG. 2,

[0064] FIG. 13 a schematic side view of a further alternative embodiment of the measuring device according to FIG. 2,

[0065] FIG. 14: a schematic view from below onto a pressure diaphragm element of a holding device for the measuring device according to FIG. 13,

[0066] FIG. 15 a perspective view of a further alternative embodiment of the measuring device according to FIG. 2,

[0067] FIG. 16 a further schematic view onto the alternative measuring device according to FIG. 15, and

[0068] FIG. 17 a schematic sectional view of the magnetic transmission device of the alternative measuring device according to FIG. 15.

[0069] FIG. 1 schematically illustrates a measuring arrangement 11. Such a measuring arrangement 11 can be provided for testing mechanical and/or physical properties of surfaces on specimens 14, such as for example films, layers and/or coatings on objects. The measuring arrangement 11 can, for example, be employed as a hardness measuring means, in which a hardness measurement is performed by penetration, by means of an indenter 41, of a measuring device 12. In addition, this measuring arrangement 11 with the measuring device 12 can be provided in order to determine a scratch resistance of a film, a layer or a coating on objects. CVD coatings or PVD coatings can be here tested with respect to their scratch resistance, for example. Likewise, further micro scratches can be detected or other deformation information from the surface can be detected and analyzed. Likewise, this measuring arrangement 11, in particular with the measuring device 12, also allows for a roughness measuring of a surface of the specimen 14, without being thusly accompanied by a damaging of the surface of the specimen 14. In this case, the indenter 41 is placed on to the surface of the specimen 14 and displaced along the surface in order to scan the roughness of the surface of the specimen 14.

[0070] The measuring arrangement 11 includes a common base body 16. Said body can preferably be formed of granite. A stand 17 is provided on the base body, which stand receives the measuring device 12 on a cantilever 18. Said stand 12 includes a drive motor 19, by means of which the measuring device 12 is displaceable from an initial position illustrated in FIG. 1 into a testing position 22, in which the intender 41 rests on a specimen 14. The drive motor 19 can, for example, power the cantilever 18 for an up-and-down movement along a guide column 23 of the stand 12.

[0071] A measuring table 25 is additionally provided on the base body 16. Said measuring table 25 comprises a measuring table receptacle 26, which is driven at least in X direction according to arrow 27, in a displaceable manner. The specimen 14 is placed on to the measuring table receptacle 26 and fixed thereto.

[0072] The measuring arrangement 11 can furthermore include an optical detection means 29, which can likewise be arranged on the stand 17 or advantageously, separate therefrom, on another stand 31. This optical detection means 29 can be positioned adjacent to the measuring device 12. Here, the measuring table 25 or the measuring table receptacle 26 is configured to be displaceable in such a manner, that the specimen 14, after the introduction of a penetration location or a scratch into surface of the specimen 14, is displaceable towards the optical detection means 29, in order that the penetration location or the introduced scratch can be optically detected in the surface of the specimen 14. Alternatively, a displacing movement of the measuring device 12 and of the optical detection means 29 relative to the measuring table 25 can also be provided.

[0073] The measuring device 11 further includes a schematically illustrated control 33, which includes a data processing means (not shown in greater detail here), a display device 35 and an input device 36. The control 33 is, at least by signal lines, connected with the stand 17, the measuring device 12 and the measuring table 25. Preferably, the optical detection means 29, and, if necessary, the stand 31 receiving the optical detection device 29 is likewise connected thereto.

[0074] For driving the measuring device 12, the measuring arrangement 11 moreover comprises at least one control line, which is connected to the control 33.

[0075] FIG. 2 illustrates a first perspective view of the measuring device 12 according to the invention. FIG. 3 illustrates another perspective view from below onto the measuring device 12 according to FIG. 2. FIG. 4 illustrates a schematic side view of the measuring device 12 according to FIG. 2, to which reference is likewise made in order to set out the structure of the measuring device 12.

[0076] The measuring device 12 includes a housing 47 with a base plate 51. Opposite said base plate, a cover element 52 is provided. Spacer elements 53 are provided between the base plate 51 and the cover element 52. The side walls between the base plate 51 and the cover element 52, which close the housing 47, are not illustrated for the purpose of clarity.

[0077] The base plate 51 comprises a recess 55, through which an indenter 41 extends and can exit downwards, as is illustrated in FIG. 3. The indenter 41 is received by a transmission element 42. Said element protrudes into an inner space of the housing 47. The transmission element 42 is preferably accommodated by a guide 57 within the housing 47. By means of said guide 57, the transmission element 43 can be moved up and down along a longitudinal axis 43 of the transmission element 42. The longitudinal axis 43 of the transmission element 42 corresponds to a longitudinal axis 48 of the indenter 41.

[0078] The guide 57, which accommodates the transmission element 42, is arranged on a holding device 58 fastened to the base plate 51. The guide 57 includes, for example, a first and second leaf spring elements 61, 62 oriented in perpendicular to the longitudinal axis 43 of the transmission element 42. The longitudinal axis 43 of the transmission element 42 is preferably situated in a travel axis 46 of a drive element 96 of the drive device 45 or is oriented in parallel thereto. The leaf-spring elements 61, 62 are preferably oriented in X-direction inside the housing, whereby the transmission element 42 is kept oriented in Z direction. Through these leaf-spring elements 61, 62, an up-and-down movement, or a travel movement along the Z axis of the housing 47 is allowed for. According to a first embodiment, it is provided that the leaf spring elements 61, 62 are formed from a thin, flat strip, in particular a spring steel. In order to reinforce the upper leaf spring element 61, for example, reinforcing elements 63 are fastened to an upper and lower side of the leaf spring element 61, 62. These reinforcing elements 63 can likewise be formed strip-shaped. Preferably, they are fixedly arranged on the leaf spring element 61 by means of a screw or a clipping connection. Alternatively, the upper leaf spring element 61 can also be configured thicker, that is more reinforced, so that the reinforcing elements are dispensable.

[0079] The measuring device 12 furthermore comprises a force generation means 44 which consists of a drive device 45 that is fastened to the cover element 52, for example.

[0080] Moreover, the force generation means 44 includes a magnetic transmission means 66, which comprises at least a first and a second magnetic pole 67, 68. A first magnetic pole 67 is assigned to the drive means 45. The at least one second magnetic pole 68 is arranged on an end of the transmission element 42 opposite the indenter 41. The first and the second magnetic pole 67, 68 are located in a common longitudinal axis, in particular in a travel axis 46 of the drive element 96, which element is preferably located in a Z axis of the housing. The first and the second magnetic pole 67, 68 are oriented to one another in such a manner that they are facing each other with a same pole. A repelling effect is thereby given between the magnetic poles 67, 68. The repelling effect or the magnetic force increases with a reducing distance of the two magnetic poles 67, 68 to one another. The magnetic poles 67, 68 are preferably configured as permanent magnets. The magnetic transmission means 66 allows for a contactless transmission of force from the drive element 96 of the drive device 45 onto the indenter 41. This magnetic transmission means 66 can also be referred to as a magnetic spring. Through the magnetic poles 67, 68 facing towards one another in opposite polarity a displacing movement is generated in a feed movement of the drive element 96 onto the transmission element 42. However, no rigid coupling is given, so that an excessive load in the components generating the displacing movement of the indenter 41 is prevented.

[0081] Reference is made to FIG. 5 for the purpose of further illustration of the transmission element 42 receiving the indenter 41, as well as the structure of the holding device 58 and the configuration of the guide 47.

[0082] The transmission element 42 is preferably formed as a tube. A receiving means 71 is provided on the upper end thereof, which receives the second magnetic pole 68. In this case, it can be a pot-shaped element, preferably from synthetic material. The magnetic pole 68 can, for example, be glued-in or pressed-in and is guided laterally in the receiving means 71. Preferably, the magnetic pole 68 is of cylindrical design. The longitudinal axis of the magnetic pole 68 is preferably oriented to the longitudinal axis 43 of the transmission element 42. Similar applies for the first magnetic pole 67. The indenter 41 is provided on the opposite end of the transmission element 42. Said indenter is accommodated in an exchangeable manner by a fastening means 72. In the configuration of the measuring device 12 as a hardness measuring device, the fastening means 72 can merely be provided by means of a latching or clipping connection, so that an axial securing of the indenter 41 in the fastening means 72 is provided. In the use of the measuring device 12 for determining the scratch resistance, the fastening means 72 also comprises a radial clamping in addition to the axial securing. Said securing can be provide by means of a threaded screw or the like. The fastening means 72 can in particular be configured as a collet chuck system.

[0083] The lower end of the transmission element 42 plunges into the recess 55 of the base plate 51, in a contact-free manner. An attachment ring 74 is positioned in this recess 55, through which ring the indenter 41 is guided through freely and without friction, such that the tip thereof can freely exit downwards. The tip of the indenter 41 is selected depending upon the measurement to be performed. Said tip can be in the shape of a pyramid or of a truncated cone. In the event of performing a scratch resistance measurement, the indenter 41 is oriented specifically within the fastening means 72.

[0084] A measuring probe 77 of a first measuring means 78 is provided at the inner end of the indenter 41. Said probe protrudes through an opening in the transmission element 42 and into the transmission element 42. This first measuring means 78 is preferably configured as a distance sensor and fastened to the base plate 51. The adjusting of a distance of the measuring probe 77 relative to the inner end of the indenter 51 is possible by means of an adjustment assembly 79. By means of this first measuring means 78, a distance of the indenter 41 to the measuring probe 47 is detected, beginning from an initial position to a penetration position and forwarded to the control 33.

[0085] By the guide 57 or the two leaf spring elements 61, 62 parallelly spaced from one another, a guided up-and-down movement of the transmission element 42 and thusly of the indenter 41 along the Z axis or the travel axis 46 can be achieved. The upper leaf-spring element 61 is held on the holding device 58 in a clamped manner. A fastening plate 81 is fastened to a mounting block 82 by a releasable connection, in particular screw connection, for example. A depression 83 can be provided for the defined alignment of the leaf spring element 61 in the mounting block 82, by means of which depression the leaf spring element 61 is aligned along an X axis of the housing 47.

[0086] The lower leaf-spring element 62 is mounted in the mounting block 82 by means of a clamping means 85. This clamping means 85 is subsequently described in greater detail in FIG. 8.

[0087] FIG. 5 furthermore shows a transport securing means 87 by means of two rods arranged on the holding device 58. The upper rod is arranged at a very small distance to the receiving means 71. The lower rod 87 terminates, with very minimal distance, in front of the transmission element 42. This way, already small deflections are blocked during transport.

[0088] Furthermore, two U-shaped plates 88 are provided in the mounting block 82 and oriented in opposite directions, which plates can secure a compensating element 89 in a somewhat horizontal orientation or orientation in X direction, during transport.

[0089] This compensating element 89 can be additionally provided. In the configuration of the measuring device 12 as a pure hardness measuring apparatus, this compensating element 89 is not required. a further stiffening can thereby be created for determining the scratch resistance, which counteracts a deflecting movement of the indenter 41. The compensating element 89 is rotatably-mounted in the mounting block 82. Preferably, a strap mounting is provided, which allows for a pivotable arrangement of the compensating element 89 about the Y axis in the housing 47. An end 93 directed towards the transmission element 42 preferably protrudes through an opening into the transmission element 42. Another leaf spring element 94 acts on this end 93, the opposite end of which element being fixed to the upper end of the transmission element 42. This leaf spring element 94 can, in turn, be of reinforced design. Preferably, the compensating element 89 is of tubular design.

[0090] FIG. 6 illustrates the drive device 45 schematically and enlarged in a first side view, and FIG. 7 illustrates it in a second side view, rotated by 90° C. compared to the first side view in FIG. 7. The drive device 45 comprises a first drive element 96, in particular configured as a drive spindle. A receiving means 71 for receiving the first magnetic pole is provided at the lower free end of the drive element 95. Preferably, the receiving means 71 for the first and second magnetic poles 67, 68 are identical. The arrangements of the first and the second magnetic poles 67, 68 can also be inverted.

[0091] In each case one magnetic pole 67, 68 can be provided in the receiving means 71, which is, one the one hand, provided on the transmission element 42 and, on the other hand, on the drive element 96. In addition, the receiving means 71 can be configured such that multiple, individual magnetic poles can be arranged therein. Just as well, the magnetic poles can, instead of an adhesive connection, be held by means of a latching or clipping connection, e.g. by an additional locking element, that engages on the receiving means 71.

[0092] The magnetic poles 67, 68 are advantageously of cylindrical design. Other geometries are also possible. Moreover, the magnetic poles 67, 68 can also be configured as rings with an internal through bore.

[0093] A drive motor 97 is provided for driving a displacing movement of the drive element 96 along the travel axis or the Z axis of the housing 47. An electric motor, in particular a servomotor, is advantageously provided. This drive motor 97 powers a rotary drive 98, which connects the drive motor 97 with the drive element 96. The rotary drive 98 e.g. includes a toothed belt 99 that drives a pinion on a drive shaft of the drive motor 97 and opposite on a rotatably-mounted spindle nut 101. The spindle nut 101 is rotatably accommodated by means of a bearing 102. The spindle nut 101 has a sleeve 103 provided thereon in a rotationally-secured manner, which sleeve accommodates a component 104 of a third measuring means 105 at an upper end. The third measuring means 105 is connected to the housing 47 in a stationary manner. The third measuring means 105 is preferably configured as a rotary encoder or incremental encoder, through which the rotation performed of the spindle nut 101 is determined.

[0094] A column guide 106 is provided for the rotationally-secured up-and-down-movement of the drive element 96. This column guide is fastened on the cover element 52 and includes a U-shaped guide column 107.

[0095] Preferably, a fourth measuring means 110 is provided between the magnetic pole 67 and the receiving device 71, or between the receiving device 72 and the drive element 96, which means is preferably configured as a force sensor. This second measuring means 110 detects the force acting between the two magnetic poles 67, 68. This allows the provision of another measuring parameter to be monitored, in order to establish measuring results. In particular, a monitoring and, as the case may be, a correction of the penetration force can be determined. The force transmitted on to the indenter 41 can be calculated by a feed movement of the drive element 96, the travel path of which is detected by the third measuring means 105, due to the know magnetic force of the two magnetic poles 67, 68. A comparison of the actually acting force is possible by means of the fourth measuring means 110.

[0096] FIG. 8 illustrates the clamping means 85 in schematically enlarged illustration. The lower leaf spring element 62 is held on the end opposite the transmission element 42, in a clamped manner, by means of two clamping elements 112. These two clamping elements 112, in turn, are held on the mounting block 82 by means of another leaf spring element 113, with the leaf spring element 113 being oriented in the Z direction. This allows for a deflection movement of the lower leaf spring element 62 in and opposite the X direction. Furthermore, the clamping element 112 has a measuring vane 114, which plunges into a second measuring device 91. This measuring device 91, in turn, is configured as a distance sensor. A force or a displacing movement acting on the leaf spring element 62 can be measured by the second measuring device 91, by means of the shifting of the vane 114. This force or travel movement is transmitted to the leaf-spring element 62 via the indenter 41 and the transmission element 42. In particular when measuring the scratch resistance, this second measuring means 91 can detect another parameter regarding the deflection of the indenter 41.

[0097] FIG. 9 is a schematic section of a lower part of the measuring device 12 according to an embodiment alternative to FIG. 5. This embodiment according to FIG. 9 mainly differs from the embodiment of FIG. 5 in that a vibration damping means 120 is assigned to the second magnetic pole 68, for example. Instead of this vibration damping means 120 assigned to the magnetic pole 68, a vibration damping means 130 also can be provided at an end of the compensating element 89 opposite the transmission element 42. A combination of the two is also possible. The vibration damping means 120, 130 fulfil the task of counteracting one or multiple lift-off movements of the indenter 41 directly after the indenter being placed on to a surface of the specimen 14. Preferably, so-called eddy current breaks are used.

[0098] The vibration damping means 120 is configured as an encasing 121, for example, which is preferably formed as a tube portion. This encasing encloses the magnetic pole 68. The magnetic pole 68 is preferably at least partially positioned inside the encasing 121, in an initial position. Once a lift-off movement takes place in the direction of the Z axis or the longitudinal axis 43, the magnetic pole 68 plunges into the encasing 121, whereby a counteracting magnetic force is increased. The encasing 121 is preferably formed of a ferromagnetic material, in particular copper. Preferably, the encasing 121 is adjustable in height relative to the magnetic pole 68. The encasing 121 can preferably be displaced in height along the spacer element 53.

[0099] The vibration damping means 130 is only illustrated in part. The compensating element 89 has a vane 131 provided thereon, formed of a ferromagnetic material. This vane is positioned between two mutually spaced permanent magnets, in order to act as a magnetic eddy current brake then.

[0100] FIG. 10 is an enlarged schematic illustration of an alternative embodiment of a leaf-spring element 61, 62. Said leaf-spring element 61, 62 does not require a reinforcing element 63. Rather, the constructive design is selected such, that such an element can be dispensed with. The leaf-spring element 61 comprises a clamping region 135 and a connecting region 136, and a spacer portion 137 located therebetween. A flexure bearing 138 is formed between the clamping region 135 and the spacer region 137 as well as between the spacer region 137 and the connecting region 136. Said flexure bearing 138 is reduced in thickness with respect to the clamping region 135, connecting region 136 and spacer region 137. A hinge is formed thereby. Adjusting of the rigidity of the flexure bearing is on the one hand achieved with the reduce in thickness, as well as the design of the radiuses 139. In addition, one or multiple slot recesses 141 can be provided, in order to form softer flexure bearings 138. Instead of a planar design, the spacer portion 137 can also be configured as a frame or a supporting structure. Holes 142 are provided for aligning the leaf spring element 61 on the holding device, in order to secure-by-pin the clamping region 135 with the mounting block 82. Opposite and on the connecting region 136 is provided a receiving hole 143, in which the transmission element 42 can be positioned. The connecting region 136 and the transmission element 42 are preferably connected to one another by an adhesive connection.

[0101] FIG. 11 illustrates an alternative embodiment of the guide 57 and the holding device 58. It is provided in this embodiment that the guide 57 and the holding device 58 are in one piece. Through a machining of the guide 57 out of one workpiece body, e.g. through eroding or ultrafine processing, it is made possible for the clamping region 135 to be integrally connected with the holding device 58, in particular the mounting block 82, and nonetheless for the leaf spring elements 61, 62 to be configured with the flexure bearings 138, the spacer portion 137 and the connecting region 136. A supporting body 146 extends between the leaf spring elements 61, 62. Said body restricts a deflecting movement of the transmission element 42 along the longitudinal axis 43, 48 or in Z-direction. The other two, face-side ends of the connecting regions 136 are fixedly connected with the transmission element 43, so that both an upward and downward movement—i.e. in and against the Z direction—is restricted.

[0102] FIG. 12 illustrates a schematic side view of an embodiment of the measuring device 12 alternative to the above described measuring means. This measuring device 12 is configured differently in terms of the drive device 45 compared to the structure in particular described in FIGS. 6 and 7. The drive motor 97 of the drive device 45 is not provided outside, but inside a base body 16 of the measuring means 12. That is, the drive motor 97 is arranged internally, that is, on a lower side of the cover element 52. Also, the drive element 96 is fastened internally and on a lower side of the cover element 52. In this embodiment, the drive element 96 is configured as a so-called telescopic spindle. This telescopic spindle comprises a central drive spindle driven by means of the rotary drive 98 via a toothed belt 99 by the drive motor 97. This achieves a telescopic extension movement of the telescopic spindle, so that the receiving device 71 arranged at the lower, free end thereof with the first magnetic pole 67 is moved towards the opposite magnetic pole 68.

[0103] This embodiment of the measuring means 12 comes with the advantage of a lower construction height. The rotary drive 98 located outside the housing can be protected by means of a cover (not illustrated in greater detail here). FIG. 13 illustrates an embodiment alternative to FIG. 2 of the measuring means 12. This measuring means 12 comprises a guide 57 for the transmission element 42 that differs from the above-described exemplary embodiments. In this embodiment, the holding device 58 preferably is of cylindrical design and receives respectively one pressure diaphragm element 151, 152 on the upper and lower ends. Due to the parallelly-spaced arrangement of the pressure diaphragm elements 151, 152, a displacing movement along the travel axis 48 is effected under the impact of the magnetic force via the magnetic transmission device 66 or the second magnetic pole 67 on to the second magnetic pole 68 arranged on the transmission element 42 by means of the receiving device 71. The indenter 41 is moved coaxially relative to the attachment ring 74 downwards or outwards. A penetration movement of the indenter 41 in the measuring surface of the object to be measured. The pressure diaphragm element 151, 152 can be of wave-like design in a cross-section. When viewed in a top view, this means that concentric circles are provided. The degree of freedom of the deflection movement or the deflection force along the travel axis 48 can be defined by means of the number and the height of the waves. The pressure diaphragm elements 151, 152 are preferably made of a non-magnetic material. Said elements consist of a thin, disc-shaped, resilient material.

[0104] The first measuring means 78 is provided on the transmission means, with a sensor element of the measuring means 78 being fixedly arranged on the transmission element and the complementary sensor element of the measuring means 78 being fixedly arranged on the holding device 58. By a displacing movement along the travel axis 48, the distance between the two sensor elements is changed, thereby allowing a precise determination of the travel path. This first measuring means 78 operates similarly to the above described, first measuring device 78.

[0105] Preferably, a second measuring means 91 is arranged on the transmission element 42. The second measuring means 91 likewise comprises a sensor element directly on the transmission element 42 and, adjacent thereto, a second sensor element arranged on the holding device 58. A deviation in the deflection of the indenter 41 during a travel movement in the X direction or opposite the X direction can be detected by means of this second measuring means 91. The configuration of the second measuring means 91 corresponds to the measuring means 91 described in FIG. 9.

[0106] FIG. 14 is a schematic illustration from below on to the lower or the second pressure diaphragm element 152, which is oriented close to the indenter 41. The holding device 58 receives the pressure diaphragm element 152 preferably in a clamped manner. The concentric waves of the pressure diaphragm element 152, also provided in the pressure diaphragm element 151, are illustrated in a dashed manner. Furthermore, this lower pressure diaphragm element 152 comprises, in contrast to the upper pressure diaphragm element 151, two longitudinal slots 152 spaced parallel from one another. The longitudinal slots 152 are oriented in the X direction, or extend parallelly to the X axis, respectively. This is why the pressure diaphragm element 152 is configured to be soft or resilient along the Y axis, and rigid in the X axis. As a result, a deflection of the indenter 41 in the X direction can be detected during the measuring of the scratch resistance.

[0107] In the embodiment according to FIG. 13, similar to the second measuring means 91, another measuring means can be provided on the transmission pin 42, arranged offset by 90°. This way, a deflection movement of the indenter 41 can be detected in the Y-direction.

[0108] Reference is made in the following to the above-described embodiments and alternatives.

[0109] FIG. 15 illustrates a first perspective view of another embodiment alternative to the embodiment of FIG. 2 of the measuring device 12. FIG. 16 shows another perspective view of the alternative embodiment of the measuring device 12 according to FIG. 15.

[0110] This measuring device 12 differs from the first embodiment according to FIG. 2 in that the drive device 45 of the force generation means 44 is configured differently. For the purpose of better illustration, FIG. 17 shows a schematic sectional view of this alternative embodiment of the drive device 45.

[0111] The drive device 45 of this alternative embodiment is arranged on the housing 47, in particular the cover element 52. The drive motor 97 powers a drive element 96 formed by two toothed racks 161, 162 oriented in parallel to one another. This pair of toothed racks 161, 162 is powered by a drive wheel 163, which wheel is, in turn, rotatively-connected with the drive motor 97. Said drive wheel 163 is preferably provided directly on the drive shaft of the drive motor 97. Alternatively, a gear mechanism for reduction or transmission can be provided therebetween. This drive wheel 163 at the same time powers both toothed racks 161, 162. This induces an opposite displacing movement of the toothed racks 161, 162.

[0112] The rotary movement of the drive shaft of the drive motor 97 or of the drive wheel 163 can be detected or decoded in a simple manner, so that thereupon, due to the fixed geometric relations of drive wheel 163 and toothed rack 161, 162, an exact detection and driving of the travel path of the permanent magnets of the first magnetic pole 67 is made possible.

[0113] The displacing movement of the toothed racks 161, 162 takes place along a travel axis 46, which axis is oriented perpendicularly to the travel axis 48 of the transmission element 42 or the indenter 41. In the exemplary embodiment, the travel axis 48 is thus oriented in Z direction—that is, in the vertical—and the travel axis 46 is oriented in the X/Y plane, respectively the horizontal.

[0114] The drive element 96 is displaceably accommodated by means of a guide 165. The guide 165 preferably consists of two guide rails 166 oriented in parallel to one another, guiding one or multiple displaceable carriages 167. In each case one toothed rack 161, 162 is arranged on the carriage(es) 167.

[0115] It provided in this alternative embodiment for the first magnetic pole 67 to be formed of two separate permanent magnets. Alternatively, also multiple, separate permanent magnets can be provided. The second magnetic pole 68 is adapted to the first permanent magnet 67 in terms of the number of the separate permanent magnets. The receiving means 71 on the transmission element 42 comprises two separate depressions, which, at a same distance to the travel axis 48, receive the permanent magnets for forming the second magnetic pole 68.

[0116] The receiving device 71 for receiving the first magnetic pole 67 is formed by two receiving elements 71 arranged separately to one another. Each receiving element 71 for the permanent magnet is arranged on a toothed rack 161, 162, wherein these are in each case oriented such, that the receiving means 71 is positioned between the two toothed racks 161, 162 extending in parallel.

[0117] In an initial position of the measuring device 12, the two permanent magnets of the first magnetic pole 67 are spaced from one another in such a way, that said magnets do not or almost not impart any magnetic force on to the oppositely arranged permanent magnets of the second magnetic pole 68. For driving the penetrating movement of the indenter 41, a rotary movement is induced into the drive wheel 73 by means of the drive motor 97, through which wheel the two toothed racks 161, 162 are driven synchronously and displaced oppositely to one another. The two permanent magnets of the first magnetic pole 67 are simultaneously moved towards one another. In a position of the permanent magnets of the first magnetic pole 67 relative to those of the second magnetic pole 68, as is illustrated in FIG. 17, only a small magnetic force is transmitted, because of the small degree of overlap. The maximum transmission of force exists if the permanent magnets of the first magnetic pole 67 are moved towards one another in such a way until they are positioned to be congruent with the permanent magnets of the second magnetic pole 68. The degree of overlap is driven by a control of the measuring device 12, in particular depending on a penetration movement or depending on the travel path of the indenter 41.

[0118] Alternatively to the above displacing movement of the permanent magnets of the first magnetic pole 67 for driving the penetration movement of the indenter 41, it can also be provided that the permanent magnets of the first magnetic pole 67 are located adjacently next one another in an initial position, and that the permanent magnets of the second magnetic pole 68, at a large distance, are located outside the two permanent magnets of the first magnetic pole 67, which are arranged so as to directly neighbor one another. In this case, a displacing movement of the permanent magnets of the first magnetic pole 67 is driven to lead them away from one another.

[0119] In the embodiments illustrated in FIGS. 15 to 17, the travel axis 46 is e.g. oriented according to the coordinate system illustrated in FIG. 2. Alternatively, this travel axis 46 can also be oriented in another direction within the XY plane, in particular in the X axis.

[0120] According to another embodiment (not shown in greater detail) of the measuring device 12 according to FIG. 15, it can also be provided, that the first and the second magnetic poles 67, 68 consist only of one permanent magnet. Therefore, driving of only one drive element having the first magnetic pole 67 fixed to it, is sufficient in order to displace said pole along the travel axis 46 perpendicular to the travel axis 48 of the transmission element.

[0121] Furthermore, it can alternatively be provided, that e.g. more than two permanent magnets are provided per magnetic pole 67, 68. Said magnets can then be arranged on a circumference of a circle. This way, multiple permanent magnets of the first magnetic pole 67 can be brought in partial or complete overlap with respect to the respective permanent magnets of the second magnetic pole 68, by means of a pivot movement.

[0122] Incidentally, the above-described embodiments and alternatives apply directly or analogously also for the above-described measuring device 12 according to FIGS. 15 to 17.

[0123] The above-described measuring devices 12 allow both for measurement in an upright position, as is illustrated in the Figures, as well as an overhead measuring.

[0124] Performing of the hardness measuring of a surface of the specimen 14 with a measuring device 12 in a measuring arrangement 11 is effected as follows:

[0125] After having placed the specimen 14 on to the measuring table 26, the measuring device 12 is positioned above the specimen 14 by means of the stand 17. In this initial position of the measuring device 12, the indenter 41 is in an initial position, that is, the indenter 41 is set back relative to an underside of the base plate 51 of the housing or relative to a place-on surface 76 on the attachment ring 74 fixed to the housing 47. Subsequently, the measuring device 12 is moved towards the surface of the specimen 14 by means of the at least one motor 19 of the stand 17. When placing on a place-on surface 76 of the attachment ring 74 of the measuring device 12 on to the specimen 14, the feed movement is immobilized. Subsequently the force generation means 44 is activated. The drive means 45 actuates the drive element 96, so that the latter performs a displacing movement along the travel axis 46 in the direction towards the indenter 41. Due to the magnetic transmission device 66, the magnetic pole 67 is moved towards the magnetic pole 68. Due to the repelling magnetic force of the two magnetic poles 67, 68, the feed movement along the travel axis 46 is transmitted contactless from the magnetic pole 67 on to magnetic pole 68. By means of this guide 57, the indenter 41 is moved along the travel axis 46, which is preferably congruent with the longitudinal axis 43 of the transmission element 42 downwards and towards the surface of the specimen 14. Once the indenter 41 comes to rest on the surface of the specimen 14, the first measuring means 78 does not determine any change in distance, so that the feed movement of the drive means 45 is immobilized via the control 33. This initial position is forwarded to the control 33 as zero position. Subsequently, another feed movement of the drive element 96 is driven by means of the control 33, thereby driving a penetration movement of the indenter 41 into the specimen 14. The first measuring means 78 determines the penetration path. The test force can be determined from the feed movement of the drive element 96, which movement is detected by a third measuring means 105. Alternatively and/or for comparison, the testing force acting on the indenter 41 can also be determined by means of the fourth measuring means 110. From these measured values and the geometry of the indenter 41, the hardness of the surface of specimen 14 can be determined. The indenter 41 can be in the form of a sphere or a pyramid. This indenter preferably consists of diamond, topaz, corundum or quartz.

[0126] Subsequently, the measuring device 12 is lifted-off the specimen 14 and/or the drive element 96 is driven to perform a displacing movement oppositely to the indenter 41. This can be effected simultaneously, or one after the other. The measuring device 12 is returned to an initial position. Using the guide 47, the indenter 41 is likewise set back into an initial position with the transmission pin 42.

[0127] Subsequently, after having introduced a penetration location into the specimen 14, a mapping of the penetration location can be established by means of the optical detection device, and an optical assessment can be performed as well.

[0128] For determining the scratch resistance of a surface of a specimen 14, the specimen 14 is positioned on the measuring table 25 or on a measuring table receptable 26 of the measuring table 15. Above the specimen 14 the measuring device 12 is positioned, so that an indenter, by means of a feed movement perpendicular to the surface of the specimen 14, can be moved towards said specimen. The drive device 45 is actuated, so that the drive element 96 performs a feed movement along the travel axis 46 in the direction towards the indenter 41. This feed movement is transformed into a displacing movement of the indenter 41 by means of the magnetic transmission device 66, so that the indenter is transferred from an initial position into an operating position. In this operating position, the indenter 41 protrudes with respect to a lower side of the base plate 51 of the housing 47 or of an attachment ring 47 arranged in the recess 55 of the baseplate 51 of the housing 47.

[0129] Thereafter, the measuring device 12 is moved towards the specimen 14. This is e.g. effected by means of the motor 19. Once the indenter 41 is placed on the surface of the specimen 14, the feed movement is immobilized. This contact is detected by the first measuring means 78. The measuring means 12 is arranged in a starting position to the specimen 14. This starting position is stored in the control 33 as the zero position. This starting position can be intended for a so-called pre-scan to determine the scratch resistance. Said starting position can also be intended for a measuring of the surface roughness of the specimen.

[0130] Based on this starting position, first a pre-scan can be performed, i.e. the surface of the specimen 14 is scanned along a predetermined displacement path of the surface of the specimen 14. The displacement path is oriented tangentially or rectangularly to the specimen 14, for example along the X axis. Preferably, the measuring device 12 is immobile and the measuring table 25 is displaced by means of a motor 28 in the direction of arrow 27 according to FIG. 1, thereby scanning the position of the surface and the contour of the surface and storing the measuring signals as pre-scratch profile data, also referred to as pre-scan. Thereafter, the measuring device 12 is lifted-off the specimen 14. The measuring device 12 and the measuring table 25 are positioned back into the starting position. Thereupon, again by means of the control 33, the same displacing movement as with the pre-scan according to arrow 27 is driven using the motor 28. Simultaneously with this displacing movement, drive means 45 is driven, so that the indenter is applied with a testing force, whereby the indenter 41 increasingly penetrates into the surface of the specimen 41 during the displacing movement of the measuring table 25. This penetration movement is detected by the first measuring device 48. At the same time, the applied testing force is calculated using the third measuring device 105. In addition, the actually applied testing force can be detected by means of the fourth measuring means 110. In addition thereto, a deflection of the indenter 41 in the travel direction according to arrow 27 is detected by means of the second measuring means 91. At the end of the predefined displacing movement after the application of the predefined testing force, the measuring device is, in turn, lifted-off the specimen 14. The measuring signals detected during the introducing of a scratch are stored by the control 33 and assessed in order to determine the scratch resistance.

[0131] The measuring device 12 and the measuring table 25 can again be returned into the starting position. Thereafter, a so-called post-scan can take place. The indenter 41 is positioned in the scratch. Again, a displacing movement of the measuring table 25 is effected according to arrow 27, whereby the indenter 41 is guided along the scratch and into the scratch. Again, a travel movement of the measuring table 25 according to arrow 27 takes place, thereby guiding the indenter 41 along the scratch and in the scratch. During the displacing movement of the indenter 41 in the scratch, the measuring signals are again detected by the first measuring means 78 and at least the second measuring means 91. In addition thereto, a deflection of the indenter in Y-direction, i.e. in a direction perpendicular to the X-direction in the plane of the surface of the specimen 14, can be detected during the pre-scan, the introduction of the scratch and/or the post-scan by means of another sensor of another measuring means.

[0132] After the introduction of the scratch and/or after the post scan, the optical detection means 29 can detect the scratch and additionally allow for an optical evaluation.

[0133] In order to measure the surface roughness of the specimen 14 the starting position is taken again, just as with measuring the scratch resistance. Starting from this starting position, the indenter 41 is moved along a predetermined displacement path on the surface of the specimen 14. The displacement path is oriented tangentially or rectangularly to the specimen 14 and along the X axis. In this case, the measuring device 12 can be immobilized and the measuring table is displaced in the direction of arrow 27 by means of a motor 28. Alternatively, the measuring table can be immobile and the measuring device 12 is displaced. Just as well, a relative movement can be effected between these two. The displacement movement of the indenter 41 along the longitudinal axis 48 caused by the surface roughness of the specimen 14 is detected by the first measuring means 78 and assessed by the control 33. After the scan of a predetermined displacement path along the surface of the specimen 14, the measuring device 12, in turn, is lifted-off the specimen 14.