Method for producing structured surfaces
10941035 · 2021-03-09
Assignee
Inventors
- Johannes H. M. Maurer (Homburg, DE)
- Tobias Kraus (Saarbrücken, DE)
- Lola González-García (Saarbrücken, DE)
- Beate Reiser (Kaiserslautern, DE)
- Ioannis Kanelidis (Saarbrücken, DE)
- Peter William de Oliveira (Saarbrücken, DE)
- Jenny Kampka (Ensdorf, DE)
- Karsten Moh (Blieskastel-Brenschelbach, DE)
Cpc classification
G06F3/041
PHYSICS
Y02P70/50
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
H01Q1/2208
ELECTRICITY
H01L31/022466
ELECTRICITY
G03F7/0002
PHYSICS
H10K30/82
ELECTRICITY
H05K3/048
ELECTRICITY
G02F1/13439
PHYSICS
B05D1/32
PERFORMING OPERATIONS; TRANSPORTING
B05D5/12
PERFORMING OPERATIONS; TRANSPORTING
B81C1/0046
PERFORMING OPERATIONS; TRANSPORTING
H05K3/1208
ELECTRICITY
G06F2203/04103
PHYSICS
C23C18/1262
CHEMISTRY; METALLURGY
Y02E10/549
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
H05K1/09
ELECTRICITY
G06F2203/04112
PHYSICS
International classification
B05D5/12
PERFORMING OPERATIONS; TRANSPORTING
G06F3/041
PHYSICS
G03F7/00
PHYSICS
B81C1/00
PERFORMING OPERATIONS; TRANSPORTING
H01Q1/22
ELECTRICITY
Abstract
A process for producing a structured surface, in which a composition comprising nanowires is applied to a surface and structured, especially by partial displacement of the composition. When the solvent is removed, the nanowires aggregate to form structures. These may be transparent and also conductive.
Claims
1. A process for producing metallic structures, comprising: (a) providing a composition comprising metallic nanowires and at least one solvent; (b) structuring the composition on a surface of a substrate by contacting a structure template with a surface of the substrate before or after applying the composition to the surface; and (c) at least partly removing the at least one solvent while the structure template is contacted with the surface of the substrate, thereby resulting in aggregation of the metallic nanowires on the surface of the substrate and forming metallic structures on the surface of the substrate, wherein the metallic nanowires form bundles parallel to the surface of the substrate following recesses of the structure template in a longitudinal direction.
2. The process as claimed in claim 1, comprising applying the composition to a substrate and subsequently applying the structure template to the substrate with partial displacement of the composition.
3. The process as claimed in claim 1, wherein the applying and the structuring are effected by applying the composition into a structured mask.
4. The process as claimed in claim 1, wherein at least 50% by weight of the metallic nanowires have a length exceeding 1 m.
5. The process as claimed in claim 1, wherein at least 50% of the metallic nanowires have an aspect ratio of length to diameter of at least 500:1.
6. The process as claimed in claim 1, wherein the metallic nanowires have a mean diameter below 15 nm.
7. The process as claimed in claim 1, wherein the metallic nanowires have a mean diameter below 5 nm.
8. The process as claimed in claim 1, further comprising subjecting the structures obtained to thermal treatment or plasma treatment.
9. The process as claimed in claim 1, wherein the substrate has a surface comprising at least one hydrolysable silane having at least one nonhydrolyzable group comprising at least one fluorine atom.
10. The process as claimed in claim 9, wherein the metallic nanowires have a mean diameter below 100 nm.
11. The process as claimed in claim 1, wherein the metallic nanowires aggregate to form bundles on the substrate between projections that are formed by the structure template.
12. The process as claimed in claim 1, wherein the metallic structures are in the form of a grid.
13. A process for producing metallic structures, comprising: contacting a structure template having projections with a surface of a substrate and with a composition comprising metallic nanowires and at least one solvent on the surface of the substrate; at least partly removing the at least one solvent while the structure template is in contact with the surface of the substrate; and aggregating the metallic nanowires on the surface of the substrate between the projections of the structure template thereby forming metallic structures comprising bundles parallel to the surface of the substrate following recesses of the structure template in a longitudinal direction.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION OF INVENTION
(21) I. Structuring by Aggregation
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(26) After the stamp has been removed, it is still possible to conduct a sintering step (
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(30) As shown in
(31) In order to produce the structure on the inert surface, the structure template together with the inert surface is rotated, such that the inert surface is arranged at the bottom. In this way, the nanowires can aggregate on the inert surface.
(32) In principle, the same arrangement as shown in the lower part of
(33) Irrespective of the manner of preparation of the arrangement, the solvent in the composition is now at least partly removed in this arrangement. In this way, the aggregation of the nanowires on the inert surface can be promoted.
(34) Thereafter, as shown in
I.1. Examples
(35) The TEM images were recorded with a JEM 2010 (JEOL, Germany) at 200 kV. The SEM images were recorded with a Quanta 400 ESEM (FEI, Germany). Optical measurements were recorded with a Cary 5000 (Varian). The spectrum of the glass substrate was recorded as the baseline. The current/voltage measurements were conducted with a Keithley 2450 Sourcemeter.
(36) The gold nanowires were produced analogously to H. Feng, Y. Yang, Y. You, G. Li, J. Guo, T. Yu, Z. Shen, T. Wu, B. Xing, Chem. Commun. 2009, 1984 and J. H. M. Maurer, L. Gonzalez-Garcia, B. Reiser, I. Kanelidis, T. Kraus, ACS Appl. Mater. Interfaces 2015, 7, 7838.
(37) For this purpose, 30 mg of HAuCl.sub.4H.sub.2O were dissolved in a mixture of 5.8 mL of n-hexane (99%, ABCR, Germany) and 1.7 mL of oleylamine ((Z)-octadec-9-enylamine technical grade, 70%, Sigma-Aldrich, Steinheim, Germany). 1.5 mL of triisopropylsilane (98%, ABCR, Germany) were added and the solution was left to stand at room temperature overnight. The nanowires were precipitated by the addition of ethanol. The supernatant was removed and the nanowires were redispersed in n-hexane. The wash step was repeated and the nanowires were then redispersed in cyclohexane, in order to obtain solutions having a gold concentration of 4 mg/mL or 8 mg/mL.
(38) 30 L of a composition of gold nanowires dispersed in cyclohexane (4 mg/mL, 8 mg/mL) were applied to a substrate. Thereafter, a structured stamp made of PDMS was pressed immediately onto the substrate. The composition is forced into the depressions of the stamp as a result. The stamp comprised a hexagonal arrangement of cylindrical projections of diameter 4 m and a distance between the projections of 5 m (center to center). The height of the projections was 5 m. When the solvent was evaporated, bundles of the gold nanowires which recreate the structure of the depressions were formed in the depressions. After the stamp had been removed, the structure was treated with a hydrogen plasma (mixture of 5% hydrogen in argon) at room temperature for 15 minutes (RF PICO plasma system (Diener electronic, Ebhausen, Germany) 0.3 mbar, 100 W).
(39) Depending on the concentration of the gold nanowires in the composition, it was possible to control the thickness of the structures obtained. When a concentration of 4 mg/mL was used, a structure having an average thickness of 15 nm was obtained. The minimum width was 250 nm (
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I.2. Production of the Stamp
(44) The PDMS stamp was produced with a silicone template. The prepolymer and the crosslinker of the PDMS kit (Sylgard 184, Dow Corning) were mixed in a ratio of 10:1 (by weight) and degassed. The mixture was introduced into the template which had been silanized beforehand with trichloro(octadecyl)silane (Sigma-Aldrich, St. Louis, Mo., USA), and hardened at 70 C. Thereafter, the stamp was removed from the template.
I.3. Comparative Examples
(45) Compositions comprising commercially available silver nanowires (Seashell Technology; diameter 130 nm+/10 nm; length 35 m+/15 m) were produced and applied to surfaces analogously to the examples. It is found that there is no aggregation. Nor can the nanowires be displaced by applying a stamp, and so there is no formation of a structure.
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(47) Nor does a larger stamp (diameter 25 m of the column-shaped projections with centers separated by 50 m) lead to structuring (
(48) II. Structurizing with an Inert Surface
(49) II.1. Production of a PDMS stamp
(50) There follows a description of the production of an embossing stamp from PDMS (silicone rubber) as casting made from a nickel master:
(51) II.1.A. Description of the Nickel Master and the Casting Mold
(52) The nickel master is an electrolytically produced nickel foil, for example of dimensions 100 mm100 mm, to which a microstructure (regularly arranged cylindrical columns having a diameter of more than 1 m) has been applied. This nickel foil is adhesive-bonded to the base of a casting mold produced from aluminum or similar material or mounted by means of ferromagnetic bonding film. It should be noted here that the nickel master has to be applied in an absolutely planar manner since any unevenness will be reflected in the later stamp.
(53) Moreover, the casting mold has to be placed in as horizontal a position as possible in order that the embossing stamp will later have a uniform thickness.
(54) II.1.B. Mixing of the Silicone Rubber and Mold Casting
(55) The base material and hardener of a polydimethyl-siloxane (PDMS) (e.g. Sylgard 184 from Dow Corning) are in a suitable ratio (e.g. 10:1) brought together and the two components are mixed by stirring. The amount to be made up is guided by the desired thickness of the embossing stamp (typical stamp thickness: 2 to 4 mm). The mixing vessel should have a capacity of 3 times the volume of the mixture in order to prevent overflow in the subsequent degassing operation.
(56) For removal of the air bubbles mixed in in the course of stirring, the mixture is introduced into a vacuum drying cabinet (at room temperature) and evacuated until all the air bubbles have been removed.
(57) The degassed PDMS mixture is then poured into the casting mold and the mixture is left to harden. In most cases, it is advisable to accelerate the hardening by heat treatment of the casting mold. Typically, heating of the casting mold to 70 C. for one hour leads to complete hardening of the PDMS.
(58) II.1.C. Demolding Operation
(59) The demolding of the PDMS stamp is accomplished by using a scalpel or another sharp blade to cut the PDMS away from the vertical wall of the casting mold around the entire circumference and then lifting it away from the edge with a flat and blunt tool (e.g. a flat spatula) and then cautiously detaching it from the nickel master. Irregularities at the edge can then be cut off with a sharp blade (e.g. carpet knife).
(60) II.2. Functionalization of the substrate surface:
(61) There follows a description of the production of the antiadhesive coating material (hydrophobic):
(62) II.2.A. Varnish Production
(63) Amounts Used:
(64) TABLE-US-00001 267.8 g methyltriethoxysilane (MTEOS) 84.8 g tetraethoxysilane (TEOS) 150.0 g Levasil 300/30 3.0 g conc. (37%) hydrochloric acid 13.35 g perfluorooctyltriethoxysilane (Dynasylan F 8261) 518.95 g isopropanol
Procedure:
(65) A 2 L reactor (jacketed vessel with connected cooling) with an internal thermometer is charged with the amounts of MTEOS and TEOS weighed out. The amount of Levasil weighed out is added and the mixture is left to stir vigorously for 2-3 min. Then the amount of concentrated hydrochloric acid weighed out is added and the mixture is left to stir further. The reaction solution and the internal temperature on the thermometer are observed and the observation is written down. The temperature within the reactor should not exceed 60 C. in this time. After stirring for 10-15 min, the amount of perfluorooctyltriethoxysilane weighed out is added and the mixture is left to stir for a further 30 min. Then the amount of isopropanol weighed out is added and the mixture is left to stir for 15 min. The material is dispensed into a 2 L glass bottle and then filtered with the aid of a pressure filtration (prefilter+0.45 m filter). The finished varnish is dispensed into a 2 L Schott glass bottle and stored in a refrigerator until further use.
(66) II.2.B. Layer Production
(67) The varnish was applied by means of spin-coating (1000 rpm/min, 30 sec) and baked in an oven (air atmosphere; heat up to 100 C. within 30 min; hold for 30 min, heat up to 250 C. within 240 min, hold for 1 h, cool down).
(68) II.3. Silver Nanowire Solution
(69) There follows a description of the preparation of a silver nanowire solution from Cambrios (solvent: ethylene glycol) for layer production:
(70) II.3.A. Purification and Solvent Exchange Via Crossflow Filtration
(71) 200 mL of the silver nanowire solution in ethylene glycol are diluted with 200 mL of pure H.sub.2O (Millipore) and introduced into a large beaker. With the aid of a peristaltic pump (flow rate: 1.2 mL/sec), the solution is pumped through a filter cartridge (material: PES; pore size: 0.5 m; from SpectrumLabs; model: Microkros 30.5 m PES 1.0 mm mLLFLL Dry (4/PK)). The filtrate removed is collected in a collecting vessel. The retentate is guided through a hose back into the large beaker. Filtration is continued until 200 mL of filtrate have been removed.
(72) This process is conducted for a second time in order to remove as many disruptive silver particles as possible. Purity of the nanowire solution>90%.
(73) II.3.B Determination of the Silver Content of the Purified Nanowire Solution in Water
(74) Before the weighing, the sample is agitated manually. The weighings are effected in 50 mL glass flasks, then 2 mL of HNO.sub.3 (65%) are added to the samples and they are made up with ultrapure water. In order to avoid matrix effects, the standards are matched to the acid content of the samples. In order to verify reproducibility, 3 weighings are carried out in parallel.
(75) Standards:
(76) TABLE-US-00002 Element S0 S1 S2 Ag (mg/L) 0.0 5.0 8.0
Instrument Parameters: ICP OES, Horiba Jobin Yvon Ultima 2 Ag determination: clinical nebulizer: pressure: 2.00 bar, flow rate: 0.781/min Ag: =328.068 nm
(77) The determination gave a silver content of 0.295% by weight+/0.002.
(78) II.3.C. Further Solvent Exchange to Obtain a Coating Solution with Different Leveling Properties than the Water-Based Silver Nanowire Solution
(79) 5 mL of the purified silver nanowire solution in water are mixed with 2 mL of 1-amino-2-butanol, 5 L of TODS (3,6,9-trioxadecanoic acid) and 10 mL of acetone, and centrifuged (speed: rcf=2000; duration: 1 min). The resultant supernatant is decanted off and the sediment formed is redispersed in 10 mL of 1-amino-2-butanol.
(80) II.4. Nanoimprint 1
(81) There follows a description of the production (variant 1) of a grid structure of silver nanowires with the aid of a PDMS stamp, in which the silver nanowires are arranged in gridlines:
(82) II.4.A. Description of the Preparation of the Silver Nanowire Solution Shortly Before Sample Production
(83) The sample vessel with the nanowire solution present therein is agitated briefly before the sample production with the aid of a vortexer (from Heidolph, model: Reax control, speed: 2500 rpm), in order to redisperse the sediment.
(84) II.4.B. Coating Operation
(85) A glass substrate (size: 10 cm10 cm0.11 cm), coated with the antiadhesive coating material (see point 11.2), is placed flat on a laboratory bench. A droplet (volume: 20 L) of the nanowire solution prepared is applied in the middle.
(86) A structured PDMS stamp (production described in point 1) is pressed on manually such that the solution is distributed homogeneously under the stamp and excess material is displaced.
(87) In order to evaporate off the excess solvent, the sample (substrate+stamp) is placed onto a hotplate and heated to 50 C. During this process, a metal plate (weight: 800 g) is placed onto the PDMS stamp in order to assure optimal, uniform adhesion of the stamp on the substrate. After 15 min, the sample assembly (substrate.fwdarw.stamp.fwdarw.metal plate) is removed from the hotplate and left to cool on the laboratory bench.
(88) As soon as the sample has cooled down, the metal plate is first removed, one hand is used to stabilize the substrate on the benchtop and the other is used to remove the PDMS stamp by pulling it off.
(89) II.4.C. Coating Operation, Variant 2
(90) A PDMS stamp with grid structure (production described in point 1, line width 15 m) is placed by its reverse side (unstructured) onto an uncoated glass substrate (size: 5 cm5 cm0.11 cm). A droplet (volume: 20 L) of the nanowire solution prepared is applied to the structured side of the PDMS stamp at the edge.
(91) With the aid of a kind of coating bar (a razor blade here), the droplet of nanowire solution is distributed homogeneously over the structured surface of the PDMS stamp.
(92) Subsequently, a coated glass substrate (size: 5 cm5 cm0.11 cm, coated with antiadhesive coating material) is pressed manually onto the coated side of the PDMS stamp covered with nanowires.
(93) The sample assembly (uncoated glass substrate.fwdarw.PDMS stamp.fwdarw.coated glass substrate) is turned over and dried at 50 C. on a hotplate, weighted down with a metal plate (weight: 800 g). After 1 h, the sample assembly is removed from the hotplate and left to cool on the laboratory bench. As soon as the sample has cooled down, the metal plate is first removed, one hand is used to stabilize the coated substrate and the other is used to remove the PDMS stamp and the uncoated glass substrate by pulling them off.
(94) II.4.D. Characterization
(95) 1. Measurement of Transmission:
(96) Transmission was determined with the aid of a spectrometer (instrument: Ocean Optics QEPro, lamp: DH-2000-BAL).
(97) 2. Determination of Conductivity:
(98) Conductivity was determined with the aid of a 2-point meter (from Keithley, instrument: 2000 Multimeter) on a respective area of 5 mm5 mm, on which contacts were made with conductive silver varnish on two opposite sides.
(99) II.5. Nanoimprint 2
(100) There follows a description of the production (variant 2) of a grid structure from silver nanowires with the aid of a PDMS stamp, in which the silver nanowires are arranged in the square grid areas and these areas are each separated from one another by lines arranged in the form of a grid:
(101) II.5.A. Pretreatment of the Antiadhesively Coated Substrate
(102) A PDMS stamp with grid structure (production described in point 1) is placed onto a glass substrate (size: 10 cm10 cm0.11 cm), coated with the antiadhesive coating material (see point 2). Then the substrate including the stamp placed on is subjected to a plasma treatment in a plasma chamber (duration: 30 min, gas: oxygen). The PDMS stamp is merely placed on and not pressed on, in order thus to hydrophilize the square surfaces of the grid structure of the stamp. And even the actually hydrophobic, coated substrate is hydrophilic after the plasma treatment.
(103) II.5.B. Description of the Preparation of the Silver Nanowires Solution Shortly Before Sample Production
(104) The sample vessel with the nanowire solution present therein is agitated shortly before the sample production with the aid of a vortexer (from Heidolph, model: Reax control, speed: 2500 rpm), in order to redisperse the sediment.
(105) II.5.C. Coating Operation
(106) The hydrophilized substrate is placed flat on to a laboratory bench. A droplet (volume: 20 L) of the nanowire solution prepared is applied in the middle and the hydrophilized PDMS stamp is pressed on manually such that the solution is distributed uniformly under the stamp and excess material is displaced. In order to evaporate the excess solvent, the sample (substrate+stamp) is placed onto a hotplate and heated to 50 C. During this process, a metal plate (weight: 800 g) is placed onto the PDMS stamp. After 15 min, the sample assembly (substrate.fwdarw.stamp.fwdarw.metal plate) is removed from the hotplate and left to cool on the laboratory bench. As soon as the sample has cooled down, the metal plate is first removed, one hand is used to stabilize the substrate on the benchtop and the other is used to remove the PDMS stamp by pulling it off.
LITERATURE CITED
(107) H. Feng, Y. Yang, Y. You, G. Li, J. Guo, T. Yu, Z. Shen, T. Wu, B. Xing, Chem. Commun. 2009, 1984. J. H. M. Maurer, L. Gonzlez-Garcia, B. Reiser, I. Kanelidis, T. Kraus, ACS Appl. Mater. Interfaces 2015, 7, 7838.