NON-CONTACT FORCE TYPE MICRO-ROTATING MECHANISM AND PREPARATION METHOD THEREOF

Abstract

A non-contact force type micro-rotating mechanism driven by attractive/repulsive force and a manufacturing method thereof, belongs to the field of intelligent micro devices, and mainly relates to micro electromechanical system technology, precision machining technology, precision assembly and the like. The mechanism adopts the interaction force between magnetic poles to replace the connection mode of a traditional through-hole bearing pressure spring positioning shaft, so that the component part structure of the mechanism can be optimized, and the space utilization rate can be greatly improved. Moreover, the attractive force type structure also has the effect of weakening the radial vibration of the motor, and the coaxiality of the rotor and the stator is improved in the running process of the motor. Meanwhile, the rotating mechanism does not directly output shaft work, a structure can be added on the disc-shaped rotor to realize different functions, an actuator and a control object are integrated.

Claims

1. A non-contact force type micro-rotating mechanism belonging to an attractive force type rotating mechanism, the mechanism comprising: a wafer; a first magnet; an elastic body; a piezoelectric ceramic a first base; a second magnet; and a first shell, wherein the wafer and the first magnet form a rotor part, and the wafer and the first magnet are bonded coaxially; the elastic body and the piezoelectric ceramic form a stator part, and the elastic body and the piezoelectric ceramic are also bonded coaxially; the elastic body is of an annular structure, and mechanical vibration of the piezoelectric ceramic is about to propagate in the elastic body in the form of waves; and the stator part, the rotor part and the second magnet are coaxially assembled, the first magnet of the rotor part is arranged in the elastic body of the stator part, and the first magnet and the elastic body are in clearance fit to ensure normal rotation; the mechanism utilizes mutual attraction of the first magnet on the rotor part and the second magnet on the first base with opposite magnetic poles to provide pre-pressure required for rotation.

2. A non-contact force type micro-rotating mechanism belonging to a repulsive force type rotating mechanism, the mechanism comprising: a wafer; a first magnet; an elastic body; a piezoelectric ceramic; a second magnet; a second base; and a first shell, wherein the wafer and the first magnet form a rotor part, and the wafer and the first magnet are bonded coaxially; the elastic body and the piezoelectric ceramic form a stator part, and the elastic body and the piezoelectric ceramic are also bonded coaxially; the elastic body is of an annular structure, and mechanical vibration of the piezoelectric ceramic is about to propagate in the elastic body in the form of waves; the stator part, the rotor part and the second magnet are coaxially assembled, the first magnet on the rotor part and the stator part are in clearance fit to ensure normal rotation; and the mechanism utilizes mutual repulsion of the first magnet on the rotor part and the second magnet on a second shell with same magnetic poles to provide pre-pressure required for rotation.

3. The non-contact force type micro-rotating mechanism according to claim 1, wherein the elastic body is provided with a tooth-shaped structure, and radial grooves are formed between adjacent teeth.

4. The non-contact force type micro-rotating mechanism according to claim 2, wherein the elastic body is provided with a tooth-shaped structure, and radial grooves are formed between adjacent teeth.

5. The non-contact force type micro-rotating mechanism according to claim 1, wherein an inner ring of the elastic body is provided with a reinforcing rib.

6. The non-contact force type micro-rotating mechanism according to claim 2, wherein an inner ring of the elastic body is provided with a reinforcing rib.

7. The non-contact force type micro-rotating mechanism according to claim 1, wherein the wafer is provided with a layer of wear-resistant material.

8. The non-contact force type micro-rotating mechanism according to claim 2, wherein the wafer is provided with a layer of wear-resistant material.

9. A method of preparing a non-contact force type micro-rotating mechanism, comprising: machining a wafer by using a machine tool; bonding the wafer and a magnet by using a displacement table to obtain a rotor part of a motor; machining a tooth-shaped elastic body by using the machine tool; bonding the tooth-shaped elastic body and a piezoelectric ceramic by using the displacement table to obtain a stator part of the motor; milling the first base on a substrate; embedding a second magnet into the first base to obtain a magnetic base; step seven, milling a first shell on another substrate; and assembling the first shell, the rotor part, the stator part and the magnetic base together from top to bottom to obtain the complete motor.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0014] FIG. 1A depicts a non-contact force type micro-rotating mechanism;

[0015] FIG. 1B depicts a non-contact force type micro-rotating mechanism;

[0016] FIG. 2A depicts an attractive force type micro-rotating mechanism;

[0017] FIG. 2B depicts an attractive force type micro-rotating mechanism;

[0018] FIG. 2C depicts an attractive force type micro-rotating mechanism;

[0019] FIG. 2D depicts an attractive force type micro-rotating mechanism;

[0020] FIG. 2E depicts an attractive force type micro-rotating mechanism;

[0021] FIG. 2F depicts an attractive force type micro-rotating mechanism;

[0022] FIG. 2G depicts an attractive force type micro-rotating mechanism;

[0023] FIG. 2H depicts an attractive force type micro-rotating mechanism;

[0024] FIG. 2I depicts an attractive force type micro-rotating mechanism;

[0025] FIG. 3A depicts a repulsive force type micro-rotating mechanism;

[0026] FIG. 3B depicts a repulsive force type micro-rotating mechanism;

[0027] FIG. 3C depicts a repulsive force type micro-rotating mechanism;

[0028] FIG. 3D depicts a repulsive force type micro-rotating mechanism;

[0029] FIG. 3E depicts a repulsive force type micro-rotating mechanism;

[0030] FIG. 3F depicts a repulsive force type micro-rotating mechanism;

[0031] FIG. 3G depicts a repulsive force type micro-rotating mechanism;

[0032] FIG. 3H depicts a repulsive force type micro-rotating mechanism;

[0033] FIG. 3I depicts a repulsive force type micro-rotating mechanism; and

[0034] wherein, 1, wafer; 2, first magnet; 3, elastic body; 4, piezoelectric ceramic; 5, first base; 6, second magnet; 7, first shell; 8, second base; and 9, second shell.

DETAILED DESCRIPTION

Embodiment 1

[0035] The embodiment is an attractive force type rotating mechanism, which consists of the wafer 1 made of the glass material with the diameter phi of 25 mm and the thickness of 0.3 mm, the rubidium-iron-boron first magnet 2 with the diameter phi of 6.8 mm and the thickness of 0.6 mm, the toothed annular phosphor bronze elastic body 3 with the inner diameter phi of 6.9 mm and the outer diameter phi of 12 mm, the piezoelectric ceramic 4 with electrodes with the thickness of 0.3 mm, the inner diameter phi of 6.9 mm and the outer diameter phi of 12 mm, the first base 5 with the thickness of 1 mm with a blind hole with the diameter phi of 10 mm and the depth of 0.4 mm, the rubidium-iron-boron second magnet 6 with the diameter phi of 6.8 mm and the thickness of 0.6 mm, and the first shell 7 made of a PMMA material. The wafer 1 and the first magnet 2 form the rotor part, and the wafer 1 and the first magnet 2 are bonded coaxially. A layer of wear-resistant material, such as polytetrafluoroethylene-based friction material, may be added to the wafer 1 to improve mechanical properties and prolong service life. The elastic body 3 and the piezoelectric ceramic 4 form the stator part, and the elastic body 3 and the piezoelectric ceramic 4 are also bonded coaxially. The elastic body 3 is of an annular structure, and mechanical vibration of the piezoelectric ceramic 4 is about to propagate in the elastic body 3 in the form of waves. The reinforcing rib on the inner ring of the elastic body 3 is used for increasing the strength and rigidity of the elastic body 3 and overcoming twisted deformation caused by uneven stress during working. On one hand, the tooth-shaped structure on the elastic body 3 is used for amplifying the vibration amplitude of the stator under the condition that the bending rigidity of the stator ring is basically kept unchanged. And on the other hand, debris generated by friction between the stator and the rotor can be accommodated in grooves of the tooth-shaped structure, so that the normal operation of the motor is guaranteed. The stator, the rotor and the second magnet 6 are coaxially assembled, the first magnet 2 of the rotor part is arranged in the elastic body 3 of the stator part, and the first magnet 2 and the elastic body 3 are in clearance fit to ensure normal rotation. The attractive force type rotating mechanism utilizes mutual attraction of the first magnet 2 on the rotor and the second magnet 6 on the first base 5 with opposite magnetic poles to provide pre-pressure required for rotation.

[0036] Referring to FIGS. 2A through 2I, an implementation method of an attractive force type micro-rotating mechanism in the embodiment, comprising the following basic processing steps: step one, referring to FIG. 2A, machining the wafer 1 with the diameter phi of 25 mm on a glass sheet with the thickness of 0.3 mm by using a milling machine; step two, referring to FIG. 2B, bonding the wafer 1 and the rubidium-iron-boron first magnet 2 with the diameter phi of 6.8 mm and the thickness of 0.6 mm by using a piezoelectric displacement table to obtain the rotor part of the ultrasonic motor; step three, referring to FIG. 2C, milling the phosphor bronze sheet with the thickness of 2 mm into 1.4 mm, milling 24 radical grooves with the depths of 0.8 mm by using a 0.2 mm micro-milling cutter, and milling a hole with the inner diameter phi of 6.9 mm and the depth of 1.2 mm, a through hole with the diameter phi of 4.5 mm and an excircle with the diameter phi of 12 mm by using a 1 mm milling cutter to obtain the phosphor bronze elastic body 3; step four, referring to FIG. 2D, bonding the phosphor bronze elastic body 3 and the piezoelectric ceramic 4 by using the piezoelectric displacement table to obtain the stator part of the ultrasonic motor; step five, referring to FIG. 2E, milling a hole with the diameter phi of 10 mm and the depth of 0.4 mm on a PMMA sheet with the thickness of 1 mm, cutting an excircle with the diameter phi of 28 mm on the sheet for cutting the excircle so as to obtain the first base; step six, referring to FIG. 2F, embedding the rubidium-iron-boron second magnet 6 with the diameter phi of 10 mm and the thickness of 0.4 mm into the hole with the diameter phi of 10 mm and the depth of 0.4 mm in the first base 5 so as to obtain the magnetic base; step seven, referring to FIG. 2G, milling a hole with the diameter phi of 27 mm and the depth of 2.2 mm on a PMMA sheet with the thickness of 2.5 mm, cutting an excircle with the diameter phi of 28 mm on the sheet for cutting the excircle so as to obtain the first shell 7; and step eight, referring to FIGS. 2H and 2I, assembling the shell, the rotor, the stator and the magnetic base together from top to bottom to obtain the complete motor.

[0037] The material of the glass wafer 1 may also be silicon, steel, copper, aluminum, plastic or the like, and the material of the phosphor bronze elastic body 3 may also be stainless steel, aluminum or the like.

Embodiment 2

[0038] The embodiment is a repulsive force type rotating mechanism, which consists of the wafer 1 made of a glass material with the diameter phi of 25 mm and the thickness of 0.3 mm, the rubidium-iron-boron first magnet 2 with the diameter phi of 6.8 mm and the thickness of 0.6 mm, the toothed annular phosphor bronze elastic body 3 with the inner diameter phi of 6.9 mm and the outer diameter phi of 12 mm, the piezoelectric ceramic 4 with electrodes with the thickness of 0.3 mm, the inner diameter phi of 6.9 mm and the outer diameter phi of 12 mm, the rubidium-iron-boron second magnet 6 with the diameter phi of 6.8 mm and the thickness of 0.6 mm, the second base 8 with the diameter phi of 28 mm and the thickness of 1 mm, and the second shell 9 made of a PMMA material. The glass wafer 1 is plated with fan-shaped filter films, with six channels, capable of transmitting visible light of six different wave bands. Each sector is 60 degrees, each sector-shaped filter film is composed of four layers of thin films, each sector-shaped filter film comprises a chromium film of 1 nm, a silver film of 18 nm, a silicon film of 20-40 nm and a silver film of 18 nm from bottom to top respectively, and the wavelength of transmitted visible light is realized by changing the thickness of the silicon film. The wafer 1 and the first magnet 2 form the rotor part, and the wafer 1 and the first magnet 2 are bonded coaxially. A layer of wear-resistant material, such as polytetrafluoroethylene-based friction material, may be added to the wafer 1 to improve mechanical properties and prolong service life. The elastic body 3 and the piezoelectric ceramic 4 form the stator part, and the elastic body 3 and the piezoelectric ceramic 4 are also bonded coaxially. The elastic body 3 is of an annular structure, and mechanical vibration of the piezoelectric ceramic 4 is about to propagate in the elastic body 3 in the form of waves. The reinforcing rib on the inner ring of the elastic body 3 is used for increasing the strength and rigidity of the elastic body 3 and overcoming twisted deformation caused by uneven stress during working. On one hand, the tooth-shaped structure on the elastic body 3 is used for amplifying the vibration amplitude of the stator under the condition that the bending rigidity of the stator ring is basically kept unchanged, and on the other hand, debris generated by friction between the stator and the rotor can be accommodated in grooves of the tooth-shaped structure, so that the normal operation of the motor is guaranteed. The stator, the rotor and the second magnet 6 are coaxially assembled, the first magnet 2 on the rotor and the stator are in clearance fit to ensure normal rotation. The repulsive force type rotating mechanism utilizes mutual repulsion of the first magnet 2 on the rotor and the second magnet 6 on the second shell 9 with same magnetic poles to provide pre-pressure required for rotation.

[0039] Referring to FIGS. 3A through 3I, an implementation method of a repulsive force type micro-rotating mechanism in the embodiment, comprising the following basic processing steps:

[0040] step one, referring to FIG. 3A, machining the glass wafer 1 with the diameter phi of 25 mm on a glass sheet with the thickness of 0.3 mm by using a milling machine, evaporating six filtering channels on an electron beam evaporation film plating machine on the wafer, each channel is sector-shaped by 60 degrees, the whole glass sheet is covered with the channels, each sector-shaped channel is composed of four films which are a chromium film of 1 nm, a silver film of 18 nm, a silicon film of 20-40 nm and a silver film of 18 nm from bottom to top respectively, only the middle silicon films of the channels are different in thicknesses, which are 20 nm, 24 nm, 28 nm, 32 nm, 36 nm and 40 nm respectively.

[0041] Step two, referring to FIG. 3B, bonding the wafer 1 and the rubidium-iron-boron first magnet 2 with the diameter phi of 6.8 mm and the thickness of 0.6 mm by using a piezoelectric displacement table to obtain the rotor part of the ultrasonic motor; step three, referring to FIG. 3C, milling a phosphor bronze sheet with the thickness of 2 mm into 1.4 mm, milling 24 radical grooves with the depths of 0.8 mm by using a 0.2 mm micro-milling cutter, and milling a hole with the inner diameter phi of 6.9 mm and the depth of 1.2 mm, a through hole with the diameter phi of 4.5 mm and an excircle with the diameter phi of 12 mm by using a 1 mm milling cutter to obtain the phosphor bronze elastic body 3; step four, referring to FIG. 3D, bonding the phosphor bronze elastic body 3 and the piezoelectric ceramic 4 by using the piezoelectric displacement table to obtain the stator part of the ultrasonic motor; step five, referring to FIG. 3E, slicing a wafer with the diameter phi of 28 mm on a PMMA sheet with the thickness of 1 mm so as to obtain the second base 8; step six, referring to FIG. 3F, milling a hole with the diameter phi of 27 mm and the depth of 2.2 mm on the PMMA sheet with the thickness of 3 mm, cutting an excircle with the diameter phi of 28 mm on the sheet for cutting the excircle so as to obtain the second shell 9; step seven, referring to FIG. 3G, embedding the rubidium-iron-boron second magnet 6 with the diameter phi of 10 mm and the thickness of 0.4 mm into a hole with the diameter phi of 10 mm and the depth of 0.4 mm in the second base 8 so as to obtain the magnetic base; and step eight, referring to FIGS. 3H and 3I, assembling the magnetic shell, the rotor, the stator and the base together from top to bottom to obtain the complete motor.

[0042] The material of the glass wafer 1 may also be silicon, steel, copper, aluminum, plastic or the like, and the material of the phosphor bronze elastic body 3 may also be stainless steel, aluminum or the like.