Electrostatic adsorption body
11866281 ยท 2024-01-09
Assignee
Inventors
Cpc classification
B32B15/20
PERFORMING OPERATIONS; TRANSPORTING
B25J15/06
PERFORMING OPERATIONS; TRANSPORTING
B32B27/304
PERFORMING OPERATIONS; TRANSPORTING
B32B15/082
PERFORMING OPERATIONS; TRANSPORTING
International classification
B25J15/06
PERFORMING OPERATIONS; TRANSPORTING
B32B15/082
PERFORMING OPERATIONS; TRANSPORTING
B32B15/20
PERFORMING OPERATIONS; TRANSPORTING
B32B27/28
PERFORMING OPERATIONS; TRANSPORTING
B32B27/30
PERFORMING OPERATIONS; TRANSPORTING
Abstract
Provided is an electrostatic adsorption body capable of exhibiting a high adsorption force, especially with respect to a highly insulative sheet-like object to be adsorbed, such as a cloth, while using an electrical adsorption force. This electrostatic adsorption body, which uses electrostatic force to adsorb an object to be adsorbed, is provided with: a laminate sheet in which a 20-200 m-thick insulator, a 1-20 m-thick electrode layer, and a 20-200 m-thick resin film are sequentially laminated; and a power supply device that applies a voltage to the electrode layer, wherein the resin film at least has a tensile modulus of 1 MPa or more and less than 100 MPa and a volume resistivity of 110.sup.10-10.sup.13 cm, the electrode layer is composed of a bipolar electrode including a positive electrode and a negative electrode, and an object to be adsorbed is adsorbed using the resin film as an adsorption surface due to an electrostatic adsorption force that is generated by applying a voltage to the electrode layer.
Claims
1. An electrostatic adsorption body adsorbing an object to be adsorbed with an electrostatic adsorption force, the electrostatic adsorption body comprising: a laminate sheet in which an insulator with a thickness of 20 to 200 m, an electrode layer with a thickness of 1 to 20 m, and a resin film with a thickness of 20 to 200 m are sequentially laminated; and a power supply device that applies a voltage to the electrode layer, wherein the resin film at least has a tensile modulus of 1 MPa or more and less than 100 MPa and a volume resistivity of 110.sup.10 to 10.sup.13 .Math.cm, the electrode layer is composed of a bipolar electrode including a positive electrode and a negative electrode, and an object to be adsorbed is adsorbed using the resin film as an adsorption surface due to an electrostatic adsorption force that is generated by applying a voltage to the electrode layer.
2. The electrostatic adsorption body according to claim 1, wherein the resin film is composed of soft polyvinyl chloride.
3. The electrostatic adsorption body according to claim 1, wherein the electrode layer composed of the bipolar electrode is a pair of comb-like electrodes.
4. The electrostatic adsorption body according to claim 3, wherein the electrode layer composed of the bipolar electrode is formed by meshing comb teeth of the pair of comb-like electrodes on a same plane while maintaining a certain interval therebetween, a width of each of the comb teeth is 0.5 to 20 mm, and the interval between the comb teeth is 0.5 to 10 mm.
5. The electrostatic adsorption body according to claim 1, wherein at least the adsorption surface adsorbing the object to be adsorbed is a curved surface.
6. The electrostatic adsorption body according to claim 1, wherein an area of the adsorption surface is smaller than an area of the object to be adsorbed.
7. The electrostatic adsorption body according to claim 1, wherein the object to be adsorbed is a sheet-like insulation component.
Description
BRIEF DESCRIPTION OF DRAWINGS
(1)
(2)
(3)
(4)
(5)
DESCRIPTION OF EMBODIMENTS
(6) Hereinafter, the present invention will be described in detail.
(7) As shown in
(8) <Resin Film>
(9) In the electrostatic adsorption body of the present invention, the resin film used for the adsorption surface with respect to the object to be adsorbed needs to have a volume resistivity of 110.sup.10 to 10.sup.13 .Math.cm. As shown in examples to be described below, when the volume resistivity of the resin film serving as the adsorption surface exceeds 110.sup.13 .Math.cm, the adsorption force with respect to the object to be adsorbed decreases, and for example, the object to be adsorbed may fall off even due to its own weight. On the other hand, if the volume resistivity is less than 110.sup.10 .Math.cm, it is presumed that an electrostatic adsorption force itself acting on the object to be adsorbed will increase, but this is not preferable because a leakage current can occur between the adsorption surface and the object to be adsorbed and damage to fibers (object to be adsorbed) such as paper or cloth can occur. In consideration of exhibition of an adsorption force and safety, the volume resistivity is preferably 110.sup.10 to 10.sup.12 .Math.cm.
(10) In addition, the resin film serving as an adsorption surface needs to have a tensile modulus (Young's modulus) of 1 MPa or more and less than 100 MPa. The reason for this is that, although the detailed principle is not clear, in this specification, in particular, many sheet-like insulation components to be adsorbed are relatively thin and soft, but adsorption can be performed to conform the shape of such an object to be adsorbed and the like, and thus for the resin film, at least the tensile modulus (Young's modulus) of the resin film serving as an adsorption surface is set to be within the above range. In addition, another reason for this, as will be described below, in this specification, in particular, when sheet-like insulation components to be adsorbed are adsorbed and peeled off one by one, the adsorption surface of the electrostatic adsorption body of the present invention preferably has a roll-like shape so that it has a curved surface. This is because it is preferable to have the above tensile modulus even if processing into such a shape is performed.
(11) In addition, the resin film needs to have a thickness of 20 to 200 m and preferably has a thickness of 50 to 100 m in order to secure insulation, flexibility, adsorption conformability with respect to the object to be adsorbed, an adsorption force, and the like. When the thickness is less than 20 m, dielectric breakdown is likely to occur, and if pinholes are formed in the resin film accordingly, there is a risk of it not being able to function as the electrostatic adsorption body. On the other hand, when the thickness exceeds 200 m, this is not preferable because adsorption conformability and flexibility with respect to the object to be adsorbed deteriorate, the distance to the object to be adsorbed increases, and accordingly there is a risk of the adsorption force decreasing.
(12) In addition, specific examples of the resin film described above include polyimide, polyethylene terephthalate (PET), nylon, polypropylene, polyurethane, soft polyvinyl chloride, and polyvinylidene chloride, and those obtained by performing a process for adjusting their conductivity (mixing with a filler, etc.). However, in order to set the volume resistivity and the tensile modulus to be within the above predetermined range, polyurethane or soft polyvinyl chloride is preferable, and soft polyvinyl chloride is more preferable.
(13) <Insulator>
(14) In addition, in the present invention, regarding the insulator used on the side opposite to the adsorption surface of the object to be adsorbed, an insulator the same as or different from the above resin film may be used, but there is a risk of a current that should flow between the resin film and the object to be adsorbed flowing to the side of the insulator. Therefore, regarding the insulator, it is preferable to use an insulator having a volume resistivity that is the same as or higher than that of the resin film. In addition, in order to exhibit flexibility of the entire electrostatic adsorption body (laminate sheet), the tensile modulus (Young's modulus) of the insulator is preferably about the same as the tensile modulus (Young's modulus) of the resin film. Here, the thickness of the insulator needs to be 20 to 200 m, and is preferably 50 to 100 m, for the same reason as in the case of the resin film.
(15) Specific examples of such an insulator are not limited, but it is possible to use the same insulator as in the resin film or ceramics such as aluminum nitride and alumina. However, as in the case of the resin film, preferable examples thereof include polyimide, polyethylene terephthalate (PET), nylon, polypropylene, polyurethane, soft polyvinyl chloride, polyvinylidene chloride and the like and an object obtained by performing a process for adjusting their conductivity (mixing with a filler, etc.). In order to set the volume resistivity and the tensile modulus to be within the above predetermined range, polyurethane or soft polyvinyl chloride is preferable, and soft polyvinyl chloride is more preferable.
(16) <Electrode Layer>
(17) Regarding the electrode layer used in the present invention, if unipolarity is desired, it is necessary to arrange an electrode near the object to be adsorbed, but, in particular, when the object to be adsorbed is cloth, it is not possible to perform such arrangement, and thus a bipolar electrode having at least a positive electrode and a negative electrode is used. The material, the shape, and the like are not particularly limited, but the thickness needs to be 1 to 20 m. When the thickness is less than 1 m, there is a risk of the electrode layer being disconnected or the conductivity being lowered due to deformation of the electrostatic adsorption body, and on the other hand, when the thickness exceeds 20 m, the hardness of the electrode layer tends to be high, and thus the flexibility of the entire electrostatic adsorption body is impaired and there is a risk of poor conformability with respect to the object to be adsorbed. Regarding the material and the production method, for example, a metal foil may be used without change, an object obtained by etching a metal formed by a sputtering method, an ion plating method or the like into a predetermined shape may be used, or an object formed into a predetermined shape by spraying a metal material or printing a conductive ink may be used.
(18) Here, the shape of the bipolar electrode can be appropriately selected from among pattern shapes, for example, a flat shape, a semicircular shape, a comb shape and a mesh. However, preferably, a pair of comb-like electrodes are preferably used, and more preferably, as shown in
(19) In addition, for the bipolar electrode of the present invention, as described above, when comb teeth of a pair of comb-like electrodes are formed by meshing with each other on the same plane while maintaining a certain interval between them, preferably, the width (electrode width) of each comb tooth is 0.5 to 20 mm and the interval (pitch) between the comb teeth is 0.5 to 10 mm, and more preferably, the width (electrode width) of each comb tooth is 1 to 10 mm and the interval (pitch) between the comb teeth is 1 to 2 mm. When the width (electrode width) of each comb tooth is 1 mm or more, the processability of the electrode is improved, and on the other hand, when the width is 10 mm or less, this is preferable because a decrease in the adsorption force can be minimized. In addition, when the interval (pitch) between the comb teeth is 1 mm or more, it contributes to minimizing discharge between the electrodes, and on the other hand, when the interval is 2 mm or less, this is preferable because a decrease in the adsorption force can be minimized. That is, when the width (electrode width) of each comb tooth and the interval (pitch) between the comb teeth are formed in this manner, this is preferable because it is possible to secure the adsorption force, the processability of the electrode, and the safety during use.
(20) <Laminate Sheet>
(21) In addition, the resin film, the electrode layer and the insulator are used and laminated to form a laminate sheet. It is necessary to interpose the laminate sheet between the resin film and the insulator so that the electrode layer is not exposed, and regarding a specific method, a method in which the resin film, the electrode layer and the insulator are sequentially laminated, and heat and pressure are applied to fuse them may be exemplified. Alternatively, as necessary, they may be bonded via a bonding sheet, an adhesive or a pressure-sensitive adhesive. However, when the electrostatic adsorption body is deformed and expanded and contracted, if another component is inserted into the adhesive layer, since there is a risk of deformation and expansion and contraction being inhibited and a bonding surface being peeled off, a fusing method using thermoplasticity of the film is preferable.
(22) Here, regarding the laminate sheet, a flat sheet formed by laminating the resin film, the electrode layer and the insulator is used without change or its shape and the like may be appropriately change according to the state of the object to be adsorbed. Specifically, when a plurality of sheet-like insulation components to be adsorbed in the present invention are stacked and the adhesion between the sheet (objects to be adsorbed) is strong, it may be difficult to peel them off one by one. Therefore, it is required to reliably adsorb and peel off only the first sheet on the outermost surface. As a result of verification by the inventors, as shown in
(23) <Power Supply Device>
(24) After the laminate sheet is formed as described above, a power supply device that applies a voltage to the electrode layer and generates an electrical adsorption force is required. The power supply device can be connected to the electrode layer of the laminate sheet via a connecting terminal and a switch (neither is shown), and one similar to that used in a general electrostatic adsorption structure can be used, or any device that can generate a high DC voltage may be used. The potential difference to be generated can be about 100 to 5,000 V, and as necessary, a voltage boosting circuit (high voltage generation circuit) that can boost to a required voltage may be provided.
(25) The electrostatic adsorption body of the present invention includes the above laminate sheet and power supply device. In the electrostatic adsorption body of the present invention, as necessary, a sensor and the like may be separately provided, and for example, appropriate modifications and additions to the configuration such as changing the pattern of the electrode layer are possible within the scope of the object of the present invention.
(26) Here, in the present invention, the object to be adsorbed as an adsorption target includes not only an insulator but also, in particular, sheet-like paper, cloth and a resin film having high insulation among objects required to be adsorbed via a gradient force, but the present invention is not limited thereto. Preferably, the sheet-like insulation component is particularly a component having a thickness of about 0.1 to 0.5 mm and exhibiting insulation and a volume resistivity of about 10.sup.12 to 10.sup.14 .Math.cm.
EXAMPLES
(27) While preferable embodiments of the present invention will be described below in detail with reference to examples and comparative examples, the present invention need not be considered to be limited.
Example 1
(28) <Production of Electrostatic Adsorption Body (Flat Electrode)>
(29) First, a double-sided Kapton (registered trademark) tape [product name: Kapton (registered trademark) double-sided tape 760H commercially available from TERAOKA SEISAKUSHO CO., LTD.] was attached to one surface side of a copper foil (thickness: 18 m) serving as an electrode layer. Next, as shown in
(30) A power supply device [a power supply device including a high voltage generating device (2,000 V output), a power cable and a 24 V power supply] was attached to the laminate sheet produced in this manner to obtain an electrostatic adsorption body according to Example 1.
(31) <Evaluation of Adsorption of Electrostatic Adsorption Body>
(32) A voltage of 2 kV was applied to the produced electrostatic adsorption body according to Example 1, and 4 types of test pieces [copy paper (woodfree paper, thickness: about 0.092 mm), a piece of 100% polyester (PE) cloth (thickness of about 0.47 mm), a piece of 100% cotton cloth 1 (hereinafter referred to as cotton 1, a hard fabric with a preprint handcraft pattern, a thickness of about 0.24 mm), and a piece of 100% cotton cloth 2 (hereinafter referred to as cotton 2, soft fabric for underwear, thickness of about 0.32 mm) serving as the object to be adsorbed were placed on the adsorption surface (the side of the resin film) and adsorbed. A loop-like hook part (made of nylon) attached to the test piece in advance was hooked with a hook of a push-pull gauge (product name: digital force gauge FGJN-5 commercially available from NIDEC-SHIMPO CORPORATION), and the push-pull gauge was then pulled in the horizontal direction, and the measurement result was used as an adsorption force (unit: gf/cm.sup.2) for each test piece. This mode is shown in
(33) TABLE-US-00001 TABLE 1 Resin film Electrode layer Volume Tensile Adsorption force of object Width and resistivity modulus to be adsorbed (gf/cm.sup.2) Shape pitch Material ( .Math. cm) (MPa) Paper PE Cotton 1 Cotton 2 Example 1 Flat Width 30 mm, Soft 1 10.sup.10 20 to 30 32.8 6.1 1.4 0.5 pitch 2 mm polyvinyl Example 2 Comb Width 10 mm, chloride 1 10.sup.10 20 to 30 58.8 11.3 5.7 4.5 teeth pitch 2 mm Example 3 Comb Width 10 mm, 1 10.sup.10 20 to 30 50.1 7.3 3.1 1.8 teeth pitch 5 mm Comparative Flat Width 60 mm, Polyimide 1 10.sup.17 3 10.sup.3 6.2 2.1 0.0 0.0 Example 1 pitch 2 mm (Kapton H) Comparative Comb Width 0.7 mm, 10.3 0.4 0.0 0.0 Example 2 teeth pitch 0.7 mm
(34) Here, the volume resistivity of the soft polyvinyl chloride film in Example 1 was measured using a double ring electrode method (IEC60093, ASTM D257, JIS K6911, JIS K6271), and the volume resistivity of the resin films used in Examples 2 and 3 and Comparative Examples 1 and 2 to be described below was measured by the same method.
Example 2
(35) An electrostatic adsorption body according to Example 2 was produced in the same manner as in Example 1 except that a comb-like electrode obtained by meshing a pair of comb teeth on the same plane as shown in
Example 3
(36) An electrostatic adsorption body according to Example 3 was produced in the same manner as in Example 2 except that a comb-like electrode was used as the electrode layer as in Example 2, and the width of each comb tooth (electrode width) was set to 10 mm and the interval (pitch) between the electrodes was set to 5 mm, and the adsorption thereof was evaluated in the same manner. The results are shown in Table 1.
Comparative Example 1
(37) An electrostatic adsorption body according to Comparative Example 1 was produced in the same manner as in Example 1 except that a polyimide film [commercially available from DU PONT-TORAY CO., LTD. product name: Kapton (registered trademark) H, volume resistivity: 110.sup.17 .Math.cm (measured by the above method), tensile modulus (Young's modulus): 310.sup.3 MPa, thickness 50 m] was used as the resin film serving as the adsorption surface of the object to be adsorbed and the same flat bipolar electrode [electrode width was 60 mm (length of 110 mm) and the interval (pitch) between electrodes was 2 mm] as in Example 1 was used as the electrode layer, and the adsorption thereof was evaluated in the same manner. The results are shown in Table 1.
Comparative Example 2
(38) An electrostatic adsorption body according to Comparative Example 2 was produced in the same manner as in Example 1 except that a polyimide film [commercially available from DU PONT-TORAY CO., LTD., product name: Kapton (registered trademark) H, volume resistivity: 110.sup.17 .Math.cm (measured by the above method), tensile modulus (Young's modulus): 310.sup.3 MPa, thickness 50 m] was used as the resin film serving as the adsorption surface of the object to be adsorbed, and the same comb-like bipolar electrode [the width of each comb tooth (electrode width) was 0.7 mm and the interval (pitch) between electrodes was 0.7 mm] as in Example 2 was used as the electrode layer, and the adsorption thereof was evaluated in the same manner. The results are shown in Table 1.
Test Examples 1 to 12 (Measurement of Adsorption Force Depending on Electrode Width)
(39) Electrostatic adsorption bodies of Test Examples 1 to 12 were produced in the same manner as in Example 2 except that the comb-like electrode as in Example 2 was used as the electrode layer and the width (electrode width) of each comb tooth was changed to 1 mm to 30 mm while the interval (pitch) between the electrodes was fixed to 2 mm, and the adsorption thereof was evaluated in the same manner. The results are shown in Table 2. Here, the reason why the result of the adsorption force (gf/cm.sup.2) obtained in Test Example 10 using an electrode layer having the same electrode width and pitch as in Example 2 was different from that of Example 2 was speculated to be due to the influence of the temperature and humidity during measurement because the experiment dates were different.
(40) TABLE-US-00002 TABLE 2 Adsorption force of object Electrode layer to be adsorbed (gf/cm.sup.2) Electrode Pitch Cotton Cotton width (mm) (mm) Paper PE 1 2 Test Example 1 1.0 2 28.7 6.1 1.6 1.4 Test Example 2 2.0 43.0 8.2 2.9 1.6 Test Example 3 3.0 51.5 10.1 3.3 1.3 Test Example 4 4.0 54.8 10.6 3.3 0.9 Test Example 5 5.0 72.8 11.2 3.6 1.1 Test Example 6 6.0 60.9 12.2 3.5 0.7 Test Example 7 7.0 65.0 12.2 3.4 0.8 Test Example 8 8.0 57.3 11.1 3.2 0.6 Test Example 9 9.0 59.5 12.1 3.2 0.4 Test Example 10 10.0 63.4 14.9 3.4 0.5 Test Example 11 20.0 51.7 11.6 3.3 0.7 Test Example 12 30.0 46.2 9.3 2.2 0.3
Test Examples 13 to 17 (Measurement of Adsorption Force Depending on Electrode Pitch)
(41) Electrostatic adsorption bodies of Test Examples 13 to 17 were produced in the same manner as in Example 2 except that the comb-like electrode as in Example 2 was used as the electrode layer, and the interval (pitch) between the electrodes was changed to 1 mm to 5 mm while fixing the width (electrode width) of each comb tooth to 10 mm, and the adsorption thereof was evaluated in the same manner. The results are shown in Table 3. Here, the reason why the result of the adsorption force (gf/cm.sup.2) obtained in Test Example 14 using an electrode layer having the same electrode width and pitch as in Example 2 and Test Example 10 was different from those of Example 2 and Test Example 10 was speculated to be due to the influence of the temperature and humidity during measurement because the experiment dates were different.
(42) TABLE-US-00003 TABLE 3 Electrode layer Adsorption force of object Electrode to be adsorbed (gf/cm.sup.2) width Pitch Cotton Cotton (mm) (mm) Paper PE 1 2 Test Example 13 10.0 1.0 47.2 9.9 4.1 2.1 Test Example 14 2.0 40.9 10.2 3.5 2.1 Test Example 15 3.0 41.6 8.5 3.6 1.5 Test Example 16 4.0 42.9 6.9 2.7 2.0 Test Example 17 5.0 50.1 7.3 3.1 1.8
Test Examples 18 and 19 (Comparison of Adsorption Depending on Shape of Electrostatic Adsorption Body)
(43) Two electrostatic adsorption bodies produced in Example 2 were prepared, one of the electrostatic adsorption bodies was bent so that the adsorption surface was a curved surface with a radius of curvature R of about 25 mm as in
(44) In the results, in Test Example 18 in which the adsorption surface of the electrostatic adsorption body was a curved surface, the probability that only the piece of cloth on the outermost surface was adsorbed and peeled was 80%, and in Test Example 19 in which the flat adsorption surface was used without change, the success rate was merely 5%. In Test Example 19 in which the flat adsorption surface was used without change, it was speculated that the electrostatic force also acted on the second and subsequent stacked pieces of cloth and the success rate was extremely lowered.
Test Examples 20 and 21 (Comparison of Adsorption Depending on Adsorption Area of Electrostatic Adsorption Body)
(45) Two electrostatic adsorption bodies produced in Example 2 were prepared, one electrostatic adsorption body was used without change as in
(46) In the results, in Test Example 20 in which the area of the adsorption surface of the electrostatic adsorption body was the same area of the piece of polyester cloth serving as the object to be adsorbed, the probability that only the piece of cloth of the outermost surface was adsorbed and peeled was merely 5%, and in Test Example 21 in which the area of the adsorption surface of the electrostatic adsorption body was smaller than the area of the piece of polyester cloth serving as the object to be adsorbed, the success rate was excellent at 100%. When the area of the adsorption surface of the electrostatic adsorption body was larger than that of the object to be adsorbed, it was speculated that the electrostatic force also acted on the second and subsequent stacked pieces of cloth and the success rate was extremely lowered.
REFERENCE SIGNS LIST
(47) a Electrode (positive electrode or negative electrode) b Resin film b Insulator c, c Electrostatic adsorption body (laminate sheet) d Object to be adsorbed e Push-pull gauge