Method and device of batch transferring micro components
10825706 ยท 2020-11-03
Assignee
Inventors
Cpc classification
H01L24/95
ELECTRICITY
H01L2224/32105
ELECTRICITY
H01L2224/75502
ELECTRICITY
H01L2924/00012
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L24/75
ELECTRICITY
H01L2224/756
ELECTRICITY
H01L33/0095
ELECTRICITY
H01L21/67144
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2924/00012
ELECTRICITY
H01L2224/95
ELECTRICITY
H01L2224/95
ELECTRICITY
H01L2224/2919
ELECTRICITY
H01L2221/68363
ELECTRICITY
H01L2224/32225
ELECTRICITY
H01L2224/8385
ELECTRICITY
H01L2224/2919
ELECTRICITY
H01L2224/8385
ELECTRICITY
H01L2224/75252
ELECTRICITY
International classification
H01L21/67
ELECTRICITY
H01L33/00
ELECTRICITY
Abstract
A method of batch transferring micro components comprising steps of: A. arranging multiple probes in array on a carrying unit and extending multiple columns of the multiple probes out of a bottom of the carrying unit; B. providing a temperature control conduit in the carrying unit into which hot water is fed; C. driving the carrying unit so that the multiple columns of the multiple probes dip an adhesive material; D. feeding cold water into the temperature control conduit; E. moving the carrying unit on micro components and pressing the multiple probes of the carrying unit downward; F. moving the carrying unit onto a substrate and pressing the micro components to desired positions respectively; and G. heating adhesive material again as pressing the micro components and controlling the substrate at a low temperature so that the adhesive material freezes among the micro components and the substrate.
Claims
1. A method of batch transferring micro components comprising steps of: A. arranging multiple probes in array on a carrying unit, and extending multiple columns of the multiple probes out of a bottom of the carrying unit; B. providing a temperature control conduit in the carrying unit into which hot water is fed so as to heat the multiple probes; C. driving the carrying unit so that the multiple columns of the multiple probes dip an adhesive material; D. feeding cold water into the temperature control conduit so as to drop temperature of the multiple probes, hence the adhesive material adheres on the multiple columns of the multiple probes; E. moving the carrying unit on micro components and pressing the multiple probes of the carrying unit downward so that the adhesive material contacts the micro components; F. moving the carrying unit onto a substrate and aligning and pressing the micro components to desired positions respectively; and G. heating the adhesive material again as pressing the micro components so that the adhesive material melts and flows onto the substrate, and controlling the substrate at a low temperature so that the adhesive material freezes among the micro components and the substrate, thus batch transferring the micro components.
2. The method as claimed in claim 1, wherein in the step B, the temperature control conduit is defined by a winding channel around the multiple probes, and an inlet segment and an outlet segment of the winding channel extend out of a top of the carrying unit, and the hot water flows through the winding channel so as to heat the multiple probes.
3. The method as claimed in claim 1, wherein in the step D, the temperature control conduit includes a winding channel arranged around the multiple probes, an inlet segment and an outlet segment of the winding channel extend of a top of the carrying unit, and the temperature control conduit includes a control valve disposed on the inlet segment thereof so as to flow the cold water into the winding channel, thus reducing a temperature of the multiple probes.
4. The method as claimed in claim 1, wherein in the step E, the micro components are moved and arranged onto a platform at a predetermined distance, hence after the adhesive material on the multiple columns contacts the micro components, the carrying unit lifts, and the micro components are removed upward from the platform.
5. The method as claimed in claim 1, wherein in the step E, each probe has a first connection portion formed on a bottom thereof, and each of the micro components has at least one second connection portion formed on a top thereof so as to retain the first connection portion of each probe, hence each probe temporarily retains each micro component.
6. The method as claimed in claim 2, wherein in the step B, a temperature of the hot water of the winding channel is within 50 C. to 140 C.
7. The method as claimed in claim 2, wherein in the step D, a temperature of the cold water of the winding channel is within 0 C. to 30 C.
8. The method as claimed in claim 1, wherein after the step A, leveling the multiple probes on the carrying unit so that the multiple columns of the multiple probes are flushed with one another.
9. The method as claimed in claim 1, wherein in the step C, the adhesive material is any one of flux, glue, and underfill.
10. The method as claimed in claim 1, wherein in the step E, a first connection portion of each probe and at least one second connection portion of each micro component are in any one of cone, polygon, circle, and arc shapes.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
(16) With reference to
(17) A. arranging multiple probes 10 in array on a carrying unit 20, and extending multiple columns 11 of the multiple probes 10 out of a bottom of the carrying unit 20, as shown in
(18) B. heating the multiple probes 10 by feeding hot water into a temperature control conduit 30 in the carrying unit 20, as illustrated in
(19) C. driving the carrying unit 20, as shown in
(20) The method of batch transferring micro components further comprises step of:
(21) D. feeding cold water into the temperature control conduit 30 so as to drop temperature of the multiple probes 10, hence the adhesive material 40 freezes on the multiple columns 11 of the multiple probes 10 so as to enhance adhesion. Referring to
(22) The method of batch transferring micro components further comprises step of:
(23) E. moving the carrying unit 20 on the micro components 50, as shown in
(24) F. moving the carrying unit 20 onto a substrate 70, as shown in
(25) Referring to
(26) With reference to
(27) As shown in
(28) With reference to
(29) Referring to
(30) The carrying unit 20 includes a transfer head 21 and a cap 22 located on the transfer head 21.
(31) The multiple probes 10 are arranged in array on and pass through the transfer head 21, and the multiple first connection portions 111 of the multiple columns 11 extend out of a bottom of the transfer head 21. The multiple columns 11 of the multiple probes 10 are in any one of cone, polygon, circle, and arc shapes.
(32) The temperature control conduit 30 is formed on the carrying unit 20 and includes a winding channel 31 arranged around the multiple probes 10, the inlet segment 32 and the outlet segment 33 of the winding channel 31 extend out of a top of the cap 22 of the carrying unit 20, and the temperature control conduit 30 includes a control valve 34 disposed on the inlet segment 32 thereof so as to flow the hot water or the cold water into the winding channel 31 after shifting the control valve 34, thus reducing the temperature of the multiple probes 10.
(33) To overcome slow production speed and low production quantity of the micro LEDs by using surface mount technology (SMT) or chip on board (COB), the temperature control conduit 30 of the carrying unit 20 heats the multiple probes 10 so that the multiple columns 11 dips the adhesive material 40, wherein a dose of dipping is controlled by controlling a heating temperature to the multiple probes 10, and a temperature of the temperature control conduit 30 is reduced so that the adhesive material 40 freezes on the multiple columns 11 of the multiple probes 10. The carrying unit 20 is moved to each micro component 50 and presses downward so that the adhesive material 40 dips each micro component 50, and each micro component 50 is lifted upward from the platform 60 and is moved to the substrate 70, then the winding channel 31 is controlled to heat the adhesive material 40 of the multiple columns 11 so that the adhesive material 40 melts and flows onto the substrate 70, and the substrate 70 is cooled, hence the adhesive material 40 freezes among the micro components 50 and the substrate 70 so as to adhere the micro components 50 on the substrate 70, thus batch transferring the micro components 50. Accordingly, the adhesive material 40 dips with the micro components 50, is cooled in a temperature controlling manner, and is heated so as to melt and to transfer the micro components 50 (i.e., the micro LEDs) onto the substrate 70 quickly and securely, thus accelerating production speed, enhancing production quantity, and reducing fabrication cost. Preferably, the multiple columns 11 engage with the micro components 50 by using the multiple first connection portions 111 and the second connection portion 52 or by using the first connection portion 111 and multiple second connection portions 52, thus transferring the micro components 50 stably.
(34) As shown in
(35) While the preferred embodiments of the invention have been set forth for the purpose of disclosure, modifications of the disclosed embodiments of the invention as well as other embodiments thereof may occur to those skilled in the art. Accordingly, the appended claims are intended to cover all embodiments which do not depart from the spirit and scope of the invention.