Test mass compensation of mass measurement drift in a microcantilever resonator

Abstract

The present disclosure provides methods and mechanisms for measuring small masses attached to a substrate within a microcantilever. Specifically, the disclosure describes the measurement of small particles accumulated at a substrate that cannot be flowed through a microchannel within a microcantilever. A resonance measurement is acquired at a first time. A pair resonance measurements is then acquired at a second point in timeone with the test mass at a first position off or along the microcantilever, the second with the test mass at a second position along the microcantilever. Comparing the resonance frequencies determined for the two test mass positions allows for disambiguation of changes in the mass of the particles from changes in the resonant behavior of the microcantilever itself.

Claims

1. A method comprising: exciting a microcantilever, the microcantilever including a substrate and a test mass; causing particles to accumulate on the substrate; transporting the test mass from a first position to a second position relative to the substrate after the particles have accumulated on the substrate; and determining a mass of the particles accumulated on the substrate based on measured resonance frequencies of the microcantilever when the test mass is at the first position and when the test mass is at the second position.

2. The method of claim 1, wherein the mass of the particles accumulated on the substrate is determined using the following two equations: $f^a=\frac{1}{2}\sqrt{\frac{k}{\stackrel{\_}{m}+{}_{s}m+{}_t^a{m}_t}}$ $f^b=\frac{1}{2}\sqrt{\frac{k}{\stackrel{\_}{m}+{}_{s}m+{}_t^b{m}_t}}$ wherein, f.sup.a is the measured resonance frequency of the microcantilever when the test mass is at the first position; wherein, f.sup.b is the measured resonance frequency of the microcantilever when the test mass is at the second position; wherein .sub.t.sup.a is a geometric constant reflecting the distribution of the test mass on the microcantilever at the first position; wherein .sub.t.sup.b is a geometric constant reflecting the distribution of the test mass on the microcantilever at the second position; wherein m.sub.t is the test mass; wherein, k is a spring constant of the microcantilever; wherein, m is a mass of the microcantilever, the substrate, and any fluid contained therein; wherein, .sub.s is a geometric constant reflecting a distribution of the particles on the microcantilever; and wherein, m is the mass of the particles accumulated on the substrate.

3. The method of claim 1, wherein the microcantilever is excited using an electrostatic drive electrode.

4. The method of claim 1, wherein the resonance frequencies of the microcantilever are measured using an optical sensor.

5. The method claims claim 1, wherein the microcantilever comprises: a body having a free end and a fixed end; wherein, the fixed end is connected to a rigid base; wherein, the body is flexible.

6. The method claims claim 5, wherein the microcantilever further comprises: a microchannel located at least partially on or within the body of the microcantilever, the microchannel configured to transport fluid to and from the substrate.

7. The method of claim 6 further comprising: conveying food to and removing waste from the particles accumulated on the substrate of the microcantilever via the microchannel.

8. The method of claim 1, wherein the test mass is transported from the first position to the second position in fluid, via a test mass microchannel, using switchable flow of the fluid.

9. The method of claim 1, wherein the test mass is transported from the first position to the second position using variable pressure.

10. The method of claim 1, wherein the test mass is transported from the first position to the second position using switchable magnets.

11. The method of claim 1, wherein the test mass is transported from the first position to the second position using a micromechanical actuator.

12. The method of claim 1, wherein at least one of the first position and the second position is located on or within the microcantilever.

13. The method of claim 1, wherein the substrate is located on or within the microcantilever; and wherein, the substrate is configured to support the accumulation, growth, or reproduction of the particles.

14. A method comprising: causing particles to accumulate on a substrate of a microcantilever; and after the particles have accumulated on the substrate: measuring a resonance frequency of the microcantilever when a test mass is at a first position relative to the substrate; transporting the test mass to a second position relative to the substrate; measuring the resonance frequency of the microcantilever when the test mass is at the second position; and determining a mass of the particles accumulated on the microcantilever based on the measured resonance frequency of the microcantilever when the test mass is at the first position and when the test mass is at the second position.

15. The method of claim 14, wherein the mass of the particles accumulated on the microcantilever is determined using the following two equations: $f^a=\frac{1}{2}\sqrt{\frac{k}{\stackrel{\_}{m}+{}_{s}m+{}_t^a{m}_t}}$ $f^b=\frac{1}{2}\sqrt{\frac{k}{\stackrel{\_}{m}+{}_{s}m+{}_t^b{m}_t}}$ wherein, f.sup.a is the measured resonance frequency of the microcantilever when the test mass is at the first position; wherein, f.sup.b is the measured resonance frequency of the microcantilever when the test mass is at the second position; wherein .sub.t.sup.a is a geometric constant reflecting the distribution of the test mass on the microcantilever at the first position; wherein .sub.t.sup.b is a geometric constant reflecting the distribution of the test mass on the microcantilever at the second position; wherein m.sub.t is the test mass; wherein, k is a spring constant of the microcantilever; wherein, m is a mass of the microcantilever; wherein, .sub.s is a geometric constant reflecting a distribution of the accumulated particles on the microcantilever; and wherein, m is the mass of the particles accumulated on the microcantilever.

16. The method of claim 14, wherein the test mass is transported to the second position using any of: switchable flow of fluid; variable pressure; switchable magnets; or a micromechanical actuator.

17. The method of claim 14, wherein at least one of the first position and the second position is located on or within the microcantilever.

18. The method of claim 14, further comprising: exciting the microcantilever using an electrostatic drive electrode before measuring the resonance frequencies.

19. The method of claim 14, wherein the resonance frequencies of the microcantilever are measured using an optical sensor.

20. A system comprising: a microcantilever; a substrate located on or within the microcantilever, the substrate configured to support the accumulation of particles; a test mass, the test mass configured to be transported from a first position to a second position relative to the substrate after the particles have accumulated on the substrate; an electrostatic drive electrode configured to excite the microcantilever; and an optical sensor configured to measure a resonance frequency of the microcantilever when when the test mass is at the first position and when the test mass is at the second position.

21. The system of claim 20, at least one of the first position and the second position is located on or within the microcantilever.

22. The system of claim 20, further comprising any of: a test mass microchannel configured to transport the test mass in fluid between the first position and the second position using switchable flow of the fluid; a test mass chamber configured to transport the test mass between the first position and the second position using variable pressure or switchable magnets; or a micromechanical actuator configured to transport the test mass between the first position and the second position.

23. The system of claim 20, further comprising: a microchannel configured to transport fluid to and from the substrate.

24. The system of claim 20, wherein the system is configured to determine a mass of the particles accumulated on the substrate based on the resonance frequency of the microcantilever when the test mass is at the first position and when the test mass is at the second position.

25. The system of claim 20, wherein the substrate comprises a lattice, mesh, or set of linear notches within a chamber located on or within the microcantilever.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) The present embodiments are illustrated by way of example and are not intended to be limited by the figures of the accompanying drawings. In the drawings:

(2) FIG. 1A shows a schematic representation of a microcantilever with a microchannel according to the prior art;

(3) FIG. 1B shows an isometric view of a microcantilever according to the prior art;

(4) FIG. 1C shows a first technique for measuring small masses using a microcantilever with a microchannel according to the prior art;

(5) FIG. 1D shows a second technique for measuring small masses using a microcantilever with a microchannel according to the prior art;

(6) FIG. 2 shows a schematic representation of an example microcantilever incorporating a substrate according to some embodiments of the present disclosure;

(7) FIG. 3 shows a first example technique for measuring small masses using a microcantilever and a microchannel based test mass, according to some embodiments of the present disclosure; and

(8) FIG. 4 shows a second example technique for measuring small masses using a microcantilever and a sliding test mass, according to some embodiments of the present disclosure; and

(9) FIG. 5 shows a third example technique for measuring small masses using a microcantilever and a linearly actuated test mass according to some embodiments of the present disclosure.

DETAILED DESCRIPTION

(10) From the foregoing, it will be appreciated that specific embodiments of the invention have been described herein for purposes of illustration, but that various modifications may be made without deviating from the scope of the invention. Accordingly, the invention is not limited except as by the appended claims.

(11) The present teachings provide for methods and mechanisms for measuring small masses attached to a substrate within a microcantilever. Specifically, the teachings allows for measurement of particles accumulated, grown, or reproduced at a substrate that cannot be flowed through a microchannel within a microcantilever. While the present disclosure describes various embodiments in the context of grown or reproduced small biological particles, it shall be understood that this is done for illustrative purposes, and that the present teachings may be applied to the measurement of changes in mass of any types of small particles where those changes occur in situ, for example in the area of nanotechnology.

(12) FIG. 2 shows a schematic representation of a microcantilever 210 incorporating a substrate 270 according to some embodiments of the present disclosure. Similar to microcantilever 110 described in FIGS. 1A-1D, microcantilever 210 may comprise a thin (e.g., with thickness O[m]) body having a free end 240 and a rigid end connected to a rigid base 230 and extending outward into a cavity 290. Formed at least partially on or within microcantilever 210, a microchannel 220 (e.g. with width and depth O[m]) may be configured to transport fluid (e.g. water) along the body of the microcantilever from the rigid based 230 to the free end 240 and back to the rigid base 230. In some embodiments, the microchannel 220 may be configured to transport sample particles and/or food to substrate 270 in order to seed and/or support growth and reproduction of particles accumulating at the substrate 270. According to some embodiments, the microchannel 220 may be configured to transport waste produced by the particles away from the substrate 270.

(13) According to some embodiments, microcantilever 210 with microchannel 220 may be fabricated by creating buried channels in silicon-on-insulator wafers and then dry etching the wafer to form the microchannel within the microcantilever. A person having skill in the art will recognize that other materials and fabrication processes may be suitable to use while remaining within the scope of the present teachings. As a non-limiting example for illustrative purposes, a microcantilever 210 may be approximately 200 m long (i.e., from rigid base 230 to free end 240) 50 m wide and 10 m thick with a microchannel 220 of approximately 10 m wide and 3 m deep, according to some embodiments. A person having skill in the art will recognize that different dimensions may be suitable depending on a number of factors, including the size of the sample particles to be measured.

(14) Using a means for exciting microcantilever 210, for example via an electrostatic drive electrode (not shown) driven by a gain controlled oscillator circuit (not shown), microcantilever 210, may be caused to vibrate within cavity 290. The resulting vibrations of microcantilever 210 may then be measured and a resonance frequency determined using a light source and optical sensor, for example a laser pointed substantially at the free end 240 of the microcantilever 210, wherein the reflected light from the laser is picked up by a position sensitive photo detector.

(15) The cavity 290, within which the microcantilever 210 is located, may be filed with gas (e.g. air) or fluid (e.g. water), however, due to the damping effect of the surrounding material within cavity 290, a microcantilever resonator within a gas (e.g. air) filed cavity will have a higher quality factor (i.e. exhibit less energy loss due to damping) than fluid (e.g. water) filed cavity (assuming equal dimensions of the microcantilever in each instance). A higher quality factor may result in reduced phase noise leading to more accurate determinations of the resonance frequency due to the higher stability of the measured frequency. According to some embodiments, in order to maximize the quality factor of a given microcantilever resonator, microcantilever 210 may be surrounded by a vacuum enclosed by cavity 290.

(16) The substrate 270 may provide mechanical support to the sample particles (not shown) that are to be measured. In other words, substrate 270 may be configured to support the accumulation, growth and/or reproduction of the particles to be measured. Generally, the substrate 270 may be formed within or upon the microcantilever 210 using micromechanical etching and deposition techniques (e.g. bulk micromachining and surface micromachining) well known in the art. For example, according to some embodiments, the substrate 270 may comprise a lattice, mesh, or set of linear notches within a chamber located along the etched microchannel 220. As described earlier, according to some embodiments, a fluid (e.g. water) may flow through the microchannel 220, conveying food to and removing waste from the biological particles (e.g. bacteria) growing or reproducing on the substrate 270. An example substrate 270 is schematically shown in FIG. 2 located substantially near the free end 240 of microcantilever 210, however it shall be understood that this is a non-limiting example. Substrate 270 may include one or more individual substrates of varying geometry located anywhere along (on or within) the body of microcantilever 210, wherein the configuration is accounted for in the geometric parameter , as referenced below in Equation 4.

(17) To measure changes in the mass of the biological particles on the substrate 270, resonance measurements can be made at two different points in time. However, as noted above, simply determining two resonance frequencies according to Equation 1 at widely separated times, namely

(18) $\begin{array}{cc}{f}_1=\frac{1}{2}\sqrt{\frac{k_1}{\stackrel{\_}{m}+m_1}}& \mathrm{Equation}\left(2\right)\\ f_2=\frac{1}{2}\sqrt{\frac{k_2}{\stackrel{\_}{m}+m_2}}& \mathrm{Equation}\left(3\right)\end{array}$
in some cases may not suffice because it is possible for the resonance behavior of the microcantilever 210 to drift over time. That is, m.sub.1 may be determined using Equation 2 as described for Equation 1, but m.sub.2 may in some cases not be reliably calculated because it is possible that k.sub.2k.sub.1.

(19) To address this difficulty, according to some embodiments, a test mass may be introduced that may be actuated between two positions a and b. The mass of the test mass is known with a high degree of accuracy. According to some embodiments, position b may be onboard the microcantilever, so that the test mass moves with the microcantilever as it flexes, and is known with a high degree of accuracy. Position a may either be onboard or offboard the microcantilever; if onboard the microcantilever, position a may also be known with a high degree of accuracy.

(20) A resonance measurement may be made at a first time, generally as described for Equation 1, to determine the mass of the biological particles at the first time. More specifically, m.sub.1 is determined from the following equation:

(21) $\begin{array}{cc}{f}_1=\frac{1}{2}\sqrt{\frac{k_1}{\stackrel{\_}{m}+{}_s{m}_1}}& \mathrm{Equation}\left(4\right)\end{array}$

(22) Here, m is the effective mass of the microcantilever, the substrate, and any fluid therein; and .sub.s is a geometric parameter reflecting the distribution of the biological particles along the length of the microcantilever (i.e. the location and lengthwise extent of the substrate).

(23) A pair of resonance measurements may be made at second timeone with the test mass at position a and one with test mass at position b. As indicated by the following equations:

(24) $\begin{array}{cc}{f}_2^a=\frac{1}{2}\sqrt{\frac{k_2}{\stackrel{\_}{m}+{}_s{m}_2+{}_t^a{m}_t}}& \mathrm{Equation}\left(5\right)\\ f_2^b=\frac{1}{2}\sqrt{\frac{k_2}{\stackrel{\_}{m}+{}_s{m}_2+{}_t^b{m}_t}}& \mathrm{Equation}\left(6\right)\end{array}$

(25) As noted above, the mass of the test mass and the locations of the two positions a (if onboard the microcantilever) and b are known with a high degree of accuracy. Thus m.sub.t, .sub.t.sup.a, and .sub.t.sup.b are known and Equations 5 and 6 can be solved for the two unknowns k.sub.2 and m.sub.2. Comparing m.sub.2 and m.sub.1 allows the change in the mass of the biological particles to be determined.

(26) It should be noted that the test mass can also be used to perform an initial calibration of the microcantilever with an empty substrate. At a time before any biological particles have grown on the substrate, a pair of resonance measurements is made.

(27) $\begin{array}{cc}{f}_0^a=\frac{1}{2}\sqrt{\frac{k_0}{\stackrel{\_}{m}+{}_s{m}_0+{}_t^a{m}_t}}& \mathrm{Equation}\left(7\right)\\ f_0^b=\frac{1}{2}\sqrt{\frac{k_0}{\stackrel{\_}{m}+{}_s{m}_0+{}_t^b{m}_t}}& \mathrm{Equation}\left(8\right)\end{array}$

(28) Because m.sub.00, Equations 7 and 8 can be solved for k.sub.0 and, more significantly, m. The test mass can thus aid in characterizing the effective mass of the microcantilever, substrate, and any fluid therein.

(29) FIG. 3 shows a first technique 300 for measuring small masses using a microcantilever 310 with a microchannel 320, substrate 370, and a microchannel-based test mass 350, according to some embodiments of the present disclosure. According to some embodiments, the test mass 350 may be actuated fluidically in a manner similar to the movement of the sample particles along the microchannel 220 in FIG. 2. As shown in FIG. 3, a separate test mass microchannel 380 interior to the feed and waste microchannel 320 may allow the test mass 350 to be conveyed by a precise switchable flow between predetermined positions 350a and 350b. As previously described position 350b may be on the microcantilever 310 (e.g. substantially near fee end 340) and position 350a may either be on the microcantilever 310 or offboard the microcantilever 310 and within the rigid base 330. Note that in FIG. 3, position 350a is shown offboard the microcantilever 310, and thus need not be known with great precision. Despite slight possible variations in position 350a, in such a configuration, .sub.t.sup.u=0.

(30) FIG. 4 shows a second technique 400 for measuring small masses using a microcantilever 410 with a microchannel 420, a substrate 470, and a sliding test mass 450, according to some embodiments of the present disclosure. In some embodiments, pressure and suction may be used to actuate the test mass 450 to and from positions 450a and 450b within a test mass chamber 480 that extends outward from the rigid base 430 onto the microcantilever 410 towards the free end 440. According to some embodiments, a lossy (e.g. thin) return line 482 may vent to atmosphere or a fluid reservoir (i.e. outside the vacuum cavity 490) and may allow gas (e.g. air) or fluid (e.g. water) to flow into the region of the test mass chamber 480 between the test mass 450 and the distal end of the test mass chamber 480. Alternatively, according to some embodiments, the test mass chamber 480 may be evacuated and the test mass 450 magnetically actuated to either end of the chamber 480. Note that in FIG. 4, as in FIG. 3, position 450a is shown as being offboard the microcantilever 410, and therefore .sub.t.sup.a0.

(31) FIG. 5 shows a third technique 500 for measuring small masses using a microcantilever 510 with a microchannel 520, substrate 570, and a linearly actuated test mass 550, according to some embodiments of the present disclosure. In such embodiments, an actuator 582 may slide an oblong test mass 550 from position 550a outward to position 550b along a path 580 that extends outward from rigid base 530 onto the microcantilever 510 towards the free end 540. According to some embodiments, actuator 582 may be a micromechanical actuator such as an electrostatic linear stepper motor fabricated using micro-machining techniques well known in the art. (See e.g., Tas, N. R.; Sonnenberg, A. H.; Sander, A. F M; Elwenspoek, M. C., Surface Micromachined Linear Electrostatic Stepper Motor, Micro Electro Mechanical Systems, 1997. MEMS '97, Proceedings, IEEE, Tenth Annual International Workshop, pp. 215-220, 26-30 Jan. 1997.) The test mass 550, coupled to the shuttle of the actuator 582 (e.g., stepper motor), may slide along the path 582. For example, path 582 may be a track, in a slot, or under a cover that ensures that the test mass 550 moves with the microcantilever 510 as it flexes. Note that in FIG. 5, as in FIGS. 3 and 4, the test mass 550 is entirely offboard the microcantilever 510 when in position 550a, therefore .sub.t.sup.a=0. In a variation of the system illustrated in FIG. 5, an actuator 582 may be a rotary motor that moves the test mass 550 between positions 550a and 550b in an oscillatory fashion, wherein the pair of measurements described by Equations 5 and 6 are obtained in a periodic fashion.

(32) Disclaimers

(33) The above detailed description of embodiments of the disclosure is not intended to be exhaustive or to limit the teachings to the precise form disclosed above. While specific embodiments of, and examples for, the disclosure are described above for illustrative purposes, various equivalent modifications are possible within the scope of the disclosure, as those skilled in the relevant art will recognize. The scope of the invention is limited only by the claims.

(34) Reference in this specification to one embodiment, an embodiment, or some embodiments means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the disclosure. The appearances of the phrase in one embodiment in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Moreover, various features are described which may be exhibited by some embodiments and not by others. Similarly, various requirements are described which may be requirements for some embodiments but not other embodiments.

(35) The terms used in this specification generally have their ordinary meanings in the art, within the context of the disclosure, and in the specific context where each term is used. Certain terms that are used to describe the disclosure are discussed above in more detail, or elsewhere in the specification, to provide additional guidance to the practitioner regarding the description of the disclosure. For convenience, certain terms may be highlighted, for example using italics and/or quotation marks. The use of highlighting has no influence on the scope and meaning of a term; the scope and meaning of a term is the same, in the same context, whether or not it is highlighted. It will be appreciated that same thing can be said in more than one way.

(36) Consequently, alternative language and synonyms may be used for any one or more of the terms discussed herein, nor is any special significance to be placed upon whether or not a term is elaborated or discussed herein. Synonyms for certain terms are provided. A recital of one or more synonyms does not exclude the use of other synonyms. The use of examples anywhere in this specification including examples of any terms discussed herein is illustrative only, and is not intended to further limit the scope and meaning of the disclosure or of any exemplified term. Likewise, the disclosure is not limited to various embodiments given in this specification.

(37) While some aspects of the disclosure may be presented herein in some claim forms, the inventors contemplate the various aspects of the disclosure in any number of claim forms. For example, while only one aspect of the disclosure is recited as a means-plus-function claim under 35 U.S.C. 112(f), other aspects can likewise be embodied as a means-plus-function claim, or in other forms. (Any claims intended to be treated under 35 U.S.C. 112(f) will begin with the words means for.) Accordingly, the applicant reserves the right to add additional claims after filing the application to pursue such additional claim forms for other aspects of the disclosure.