Method of manufacturing display device
10784466 ยท 2020-09-22
Assignee
Inventors
- Tohru Okabe (Sakai, JP)
- Ryosuke Gunji (Sakai, JP)
- Hiroki Taniyama (Sakai, JP)
- Shinsuke Saida (Sakai, JP)
- Shinji Ichikawa (Sakai, JP)
- Akira Inoue (Sakai, JP)
- Hiroharu Jinmura (Sakai, JP)
- Yoshihiro Nakada (Sakai, JP)
Cpc classification
H01L21/02
ELECTRICITY
H10K71/00
ELECTRICITY
Y02P70/50
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
G09F9/00
PHYSICS
H01L21/67
ELECTRICITY
H05B33/10
ELECTRICITY
G09F9/30
PHYSICS
H01L27/12
ELECTRICITY
International classification
Abstract
A portion of a resin film is precisely cut out when the resin film is peeled off. A rear surface of a glass substrate on which a protrusion is formed is irradiated with a laser beam to peel a resin film from the glass substrate. Then, the protrusion and the resin film formed on the protrusion are left on the glass substrate.
Claims
1. A method of manufacturing a display device comprising: forming a protrusion composed of a first material in a portion on a glass substrate; forming a resin film composed of a second material on the glass substrate and the protrusion, the second material being different from the first material; forming a TFT layer on the resin film; forming a display element layer on the TFT layer; forming a sealing film on the display element layer; and peeling the resin film from the glass substrate by irradiating a rear surface of the glass substrate with a laser beam, wherein the peeling includes leaving the protrusion and the resin film formed on the protrusion on the glass substrate, the TFT layer includes an inorganic film, the forming of the TFT layer includes forming the inorganic film to include an opening at a portion corresponding to the protrusion, and the protrusion and the inorganic film do not overlap.
2. The manufacturing method according to claim 1, wherein the forming of the sealing film includes: forming a first inorganic film, forming an interlayer resin film in an ink-jet manner, and forming a second inorganic film, the forming of the TFT layer includes forming a bank configured to stem the interlayer resin film, the display device includes a display region and a frame region that surrounds the display region, an end portion of the display region is opposite the bank, and the forming of the protrusion includes forming the protrusion between two different portions of the bank on the glass substrate.
3. The manufacturing method according to claim 2, wherein the peeling includes leaving the first inorganic film and the second inorganic film that overlap the protrusion on the glass substrate.
4. The manufacturing method according to claim 1, wherein the display device includes a display region and a frame region that surrounds the display region, and the forming of the protrusion includes forming the protrusion inside the display region.
5. The manufacturing method according to claim 4, wherein the forming of the protrusion includes forming the protrusion in a substantially circular shape.
6. The manufacturing method according to claim 1, wherein the display device includes a display region and a frame region that surrounds the display region, and the forming of the protrusion includes forming the protrusion to have a shape extending from a boundary between the display region and the frame region toward the display region.
7. The manufacturing method according to claim 1, wherein the forming of the resin film includes forming the resin film such that a thickness of the resin film overlapping the protrusion is 0.5 m or smaller.
8. The manufacturing method according to claim 1, wherein the protrusion includes a tilted portion that is tilted at an angle of 30 degrees or smaller from a top face of the protrusion toward a bottom face of the protrusion.
9. The manufacturing method according to claim 1, wherein the first material is a metal.
10. The manufacturing method according to claim 1, wherein the second material is polyimide.
Description
BRIEF DESCRIPTION OF DRAWINGS
(1)
(2)
(3)
(4)
(5)
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(8)
DESCRIPTION OF EMBODIMENTS
(9) Planar Configuration of Display Device 1
(10)
(11) Cross-Sectional Configuration of Display Device 1
(12)
(13) The material of the resin film 11 is a resin such as polyimide, epoxy, and polyamide. The resin film 11 is composed of a resin and is therefore flexible.
(14) The TFT layer 12 is composed of a semiconductor layer 21 and an inorganic film 22. The semiconductor layer 21 is composed of a TFT for driving the display element layer 14. The inorganic film 22 electrically separates the semiconductor layer 21 from the display element layer 14.
(15) When a liquid material of a resin film 52 that constitutes the sealing film 15 is applied to the entire surface of the display element layer 14, the bank 13 restricts wet-spreading of the liquid material beyond the TFT layer 12. The bank 13 is formed around the display element layer 14 on the surface of the TFT layer 12 before applying the liquid material.
(16) The display element layer 14 is a layer in which a plurality of light-emitting elements, which self-emit light when a voltage is applied thereto, are formed in a predetermined plane pattern (such as a matrix). The light-emitting element is an organic EL element, for example. Alternatively, the light-emitting element may be an inorganic light-emitting element or a quantum dot light-emitting element.
(17) The sealing film 15 is composed of an inorganic film 51 (first inorganic film), the resin film 52 (interlayer resin film) and an inorganic film 53 (second inorganic film). The sealing film 15 seals the TFT layer 12, the bank 13 and the display element layer 14. The sealing film 15 seals the display element layer 14a by thin-film encapsulation (TFE) and thus prevents deterioration of the light-emitting element due to moisture and oxygen permeated from the outside.
(18) Method of Manufacturing Display Device 1
(19)
(20) The material (first material) of the protrusion 62 may be any material different from the material of (second material) the resin film 11. For example, when the material of the resin film 11 is polyimide, the material of the protrusion 62 is any resin different from polyimide. Preferably, the material of the protrusion 62 is a metal regardless of the material of the resin film 11.
(21) Formation of Resin Film 11
(22) After the protrusion 62 is formed, the resin film 11 is formed on the surface of the glass substrate 61 as illustrated in
(23) After the resin film 11 is formed, the TFT layer 12, the bank 13, the display element layer 14, and the sealing film 15 are sequentially formed on the resin film 11 as illustrated in
(24) The step of forming the sealing film 15 includes a step of forming the inorganic film 51, a step of forming the resin film 52 in an ink-jet manner, and a step of forming the inorganic film 53. The forming of the sealing film 15 includes, first, forming the inorganic film 51 on the bank 13 and the display element layer 14, then forming the resin film 52 on the inorganic film 51, and finally forming the inorganic film 53 on the resin film 52. The inorganic film 51 and the inorganic film 53 are formed also on the resin film 11 formed on the protrusion 62.
(25) Peeling of Resin Film 11
(26) After the sealing film 15 is formed, the rear surface of the glass substrate 61 is irradiated with a laser beam 63 as illustrated in
(27) By the irradiation with the laser beam 63, the resin film 11 can be peeled from the glass substrate 61 as illustrated in
(28) The resin film 11 formed on the protrusion 62 is sufficiently thin, and therefore, when the resin film 11 is peeled from the glass substrate 61, the portion left on the protrusion 62 is easily cut out from the main body of the resin film 11 without being stretched. As a result, when peeling the resin film 11 from the glass substrate 61, a portion (corresponding to the protrusion 62) of the resin film 11 can be precisely left on the glass substrate 61. Thus, the display device 1 in which the blank portion 4 is formed at a position corresponding to the protrusion 62 is manufactured as illustrated in
(29) In the formation of the resin film 11, it is preferable to form the resin film 11 such that the thickness of the resin film 11 overlapping the protrusion 62 is 0.5 m or smaller. With such a configuration, the resin film 11 can be easily peeled from the glass substrate 61.
(30) As described above, the method of manufacturing the display device 1 does not include a step of irradiating the display device 1 with a laser beam having a high temperature to cut out a portion of the resin film 11 by the heat of the laser beam. Therefore, burning of the periphery of the blank portion 4, cracking in the display device 1, or damage to the display element layer 14 is not caused. Thus, the display device 1 with higher quality can be manufactured.
(31) Formation Position of Protrusion 62
(32)
(33) In
(34) In
(35)
(36) Another Method of Manufacturing Display Device 1
(37)
(38) After the resin film 11 is formed, the TFT layer 12, the bank 13, the display element layer 14, and the sealing film 15 are sequentially formed on the resin film 11 as illustrated in
(39) After the sealing film 15 is formed, the rear surface of the glass substrate 61 is irradiated with the laser beam 63 as illustrated in
(40) Tilted Protrusion 62
(41)
(42) Supplement
(43) A method of manufacturing a display device according to a first aspect of the disclosure includes: forming a protrusion composed of a first material in a portion on a glass substrate; forming a resin film composed of a second material on the glass substrate and the protrusion, the second material being different from the first material; forming a TFT layer on the resin film; forming a display element layer on the TFT layer; forming a sealing film on the display element layer; and peeling the resin film from the glass substrate by irradiating a rear surface of the glass substrate with a laser beam. The peeling including leaving the protrusion and the resin film formed on the protrusion on the glass substrate.
(44) With the configuration, the resin film overlapping the protrusion can be easily cut out from the main body of the resin film.
(45) In a manufacturing method according to a second aspect in the manufacturing method according to the first aspect, the TFT layer includes an inorganic film; the forming of the TFT layer includes forming the inorganic film including an opening at a portion corresponding to an end portion of the protrusion; and the forming of the protrusion includes avoiding the end portion of the protrusion from overlapping the inorganic film.
(46) With the configuration, when the resin film is peeled off, cracking in the inorganic film and propagation of such cracking to the display region can be prevented.
(47) In a manufacturing method according to a third aspect in the manufacturing method according to the first aspect, the forming of the sealing film includes forming a first inorganic film, forming an interlayer resin film in an ink-jet manner, and forming a second inorganic film; the forming of the TFT layer includes forming a bank configured to stem the interlayer resin film; the display device includes a display region and a frame region that surrounds the display region; an end portion of the display region is opposite the bank; and the forming of the protrusion includes forming the protrusion between each of the different bank on the glass substrate.
(48) With the configuration, the display element layer does not overlap the protrusion, and therefore, when the resin film is peeled from the glass substrate, damage to the display element layer can be prevented.
(49) In a manufacturing method according to a fourth aspect in the manufacturing method according to the third aspect, the peeling includes leaving the first inorganic film and the second inorganic film that overlap the protrusion on the glass substrate.
(50) With the configuration, the sealing film overlapping the protrusion can be cut out from the main body of the sealing film.
(51) In a manufacturing method according to a fifth aspect in the manufacturing method according to any one of the first to fourth aspects, the display device includes a display region and a frame region that overlaps the display region; and the forming of the protrusion includes forming the protrusion inside the display region.
(52) With the configuration, a display device including a blank portion formed inside the display region can be manufactured.
(53) In a manufacturing method according to a sixth aspect in the manufacturing method according to the fifth aspect, the forming of the protrusion includes forming the protrusion in a substantially circular shape.
(54) With the configuration, a display device including a blank portion having a substantially circular shape can be manufactured.
(55) In a manufacturing method according to a seventh aspect in the manufacturing method according to any one of the first to fourth aspects, the display device includes a display region and a frame region that overlaps the display region; and in the forming of the protrusion, the protrusion cut out from the frame region to the display region is formed.
(56) With the configuration, a display device including a blank portion cut out from the frame region into the display region can be manufactured.
(57) In a manufacturing method according to an eighth aspect in the manufacturing method according to any one of the first to seventh aspects, the forming of the resin film includes forming the resin film such that a thickness of the resin film overlapping the protrusion is 0.5 m or smaller.
(58) With the configuration, the resin film can be easily peeled from the glass substrate.
(59) In a manufacturing method according to a ninth aspect in the manufacturing method according to any one of the first to eighth aspects, the protrusion includes a tilted portion that is tilted at an angle of 30 degrees or smaller from a top face of the protrusion toward a bottom face of the protrusion.
(60) With the configuration, when the resin film is peeled from the glass substrate, damages such as cracking in the inorganic film disposed on the resin film are less caused, and thus the yield of the display device can be increased.
(61) In a manufacturing method according to a tenth aspect in the manufacturing method according to any one of the first to ninth aspects, the first material is a metal.
(62) With the configuration, the resin film overlapping the protrusion can be easily cut out from the main body of the resin substrate.
(63) In a manufacturing method according to an eleventh aspect in the manufacturing method according to any one of the first to tenth aspects, the second material is polyimide.
(64) A display device according to a twelfth aspect manufactured by the manufacturing method according to any one of the first to eleventh aspects.
(65) The disclosure is not limited to the embodiments, and various modifications may be made within the scope of the claims. Embodiments obtained by appropriately combining technical approaches stated in each of the different embodiments also fall within the scope of the technology of the disclosure. Novel technical features may be formed by combining the technical approaches stated in each of the embodiments.
REFERENCE SIGNS LIST
(66) 1 Display device 11 Resin film 12 TFT layer 13 Bank 14 Display element layer 15 Sealing film 21 Semiconductor layer 22 Inorganic film 51 Inorganic film 52 Interlayer resin film 53 Inorganic film 61 Glass substrate 62 Protrusion 63 Laser beam