Plating interconnect for silicon chip
10755940 ยท 2020-08-25
Assignee
Inventors
Cpc classification
H01L2924/00012
ELECTRICITY
H01L24/82
ELECTRICITY
H01L2224/92244
ELECTRICITY
H01L21/4846
ELECTRICITY
H01L2924/00012
ELECTRICITY
H01L24/25
ELECTRICITY
H01L21/76894
ELECTRICITY
International classification
H01L21/768
ELECTRICITY
H01L21/3205
ELECTRICITY
Abstract
A system, method, and silicon chip package for providing connections between a die of a silicon chip package and external leads of the silicon chip package is disclosed. The connections are formed using a pre-mold etched with a trace pattern. The trace pattern provides rigid traces that connect the die with the external leads.
Claims
1. A method for forming interconnections between a silicon die and external leads of a silicon chip package comprising: forming a pre-mold onto a front assembly of the silicon chip package, wherein the silicon die is disposed on the front assembly; etching a trace pattern on the pre-mold, wherein the trace pattern is representative of the interconnections; plating rigid traces onto the trace pattern; and forming a mold around the pre-mold and the plated rigid traces.
2. The method of claim 1, wherein the pre-mold is formed using a plastic material.
3. The method of claim 2, wherein the pre-mold is formed using Ajinomoto build-up film.
4. The method of claim 1, wherein the etching is performed using ablation process.
5. The method of claim 1, wherein the etching is performed using laser ablation.
6. The method of claim 1, wherein the etching is performed until lead fingers are exposed, the lead fingers connecting the silicon die to the external leads.
7. The method of claim 1, wherein the plating comprises: exposing the trace pattern, soaking the front assembly in a plating solution, and depositing plating material onto the trace pattern.
8. The method of claim 7, wherein the plating solution comprises electro conductive ions that include copper, silver and gold.
9. The method of claim 7, further comprising applying a catalyst before the soaking in a plating solution.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION
(9) The following description provides many different embodiments, or examples, for implementing different features of the subject matter. These descriptions are merely for illustrative purposes and do not limit the scope of the invention.
(10) Referring to
(11) A pre-mold 108 is caste/formed as part of silicon chip package 100. The pre-mold 108 provides for the formation of a rigid trace interconnects, as represented by rigid trace 110. The rigid trace 110 is a made up of an electrically conductive material, such as copper, silver, gold, etc. The rigid trace 110 connects the die or silicon chip 102 to the lead finger 106. A mold 112 is formed around the silicon chip package 100.
(12) Referring to
(13) Referring to
(14) At block 204, a pre-mold is formed over the front assembly. The pre-mold can be made of a non-conductive plastic material, such as Ajinomoto build-up films (ABF) and the like. Ajinomoto build-up films (ABF) are typically used due to their features of good reliability, excellent process-ability and well-balanced properties. ABF can support tightly-spaced interconnect designs. ABF supports dense interconnect geometries because it is receptive of plated seed and conductive layers, for example in the micron range, thus allowing smaller geometries to be formed. The pre-mold is formed after die or silicon chip attachment (cure). In certain embodiments, the pre-mold material can cover from a die pad to a certain thickness just above the die and lead fingers of the carrier/carrier frame.
(15) At block 206, an ablation, such as laser ablation is performed on the pre-mold material. In particular, a trace pattern is engraved using laser ablation where the pre-mold material will be etched out using laser beam. The trace pattern represents connections from the die or silicon chip to the lead fingers. Etching will be done until the bond pad and lead finger are exposed. In certain instances, the same machine may be used that etches out mold compound on package on package (POP) devices.
(16) At block 208, plating is performed. In particular, a strip or the pre-mold trace pattern is plated. Strip covers can be placed over the strip using a frame and exposing the area (trace pattern) to be plated. The trace pattern is representative of the interconnections and where rigid traces are to be formed. A catalyst may be sprayed on the trace pattern, where the trace pattern is the only area to be plated. This process of catalyst spraying can be performed using exemplary sputtering. The strip can then be soaked in a solution (plating solution). This can be an electroless or chemical plating process. Plating material is deposited on the pattern to create interconnects. Interconnects, which are rigid traces, are exposed by removing strip cover(s). The strips can then be baked/heated to remove any moisture. At block 210, a mold is formed around the silicon chip package, to provide a finished product.
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(22) The foregoing outlines feature several embodiments so that those of ordinary skill in the art may better understand various aspects of the present disclosure. Those of ordinary skill in the art should appreciate that they may readily use the present disclosure as a basis for designing or modifying other processes and structures for carrying out the same purposes and/or achieving the same advantages of various embodiments introduced herein. Those of ordinary skill in the art should also realize that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they may make various changes, substitutions, and alterations herein without departing from the spirit and scope of the present disclosure.
(23) Although the subject matter has been described in language specific to structural features or methodological acts, it is to be understood that the subject matter of the appended claims is not necessarily limited to the specific features or acts described above. Rather, the specific features and acts described above are disclosed as example forms of implementing at least some of the claims. Various operations of embodiments are provided herein. The order in which some or all of the operations are described should not be construed to imply that these operations are necessarily order dependent. Alternative ordering will be appreciated having the benefit of this description. Further, it will be understood that not all operations are necessarily present in each embodiment provided herein. Also, it will be understood that not all operations are necessary in some embodiments.
(24) Moreover, exemplary is used herein to mean serving as an example, instance, illustration, etc., and not necessarily as advantageous. Also, although the disclosure has been shown and described with respect to one or more implementations, equivalent alterations and modifications will occur to others of ordinary skill in the art based upon a reading and understanding of this specification and the annexed drawings. The disclosure comprises all such modifications and alterations and is limited only by the scope of the following claims. In particular regard to the various functions performed by the above described components (e.g., elements, resources, etc.), the terms used to describe such components are intended to correspond, unless otherwise indicated, to any component which performs the specified function of the described component (e.g., that is functionally equivalent), even though not structurally equivalent to the disclosed structure. In addition, while a particular feature of the disclosure may have been disclosed with respect to only one of several implementations, such feature may be combined with one or more other features of the other implementations as may be desired and advantageous for any given or particular application.