MODULE FOR CHEMICALLY PROCESSING A SUBSTRATE

Abstract

The invention relates to a module for chemically processing a substrate, a method for chemically processing a substrate and a use of a module for chemically processing a substrate and in particular a large substrate. The module for chemically processing a substrate comprises: an immersion chamber, a spray unit, and a motion unit (14). The immersion chamber is configured to receive a first liquid and the substrate, so that the substrate is immersed in the liquid. The spray unit comprises a plurality of spray nozzles, which are configured to spray a second liquid within the immersion chamber. The motion unit is configured to provide a relative motion between the substrate and the spray unit.

Claims

1. A module for chemically processing a substrate, comprising: an immersion chamber, a spray unit, and a motion unit, wherein the immersion chamber is configured to receive a first liquid and the substrate, so that the substrate is immersed in the first liquid, wherein the spray unit comprises a plurality of spray nozzles, which are configured to spray a second liquid within the immersion chamber, wherein the motion unit is configured to provide a relative motion between the substrate and the spray unit, and wherein the spry unit extends along the substrate to be processed such that the second liquid is substantially sprayed on the substrate in a thickness direction of the substrate, wherein the spray unit comprises several rows of spray nozzles arranged in the immersion chamber along a height direction of the immersion chamber.

2. The module according to claim 1, further comprising an ultrasonic unit configured to provide ultrasound to agitate the first liquid in the immersion chamber.

3. The module according to claim 2, wherein the ultrasound unit is arranged at an outer surface of the immersion chamber.

4. The module according to claim 2, wherein the ultrasound unit and the spray unit are at least partially arranged at a removable plate element configured to be moved relative to the immersion chamber.

5. The module according to claim 1, further comprising an exhaust unit comprising an upper exhaust arranged above the first liquid and a bottom exhaust arranged at the bottom of the immersion chamber.

6. The module according to claim 1, wherein the motion unit is configured to move the substrate relative to the immersion chamber in a first direction in and out of the immersion chamber.

7. The module according to claim 6, wherein the motion unit is configured to move the substrate relative to the immersion chamber in another direction perpendicular to the first direction.

8. The module according to claim 1, wherein the spray nozzles are at least partially arranged in a wall of the immersion chamber.

9. The module according to claim 1, wherein the spray nozzles are at least partially arranged in spray bars.

10. The module according to claim 9, wherein the motion unit is configured to move at least some of the spray bars relative to the substrate.

11. The module according to claim 2, wherein the ultrasonic unit comprises a plurality of ultrasound transducers, which are arranged between adjacent spray bars.

12. The module according to claim 1, wherein the spray unit is configured to spray the second liquid in a spray direction, which is non-perpendicular tilted relative to a wall of the immersion chamber and directed towards a bottom of the immersion chamber.

13. The module according to claim 1, wherein in a row of adjacent first, second and third spray nozzles, the first and third spray nozzles are tilted similar and the second spray nozzle is arranged differently to the first and third spray nozzles.

14. The module according to claim 1, further comprising a chamber cover unit comprising several cover elements configured to close an opening in the immersion chamber in a closed position and to surround a substrate to be transferred through the opening in close contact in a transfer position.

15. The module according to claim 14, wherein a gap between the cover elements and a rim of the immersion chamber is controlled by a flow of sealing gas.

16. The module according to claim 14, wherein the chamber cover unit is further configured to essentially entirely open the opening in an open position.

17. The module according to claim 14, wherein the chamber cover unit further comprises a processing element configured to control a movement of the chamber cover elements depending on motion data received from the motion unit controlling the relative motion between the substrate and the spray unit.

18. The module according to claim 1, further comprising a valve unit with several valves, wherein each valve is connected to a separate tank or drain and wherein the valves are configured for liquid drain and gas exhaust.

19. The module according to claim 1, further comprising a drain, rinse and dry unit configured to blow and/or to suck liquid and/or gas in and/or out of the immersion chamber and/or the spray unit.

20. The module according to claim 19, wherein the drain, rinse and dry unit is configured for waterfall-rinsing, waterfall-chemical processing and/or waterfall quenching.

21. The module according to claim 19, wherein the drain, rinse and dry unit comprises a temperature controlling element configured to heat or cool the liquid and/or gas to be blown or sucked through the immersion chamber and/or the spray unit.

22. The module according to claim 1, further comprising a lifting unit configured to lift at least a portion of the immersion chamber to drain liquid out of the spray unit.

23. A method for chemically processing a substrate, comprising the following steps, not necessarily in this order: inserting a first liquid and a substrate into an immersion chamber, so that the substrate is immersed in the first liquid, removing the first liquid from the immersion chamber, spraying a second liquid within the immersion chamber on the substrate in a thickness direction of the substrate by means of a spray unit comprising several rows of spray nozzles, arranged in the immersion chamber along a height direction of the immersion chamber, and relatively moving the substrate and the spray unit by means of a motion unit.

24. The method according to claim 23, wherein the spraying of the second liquid is done while the substrate is at least partially immersed in the first liquid and before removing the first liquid from the immersion chamber.

25. The method according to claim 23, further comprising the step of removing the substrate out of the immersion chamber while rinsing the immersion chamber for a subsequent processing of the same substrate.

26. (canceled)

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0064] Exemplary embodiments of the invention will be described in the following with reference to the accompanying drawing:

[0065] FIGS. 1a,b show schematically and exemplarily embodiments of a module for chemically processing a substrate according to the invention.

[0066] FIGS. 2a,b,c show schematically and exemplarily cross sections through a module for chemically processing a substrate and a side view of a module for chemically processing a substrate according to the invention.

[0067] FIG. 3 shows schematically and exemplarily a detail of FIG. 2a with a focus on the spray unit.

[0068] FIG. 4 shows schematically and exemplarily a detailed view with a focus on the valve unit.

[0069] FIG. 5 shows schematically and exemplarily a detailed view with a focus on the chamber cover unit.

DETAILED DESCRIPTION OF EMBODIMENTS

[0070] FIGS. 1a,b show schematically and exemplarily embodiments of a module 10 for chemically processing a substrate 20 according to the invention. FIGS. 2a,b,c show schematically and exemplarily different embodiments of the invention in a cross section through a module 10 for chemically processing a substrate 20, a side view and another cross section. The module 10 for chemically processing a substrate 20 comprises an immersion chamber 11, a spray unit 13, and a motion unit 14.

[0071] The substrate 20 is held by a substrate holder 21 or chuck and is inserted into the immersion chamber 11. The immersion chamber 11 may receive a chemical as a first liquid, so that the substrate 20 is immersed in the liquid. The substrate 20 may be processed on one or both sides. This means either one surface of the substrate or two surfaces of the substrate, the two surfaces being opposite to each other, may be processed.

[0072] The spray unit 13 comprises a plurality of spray nozzles 15, which spray a second liquid 22 within the immersion chamber 11 and onto the substrate 20, wherein the second liquid 22 hits the substrate 20 on both sides substantially perpendicular, thereby treating/processing the two opposite surfaces of the substrate. The first and second liquids 22 can be same or different. The spray nozzles 15 are arranged in spray bars 16, which are arranged along the two long side walls of the immersion chamber 11, the spray nozzles 15 being arranged opposite to each other and the substrate 20 being arranged in between, such that the spray nozzles spray the second liquid substantially perpendicular on the two opposite surfaces of the substrate 20. “Substantially perpendicular” can be understood not spraying of the liquid parallel to the substrate and preferably in a range of 70° to 110° to each of the surfaces of the substrate 20. The spray nozzles 15 may also be arranged in a wall of the immersion chamber 11. FIG. 3 shows schematically and exemplarily a detailed view of the spray unit 13. The spray nozzles 15 may be tilted relative to the substrate 20 or the immersion chamber 11 wall to direct the spray or to allow a draining. There are several options to achieve the tilt. For example, the spray nozzles 15 are tilted relative to the spray bar or the spray nozzles 15 are tilted relative to the chamber wall or the spray bars 16 are tilted relative to chamber wall or the like. Also, combinations are possible. The tilting movement preferably corresponds to a rotational movement around a Y-axis and/or a Z-axis (see FIG. 1).

[0073] As shown in FIGS. 1a,b and 2a,b,c, the motion unit 14 may provide a relative motion between the substrate 20 and the spray unit 13. The motion unit 14 may therefore move the substrate 20 including a substrate holder 21 and/or move the spray unit 13. To move the substrate 20 including the substrate holder 21, the motion unit 14 is shown in the drawings as portal or framework to enable an up and down movement of the substrate 20 in a Z-direction.

[0074] Moving the spray unit 13 may be understood as moving spray nozzles 15 and/or spray bars 16 of the spray unit 13 relative to the substrate 20 or the wall of the immersion chamber 11. The spray nozzles 15 and/or spray bars 16 may be moved to direct the spray of liquid with a certain angle onto the substrate 20 or into the immersion chamber 11. The purpose may be to chemically process the substrate 20 or to clean the substrate 20, the immersion chamber 11 and/or other components of the module 10. The purpose may also be to allow a gravitational draining of liquids out of the spray nozzles 15 and/or spray bars 16. Therefore, the spray bars 16 may be rotated around their respective longitudinal axis. The spray bars 16 may also conduct a fanning movement perpendicular to the longitudinal axes of the spray bars 16. This can be understood as a left—right movement when looking along the Y-direction and the width of the substrate 20 and the immersion chamber 11.

[0075] Moving the substrate 20 may be understood as moving the substrate 20 including a substrate holder 21 relative to the immersion chamber 11 and relative to the spray unit 13 [0076] in a first Z-direction vertically in and out of the immersion chamber 11, [0077] in a second X-direction direction horizontally in the direction of thickness of the substrate 20 from a front side to a back side of the substrate, and/or [0078] in a third Y-direction horizontally in the direction of width of the substrate 20.

[0079] The module 10 for chemically processing a substrate 20 further comprises an ultrasonic unit 12 to provide ultrasound to agitate the first liquid in the immersion chamber 11. The ultrasonic unit 12 may comprise one full area transducer or a plurality of smaller transducers. Here, as shown in the drawings, two full area transducers are provided as ultrasonic unit 12. The transducer(s) may be directly connected to the immersion chamber 11 or indirectly by means of a transducer plate. The transducer(s) may be arranged at an outer surface of the immersion chamber 11 or may be arranged between adjacent spray bars 16 of the spray unit 13. Here, as shown in the drawings, the two transducers of the ultrasonic unit 12 arranged at outer (lateral) surfaces of the immersion chamber 11.

[0080] As a result, an “All-in-One” multi-purpose module 10 or process chamber for liquid processing is provided, which is able to integrate diverse process technologies. For example, the application of immersion type processing, liquid spray processing (sequentially or at the same time/in parallel) and ultrasonic agitation within the same chamber is possible. In addition, an efficient and effective rinsing and drying without the need to move the substrate 20 in-between different processing vessels is achieved. The “All-in-One” multi-purpose module 10 allows, at the same time, accelerating many procedures and improving the product quality, while costs are still reduced. Further, many different substrate sizes may be processed without the need of mechanical changes to the chamber.

[0081] As shown in FIGS. 1b and 2b,c, the module 10 for chemically processing a substrate 20 further comprises an exhaust unit 25 for an exhaust flow during e.g. substrate drying. The exhaust unit 25 comprise here a bottom exhaust, which is arranged at the bottom of the immersion chamber 11. The exhaust unit 25 comprises an exhaust valve and several exhaust lines 26. The exhaust lines 26 with the capability of being rinsed, flushed or filled with a liquid or gas. The exhaust valve is here switchable between different exhaust lines 26.

[0082] The module 10 for chemically processing a substrate 20 further comprises a drain, rinse and dry unit. The drain, rinse and dry unit is configured to control a draining, a rinsing and/or a drying e.g. in-between chemicals or after a process step is completed. The drain, rinse and dry unit may be further controlled to blow and/or to suck liquid and/or gas in and/or out of the immersion chamber 11 and/or the spray unit 13. As an example, the drain, rinse and dry unit allows a back suction of liquids from the spray bars 16 and/or spray nozzles 15 and/or a blow-out of chemicals from the spray bars 16 sequentially or simultaneously.

[0083] As shown in FIGS. 1b and 2b,c, the drain, rinse and dry unit here further comprise air-knifes 32 for e.g. drying the substrate 20 and/or the substrate holder 21. The air-knifes 32 are shown in FIG. 2c and provide a laminar flow from top down while the substrate 20 and/or substrate holder 21 moves (repeatable) through a drying zone on top of the immersion chamber 11.

[0084] The drain, rinse and dry unit here further comprises waterfall elements 33, 34. Waterfall elements 33, 34 can be understood as spray or nozzle bars or slit bars providing liquid in the form of a waterfall. Upper waterfall elements 33 are arranged in an upper part of a chamber cover unit 17 to allow a cleaning of moveable cover elements 18 of the chamber cover unit 17 and/or the immersion chamber 11. Lower waterfall elements 34 are arranged in the immersion chamber 11 at e.g. two opposite sides to enable a waterfall-rinsing, waterfall-chemical processing, waterfall quenching etc. The lower waterfall elements 34 provide water or chemicals to flow from top of the substrate to the bottom by the action of gravity. They can also be used to rinse and clean the immersion chamber 11. The drain, rinse and dry unit here further comprises overflows 35 as a liquid level overflow below e.g. the top two waterfall spray or nozzle bars 33, 34.

[0085] The module 10 for chemically processing a substrate 20 further comprises a valve unit 30. FIG. 4 shows schematically and exemplarily a detailed view of the valve unit 30. The valve unit 30 is here a quick dump and rinse (QDR) valve block for liquid drain and gas exhaust. The valve unit 30 has several valves 31. Each valve 31 is connected to a separate tank or drain. The valves 31 are arranged at a bottom or lower end of the immersion chamber 11. The lowest point for liquids inside the module 10 is inside the valves 31. As a result, gravity drain can be used.

[0086] FIG. 5 shows schematically and exemplarily a detailed view of a chamber cover unit 17. The module 10 for chemically processing a substrate 20 further comprises a chamber cover unit 17 comprising four moveable cover elements 18. The moveable cover elements 18 can close an opening on top of the immersion chamber 11 to a closed position. The moveable cover elements 18 can further surround a substrate 20 while transferred through the opening in close contact in a transfer position. The moveable cover elements 18 can further open the opening in an open position. The moveable cover elements 18 are pushed against the substrate 20 or the substrate holder 21 by e.g. pneumatic cylinders 19.

[0087] In the closed position, the moveable cover elements 18 are sealed against the immersion chamber 11 or a rim or contact surface of the immersion chamber 11. The sealing between the moveable cover elements 18 and the immersion chamber 11 is essentially liquid and gas tight to avoid e.g. an escape of toxic gas. The sealing can be done by means of sealing elements as e.g. at least an elastic lip, a labyrinth seal and/or the like. The sealing can also be done by means of [0088] an expandable sealing, which is particular easy to implement, [0089] an encapsulation of an upper area or the tank, which can be easily made entirely tight, [0090] a collar joint with a liquid basin, which can easily handle all kinds of motions of the module 10, [0091] an adjustable cover, [0092] a cover covering essentially the entire upper part of the substrate holder 21 and being moveably in horizontal and vertical directions by means of e.g. rails and a step motor as well as moveable nozzles, [0093] spring loaded vertical blinds e.g. coupled to the substrate holder 21, which can be easily made entirely tight, [0094] a complete encapsulation of the motion unit 14 and of a loading position of the substrate holder 21, which can be easily made entirely tight and which can easily handle all kinds of motions of the module 10, [0095] an air curtain, allowing large movements, [0096] a simple cover for a fixed substrate holder 21 with several spray nozzles 15, which might be moved, tilted and/or rotated in arbitrary positions and which can be separately controlled, [0097] another simple cover for a fixed substrate holder 21 with several spray nozzles 15, wherein the spray nozzles 15 are arranged at a manifold or a plate within the immersion chamber 11 and can be horizontally and vertically displaced by means of e.g. a thrust rod, [0098] etc.

[0099] In the transfer position, the moveable cover elements push against the substrate and a gap opens between the moveable cover elements and the rim of the immersion chamber. The gap is controlled by a flow of sealing gas from the outside to the inside of the immersion chamber to prevent a contaminating gas flow from the inside to the outside. The gap is not mechanically closed.

[0100] It has to be noted that embodiments of the invention are described with reference to different subject matters. In particular, some embodiments are described with reference to method type claims whereas other embodiments are described with reference to the device type claims. However, a person skilled in the art will gather from the above and the following description that, unless otherwise notified, in addition to any combination of features belonging to one type of subject matter also any combination between features relating to different subject matters is considered to be disclosed with this application. However, all features can be combined providing synergetic effects that are more than the simple summation of the features.

[0101] While the invention has been illustrated and described in detail in the drawings and foregoing description, such illustration and description are to be considered illustrative or exemplary and not restrictive. The invention is not limited to the disclosed embodiments. Other variations to the disclosed embodiments can be understood and effected by those skilled in the art in practicing a claimed invention, from a study of the drawings, the disclosure, and the dependent claims.

[0102] In the claims, the word “comprising” does not exclude other elements or steps, and the indefinite article “a” or “an” does not exclude a plurality. A single processor or other unit may fulfil the functions of several items re-cited in the claims. The mere fact that certain measures are re-cited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage. Any reference signs in the claims should not be construed as limiting the scope.