INDUCTOR/TRANSFORMER WITH CLOSED RING
20200066829 ยท 2020-02-27
Inventors
Cpc classification
H01L27/08
ELECTRICITY
H01F2017/0073
ELECTRICITY
H01L23/5227
ELECTRICITY
H03J2200/35
ELECTRICITY
International classification
H01L27/08
ELECTRICITY
Abstract
Aspects generally relate to adjusting, or lowering, the Q of an inductor. In one embodiment, an integrated circuit includes an inductor and a conductive closed ring inside a periphery of the inductor. In another embodiment, there can be a plurality of closed rings inside the periphery of the inductor. The conductive closed rings are magnetically coupled to the inductor to adjust the Q.
Claims
1. An integrated circuit comprising: an inductor; and a conductive closed ring inside a periphery of the inductor.
2. The integrated circuit of claim 1, further comprising a plurality of closed rings inside the periphery of the inductor.
3. The integrated circuit of claim 2, wherein at least some of the plurality of conductive closed rings inside the periphery of the inductor are coupled together.
4. The integrated circuit of claim 1, wherein the conductive closed ring comprises a single turn closed ring.
5. The integrated circuit of claim 1, wherein the conductive closed ring comprises a multi-turn closed ring.
6. The integrated circuit of claim 1, wherein the inductor is used in a radio frequency (RF) amplifier or filter.
7. The integrated circuit of claim 6, wherein the RF amplifier or fitler is a 5G RF amplifier or filter.
8. An integrated circuit comprising: an inductor; and a conductive configurable ring inside the periphery of the inductor, wherein the conductive configurable ring comprises a switch operable to configure the configurable ring as a closed ring or an open ring.
9. The integrated circuit of claim 8, wherein the conductive configurable ring comprises a single turn conductive configurable ring.
10. The integrated circuit of claim 8, wherein the conductive configurable ring comprises a multi-turn conductive configurable ring.
11. The integrated circuit of claim 8, further comprising a plurality of conductive configurable rings inside the periphery of the inductor.
12. The integrated circuit of claim 11, wherein at least one of the plurality of conductive configurable rings is a conductive closed ring and at least one of the plurality of conductive configurable rings is an open ring.
13. The integrated circuit of claim 11, wherein the plurality of conductive configurable rings are closed rings.
14. The integrated circuit of claim 8, further comprising a conductive closed ring inside the periphery of the inductor.
15. The integrated circuit of claim 8, wherein the inductor is used in a radio frequency (RF) amplifier or filter.
16. The integrated circuit of claim 15, wherein the RF amplifier or filter is a 5G RF amplifier or filter.
17. A method of adjusting a quality (Q) factor of an inductor comprising: forming a loop inductor; and forming a conductive ring inside a periphery of the loop inductor, the conductive ring magnetically coupled to the inductor.
18. The method of claim 17, wherein the conductive ring is a closed ring.
19. The method of claim 17, wherein the conductive ring is a configurable ring.
20. The method of claim 17, further comprising forming a plurality of conductive rings in the periphery of the inductor.
21. The method of claim 17, wherein at least some of the closed rings are coupled together.
22. The method of claim 17, wherein the closed ring comprises a single turn closed ring.
23. The integrated circuit of claim 17, wherein the closed ring comprises a multi-turn closed ring.
24. The method of claim 17, wherein the inductor is part of a radio frequency amplifier or filter.
25. The method of claim 24, wherein the RF amplifier or filter is a 5G RF amplifier or filter.
Description
BRIEF DESCRIPTION OF THE FIGURES
[0009] The accompanying drawings are presented to aid in the description and illustrations of embodiments and are not intended to be limitations thereof.
[0010]
[0011]
[0012]
[0013]
[0014]
[0015]
[0016]
[0017] The drawings may not depict all components of a particular apparatus, structure, or method. Further, like reference numerals denote like features throughout the specification and figures.
DETAILED DESCRIPTION
[0018] Aspects disclosed in the following description and related drawings are directed to specific embodiments. Alternative embodiments may be devised without departing from the scope of the invention. Additionally, well-known elements may not be described in detail, or may be omitted, so as not to obscure relevant details. Embodiments disclosed may be suitably included in any electronic device.
[0019] With reference now to the drawing, several exemplary aspects of the present disclosure are described. The word exemplary is used herein to mean serving as an example, instance, or illustration. Any aspect described herein as exemplary is not necessarily to be construed as preferred or advantageous over other aspects. Furthermore, the terminology used herein is for the purpose of describing particular embodiments and is not intended to be limiting
[0020]
[0021] In the example of
[0022] In an embodiment, such as a power amplified for an RF signal, the DC bias current 106 can be large. A large DC bias current requires the conductor used to form the inductor 102 to be large (thick/wide) to prevent electromigration (EM).
[0023] EM is the transport of material caused by the gradual movement of ions in a conductor due to the momentum transfer between conducting electrons and diffusing metal atoms. EM can cause the eventual loss of connections or failure of an integrated circuit (IC), and therefore decreases the reliability of ICs.
[0024] Making the conductor used to form the inductor large (thick/wide) can minimize EM but it also lowers the resistance of the inductor 102 leading to a higher quality (Q) factor of the inductor. The Q of the inductor is the ratio of the inductance of the inductor to the resistance, as described in Equation 1.
[0025] Where f is the frequency, L is the inductance, and R is the resistance.
[0026] In general, the higher the Q of an inductor the narrower the bandwidth of an RF signal will pass through the inductor. In some applications it is desirable to pass a wider bandwidth signal, and thus have a lower Q inductor. One technique for lowering the Q of an inductor is to increase the resistance of the conductor used to form the inductor by making the conductor narrower or thinner. However, as noted, making the conductor narrower or thinner can lead to EM problems. Another technique for lowering the Q of the inductor is to add a resistor in the inductor. However, the addition of a resistor generates heat in a tiny area, degrading circuit performance and reliability.
[0027]
[0028] In the example of
[0029] The amount the Q can be lowered using the configuration illustrated in
[0030]
[0031] In the example of
[0032] The amount the Q can be lowered using the configuration illustrated in
[0033] An additional benefit to the configuration illustrated in
[0034]
[0035] Inside a periphery of the inductor 402 is a plurality of conductive closed rings 410a, 410b, and 410c. The Q of the inductor 402 is lowered by magnetic coupling between the inductor 402 and the plurality of conductive closed rings 410a, 410b, and 410c. The magnetic coupling induces eddy currents in the plurality of conductive closed rings 410a, 410b, and 410c which lowers the effective inductance and increases effective resistance of the inductor 402, and referring to Equation 1, lowering the inductance (L) and increasing resistance (R) will lower the Q.
[0036] The amount the Q can be lowered using the configuration illustrated in
[0037]
[0038]
[0039]
[0040] A plurality of conductive configurable rings 510a, 510b, and 510c, inside the periphery of the inductor 502 are configured with switches 520a, 520b, and 520c. Operation of the switches 520a, 520b, and 520c can configure the conductive configurable rings 510a, 510b, and 510c to be conductive closed rings, able to conduct eddy currents, or open rings, unable to conduct eddy currents. For example, if a first switch 520a is closed a first conductive configurable ring 510a of the plurality of configurable rings forms a conductive closed ring able to conduct eddy current, while if first switch 520a is open the first conductive configurable ring 510a is not closed and is unable to conduct eddy current. Not being able to conduct eddy current means the first ring 510a will not affect the inductance of the inductor 502. Likewise, operation of the second and third switches 520b and 520c can make the second and third conductive configurable rings 510b and 510c be configured to conduct eddy current or not.
[0041] By operation of the switches 520a, 520b, and 520c various combinations of conductive closed rings can be configured. The ability to configure the number of conductive closed rings within the periphery of the inductor 502 provides flexibility in configuring the Q of the inductor 502.
[0042] The example of
[0043] While aspects described above discuss single turn closed rings(s), multi-turn closed ring(s) can also be used.
[0044]
[0045] The conductive ring can be a closed ring, a configurable ring, or a multi-turn ring Also, there can be a plurality of rings inside the periphery of the inductor. The plurality of rings can include combinations of closed rings, configurable rings, or multi-turn rings. At least some of the rings inside the periphery of the inductor can be coupled together. The inductor can be used in an RF amplifier circuit, such as a 5G RF amplifier. The inductor can also be used in a radio frequency (RF) filter, such as a 5G RF filter.
[0046] As described, to meet electro migration specifications, wide and thick metal is used for on-chip inductor or transformer design. However, the Q factor of the inductor may be too high to cover a wide frequency bandwidth. Therefore, conductive closed ring(s) are place inside the inductor/transformer periphery to reduce the Q factor, while still meeting electro migration specifications. This also improves the magnetic isolation from the inductor the nearby circuits. In the description, aspects were generally described applying generally to an inductor, however the aspects apply to transformers as well.
[0047] Aspects of the description include at least one conductive closed ring within the periphery of an inductor, for example, one conductive closed ring, two conductive closed rings, three conductive closed rings, etc. There can also be conductive configurable closed ring(s) that can be closed and open by operation of a switch. There can also be conductive multi-turn closed loops, and there can be conductive multi-turn closed rings with switches to remove portions of the multi-turn rings. Additional aspects include various combinations of conductive closed ring(s), conductive configurable closed ring(s), and conductive multi-turn closed ring(s). Also, the rings can be coupled to some, or all, of other rings in a combination of closed rings.
[0048] An aspect is that the ring(s) can be on same or different metal layers, compared with inductor metal layer. For example, the ring(s) can be under, or above, or on the same level as the inductor routing layer. In addition, ring(s) can be on one layer or stacked on multiple layers through vias. In the description above, the example ring(s) illustrated were generally rectangular. In other embodiments, the ring(s) can be other shapes, such orthogonal, round, oval, any polygons shape, or other shape. Also, there can be additional open or closed ring(s) outside the periphery of the inductor/transformer.
[0049] An additional aspect is that conductive multi-turn closed ring(s) can include switches so that portions of the conductive multi-turn closed loop can be effectively removed from the multi-turn closed ring. In other embodiments, conductive multi-turn closed ring(s) and be used with various combinations of conductive closed ring(s) and conductive configurable closed ring(s) to get a desired combination of closed ring(s) in the periphery of an inductor to adjust the Q of the inductor to a desired value.
[0050] The various illustrative logical blocks, modules, and circuits described in connection with the aspects disclosed herein may be implemented or performed in an integrated circuit (IC), a system on a chip (SoC), an Application Specific Integrated Circuit (ASIC), a Field Programmable Gate Array (FPGA) or other programmable logic device, discrete gate or transistor logic, discrete hardware components, or any combination thereof designed to perform the functions described herein.
[0051] It is also noted that the operational steps described in any of the exemplary aspects herein are described to provide examples and discussion. The operations described may be performed in numerous different sequences other than the illustrated sequences. Furthermore, operations described in a single operational step may actually be performed in a number of different steps. Additionally, one or more operational steps discussed in the exemplary aspects may be combined. It is to be understood that the operational steps illustrated in flow chart diagrams may be subject to numerous different modifications as will be readily apparent to one of skill in the art. Those of skill in the art will also understand that information and signals may be represented using any of a variety of different technologies and techniques. For example, data, instructions, commands, information, signals, bits, symbols, and chips that may be referenced throughout the above description may be represented by voltages, currents, electromagnetic waves, magnetic fields or particles, optical fields or particles, or any combination thereof.
[0052] The previous description of the disclosure is provided to enable any person skilled in the art to make or use the disclosure. Various modifications to the disclosure will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other variations without departing from the spirit or scope of the disclosure. Thus, the disclosure is not intended to be limited to the examples and designs described herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.