Multi-negative differential resistance device and method of manufacturing the same
10566389 ยท 2020-02-18
Assignee
Inventors
Cpc classification
H10N89/00
ELECTRICITY
International classification
Abstract
Provided is a multi-negative differential resistance device. The multi-negative differential resistance device includes a first negative differential resistance device and a second negative differential resistance device connected in parallel with the first negative differential resistance device, and a peak and a valley of the first negative differential resistance device and a peak and a valley of the second negative differential resistance device are synthesized, and, thus, the multi-negative differential resistance device has two peaks and two valleys.
Claims
1. A multi-negative differential resistance device, comprising: a first negative differential resistance device; and a second negative differential resistance device connected in parallel with the first negative differential resistance device, wherein a peak and a valley of the first negative differential resistance device and a peak and a valley of the second negative differential resistance device, as synthesized, result in the multi-negative differential resistance device having two peaks and two valleys, wherein each of the first negative differential resistance device and the second negative differential resistance device includes a degenerated first semiconductor and a degenerated second semiconductor joined together.
2. The multi-negative differential resistance device of claim 1, further comprising: a resistance device connected to any one of the degenerated first polar semiconductor and the degenerated second polar semiconductor.
3. The multi-negative differential resistance device of claim 2, wherein the degenerated first polar semiconductor is formed to have a higher Fermi level than a conduction band due to its very high impurity concentration, and the degenerated second polar semiconductor is formed to have a lower Fermi level than a valence band due to its very high impurity concentration.
4. The multi-negative differential resistance device of claim 1, wherein the first negative differential resistance device includes: a first electrode, a second electrode, and a third electrode; a degenerated p-type semiconductor and a degenerated n-type semiconductor arranged between the first electrode and the second electrode and joined together; and a resistance device arranged between the second electrode and the third electrode, the second negative differential resistance device includes: a first electrode, a second electrode, and a third electrode; a degenerated p-type semiconductor and a degenerated n-type semiconductor arranged between the first electrode and the second electrode and joined together; and a resistance device arranged between the second electrode and the third electrode, the first electrode of the first negative differential resistance device and the first electrode of the second negative differential resistance device are electrically connected, and the third electrode of the first negative differential resistance device and the third electrode of the second negative differential resistance device are electrically connected.
5. The multi-negative differential resistance device of claim 1, wherein the first negative differential resistance device includes: a first electrode and a second electrode; and a degenerated p-type semiconductor, a degenerated n-type semiconductor, and a resistance device arranged between the first electrode and the second electrode and joined together, the second negative differential resistance device includes: a first electrode and a second electrode; and a degenerated p-type semiconductor, a degenerated n-type semiconductor, and a resistance device arranged between the first electrode and the second electrode and joined together, the first electrode of the first negative differential resistance device and the first electrode of the second negative differential resistance device are electrically connected, and the second electrode of the first negative differential resistance device and the second electrode of the second negative differential resistance device are electrically connected.
6. The multi-negative differential resistance device of claim 5, wherein the degenerated n-type semiconductor and the resistance device are formed by degenerating a junction portion of the n-type semiconductor joined to the degenerated p-type semiconductor.
7. The multi-negative differential resistance device of Claim 1, wherein the degenerated first semiconductor is a degenerated first polar semiconductor and the degenerated second semiconductor is a degenerated second polar semiconductor.
8. A multi-negative differential resistance device, wherein N number of negative differential resistance devices are connected in parallel with each other, and peaks and valleys of the respective negative differential resistance devices, as synthesized, result in the multi-negative differential resistance device having N number of peaks and valleys, and each of the negative differential resistance devices includes a degenerated p-type semiconductor and a degenerated n-type semiconductor joined together and a resistance device connected to any one of the degenerated p-type semiconductor and the degenerated n-type semiconductor.
9. The multi-negative differential resistance device of Claim 8, wherein each of the negative differential resistance device includes a degenerated polar semiconductor.
10. A method of manufacturing a multi-negative differential resistance device, comprising: forming N (N is a natural number of 2 or more) number of degenerated first polar semiconductor layers on a substrate; forming N number of degenerated second polar semiconductor layers to be joined to the degenerated first polar semiconductor layers; forming N number of resistive layers to be adjacent to the second polar semiconductor layers; forming N number of first electrodes in contact with the first polar semiconductor layers, N number of second electrodes in contact between the second polar semiconductor layers and the resistive layers and N number of third electrodes in contact with the resistive layers; and connecting the N number of first electrodes in parallel with the N number of third electrodes, respectively.
11. A method of manufacturing a multi-negative differential resistance device, comprising: forming N (N is a natural number of 2 or more) number of degenerated first polar semiconductor layers on a substrate; forming N number of second polar semiconductor layers to be joined to the degenerated first polar semiconductor layers; degenerating junction portions of the second polar semiconductor layers joined to the degenerated first polar semiconductor layers; forming N number of first electrodes in contact with the first polar semiconductor layers and N number of second electrodes in contact with non-degenerated portions of the second polar semiconductor layers; and connecting the N number of first electrodes in parallel with the N number of second electrodes, respectively.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) In the detailed description that follows, embodiments are described as illustrations only since various changes and modifications will become apparent to those skilled in the art from the following detailed description. The use of the same reference numbers in different figures indicates similar or identical items.
(2)
(3)
(4)
(5)
(6)
(7)
(8)
(9)
(10)
(11)
(12)
(13)
(14)
(15)
(16)
(17)
DETAILED DESCRIPTION
(18) Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings so that the present disclosure may be readily implemented by a person with ordinary skill in the art. However, it is to be noted that the present disclosure is not limited to the embodiments but can be embodied in various other ways. In drawings, parts irrelevant to the description are omitted for the simplicity of explanation, and like reference numerals denote like parts through the whole document.
(19) Through the whole document, the term connected to or coupled to that is used to designate a connection or coupling of one element to another element includes both a case that an element is directly connected or coupled to another element and a case that an element is electronically connected or coupled to another element via still another element. Further, it is to be understood that the term comprises or includes and/or comprising or including used in the document means that one or more other components, steps, operation and/or existence or addition of elements are not excluded in addition to the described components, steps, operation and/or elements unless context dictates otherwise and is not intended to preclude the possibility that one or more other features, numbers, steps, operations, components, parts, or combinations thereof may exist or may be added.
(20)
(21) A multi-negative differential resistance device of the present disclosure includes a first negative differential resistance device and a second negative differential resistance device connected in parallel with the first negative differential resistance device, and a peak and a valley of the first negative differential resistance device and a peak and a valley of the second negative differential resistance device may be synthesized, and, thus, the multi-negative differential resistance device may have two peaks and two valleys.
(22) As illustrated in
(23)
(24)
(25) Referring to
(26) Herein, the degenerated first polar semiconductors 200 and 200a may be n-type semiconductors and formed to have a higher Fermi level than a conduction band due to their very high impurity concentration, and the degenerated second polar semiconductors 300 and 300a may be p-type semiconductors and formed to have a lower Fermi level than a valence band due to their very high impurity concentration. In this case, the impurity concentration for forming the degenerated semiconductors 200, 200a, 300, and 300a may be 10.sup.19 cm.sup.3 or more for silicon (Si), 10.sup.18 cm.sup.3 or more for germanium (Ge), and 10.sup.17 cm.sup.3 or more for gallium arsenide (GaAs).
(27) Further, as illustrated in
(28) For example, referring to
(29) An example of the multi-negative differential resistance device of the present disclosure will be described with reference to
(30) However, the multi-negative differential resistance device to be described below is just an example of the present disclosure and can be modified in various ways based on its components.
(31) As illustrated in
(32) In this case, the first electrode 501 of the first negative differential resistance device 10 and the first electrode 501 of the second negative differential resistance device 20 may be electrically connected through an electric wire a, and the third electrode 503 of the first negative differential resistance device 10 and the third electrode 503 of the second negative differential resistance device 20 may be electrically connected through an electric wire a.
(33) Herein, the degenerated p-type semiconductor 200 may be formed of at least one of silicon, germanium (Ge), semiconductors of elements from Groups III-V of the periodic table, oxide semiconductors, organic semiconductors, transition metal dichalcogenide, and phosphorene, but may not be limited thereto.
(34) Further, the degenerated n-type semiconductor 300 may be formed of at least one of silicon, germanium (Ge), semiconductors of elements from Groups III-V of the periodic table, oxide semiconductors, organic semiconductors, and transition metal dichalcogenide, but may not be limited thereto.
(35) Another example of the multi-negative differential resistance device of the present disclosure will be described with reference to
(36) As illustrated in
(37) In this case, the first electrode 501a of the first negative differential resistance device 10a and the first electrode 501a of the second negative differential resistance device 20a may be electrically connected through an electric wire a, and the second electrode 502a of the first negative differential resistance device 10a and the second electrode 502a of the second negative differential resistance device 20a may be electrically connected through an electric wire a.
(38) Herein, the degenerated n-type semiconductor 300a and the resistance device 400a may be formed by degenerating a junction portion of the n-type semiconductor 300a joined to the degenerated p-type semiconductor 200a.
(39) Further, in the multi-negative differential resistance device, N number of negative differential resistance devices 10, 20, 10a, and 20a are connected in parallel with each other, and peaks and valleys of the respective negative differential resistance devices 10 to 20a are synthesized, and, thus, the multi-negative differential resistance device has N number of peaks and valleys, and each of the negative differential resistance devices 10 to 20a may include a degenerated p-type semiconductor 200 or 200a and a degenerated n-type semiconductor 300 or 300a joined together and a resistance device 400 or 400a connected to any one of the degenerated p-type semiconductors 200 and 200a and the degenerated n-type semiconductors 300 and 300a.
(40) Hereinafter, a method of manufacturing the multi-negative differential resistance device of the present disclosure will be described in detail.
(41)
(42)
(43) Referring to
(44) For example, a method of manufacturing multi-negative differential resistance devices 10 and 20 with N number of (i.e., two) peaks and valleys will be described with reference to
(45) For example, the substrate 100 may be formed of at least one of silicon (Si) on which an insulating layer such as silicon dioxide (SiO.sub.2), aluminum oxide (Al.sub.2O.sub.3), or hafnium oxide (HfO.sub.2) is grown or deposited, a germanium (Ge) substrate, glass, and a PET film, but may not be limited thereto.
(46) The degenerated p-type semiconductor 200 may be formed to have various thicknesses of from several ten nm to several hundred m and may be formed using any semiconductor material, such as silicon, germanium, Group III-V semiconductors, oxide semiconductors, organic semiconductors, transition metal dichalcogenide, or phosphorene, operating in p-type. The p-type semiconductor 200 formed of silicon, germanium, Group III-V semiconductors, oxide semiconductors, or organic semiconductors may be formed by thermal evaporation, e-beam evaporation, sputtering, or chemical vapor deposition, and the p-type semiconductor 200 formed of a 2-dimensional semiconductor material such as transition metal dichalcogenide and phosphorene may be grown and formed by delamination using a tape and chemical vacuum deposition such as CVD (chemical vapor deposition). In this case, degenerated semiconductor layers may be formed using a semiconductor material present in a naturally degenerated form such as phosphorene in bulk or using an in-situ doping method when semiconductor layers are grown or deposited.
(47) Further, the degenerated n-type semiconductor 300 may be formed to have various thicknesses of from several ten nm to several hundred m and may be formed using any semiconductor material, such as silicon, germanium, Group III-V semiconductors, oxide semiconductors, organic semiconductors, or transition metal dichalcogenide, operating in n-type. The n-type semiconductor 300 may be formed using a semiconductor material present in a naturally degenerated form such as rhenium disulfide (ReS.sub.2) in bulk or using the same method as that used for the degenerated p-type semiconductor 200.
(48) Then, in S103, N number of serial resistive thin films (resistive layers 400) may be formed to be adjacent to the n-type semiconductors 300 as illustrated in
(49) Then, in S104, N number of first electrodes 501 in contact with the p-type semiconductors 200, N number of second electrodes 502 in contact between the n-type semiconductors 300 and the serial resistive thin films 400 which are the resistive layers, and N number of third electrodes 503 in contact with the resistive thin films 400 may be formed as illustrated in
(50) Finally, in S105, the N number of first electrodes 501 and the N number of third electrodes 503 may be connected in parallel with each other through electric wires a, respectively, as illustrated in
(51) As such, a multi-negative differential resistance device with multiple peaks and valleys can be manufactured by parallelly connecting the negative differential resistance devices 10 and 20 and the resistive layers 400 corresponding in number to (N number of) peaks and valleys as desired.
(52) Hereinafter, an explanation of the components that perform the same function as those illustrated in
(53)
(54)
(55) Referring to
(56) For example, a method of manufacturing multi-negative differential resistance devices 10a and 20a with N number of (i.e., two) peaks and valleys will be described with reference to
(57) Then, in S204, N number of first electrodes 501a in contact with the P-type semiconductors 200a and N number of second electrodes 502a in contact with non-degenerated portions 400a, i.e., the resistive layers 400a, of the N-type semiconductors 401 may be formed as illustrated in
(58)
(59)
(60) Hereinafter, the possibility of implementation of a negative differential resistance device of the present disclosure having multiple peaks and valleys by varying a value of a resistance connected in series with the negative differential resistance will be described with reference to
(61) A negative differential resistance current operating model has been developed in consideration of tunneling and diffusion of electrons and includes a tunneling current I.sub.tunnel and a diffusion current I.sub.diff of a negative differential resistance device as shown in the following Equation 1.
(62)
(63) Herein, I.sub.tunnel represents tunneling current, a represents screening factor, q represents elementary quantum of electricity, h represents Planck's constant, Ev.sub.p represents valence band for a p-type semiconductor, Ec.sub.n represents conduction band for an n-type semiconductor, DOS.sub.p and DOS.sub.n, represent state densities for p-type and n-type semiconductors, respectively, f.sub.p and f.sub.n represent Fermi-Dirac distribution functions, respectively, R.sub.s represents serial resistance, V represents applied voltage, and I represents current flowing through a device.
(64) Further, I.sub.diff represents diffusion current, I.sub.0 represents saturated current, k.sub.B represents Boltzmann constant, and represents ideality factor.
(65)
(66)
(67)
(68) The above description of the present disclosure is provided for the purpose of illustration, and it would be understood by a person with ordinary skill in the art that various changes and modifications may be made without changing technical conception and essential features of the present disclosure. Thus, it is clear that the above-described embodiments are illustrative in all aspects and do not limit the present disclosure. For example, each component described to be of a single type can be implemented in a distributed manner. Likewise, components described to be distributed can be implemented in a combined manner.
(69) The scope of the present disclosure is defined by the following claims rather than by the detailed description of the embodiment. It shall be understood that all modifications and embodiments conceived from the meaning and scope of the claims and their equivalents are included in the scope of the present disclosure.
EXPLANATION OF REFERENCE NUMERALS
(70) 10: First negative differential resistance device 20: Second negative differential resistance device 100: Substrate 200, 200a: Degenerated first polar semiconductor/Degenerated p-type semiconductor 300, 300a: Degenerated second polar semiconductor/Degenerated n-type semiconductor 400, 400a: Resistance device/Resistive layer/Resistive thin film 501, 501a: First electrode 502, 502a: Second electrode 503, 503a: Third electrode