METHOD FOR DETECTING COMPROMISED ZONE IN CLEANROOM

Abstract

Method for detecting compromised zone in cleanroom, including the following steps: (1) cleanroom including air supply space, ceiling, clean space, elevated floor, and return air space that are arranged sequentially from top down, wherein ceiling is divided into plurality of air supply zones, elevated floor is divided into plurality of exhaust zones, air supply zones and exhaust zones are arranged vertically in one-to-one corresponding manner with cylindrical space formed between corresponding two, cleanroom further includes detection mechanisms corresponding, one-to-one, to cylindrical spaces, and detection mechanism includes corrosion test specimen and detection unit; and (2) monitoring electrical parameters of corrosion test specimen of each detection mechanisms, and determining, if electrical parameters of corrosion test specimen of one detection mechanism change continuously in trend, that cylindrical space corresponding to this detection mechanism is compromised zone.

Claims

1. A method for detecting a compromised zone in a cleanroom, comprising the following steps: (1) providing a cleanroom including an air supply space, a ceiling, a clean space, an elevated floor, and a return air space that are arranged sequentially from top down, wherein the ceiling is divided into a plurality of air supply zones, the elevated floor is divided into a plurality of exhaust zones, the air supply zones and the exhaust zones are arranged vertically in a one-to-one corresponding manner with a cylindrical space formed between the corresponding two, the cleanroom further comprises detection mechanisms corresponding, one-to-one, to the cylindrical spaces, and the detection mechanism comprises a corrosion test specimen in contact with a corrosive gas flowing through the corresponding cylindrical space and a detection unit for detecting electrical parameters of the corrosion test specimen; and (2) monitoring electrical parameters of the corrosion test specimen of each of the detection mechanisms, and determining, if the electrical parameters of the corrosion test specimen of one detection mechanism change continuously in a trend, that the cylindrical space corresponding to this detection mechanism is a compromised zone.

2. The method for detecting a compromised zone in a cleanroom according to claim 1, characterized in that the corrosion test specimen is a to-be-measured resistor, and the detection unit is a resistance-measuring circuit.

3. The method for detecting a compromised zone in a cleanroom according to claim 2, characterized in that the corrosion test specimen and the detection unit form a Wheatstone bridge resistance-measuring circuit, and the corrosion test specimen functions as the to-be-measured resistor of the Wheatstone bridge resistance-measuring circuit.

4. The method for detecting a compromised zone in a cleanroom according to claim 2, characterized in that the corrosion test specimen and the detection unit form a voltammetric resistance-measuring circuit, and the corrosion test specimen functions as the to-be-measured resistor of the voltammetric resistance-measuring circuit.

5. The method for detecting a compromised zone in a cleanroom according to claim 1, characterized in that the detection mechanism comprises at least one corrosion test specimen, and the detection mechanism is arranged in at least one of the air supply space, the ceiling, the clean space, the elevated floor, and the return air space.

6. The method for detecting a compromised zone in a cleanroom according to claim 1, characterized in that each of the air supply zones comprises at least one air supply mechanism.

7. The method for detecting a compromised zone in a cleanroom according to claim 6, characterized in that the air supply mechanism is an FFU device or the air supply mechanism comprises an FFU device and a chemical filter.

8. The method for detecting a compromised zone in a cleanroom according to claim 6, characterized in that the corrosion test specimen of the detection mechanism is arranged on the ceiling, and the detection mechanism and the air supply mechanism share a single chip machine.

9. The method for detecting a compromised zone in a cleanroom according to claim 1, characterized in that the detection unit of the detection mechanism is in wireless communication with the single chip machine thereof.

10. The method for detecting a compromised zone in a cleanroom according to claim 1, characterized in that the corrosion test specimen is an iron specimen, a copper specimen, a silver specimen or a semiconductor.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0025] FIG. 1 is a schematic structural diagram of a cleanroom disclosed by the present invention;

[0026] FIG. 2 is a schematic diagram of the principle of a Wheatstone bridge resistance-measuring circuit disclosed by the present invention;

[0027] FIG. 3 is a schematic diagram of the principle of a voltammetric resistance-measuring circuit disclosed by the present invention.

[0028] Wherein, 10. air supply space, 20. ceiling, 21. air supply mechanism; 30. clean space; 40. elevated floor; 50. return air space; 60. corrosion test specimen.

DESCRIPTION OF THE SPECIFIC EMBODIMENTS

[0029] The present invention will be further described below with reference to the accompanying drawings and embodiments:

Embodiment I

[0030] Referring to FIG. 1, as indicated by the legends therein, a method for detecting a compromised zone in a cleanroom comprises the following steps:

[0031] (1) providing a cleanroom including an air supply space 10, a ceiling 20, a clean space 30, an elevated floor 40, and a return air space 50 that are arranged sequentially from top down, wherein the ceiling 20 is divided into a plurality of air supply zones, the elevated floor 40 is divided into a plurality of exhaust zones, the air supply zones and the exhaust zones are arranged vertically in a one-to-one corresponding manner with a cylindrical space formed between the corresponding two, the cleanroom further comprises detection mechanisms corresponding, one-to-one, to the cylindrical spaces, and each detection mechanism comprises a corrosion test specimen 60 in contact with a corrosive gas flowing through the corresponding cylindrical space and a detection unit for detecting electrical parameters of the corrosion test specimen 60; and

[0032] (2) monitoring electrical parameters of the corrosion test specimen 60 of each of the detection mechanisms, and determining, if the electrical parameters of the corrosion test specimen 60 of one detection mechanism change continuously in a trend, that the cylindrical space corresponding to this detection mechanism is a compromised zone.

[0033] In the text above, the corrosion test specimen 60 is a to-be-measured resistor, and the detection unit is a resistance-measuring circuit. The corrosion test specimen 60 and the detection unit form a Wheatstone bridge resistance-measuring circuit, and the corrosion test specimen 60 functions as the to-be-measured resistor of the Wheatstone bridge resistance-measuring circuit.

[0034] Taking a Wheatstone balanced bridge as an example, the principle is shown in FIG. 2. Standard resistors R0, R1, and R2 and a to-be-measured resistor RX are connected to form a quadrilateral with each side referred to as an arm of the suspension bridge. A power source E is connected between the opposite angles A and C, and a galvanometer is connected between the opposite angles B and D. Therefore, the bridge consists of three parts, i.e., four arms, a power source and a galvanometer. When switches KE and KG are closed, each branch has a current flowing through, and the galvanometer branch functions to connect two branches of ABC and ADC, which is like a bridge and therefore, is referred to as a bridge. No current will flow through the bridge by appropriately adjusting the values of R0, R1, and R2, i.e., the current flowing through the galvanometer IG=0. At this moment, the electric potential is the same for point B and point D. Such a state of the bridge is referred to as the balanced state. At this moment, the potential difference between A and B is equal to the potential difference between A and D, and the potential difference between B and C is equal to the potential difference between D and C. Assuming that the current is I1 and I2 in the ABC branches, respectively, and according to the Ohm's law, it is obtained that

I1RX=I2R1;

I1R0=I2R2;

[0035] The first equation is divided by the equation to obtain

RX/R0=R1/R2(1)

[0036] The equation (1) is referred to as the balance condition for a bridge, and it can be obtained from the equation (1) that

RX=(R1/R2)R0(2)

[0037] The resistance value of the to-be-measured resistor may be calculated according to the equation (2).

[0038] In the text above, the air supply mechanism 21 is an FFU device or the air supply mechanism 21 comprises an FFU device and a chemical filter.

[0039] Preferably, detection mechanism comprises two corrosion test specimens arranged on the ceiling 20 and each of the air supply zones comprises one air supply mechanism 21. The corrosion test specimen of the detection mechanism is arranged on the ceiling, and the detection unit of the corrosion test specimen arranged on the ceiling 20 and the air supply mechanism 21 share a single chip machine. The corrosion test specimen 60 is an iron specimen, a copper specimen, a silver specimen or a semiconductor.

[0040] In practical use, operations of the air supply mechanism 21, adjustment of the detection unit, and computation of resistance of the to-be-measured resistor are controlled by the single chip machine. If a cylindrical space is a compromised zone, a prompt for attention is timely provided or the monitoring of environmental conditions of the machine in the compromised zone is enhanced.

Embodiment II

[0041] It is the same as Embodiment I with the difference being that the corrosion test specimen 60 and the detection unit form a voltammetric resistance-measuring circuit, and the corrosion test specimen 60 functions as the to-be-measured resistor of the voltammetric resistance-measuring circuit. The principle is shown in FIG. 3.

[0042] Voltammetric resistance measuring is a common method to use an ammeter and a voltmeter to directly measure a to-be-measured resistor, and the resistance is measured through the Ohm's law for partial circuit: R=U/I. The ammeter is used to measure a current flowing through an unknown resistor under this voltage, and then the resistance of the unknown resistor is calculated, which is roughly divided into two types: internal connection of the ammeter and external connection of the ammeter. The so-called external connection and internal connection means that the ammeter is connected outside or inside the voltmeter, and the specific steps are as follows:

[0043] (1) adjusting the indicators of the ammeter A and the voltmeter V to zero, connecting an object according to a circuit diagram, and adjusting the resistance of a sliding rheostat R to the maximum;

[0044] (2) closing the switch S, adjusting the slider of the sliding rheostat R to an appropriate position, and taking the reading I of the ammeter A and the reading U of the voltmeter V, respectively; and

[0045] (3) calculating the value of R according to the equation R=U/I.

[0046] According to the method above, the slider of the sliding rheostat is adjusted to change the current in a to-be-measured resistor and the voltage at two ends, and multiple sets of R values are measured.

Embodiment III

[0047] It is the same as either Embodiment I or Embodiment II with the difference being that the detection unit is an ohm gauge or a multimeter.

Embodiment IV

[0048] It is the same as any one of Embodiments I to III with the difference being that each detection mechanism may further comprise one corrosion test specimen or two or more corrosion test specimens. The corrosion test specimens are arranged at any position in the air supply space, the ceiling, the clean space, the elevated floor, and the return air space.

Embodiment V

[0049] It is the same as any one of Embodiments I to IV with the difference being that the detection unit of the detection mechanism is in wireless communication with the single chip machine thereof.

[0050] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications of these embodiments would be obvious to those skilled in the art. The general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to these embodiments illustrated herein, but will conform to the broadest scope consistent with the principles and novel features disclosed herein.