Imaging optical unit and projection exposure apparatus including same

Abstract

An imaging optical unit for projection lithography has a plurality of mirrors for imaging an object field into an image field with imaging light guided along a path from the object field to the image field. The penultimate mirror in the path has no passage opening to pass the imaging light. The imaging optical unit has a stop to predefine an outer marginal contour of a pupil of the imaging optical unit. The stop is between the penultimate and last mirrors in the path. The imaging optical unit can have exactly one stop for predefining at least one section of the outer pupil marginal contour. An entrance pupil of the imaging optical unit can be upstream of the object field. The imaging optical unit can be well defined regarding its pupil and exhibit desirable properties for projection lithography.

Claims

1. An imaging optical unit having a pupil, the imaging optical unit comprising: a plurality of mirrors configured to image an object field in an object plane into an image field in an image plane with imaging light guided along a path from the object field to the image field; and a stop configured to for predefine a section of an outer marginal contour of a pupil of the imaging optical unit, wherein: the plurality of mirrors comprises a penultimate mirror in the path and a last mirror in the path; the penultimate mirror is without an opening to pass the imaging light; the stop is in the path between the penultimate mirror and the last mirror; and the stop is configured to delimit an outer marginal contour of the pupil in more than one plane.

2. The imaging optical unit of claim 1, wherein the last mirror has an opening to pass the imaging light.

3. The imaging optical unit of claim 2, wherein the stop is configured to cover the outer marginal contour of the pupil in an azimuth range around a center of the pupil that is greater than 180.

4. The imaging optical unit of claim 3, wherein the imaging optical unit comprises exactly one stop configured to predefine the complete outer marginal contour of the pupil.

5. The imaging optical unit of claim 4, wherein at least sections of the stop are planar.

6. The imaging optical unit of claim 5, wherein a marginal contour of the stop has a three-dimensional profile.

7. The imaging optical unit of claim 6, wherein the stop has a bent topography.

8. The imaging optical unit of claim 1, wherein the stop is configured to cover the outer marginal contour of the pupil in an azimuth range around a center of the pupil that is greater than 180.

9. The imaging optical unit of claim 1, wherein the imaging optical unit comprises exactly one stop configured to predefine the complete outer marginal contour of the pupil.

10. The imaging optical unit of claim 1, wherein at least sections of the stop are planar.

11. The imaging optical unit of claim 1, wherein a marginal contour of the stop has a three-dimensional profile.

12. The imaging optical unit of claim 1, wherein the stop has a bent topography.

13. An optical system, comprising: an imaging optical unit according to claim 1; and an illumination optical unit configured to illuminate the object field with the imaging light.

14. An optical system, comprising: an imaging optical unit according to claim 1; and a wafer holder configured to displace a wafer along a first direction, wherein, in a second direction perpendicular to the first direction, the stop delimits both extreme marginal positions of the outer marginal contour of the pupil.

15. An apparatus, comprising: an EUV light source; an imaging optical unit according to claim 1; and an illumination optical unit configured to illuminate the object field with the imaging light.

16. An apparatus, comprising: an EUV light source; an imaging optical unit according to claim 1; and a wafer holder configured to displace a wafer along a first direction, wherein, in a second direction perpendicular to the first direction, the stop delimits both extreme marginal positions of the outer marginal contour of the pupil.

17. A method, comprising: illuminating a structure of a reticle with EUV light; and using an imaging optical unit according to claim 1 to project the illuminated structure of the reticle onto a light-sensitive material.

18. An imaging optical unit having a pupil and an entrance pupil, the imaging optical unit comprising: a plurality of mirrors configured to image an object field in an object plane into an image field in an image plane with imaging light guided along a path from the object field to the image field; and a stop configured to predefine a section of an outer marginal contour of the pupil, wherein: the imaging optical unit comprises a penultimate mirror in the path and a last mirror in the path; the penultimate mirror is without an opening to pass the imaging light; the stop is in the path between the penultimate mirror and the last mirror; and the entrance pupil is upstream of the object field.

19. An optical system, comprising: an imaging optical unit according to claim 18; and an illumination optical unit configured to illuminate the object field with the imaging light.

20. An optical system, comprising: an imaging optical unit according to claim 18; and a wafer holder configured to displace a wafer along a first direction, wherein, in a second direction perpendicular to the first direction, the stop delimits both extreme marginal positions of the outer marginal contour of the pupil.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) Exemplary embodiments of the disclosure are explained in greater detail below with reference to the drawings, in which:

(2) FIG. 1 schematically shows a projection exposure apparatus for EUV microlithography;

(3) FIG. 2 shows, in a meridional section, an embodiment of an imaging optical unit which can be used as a projection lens in the projection exposure apparatus according to FIG. 1, wherein an imaging beam path for chief rays and for an upper coma ray and a lower coma ray of a plurality of selected field points is depicted;

(4) FIG. 3 shows in perspective view an excerpt from the imaging optical unit according to FIG. 2, with illustration of the imaging beam path with additional individual rays of the imaging light, in the region of a penultimate and a last mirror in the imaging beam path upstream of an image field;

(5) FIG. 4 shows a sectional view in accordance with plane IV in FIG. 3, with illustration of envelopes of imaging light partial beams in the beam path on the one hand between the penultimate mirror and the image field, and on the other hand between the last mirror and the image field;

(6) FIG. 5 shows a view of the imaging optical unit according to FIG. 2, as seen from viewing direction V in FIG. 2;

(7) FIG. 5A shows in a plan view marginal contours of reflection surfaces impinged on in each case by the imaging light on the mirrors of the imaging optical unit according to FIG. 2;

(8) FIGS. 6 to 9 show illustrations similar to FIGS. 2 to 5 of a further embodiment of an imaging optical unit, usable as a projection lens in the projection exposure apparatus according to FIG. 1;

(9) FIGS. 10 to 12 show illustrations similar to FIGS. 2, 3 and 5 of a further embodiment of an imaging optical unit, usable as a projection lens in the projection exposure apparatus according to FIG. 1;

(10) FIGS. 13 to 15 show illustrations similar to FIGS. 2, 3 and 5 of a further embodiment of an imaging optical unit, usable as a projection lens in the projection exposure apparatus according to FIG. 1;

(11) FIGS. 16 and 17 show illustrations similar to FIGS. 2 and 5 of a further embodiment of an imaging optical unit, usable as a projection lens in the projection exposure apparatus according to FIG. 1;

(12) FIG. 18 shows in a plan view marginal contours of reflection surfaces impinged on in each case by the imaging light on the mirrors of the imaging optical unit according to FIGS. 16 and 17;

(13) FIG. 19 shows in perspective view an excerpt from the imaging optical unit according to FIGS. 16 and 17 in the region of the last three image-side mirrors in an imaging light beam path; and

(14) FIG. 20 shows an enlarged plan view of an aperture and obscuration stop of the imaging optical unit according to FIGS. 16, 17 and 19, which is arranged spatially between the penultimate mirror in the beam path and the last mirror in the beam path.

DETAILED DESCRIPTION

(15) A microlithographic projection exposure apparatus 1 has a light source 2 for illumination light or imaging light 3. The light source 2 is an EUV light source, which produces light in a wavelength range of e.g. between 5 nm and 30 nm, in particular between 5 nm and 15 nm. In particular, the light source 2 may be a light source with a wavelength of 13.5 nm or a light source with a wavelength of 6.9 nm. Other EUV wavelengths are also possible. In general, even arbitrary wavelengths are possible for the illumination light 3 guided in the projection exposure apparatus 1, for example visible wavelengths or else other wavelengths which may find use in microlithography (for example, DUV, deep ultraviolet) and for which suitable laser light sources and/or LED light sources are available (e.g. 365 nm, 248 nm, 193 nm, 157 nm, 129 nm, 109 nm). A beam path of the illumination light 3 is depicted very schematically in FIG. 1.

(16) An illumination optical unit 6 serves to guide the illumination light 3 from the light source 2 to an object field 4 in an object plane 5. Using a projection optical unit or imaging optical unit 7, the object field 4 is imaged into an image field 8 in an image plane 9 with a predetermined reduction scale. The projection optical unit 7 has exactly one object field 4. The projection optical unit 7 has exactly one image field 8.

(17) In order to facilitate the description of the projection exposure apparatus 1 and the various embodiments of the projection optical unit 7, a Cartesian xyz-coordinate system is indicated in the drawing, from which system the respective positional relationship of the components illustrated in the figures is evident. In FIG. 1, the x-direction runs perpendicular to the plane of the drawing into the latter. The y-direction runs toward the left, and the z-direction runs upward.

(18) The object field 4 and the image field 8 are rectangular. Alternatively, it is also possible for the object field 4 and the image field 8 to have a bent or curved embodiment, that is to say, in particular, a partial ring shape. The object field 4 and the image field 8 have an x/y-aspect ratio of greater than 1. Therefore, the object field 4 has a longer object field dimension in the x-direction and a shorter object field dimension in the y-direction. These object field dimensions extend along the field coordinates x and y.

(19) One of the exemplary embodiments depicted in FIG. 2 et seq. can be used for the projection optical unit 7. The projection optical unit 7 is anamorphic, i.e. it has a different reduction scale in the x-direction (reduction scale in the xz-plane) than in the y-direction (reduction scale in the yz-plane). The projection optical unit 7 has a reduction scale of 4 in the x-direction. The projection optical unit 7 has a reduction scale of 8 in the y-direction. Other reduction scales for the reduction in the x-direction and/or for the reduction in the y-direction are also possible, for example 4, 5 or even reduction scales that are greater than 8. An embodiment of the projection optical unit 7 with the same reduction scales as these in, firstly, the xz-plane and, secondly, in the yz-plane is also possible.

(20) The image plane 9 is arranged parallel to the object plane 5 in the case of the projection optical unit 7. What is imaged in this case is a section of a reflection mask 10, also referred to as reticle, coinciding with the object field 4. The reticle 10 is carried by a reticle holder 10a. The reticle holder 10a is displaced by a reticle displacement drive 10b.

(21) The imaging by way of the projection optical unit 7 is implemented on the surface of a substrate 11 in the form of a wafer, which is carried by a substrate holder 12. The substrate holder 12 is displaced by a wafer or substrate displacement drive 12a.

(22) FIG. 1 schematically illustrates, between the reticle 10 and the projection optical unit 7, a ray beam 13 of the illumination light 3 that enters into the projection optical unit and, between the projection optical unit 7 and the substrate 11, a ray beam 14 of the illumination light 3 that emerges from the projection optical unit 7. An image field-side numerical aperture (NA) of the projection optical unit 7 is not reproduced to scale in FIG. 1.

(23) The projection exposure apparatus 1 is of the scanner type. Both the reticle 10 and the substrate 11 are scanned in the y-direction during the operation of the projection exposure apparatus 1. A stepper type of the projection exposure apparatus 1, in which a stepwise displacement of the reticle 10 and of the substrate 11 in the y-direction is effected between individual exposures of the substrate 11, is also possible. These displacements are effected synchronously to one another by an appropriate actuation of the displacement drives 10b and 12a.

(24) FIG. 2 shows the optical design of a first embodiment of the projection optical unit 7. FIG. 2 depicts the beam path of in each case three individual rays 15 emanating from a plurality of object field points which are spaced apart from one another in the y-direction in FIG. 2. What is depicted are chief rays 16, i.e. individual rays 15 which pass through the center of a pupil in a pupil plane of the projection optical unit 7, and in each case an upper coma ray and a lower coma ray of these two object field points. Proceeding from the object field 4, the chief ray 16 of a central object field point includes an angle CRAO of 5.5 with a normal of the object plane 5.

(25) The projection optical unit 7 has an image-side numerical aperture of 0.55.

(26) An entrance pupil EP is arranged in the beam path of the imaging light 3 upstream of the object field 4. Possible positions of the entrance pupil EP above the object plane 5 with the use of a reticle 10 that transmits the imaging light 3 and below the object plane 5 with the use of a reflective reticle 10 are indicated in each case in FIG. 2. This results in a divergent course of the chief rays 16 between the object field 4 and the mirror M1.

(27) The projection optical unit 7 according to FIG. 2 has a total of ten mirrors, which are numbered consecutively by M1 to M10 in the order of the beam path of the individual rays 15, proceeding from the object field 4. The projection optical unit 7 is a purely catoptric optical unit. The imaging optical unit 7 can also have a different number of mirrors, for example four mirrors, six mirrors or eight mirrors. An odd number of mirrors is also possible in the projection optical unit 7.

(28) FIG. 2 illustrates the calculated reflection surfaces of the mirrors M1 to M10. What can be identified in the illustration according to FIG. 2 is that only a portion of these calculated reflection surfaces is used. Only this actually used region of the reflection surfaces is actually present in the real mirrors M1 to M10. These used reflection surfaces are carried in a known manner by mirror bodies (not shown).

(29) In the case of the projection optical unit 7 according to FIG. 2, the mirrors M1, M9 and M10 are embodied as normal incidence mirrors, that is to say as mirrors on which the imaging light 3 is incident with an angle of incidence that is less than 45. Overall, the projection optical unit 7 according to FIG. 2 thus has three normal incidence mirrors M1, M9 and M10. Below, these mirrors are also referred to as NI mirrors.

(30) The mirrors M2 to M8 are mirrors for grazing incidence of the illumination light 3, that is to say mirrors onto which the illumination light 3 impinges with angles of incidence that are greater than 45. A typical angle of incidence of the individual rays 15 of the imaging light 3 on the mirrors M2 to M8 for grazing incidence lies in the region of 80. Overall, the projection optical unit 7 according to FIG. 2 has exactly seven mirrors M2 to M8 for grazing incidence. Below, these mirrors are also referred to as GI mirrors.

(31) The mirrors M2 to M8 reflect the imaging light 3 such that the angles of reflection of the individual rays 15 on the respective mirrors M2 to M8 add up.

(32) The mirrors M1 to M10 carry a coating optimizing the reflectivity of the mirrors M1 to M10 for the imaging light 3. The coating can be, in particular for the GI mirrors, a ruthenium coating, a molybdenum coating or a molybdenum coating with a topmost layer of ruthenium. Other coating materials can also be used. A coating including for example a layer of molybdenum or ruthenium can be used in the case of the grazing incidence mirrors M2 to M8. The highly reflecting layers, in particular of the mirrors M1, M9 and M10 for normal incidence, can be configured as multi-ply layers, wherein successive layers can be manufactured from different materials. Alternating material layers can also be used. A typical multi-ply layer can have fifty bilayers, respectively made of a layer of molybdenum and a layer of silicon.

(33) Information concerning reflection at a GI mirror (grazing incidence mirror) can be found in WO 2012/126867 A. Further information concerning the reflectivity of NI mirrors (normal incidence mirrors) can be found in DE 101 55 711 A.

(34) An overall reflectivity or system transmission of the projection optical unit 7, emerging as a product of the reflectivities of all mirrors M1 to M10 of the projection optical unit 7, is approximately R=8.49%.

(35) The mirror M10, that is to say the last mirror upstream of the image field 8 in the imaging beam path, has a passage opening 17 for the passage of the imaging light 3 which is reflected from the antepenultimate mirror M8 toward the penultimate mirror M9. The mirror M10 is used in a reflective manner around the passage opening 17. None of the other mirrors M1 to M9 have passage openings and the mirrors are used in a reflective manner in a continuous region without gaps.

(36) The mirrors M1 to M10 are embodied as free-form surfaces which cannot be described by a rotationally symmetric function. Other embodiments of the projection optical unit 7, in which at least one of the mirrors M1 to M10 is embodied as a rotationally symmetric asphere, are also possible. It is also possible for all mirrors M1 to M10 to be embodied as such aspheres.

(37) A free-form surface can be described by the following free-form surface equation (equation 1):

(38) $\begin{matrix} Z = \frac{c_{x} x^{2} + c_{y} y^{2}}{1 + \sqrt{1 - (1 + k_{x}) {(c_{x} x)}^{2} - (1 + k_{y}) {(c_{y} y)}^{2}}} + C_{1} x + C_{2} y + C_{3} x^{2} + C_{4} xy + C_{5} y^{2} + C_{6} x^{3} + C_{9} y^{3} + C_{10} x^{4} + .Math. + C_{12} x^{2} y^{2} + {.Math.C}_{14} y^{4} + C_{15} x^{5} + .Math. + C_{20} y^{5} + C_{21} x^{6} + .Math. + C_{24} x^{3} y^{3} + .Math. + C_{27} y^{6} + .Math. & (1) \end{matrix}$

(39) The following applies to the parameters of this equation (1):

(40) Z is the sag of the free-form surface at the point x, y, where x.sup.2+y.sup.2=r.sup.2. Here, r is the distance from the reference axis of the free-form equation
(x=0; y=0).

(41) In the free-form surface equation (1), C.sub.1, C.sub.2, C.sub.3 . . . denote the coefficients of the free-form surface series expansion in powers of x and y.

(42) In the case of a conical base area, c.sub.x, c.sub.y is a constant corresponding to the vertex curvature of a corresponding asphere. Thus, c.sub.x=1/R.sub.x and c.sub.y=1/R.sub.y applies. Here, k.sub.x and k.sub.y each correspond to a conical constant of a corresponding asphere. Thus, equation (1) describes a biconical free-form surface.

(43) An alternative possible free-form surface can be generated from a rotationally symmetric reference surface. Such free-form surfaces for reflection surfaces of the mirrors of projection optical units of microlithographic projection exposure apparatuses are known from US 2007 0 058 269 A1.

(44) Alternatively, free-form surfaces can also be described with the aid of two-dimensional spline surfaces. Examples for this are Bezier curves or non-uniform rational basis splines (NURBS). By way of example, two-dimensional spline surfaces can be described by a grid of points in an xy-plane and associated z-values, or by these points and gradients associated therewith. Depending on the respective type of the spline surface, the complete surface is obtained by interpolation between the grid points using for example polynomials or functions which have specific properties in respect of the continuity and the differentiability thereof. Examples for this are analytical functions.

(45) FIG. 5A shows marginal contours of the reflection surfaces impinged on in each case by the imaging light 3 on the mirrors M1 to M10 of the projection optical unit 7, that is to say the so-called footprints of the mirrors M1 to M10. These marginal contours are in each case depicted in an x/y-diagram, which corresponds to the local x- and y-coordinates of the respective mirror M1 to M10. The illustrations are to scale in millimeters. Moreover, the form of the passage opening 17 is depicted in the illustration relating to the mirror M10.

(46) The two tables below summarize the parameters Maximum angle of incidence, Extent of the reflection surface in the x-direction, Extent of the reflection surface in the y-direction and Maximum mirror diameter for the mirrors M1 to M10.

(47) TABLE-US-00001 M1 M2 M3 M4 M5 Maximum angle of 12.0 83.3 78.4 81.9 81.0 incidence [] Extent of the reflection 684.0 419.4 360.4 310.9 369.2 surface in the x-direction [mm] Extent of the reflection 278.6 353.5 256.2 289.9 340.8 surface in the y-direction [mm] Maximum mirror 684.3 437.3 364.4 359.4 398.8 diameter [mm] M6 M7 M8 M9 M10 Maximum angle of 81.7 80.8 78.8 21.2 8.1 incidence [] Extent of the reflection 387.2 372.1 322.2 350.8 924.0 surface in the x-direction [mm] Extent of the reflection 195.6 107.2 208.7 170.7 897.6 surface in the y-direction [mm] Maximum mirror 388.2 372.1 322.3 350.9 924.2 diameter [mm]

(48) The mirror M10 that predefines the image-side numerical aperture has the largest maximum mirror diameter, with a diameter of 924.2 mm. None of the other mirrors M1 to M9 has a maximum diameter that is greater than 700 mm. Eight of the ten mirrors, namely the mirrors M2 to M9, have a maximum mirror diameter that is less than 450 mm. Seven of the ten mirrors, namely the mirrors M3 to M9, have a maximum mirror diameter that is less than 400 mm.

(49) The optical design data of the reflection surfaces of the mirrors M1 to M10 of the projection optical unit 7 can be gathered from the following tables. These optical design data in each case proceed from the image plane 9, i.e. describe the respective projection optical unit in the reverse propagation direction of the imaging light 3 between the image plane 9 and the object plane 5.

(50) The first of these tables provides an overview of the design data of the projection optical unit 7 and summarizes the numerical aperture NA, the calculated design wavelength for the imaging light, the dimensions of the image field in the x-direction and y-direction, image field curvature and stop locations. This curvature is defined as the inverse radius of curvature of the field.

(51) The image field 8 has an x-extent of two-times 13 mm and a y-extent of 1 mm. The projection optical unit 7 is optimized for an operating wavelength of the illumination light 3 of 13.5 nm.

(52) The second of these tables indicates vertex point radii (Radius_x=R.sub.x, Radius_y=R.sub.y) and refractive power values (Power_x, Power_y) for the optical surfaces of the optical components. Negative radii values denote curves that are concave toward the incident illumination light 3 at the intersection of the respective surface with the considered plane (xz, yz) that is spanned by a surface normal at the vertex point with the respective direction of curvature (x, y). The two radii Radius_x, Radius_y may explicitly have different signs.

(53) The vertex points at each optical surface are defined as points of incidence of a guide ray which travels from an object field center to the image field 8 along a plane of symmetry x=0, i.e. the plane of the drawing of FIG. 2 (meridional plane).

(54) The refractive powers Power_x (P.sub.x), Power_y (P.sub.y) at the vertex points are defined as:

(55) $P_{x} = - \frac{2 \cos AOI}{R_{x}}$ $P_{y} = - \frac{2}{R_{y} \cos AOI}$

(56) Here, AOI denotes an angle of incidence of the guide ray with respect to the surface normal.

(57) The third table indicates for the mirrors M1 to M10 in mm the conic constants k.sub.x and k.sub.y, the vertex point radius R.sub.x (=Radius_x) and the free-form surface coefficients C.sub.n. Coefficients C.sub.n that are not tabulated have the value 0 in each case.

(58) The fourth table also indicates the magnitude along which the respective mirror, proceeding from a reference surface, was decentred (DCY) in the y-direction, and displaced (DCZ) and tilted (TLA, TLB, TLC) in the z-direction. This corresponds to a parallel shift and a tilting in the case of the freeform surface design method. Here, a displacement is carried out in the y-direction and in the z-direction in mm, and tilting is carried out about the x-axis, about the y-axis and about the z-axis. In this case, the angle of rotation is specified in degrees. Decentering is carried out first, followed by tilting. The reference surface during decentering is in each case the first surface of the specified optical design data. Decentring in the y-direction and in the z-direction in the object plane 5 is also specified for the object field 4. Besides the surfaces assigned to the individual mirrors, the image plane as first surface, the object plane as last surface and a plurality of stop surfaces (having the stop designation AS) are also tabulated in the fourth table.

(59) A first stop AS2 is arranged in a plane E.sub.AS2 in the imaging light beam path between the mirrors M4 and M5. A further stop AS (cf. FIG. 3) is arranged in the imaging light beam path between the mirrors M9 and M10 in a plane E.sub.AS. Further steps AS3 and AS4 are arranged on the mirrors M9 and M10. Alternatively, the stops AS3 and AS4 can also be arranged adjacent to and at a distance from the mirrors.

(60) The fifth table specifies the transmission data of the mirrors M10 to M1, namely the reflectivity thereof for the angle of incidence of an illumination light ray incident centrally on the respective mirror. The overall transmission is specified as a proportional factor remaining from an incident intensity after reflection at all mirrors in the projection optical unit.

(61) The sixth table indicates a boundary of the stop AS4 (surface M10) as a polygon progression in local coordinates xyz. The stop is arranged at the location of the mirror M10. As described above, the stop is decentred and tilted. The respective stop type of the polygon progression indicated is also mentioned in the last column of table 6. CLA here denotes a stop boundary that is transparent inward, that is to say toward a stop center, and is blocking outward (type aperture stop). The stop type OBS indicates a stop boundary that is blocking inward, that is to say toward a stop center, and is transparent outward (type obscuration stop). An aperture stop boundary serves to define an outer delimitation of a pupil of the projection optical unit 7. An obscuration stop serves to define an obscured region situated in the interior of the pupil. The stops AS to AS4 serve jointly both for predefining the outer boundary of the system pupil and for predefining the inner boundary of the obscuration region of the system pupil. In the embodiment of the projection optical unit 7 according to FIGS. 2 to 5, all the stops AS, AS2, AS3 and AS4 are of the type aperture stop. The stop AS4 is additionally of the type obscuration stop. A different distribution of the types aperture stop and obscuration stop among the stops of the projection optical unit is also possible.

(62) The seventh table correspondingly indicates the boundary of the stop AS3 (surface M9) as polygon progression data corresponding to table 6.

(63) The eighth table correspondingly indicates the boundary of the stop AS2 in the imaging light beam path between the mirrors M4 and M5 as polygon progression data corresponding to table 6.

(64) The ninth table correspondingly indicates the boundary of the stop AS in the imaging light beam path between the mirrors M9 and M10 as polygon progression data corresponding to table 6.

(65) A boundary of a stop surface of the stops AS to AS4 (also cf. table 6 et seq. concerning FIG. 2) results from intersection points on the stop surface of all rays of the illumination light 3 which, on the image side, propagate at selected field points in the direction of the stop surface with a complete image-side telecentric aperture. To predetermine the edge of the stop surface of the stop AS, use is made of the intersection points on the stop surface of all rays of the illumination light 3 which, on the image side, propagate from the field centre point in the direction of the stop surface with a complete image-side telecentric aperture. In the case of the other stops AS2, AS3 and AS4, the intersection points result from the use of all rays of the illumination light 3 which, on the image side, propagate from all field points of the image field 8 in the direction of the stop surface with a complete image-side telecentric aperture. In principle, there may also be a different selection of the employed image-side field points when defining the stop. The field centre point and overall field selections, specified above, are the possible extreme situations in this case.

(66) When the stop is embodied as an aperture stop, the boundary is an inner boundary. In the case of an embodiment as an obscuration stop, the boundary is an outer boundary.

(67) The respective stop AS to AS4 can lie in a plane or else be embodied three-dimensionally. The extent of the stop 18 can be smaller in the scanning direction (y) than in the cross scanning direction (x).

(68) The non-illuminated obscuration region in the system pupil can be round, elliptical, square or rectangular. Moreover, this surface in the system pupil which cannot be illuminated can be decentered in the x-direction and/or in the y-direction in relation to a center of the system pupil.

(69) TABLE-US-00002 TABLE 1 for FIG. 2 Exemplary embodiment FIG. 2 NA 0.55 Wavelength 13.5 nm Field dimension x 26.0 mm Field dimension y 1.0 mm Field curvature 0.012345 1/mm Stops AS, AS2, AS3 (on M9), AS4 (on M10)

(70) TABLE-US-00003 TABLE 2 for FIG. 2 Radius_x Power_x Radius_y Power_y Operating Surface [mm] [1/mm] [mm] [mm] mode M10 924.4981198 0.0021492 841.5674623 0.0023921 REFL M9 1845.8313982 0.0010835 356.4114777 0.0056115 REFL M8 807.7853011 0.0006289 16794.6817783 0.0004689 REFL M7 633.7019549 0.0007380 20332.8433550 0.0004206 REFL M6 1159.7877847 0.0003528 7078.0588424 0.0013813 REFL M5 7911.6202298 0.0000533 2197.1749958 0.0043148 REFL M4 6252.7176733 0.0000660 2753.7274849 0.0035212 REFL M3 1718.6984546 0.0002678 10060.7554809 0.0008638 REFL M2 1592.6268445 0.0002500 2592.5626309 0.0038746 REFL M1 2135.9876330 0.0009216 1377.1202039 0.0014756 REFL

(71) TABLE-US-00004 TABLE 3a for FIG. 2 Coeffi- cient M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 924.49811980 1845.83139800 807.78530110 C7 5.32161644e09 7.17957299e07 3.61958396e07 C9 1.2051462e08 1.48021766e06 4.61852728e08 C10 4.28738318e12 3.94779844e10 1.36275822e10 C12 3.49709402e11 2.67402017e09 4.92199166e11 C14 9.81786584e12 6.31481582e09 4.23949539e10 C16 3.40219667e15 2.74047503e12 1.12548598e12 C18 1.60335869e14 2.04228406e14 3.71761249e13 C20 1.30399612e14 3.2725238e11 2.05971586e12 C21 1.15274335e17 2.35879877e15 1.09054091e15 C23 6.9260806e17 1.00239611e14 1.70911423e15 C25 7.13524377e17 5.05529889e14 3.62622238e15 C27 1.67322747e17 1.78538542e13 7.36849912e15 C29 7.92528578e21 4.11347975e18 2.59696939e18 C31 1.27834004e20 5.83032641e17 1.25679501e17 C33 3.27119661e20 1.71591989e16 1.04543394e17 C35 1.71377495e20 1.22876874e15 3.91086555e17 C36 1.89551894e23 4.14843428e22 5.26679107e21 C38 1.11996388e22 1.06656248e19 2.8502374e20 C40 1.96750203e22 2.08419251e19 6.3260457e20 C42 1.2392523e22 8.95301505e19 4.7233819e21 C44 2.47458966e23 8.36809183e18 2.27707911e19 C46 9.77909864e27 1.02394711e22 1.39450428e23 C48 5.19824336e27 7.95041789e23 1.68839235e22 C50 5.59498452e26 8.75666056e22 2.79254271e22 C52 6.43656264e26 4.60087068e21 9.11661464e23 C54 1.96031627e26 4.50459082e20 1.98458883e22 C55 1.9734083e29 2.61667221e26 4.54521391e26 C57 1.39192995e28 1.48955085e25 1.23387971e24 C59 3.49342237e28 2.18616238e24 4.57708029e24 C61 3.79015472e28 8.50729665e24 6.06052772e24 C63 1.77868817e28 2.63725246e23 9.61661588e26 C65 2.61320106e29 1.37431086e22 9.18355997e24 C67 1.75320584e32 1.91491617e28 2.00093096e27 C69 1.49695509e32 5.27938029e27 2.16982668e27 C71 6.84912486e32 5.29216183e27 7.30096104e27 C73 1.54586906e31 4.04146338e26 4.93769708e27 C75 1.15783975e31 2.37812676e25 4.16594376e26 C77 4.14587364e32 1.20314674e24 1.62235584e25 C78 5.34426777e35 4.49836368e31 6.13330316e30 C80 4.27488688e34 1.29694668e29 1.62333428e29 C82 1.25436413e33 3.24280489e29 1.68167617e28 C84 1.71502766e33 3.00254831e29 4.89454528e28 C86 1.25734127e33 7.46446045e28 6.5895393e28 C88 5.19929261e34 5.84363659e27 1.5416679e27 C90 9.42013117e35 2.61240017e26 3.38007496e27 C92 1.00872668e38 4.95175891e33 1.78435553e32 C94 1.45968234e39 2.0913161e33 1.10022934e32 C96 2.49294655e38 9.54156933e32 1.00044858e30 C98 1.25738947e37 7.47916509e33 1.98972461e30 C100 1.6844889e37 7.35199153e30 3.47483305e30 C102 7.66863005e38 5.82871085e29 1.47027148e29 C104 1.4887687e38 2.15570834e28 2.0886266e29 C105 3.84331333e41 2.72151554e36 1.09100622e34 C107 4.50330303e40 6.8970507e35 3.91399908e34 C109 1.60900752e39 2.41557224e34 4.01031765e33 C111 2.46751199e39 1.07560857e33 1.8289791e32 C113 1.94052198e39 8.96263507e33 2.87152163e32 C115 9.9606188e40 4.77961552e32 4.19223781e33 C117 4.55475999e40 2.14647641e31 4.42634085e32 C119 9.96424428e41 6.08163641e31 4.46533131e32 C121 6.67748909e44 0 0 C123 1.35652075e43 0 0 C125 1.98636308e43 0 0 C127 1.25607622e42 0 0 C129 2.10051386e42 0 0 C131 1.77289428e42 0 0 C133 7.94693346e43 0 0 C135 1.74862061e43 0 0 C136 1.77390976e46 0 0 C138 2.00142247e45 0 0 C140 8.6258998e45 0 0 C142 1.91465627e44 0 0 C144 2.50271596e44 0 0 C146 2.03958823e44 0 0 C148 1.04613962e44 0 0 C150 3.18867421e45 0 0 C152 4.17582475e46 0 0

(72) TABLE-US-00005 TABLE 3b for FIG. 2 Coeffi- cient M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 633.70195490 1159.78778500 7911.62023000 C7 3.6838108e08 8.9762673e08 1.29208819e08 C9 1.66051547e07 5.4606184e08 4.52621083e08 C10 2.70786958e11 4.84436976e10 5.84676904e10 C12 4.05365907e10 4.4034394e11 3.29353371e11 C14 1.17570885e09 8.49494866e10 3.27657845e11 C16 5.32058235e13 1.22366579e12 4.06185258e13 C18 2.33907349e12 3.31495258e12 3.05655881e13 C20 1.03622586e11 4.74017946e12 9.90515078e14 C21 1.84951658e17 4.70815441e16 6.8177486e16 C23 1.97362743e16 5.63918759e15 1.78311332e16 C25 4.50645748e14 2.04438614e14 1.92769745e15 C27 1.22197136e13 4.46320586e14 1.11134948e15 C29 8.3397015e19 3.12037967e18 1.20925734e18 C31 5.73336291e17 2.52930984e17 2.68755339e18 C33 4.26965471e16 2.57659349e16 5.94759876e18 C35 1.12309508e15 3.62043368e16 4.78247891e18 C36 2.54002154e21 2.33285817e21 8.64176325e21 C38 6.58698589e22 6.78093367e21 2.69603122e21 C40 9.19834216e19 6.09316184e19 1.90190625e20 C42 5.20603364e18 2.48560476e18 2.06136053e20 C44 1.95177251e17 3.71987432e18 1.52178482e20 C46 5.11031274e23 2.36475219e24 1.40723013e23 C48 5.22351362e22 1.08955249e21 1.74886691e23 C50 1.29955621e20 6.28062297e21 1.31280422e22 C52 7.19352591e20 2.83502526e20 1.33189978e22 C54 3.01583882e19 4.05968238e20 5.11578136e23 C55 3.2378259e26 5.04920803e26 9.74226056e26 C57 2.56114803e26 1.66126857e24 1.25073538e25 C59 2.15568526e23 1.21962666e23 3.61644254e25 C61 7.54597503e23 7.85294647e23 6.17670028e25 C63 1.37768633e21 2.60819335e22 3.1972004e25 C65 9.91159698e22 3.82043453e22 5.14604952e26 C67 8.86143266e29 1.38719494e27 4.85096213e29 C69 2.95926995e28 1.1409927e26 1.52883817e29 C71 4.08946521e25 1.70193798e25 2.99192047e28 C73 1.1764e24 5.79647838e25 1.27326956e27 C75 1.82271068e23 1.8185183e24 2.14215183e27 C77 6.0476105e23 2.47496013e24 2.43586456e28 C78 1.46974123e31 2.48880617e30 2.2910216e30 C80 1.62035317e29 3.63910799e30 2.10355105e30 C82 2.64119709e28 1.39124488e28 3.56165247e30 C84 2.75435112e27 9.92371827e28 1.25073816e29 C86 6.06493358e26 2.9562807e27 1.02346615e29 C88 1.82794269e25 7.99387324e27 1.25693216e30 C90 8.10897778e25 1.01333935e26 6.64972771e30 C92 5.94852836e33 2.20554773e33 1.22259104e33 C94 7.23973112e32 1.10525284e31 1.24849687e32 C96 7.40539289e30 4.613537e32 3.29652704e32 C98 4.88216265e30 4.80483016e30 8.41705133e32 C100 9.65449531e28 6.23756899e30 1.57134898e31 C102 1.70876067e27 2.1445453e29 1.2032548e31 C104 2.67082934e26 2.28654521e29 3.36577402e32 C105 2.35094421e36 2.08468354e35 1.08251776e35 C107 3.37747137e34 1.04397603e34 3.142163e35 C109 7.70896596e34 2.85346997e34 8.01180965e35 C111 6.84579774e32 8.80664689e35 3.89769754e34 C113 9.31004972e32 9.19882787e33 7.80016296e34 C115 5.48180337e30 1.39857273e33 7.27970094e34 C117 9.40923091e30 2.85191959e32 3.44660803e34 C119 1.58250782e28 2.04899764e32 5.28320959e35

(73) TABLE-US-00006 TABLE 3c for FIG. 2 Coeffi- cient M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 6252.71767300 1718.69845500 1592.62684400 C7 2.02039657e07 7.72442186e08 2.81200257e07 C9 6.26194854e08 6.39011454e08 4.33420894e07 C10 1.17096485e10 5.38504965e10 2.16914992e10 C12 1.65918593e10 1.54474735e10 2.43233271e10 C14 2.6047855e11 5.67012949e11 1.0908048e09 C16 1.53352973e13 1.28128634e12 1.3249687e12 C18 6.85280998e14 3.29016521e13 2.3245033e12 C20 1.33134745e14 7.9135182e14 2.74288101e12 C21 9.63392843e16 2.23006179e16 3.54173468e16 C23 2.56356327e16 8.08610012e16 5.15456653e15 C25 4.93143601e16 1.64061139e16 1.06774698e14 C27 3.50827102e17 8.3638218e18 5.96789915e15 C29 1.32470314e18 2.06883208e18 1.70541615e18 C31 1.08456401e18 3.75046097e18 2.42446489e17 C33 3.23480928e19 1.52741866e18 4.43191025e17 C35 3.72075346e19 1.62584985e18 1.05861269e17 C36 3.85707039e21 2.85425871e21 1.53834046e21 C38 7.16357253e21 4.79674043e21 1.1251108e20 C40 1.76766744e21 6.62315222e22 1.18315789e19 C42 5.70159933e21 2.6546097e21 1.77703731e19 C44 3.65158025e21 1.5355861e20 1.37862764e20 C46 2.99726604e23 7.26058549e23 2.55922076e23 C48 4.17503344e23 9.21476496e23 1.00193833e22 C50 4.7884568e23 2.35567601e22 5.31735424e22 C52 6.91516977e24 1.35526865e22 6.79507546e22 C54 1.98546253e23 9.61975988e23 4.01660209e23 C55 1.94031018e26 1.56888015e25 1.38213528e26 C57 3.42382432e25 2.2750218e25 1.79376182e25 C59 2.2756817e25 1.23549695e25 5.94897934e25 C61 2.01539859e25 2.29974662e25 2.27901415e24 C63 4.95631548e25 8.59833428e25 2.22922414e24 C65 1.12176727e25 1.26876311e24 7.70058057e25 C67 9.06942404e28 9.3079309e28 3.74223228e28 C69 1.9957938e27 4.99157193e27 9.62902214e28 C71 3.12476201e27 1.58761398e26 2.15189986e27 C73 4.54981924e27 1.53821757e26 8.59545995e27 C75 6.59335485e28 3.62238546e27 5.36715829e27 C77 1.58015986e27 1.19949042e27 5.14863336e27 C78 4.37655985e30 2.15256015e30 6.68041182e32 C80 8.62343063e30 8.27474872e30 2.88698633e30 C82 1.3965552e29 1.85964202e29 2.97808799e30 C84 1.2610299e29 5.63075807e29 9.25513518e30 C86 4.82567841e30 7.58802797e29 2.1567675e29 C88 1.35566233e29 6.2816052e29 8.2378632e30 C90 8.35698293e31 2.48292667e29 1.8363031e29 C92 6.20912191e33 1.53848466e33 2.72722676e33 C94 3.03339233e32 5.56751434e32 9.35668771e33 C96 4.15846221e32 2.81174802e31 1.01318148e32 C98 1.20240425e31 5.69729421e31 4.31201041e32 C100 1.23999978e31 3.40400557e31 2.58821352e32 C102 1.77507014e33 9.97858945e32 6.91936623e33 C104 3.83557979e32 1.09580074e31 3.45333625e32 C105 1.52261212e35 5.38313447e37 2.4018539e36 C107 7.96360046e35 8.5583118e35 1.94949839e35 C109 2.50162343e34 3.84351739e34 2.7269109e35 C111 2.81541874e34 1.85492006e33 5.57867255e35 C113 6.28531061e34 2.60940268e33 8.0628501e35 C115 2.25293161e35 2.55655776e33 6.48059264e36 C117 7.79107372e35 1.01920129e33 2.46632816e36 C119 1.12500845e34 7.43677377e34 2.70846382e35

(74) TABLE-US-00007 TABLE 3d for FIG. 2 Coefficient M1 KY 0.00000000 KX 0.00000000 RX 2135.98763300 C7 3.62667214e08 C9 8.77001096e09 C10 7.9878408e12 C12 3.57622422e11 C14 5.67666306e11 C16 1.00670933e14 C18 6.43363507e14 C20 3.49263438e14 C21 1.83622059e18 C23 1.63146414e17 C25 2.33281554e16 C27 2.13403252e16 C29 7.17734463e22 C31 7.76916167e20 C33 2.45391831e19 C35 9.06895125e19 C36 2.87240432e24 C38 5.67479156e24 C40 2.53075334e22 C42 2.33441297e22 C44 4.90816027e21 C46 1.82993123e26 C48 1.40735408e25 C50 1.62994831e25 C52 4.12295522e24 C54 2.26175423e23 C55 6.84620783e30 C57 8.9211373e29 C59 3.99552919e28 C61 2.87701829e26 C63 7.90515964e26 C65 4.93963599e26 C67 8.37008672e32 C69 9.8548077e31 C71 7.50758997e30 C73 6.72582496e30 C75 2.5702957e28 C77 1.08487883e27 C78 4.88158898e36 C80 1.55182242e33 C82 1.52095525e32 C84 1.27781492e31 C86 1.81913568e30 C88 5.89459163e30 C90 2.69055495e30 C92 4.03243187e38 C94 3.64827588e36 C96 3.2629352e35 C98 1.58289449e34 C100 1.41502554e34 C102 7.52721979e33 C104 1.42550505e32 C105 9.85463233e41 C107 4.7133732e39 C109 9.62905307e38 C111 4.88592887e38 C113 5.89605443e36 C115 4.37586765e35 C117 1.2944388e34 C119 5.79847892e35

(75) TABLE-US-00008 TABLE 4a for FIG. 2 Surface DCX DCY DCZ Image 0.00000000 0.00000000 0.00000000 M10 (AS4) 0.00000000 0.00000000 805.12545493 AS 0.00000000 121.91685762 283.85220626 M9 (AS3) 0.00000000 161.70815863 113.71871405 M8 0.00000000 95.26534725 1237.21684296 M7 0.00000000 33.77425023 1447.75579022 M6 0.00000000 65.18321239 1551.64751609 M5 0.00000000 416.29245364 1699.16961083 AS2 0.00000000 446.29210651 1699.02529226 M4 0.00000000 1004.20719186 1696.34134424 M3 0.00000000 1452.13094016 1490.08513977 M2 0.00000000 1660.63260708 1219.01552868 M1 0.00000000 1898.51696847 380.25896967 Object 0.00000000 2052.66210418 2142.14593325

(76) TABLE-US-00009 TABLE 4b for FIG. 2 Surface TLA[deg] TLB[deg] TLC[de2] Image 0.00000000 0.00000000 0.00000000 M10 (AS4) 6.58193819 0.00000000 0.00000000 AS 11.93243779 180.00000000 0.00000000 M9 (AS3) 193.02365372 0.00000000 0.00000000 M8 88.30109261 0.00000000 0.00000000 M7 60.05609350 0.00000000 0.00000000 M6 34.59181790 0.00000000 0.00000000 M5 11.25728686 0.00000000 0.00000000 AS2 269.72437077 0.00000000 0.00000000 M4 12.50018064 0.00000000 0.00000000 M3 38.57896098 0.00000000 0.00000000 M2 63.29951574 0.00000000 0.00000000 M1 185.41707922 0.00000000 0.00000000 Object 0.00000000 0.00000000 0.00000000

(77) TABLE-US-00010 TABLE 5 for FIG. 2 Angle of Surface incidence [deg] Reflectivity M10 6.54595976 0.66117442 M9 0.00927824 0.66565898 M8 75.28640231 0.80872358 M7 76.47602867 0.82797480 M6 78.19600462 0.85363243 M5 77.82112299 0.84823720 M4 78.09659958 0.85221174 M3 76.69475350 0.83137235 M2 78.51548223 0.85815147 M1 10.19566395 0.65421760 Overall transmis- 0.0849

(78) TABLE-US-00011 TABLE 6 Stop polygon AS4 on M10 X[mm] Y[mm] Z[mm] Type 461.17630000 10.30450000 123.68161700 CLA 461.14370000 10.80690000 123.67061100 CLA 461.11090000 11.30930000 123.65984400 CLA 458.94680000 34.79650000 123.19019500 CLA 455.54960000 58.06020000 122.77715600 CLA 450.94270000 81.03510000 122.42063900 CLA 445.15300000 103.65790000 122.11947100 CLA 438.21120000 125.86830000 121.87186800 CLA 430.15080000 147.60870000 121.67507300 CLA 421.00830000 168.82430000 121.52571100 CLA 410.82240000 189.46380000 121.41976700 CLA 399.63390000 209.47900000 121.35274200 CLA 387.48550000 228.82490000 121.31983600 CLA 374.42100000 247.45960000 121.31578700 CLA 360.48530000 265.34480000 121.33532100 CLA 345.72420000 282.44490000 121.37301600 CLA 330.18380000 298.72750000 121.42343900 CLA 313.91070000 314.16310000 121.48136900 CLA 296.95130000 328.72480000 121.54158300 CLA 279.35240000 342.38840000 121.59932900 CLA 261.16010000 355.13180000 121.64979700 CLA 242.42050000 366.93550000 121.68877800 CLA 223.17950000 377.78180000 121.71231900 CLA 203.48240000 387.65510000 121.71685900 CLA 183.37420000 396.54150000 121.69922000 CLA 162.89950000 404.42860000 121.65654300 CLA 142.10260000 411.30570000 121.58649000 CLA 121.02740000 417.16350000 121.48711600 CLA 99.71750000 421.99390000 121.35681900 CLA 78.21660000 425.79020000 121.19454200 CLA 56.56780000 428.54670000 120.99947300 CLA 34.81460000 430.25900000 120.77135000 CLA 13.00000000 430.92370000 120.51021500 CLA 13.00000000 430.92370000 120.51021500 CLA 34.81460000 430.25900000 120.77135000 CLA 56.56780000 428.54670000 120.99947300 CLA 78.21660000 425.79020000 121.19454200 CLA 99.71750000 421.99390000 121.35681900 CLA 121.02740000 417.16350000 121.48711600 CLA 142.10260000 411.30570000 121.58649000 CLA 162.89950000 404.42860000 121.65654300 CLA 183.37420000 396.54150000 121.69922000 CLA 203.48240000 387.65510000 121.71685900 CLA 223.17950000 377.78180000 121.71231900 CLA 242.42050000 366.93550000 121.68877800 CLA 261.16010000 355.13180000 121.64979700 CLA 279.35240000 342.38840000 121.59932900 CLA 296.95130000 328.72480000 121.54158300 CLA 313.91070000 314.16310000 121.48136900 CLA 330.18380000 298.72750000 121.42343900 CLA 345.72420000 282.44490000 121.37301600 CLA 360.48530000 265.34480000 121.33532100 CLA 374.42100000 247.45960000 121.31578700 CLA 387.48550000 228.82490000 121.31983600 CLA 399.63390000 209.47900000 121.35274200 CLA 410.82240000 189.46380000 121.41976700 CLA 421.00830000 168.82430000 121.52571100 CLA 430.15080000 147.60870000 121.67507300 CLA 438.21120000 125.86830000 121.87186800 CLA 445.15300000 103.65790000 122.11947100 CLA 450.94270000 81.03510000 122.42063900 CLA 455.54960000 58.06020000 122.77715600 CLA 458.94680000 34.79650000 123.19019500 CLA 461.11090000 11.30930000 123.65984400 CLA 461.14370000 10.80690000 123.67061100 CLA 461.17630000 10.30450000 123.68161700 CLA 462.07200000 13.33840000 124.23127700 CLA 461.70020000 37.06640000 124.83493200 CLA 460.05040000 60.80860000 125.48977700 CLA 457.11670000 84.49360000 126.19215400 CLA 452.89790000 108.04900000 126.93756000 CLA 447.39740000 131.40220000 127.72066800 CLA 440.62340000 154.48080000 128.53554800 CLA 432.58870000 177.21270000 129.37563400 CLA 423.31070000 199.52670000 130.23393200 CLA 412.81130000 221.35250000 131.10306200 CLA 401.11660000 242.62130000 131.97536300 CLA 388.25720000 263.26580000 132.84316100 CLA 374.26750000 283.22060000 133.69864500 CLA 359.18570000 302.42230000 134.53401400 CLA 343.05410000 320.81000000 135.34191300 CLA 325.91810000 338.32500000 136.11492000 CLA 307.82680000 354.91130000 136.84610300 CLA 288.83230000 370.51600000 137.52897300 CLA 268.98990000 385.08880000 138.15736000 CLA 248.35740000 398.58260000 138.72547500 CLA 226.99570000 410.95380000 139.22831200 CLA 204.96780000 422.16200000 139.66114600 CLA 182.33920000 432.17040000 140.01989100 CLA 159.17740000 440.94580000 140.30093200 CLA 135.55190000 448.45910000 140.50142200 CLA 111.53350000 454.68480000 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(79) TABLE-US-00012 TABLE 7 Stop polygon AS3 on M9 X[mm] Y[mm] Z[mm] Type 4.84286400 99.11799200 13.02505600 CLA 7.85158500 99.08636500 13.03128500 CLA 10.85934400 99.01479100 13.03396300 CLA 13.86529000 98.90330900 13.03309700 CLA 16.86857600 98.75198300 13.02870000 CLA 19.86835400 98.56090100 13.02079000 CLA 22.86377600 98.33017600 13.00939400 CLA 25.85399400 98.05994200 12.99454200 CLA 28.83816300 97.75035900 12.97627200 CLA 31.81543500 97.40160900 12.95462800 CLA 34.78496400 97.01390100 12.92965900 CLA 37.74590400 96.58746300 12.90142000 CLA 40.69741000 96.12254800 12.86997200 CLA 43.63863800 95.61943400 12.83538200 CLA 46.56874100 95.07841700 12.79772100 CLA 49.48687600 94.49982100 12.75706600 CLA 52.39220000 93.88398800 12.71349900 CLA 55.28386700 93.23128500 12.66710800 CLA 58.16103600 92.54210000 12.61798300 CLA 61.02286300 91.81684200 12.56622100 CLA 63.86850500 91.05594200 12.51192300 CLA 66.69712100 90.25985100 12.45519300 CLA 69.50786800 89.42904300 12.39613800 CLA 72.29990300 88.56401000 12.33487100 CLA 75.07238700 87.66526400 12.27150700 CLA 77.82447700 86.73333900 12.20616400 CLA 80.55533200 85.76878700 12.13896300 CLA 83.26411300 84.77217700 12.07002700 CLA 85.94997800 83.74410000 11.99948200 CLA 88.61208700 82.68516400 11.92745500 CLA 91.24960200 81.59599200 11.85407600 CLA 93.86168200 80.47722800 11.77947400 CLA 96.44749000 79.32953100 11.70378200 CLA 99.00618600 78.15357600 11.62713100 CLA 101.53693500 76.95005500 11.54965500 CLA 104.03889900 75.71967300 11.47148400 CLA 106.51124400 74.46315300 11.39275200 CLA 108.95313400 73.18123000 11.31359000 CLA 111.36373800 71.87465300 11.23412900 CLA 113.74222400 70.54418400 11.15449900 CLA 116.08776400 69.19059800 11.07482700 CLA 118.39952900 67.81468200 10.99523900 CLA 120.67669700 66.41723400 10.91585800 CLA 122.91844500 64.99906200 10.83680800 CLA 125.12395600 63.56098300 10.75820500 CLA 127.29241500 62.10382700 10.68016600 CLA 129.42301300 60.62842900 10.60280200 CLA 131.51494400 59.13563200 10.52622100 CLA 133.56740800 57.62628900 10.45052900 CLA 135.57961200 56.10125500 10.37582600 CLA 137.55076900 54.56139500 10.30220800 CLA 139.48009800 53.00757600 10.22976600 CLA 141.36682700 51.44067000 10.15858700 CLA 143.21019400 49.86155100 10.08875200 CLA 145.00944500 48.27109700 10.02033800 CLA 146.76383500 46.67018700 9.95341600 CLA 148.47263400 45.05970100 9.88805200 CLA 150.13511900 43.44051700 9.82430600 CLA 151.75058600 41.81351600 9.76223200 CLA 153.31833900 40.17957300 9.70188000 CLA 154.83770000 38.53956200 9.64329100 CLA 156.30800600 36.89435500 9.58650400 CLA 157.72861100 35.24481700 9.53154900 CLA 159.09888600 33.59180900 9.47845200 CLA 160.41822100 31.93618600 9.42723300 CLA 161.68602700 30.27879600 9.37790600 CLA 162.90173400 28.62047800 9.33047800 CLA 164.06479400 26.96206400 9.28495300 CLA 165.17468100 25.30437400 9.24132800 CLA 166.23089600 23.64822000 9.19959500 CLA 167.23296000 21.99440100 9.15974000 CLA 168.18042200 20.34370400 9.12174400 CLA 169.07285800 18.69690500 9.08558600 CLA 169.90987000 17.05476300 9.05123700 CLA 170.69108900 15.41802500 9.01866400 CLA 171.41617600 13.78742200 8.98783100 CLA 172.08482000 12.16366800 8.95869900 CLA 172.69674200 10.54746200 8.93122200 CLA 173.25169300 8.93948200 8.90535300 CLA 173.74945900 7.34039300 8.88104200 CLA 174.18985600 5.75083700 8.85823500 CLA 174.57273400 4.17143900 8.83687700 CLA 174.89797700 2.60280200 8.81690800 CLA 175.16550300 1.04551200 8.79826900 CLA 175.37526600 0.49987000 8.78089700 CLA 175.52725300 2.03280000 8.76473000 CLA 175.62148800 3.55276000 8.74970400 CLA 175.65802900 5.05924900 8.73575300 CLA 175.63697200 6.55179200 8.72281100 CLA 175.55844600 8.02993500 8.71081500 CLA 175.42261700 9.49324500 8.69969700 CLA 175.38539800 9.80003000 8.69732700 CLA 175.34809200 10.10667300 8.69525000 CLA 175.15412300 11.55752300 8.68773500 CLA 174.90330200 12.99272200 8.68099300 CLA 174.59590200 14.41190500 8.67496000 CLA 174.23223100 15.81472800 8.66957100 CLA 173.81263200 17.20086900 8.66476500 CLA 173.33748100 18.57003000 8.66048000 CLA 172.80718800 19.92193100 8.65665800 CLA 172.22219700 21.25631700 8.65324100 CLA 171.58298300 22.57295200 8.65017400 CLA 170.89005200 23.87162200 8.64740500 CLA 170.14394200 25.15213000 8.64488200 CLA 169.34522100 26.41430400 8.64255700 CLA 168.49448300 27.65798500 8.64038500 CLA 167.59235100 28.88303600 8.63832200 CLA 166.63947600 30.08933900 8.63632700 CLA 165.63653300 31.27679100 8.63436300 CLA 164.58422100 32.44530500 8.63239300 CLA 163.48326100 33.59481300 8.63038500 CLA 162.33439800 34.72526000 8.62830800 CLA 161.13839400 35.83660600 8.62613300 CLA 159.89603300 36.92882800 8.62383600 CLA 158.60811400 38.00191100 8.62139200 CLA 157.27545200 39.05585700 8.61878100 CLA 155.89887800 40.09067900 8.61598400 CLA 154.47923500 41.10640100 8.61298400 CLA 153.01737700 42.10305600 8.60976600 CLA 151.51416800 43.08069100 8.60631800 CLA 149.97048100 44.03935900 8.60262700 CLA 148.38719700 44.97912400 8.59868500 CLA 146.76520100 45.90005600 8.59448400 CLA 145.10538200 46.80223400 8.59001600 CLA 143.40863300 47.68574500 8.58527800 CLA 141.67584700 48.55068000 8.58026500 CLA 139.90791900 49.39713900 8.57497400 CLA 138.10574000 50.22522400 8.56940300 CLA 136.27020000 51.03504600 8.56355300 CLA 134.40218600 51.82671600 8.55742300 CLA 132.50257900 52.60035400 8.55101300 CLA 130.57225300 53.35607900 8.54432600 CLA 128.61207800 54.09401600 8.53736300 CLA 126.62291300 54.81429200 8.53012900 CLA 124.60561000 55.51703600 8.52262400 CLA 122.56100900 56.20238000 8.51485500 CLA 120.48994200 56.87045700 8.50682400 CLA 118.39322700 57.52140200 8.49853600 CLA 116.27167300 58.15535000 8.48999600 CLA 114.12607300 58.77243800 8.48121000 CLA 111.95721000 59.37280200 8.47218200 CLA 109.76585200 59.95657900 8.46291800 CLA 107.55275100 60.52390700 8.45342400 CLA 105.31864900 61.07492200 8.44370700 CLA 103.06426900 61.60976000 8.43377100 CLA 100.79032200 62.12855600 8.42362400 CLA 98.49750200 62.63144500 8.41327300 CLA 96.18649100 63.11855800 8.40272300 CLA 93.85795200 63.59002800 8.39198300 CLA 91.51253500 64.04598500 8.38105800 CLA 89.15087400 64.48655600 8.36995600 CLA 86.77358900 64.91186800 8.35868400 CLA 84.38128500 65.32204300 8.34725000 CLA 81.97455100 65.71720500 8.33566100 CLA 78.45385800 66.27039900 8.31981800 CLA 76.01539200 66.63736900 8.30974800 CLA 73.56432400 66.98967000 8.29955700 CLA 71.10119300 67.32741100 8.28925400 CLA 67.51185900 67.79723300 8.27551900 CLA 65.02213500 68.10760200 8.26679900 CLA 62.52204800 68.40372000 8.25799800 CLA 60.01208900 68.68568400 8.24912300 CLA 57.49274100 68.95358600 8.24018000 CLA 56.36541400 69.07342900 8.23728900 CLA 53.83371600 69.32874400 8.23006100 CLA 51.29372900 69.57017000 8.22278900 CLA 48.74590700 69.79778900 8.21547800 CLA 46.19069200 70.01168000 8.20813500 CLA 45.05275500 70.10458800 8.20539400 CLA 42.48779600 70.30617100 8.19979100 CLA 39.91648700 70.49416600 8.19417400 CLA 37.33924700 70.66863900 8.18855000 CLA 34.75648600 70.82965300 8.18292200 CLA 31.02012900 71.04435900 8.17624900 CLA 28.42562400 71.17993400 8.17239700 CLA 25.82698800 71.30220600 8.16856000 CLA 23.22460800 71.41121700 8.16474300 CLA 20.61886600 71.50700800 8.16094900 CLA 19.46491600 71.54680900 8.15967700 CLA 16.85499600 71.63071000 8.15767300 CLA 14.24266800 71.70145500 8.15570100 CLA 11.62830600 71.75906800 8.15376400 CLA 9.01227700 71.80357000 8.15186200 CLA 6.39495000 71.83497800 8.14999800 CLA 5.23741300 71.84868600 8.15017200 CLA 2.61888900 71.86829900 8.15011200 CLA 0.00000000 71.87483500 8.15009100 CLA 2.61888900 71.86829900 8.15011200 CLA 5.23741300 71.84868600 8.15017200 CLA 6.39495000 71.83497800 8.14999800 CLA 9.01227700 71.80357000 8.15186200 CLA 11.62830600 71.75906800 8.15376400 CLA 14.24266800 71.70145500 8.15570100 CLA 16.85499600 71.63071000 8.15767300 CLA 19.46491600 71.54680900 8.15967700 CLA 20.61886600 71.50700800 8.16094900 CLA 23.22460800 71.41121700 8.16474300 CLA 25.82698800 71.30220600 8.16856000 CLA 28.42562400 71.17993400 8.17239700 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63.59002800 8.39198300 CLA 96.18649100 63.11855800 8.40272300 CLA 98.49750200 62.63144500 8.41327300 CLA 100.79032200 62.12855600 8.42362400 CLA 103.06426900 61.60976000 8.43377100 CLA 105.31864900 61.07492200 8.44370700 CLA 107.55275100 60.52390700 8.45342400 CLA 109.76585200 59.95657900 8.46291800 CLA 111.95721000 59.37280200 8.47218200 CLA 114.12607300 58.77243800 8.48121000 CLA 116.27167300 58.15535000 8.48999600 CLA 118.39322700 57.52140200 8.49853600 CLA 120.48994200 56.87045700 8.50682400 CLA 122.56100900 56.20238000 8.51485500 CLA 124.60561000 55.51703600 8.52262400 CLA 126.62291300 54.81429200 8.53012900 CLA 128.61207800 54.09401600 8.53736300 CLA 130.57225300 53.35607900 8.54432600 CLA 132.50257900 52.60035400 8.55101300 CLA 134.40218600 51.82671600 8.55742300 CLA 136.27020000 51.03504600 8.56355300 CLA 138.10574000 50.22522400 8.56940300 CLA 139.90791900 49.39713900 8.57497400 CLA 141.67584700 48.55068000 8.58026500 CLA 143.40863300 47.68574500 8.58527800 CLA 145.10538200 46.80223400 8.59001600 CLA 146.76520100 45.90005600 8.59448400 CLA 148.38719700 44.97912400 8.59868500 CLA 149.97048100 44.03935900 8.60262700 CLA 151.51416800 43.08069100 8.60631800 CLA 153.01737700 42.10305600 8.60976600 CLA 154.47923500 41.10640100 8.61298400 CLA 155.89887800 40.09067900 8.61598400 CLA 157.27545200 39.05585700 8.61878100 CLA 158.60811400 38.00191100 8.62139200 CLA 159.89603300 36.92882800 8.62383600 CLA 161.13839400 35.83660600 8.62613300 CLA 162.33439800 34.72526000 8.62830800 CLA 163.48326100 33.59481300 8.63038500 CLA 164.58422100 32.44530500 8.63239300 CLA 165.63653300 31.27679100 8.63436300 CLA 166.63947600 30.08933900 8.63632700 CLA 167.59235100 28.88303600 8.63832200 CLA 168.49448300 27.65798500 8.64038500 CLA 169.34522100 26.41430400 8.64255700 CLA 170.14394200 25.15213000 8.64488200 CLA 170.89005200 23.87162200 8.64740500 CLA 171.58298300 22.57295200 8.65017400 CLA 172.22219700 21.25631700 8.65324100 CLA 172.80718800 19.92193100 8.65665800 CLA 173.33748100 18.57003000 8.66048000 CLA 173.81263200 17.20086900 8.66476500 CLA 174.23223100 15.81472800 8.66957100 CLA 174.59590200 14.41190500 8.67496000 CLA 174.90330200 12.99272200 8.68099300 CLA 175.15412300 11.55752300 8.68773500 CLA 175.34809200 10.10667300 8.69525000 CLA 175.38539800 9.80003000 8.69732700 CLA 175.42261700 9.49324500 8.69969700 CLA 175.55844600 8.02993500 8.71081500 CLA 175.63697200 6.55179200 8.72281100 CLA 175.65802900 5.05924900 8.73575300 CLA 175.62148800 3.55276000 8.74970400 CLA 175.52725300 2.03280000 8.76473000 CLA 175.37526600 0.49987000 8.78089700 CLA 175.16550300 1.04551200 8.79826900 CLA 174.89797700 2.60280200 8.81690800 CLA 174.57273400 4.17143900 8.83687700 CLA 174.18985600 5.75083700 8.85823500 CLA 173.74945900 7.34039300 8.88104200 CLA 173.25169300 8.93948200 8.90535300 CLA 172.69674200 10.54746200 8.93122200 CLA 172.08482000 12.16366800 8.95869900 CLA 171.41617600 13.78742200 8.98783100 CLA 170.69108900 15.41802500 9.01866400 CLA 169.90987000 17.05476300 9.05123700 CLA 169.07285800 18.69690500 9.08558600 CLA 168.18042200 20.34370400 9.12174400 CLA 167.23296000 21.99440100 9.15974000 CLA 166.23089600 23.64822000 9.19959500 CLA 165.17468100 25.30437400 9.24132800 CLA 164.06479400 26.96206400 9.28495300 CLA 162.90173400 28.62047800 9.33047800 CLA 161.68602700 30.27879600 9.37790600 CLA 160.41822100 31.93618600 9.42723300 CLA 159.09888600 33.59180900 9.47845200 CLA 157.72861100 35.24481700 9.53154900 CLA 156.30800600 36.89435500 9.58650400 CLA 154.83770000 38.53956200 9.64329100 CLA 153.31833900 40.17957300 9.70188000 CLA 151.75058600 41.81351600 9.76223200 CLA 150.13511900 43.44051700 9.82430600 CLA 148.47263400 45.05970100 9.88805200 CLA 146.76383500 46.67018700 9.95341600 CLA 145.00944500 48.27109700 10.02033800 CLA 143.21019400 49.86155100 10.08875200 CLA 141.36682700 51.44067000 10.15858700 CLA 139.48009800 53.00757600 10.22976600 CLA 137.55076900 54.56139500 10.30220800 CLA 135.57961200 56.10125500 10.37582600 CLA 133.56740800 57.62628900 10.45052900 CLA 131.51494400 59.13563200 10.52622100 CLA 129.42301300 60.62842900 10.60280200 CLA 127.29241500 62.10382700 10.68016600 CLA 125.12395600 63.56098300 10.75820500 CLA 122.91844500 64.99906200 10.83680800 CLA 120.67669700 66.41723400 10.91585800 CLA 118.39952900 67.81468200 10.99523900 CLA 116.08776400 69.19059800 11.07482700 CLA 113.74222400 70.54418400 11.15449900 CLA 111.36373800 71.87465300 11.23412900 CLA 108.95313400 73.18123000 11.31359000 CLA 106.51124400 74.46315300 11.39275200 CLA 104.03889900 75.71967300 11.47148400 CLA 101.53693500 76.95005500 11.54965500 CLA 99.00618600 78.15357600 11.62713100 CLA 96.44749000 79.32953100 11.70378200 CLA 93.86168200 80.47722800 11.77947400 CLA 91.24960200 81.59599200 11.85407600 CLA 88.61208700 82.68516400 11.92745500 CLA 85.94997800 83.74410000 11.99948200 CLA 83.26411300 84.77217700 12.07002700 CLA 80.55533200 85.76878700 12.13896300 CLA 77.82447700 86.73333900 12.20616400 CLA 75.07238700 87.66526400 12.27150700 CLA 72.29990300 88.56401000 12.33487100 CLA 69.50786800 89.42904300 12.39613800 CLA 66.69712100 90.25985100 12.45519300 CLA 63.86850500 91.05594200 12.51192300 CLA 61.02286300 91.81684200 12.56622100 CLA 58.16103600 92.54210000 12.61798300 CLA 55.28386700 93.23128500 12.66710800 CLA 52.39220000 93.88398800 12.71349900 CLA 49.48687600 94.49982100 12.75706600 CLA 46.56874100 95.07841700 12.79772100 CLA 43.63863800 95.61943400 12.83538200 CLA 40.69741000 96.12254800 12.86997200 CLA 37.74590400 96.58746300 12.90142000 CLA 34.78496400 97.01390100 12.92965900 CLA 31.81543500 97.40160900 12.95462800 CLA 28.83816300 97.75035900 12.97627200 CLA 25.85399400 98.05994200 12.99454200 CLA 22.86377600 98.33017600 13.00939400 CLA 19.86835400 98.56090100 13.02079000 CLA 16.86857600 98.75198300 13.02870000 CLA 13.86529000 98.90330900 13.03309700 CLA 10.85934400 99.01479100 13.03396300 CLA 7.85158500 99.08636500 13.03128500 CLA 4.84286400 99.11799200 13.02505600 CLA

(80) TABLE-US-00013 TABLE 8 Stop polygon AS2 X[mm] Y[mm] Z[mm] Type 0.00000000 51.07217300 0.00000000 CLA 2.66162300 51.05712900 0.00000000 CLA 5.32262300 51.01202200 0.00000000 CLA 7.98237900 50.93692400 0.00000000 CLA 10.64026700 50.83195500 0.00000000 CLA 13.29566300 50.69728600 0.00000000 CLA 16.66141500 50.51366500 0.00000000 CLA 19.31292800 50.34884700 0.00000000 CLA 21.96055600 50.15484900 0.00000000 CLA 24.60366900 49.93198400 0.00000000 CLA 27.24163700 49.68060900 0.00000000 CLA 29.87382300 49.40112300 0.00000000 CLA 32.49958900 49.09397300 0.00000000 CLA 35.11829400 48.75964300 0.00000000 CLA 37.72929300 48.39866000 0.00000000 CLA 40.33193500 48.01158900 0.00000000 CLA 42.92556700 47.59903300 0.00000000 CLA 46.28092200 47.05364500 0.00000000 CLA 48.86277100 46.61658100 0.00000000 CLA 51.43416400 46.15546400 0.00000000 CLA 53.99443400 45.67100300 0.00000000 CLA 56.54291400 45.16393500 0.00000000 CLA 59.07892900 44.63502300 0.00000000 CLA 61.60180100 44.08505900 0.00000000 CLA 64.11084700 43.51485800 0.00000000 CLA 66.60538000 42.92525600 0.00000000 CLA 69.08470900 42.31710800 0.00000000 CLA 71.54813700 41.69128700 0.00000000 CLA 73.99496400 41.04868100 0.00000000 CLA 77.32711100 40.16178300 0.00000000 CLA 79.75318800 39.50583000 0.00000000 CLA 82.16115000 38.83509200 0.00000000 CLA 84.55029100 38.15048500 0.00000000 CLA 86.91990000 37.45293200 0.00000000 CLA 89.26926400 36.74335900 0.00000000 CLA 91.59766700 36.02268900 0.00000000 CLA 93.90439200 35.29184800 0.00000000 CLA 96.18871900 34.55175500 0.00000000 CLA 98.44992800 33.80332300 0.00000000 CLA 100.68729600 33.04745700 0.00000000 CLA 102.90010300 32.28505400 0.00000000 CLA 105.08762600 31.51699400 0.00000000 CLA 107.24914300 30.74414800 0.00000000 CLA 110.53967800 29.56667400 0.00000000 CLA 112.66988600 28.79613300 0.00000000 CLA 114.77260000 28.02271900 0.00000000 CLA 116.84710900 27.24724600 0.00000000 CLA 118.89270500 26.47050500 0.00000000 CLA 120.90868100 25.69326600 0.00000000 CLA 122.89433700 24.91627500 0.00000000 CLA 124.84897500 24.14025500 0.00000000 CLA 126.77190300 23.36590300 0.00000000 CLA 128.66243200 22.59388900 0.00000000 CLA 130.51988200 21.82485700 0.00000000 CLA 132.34357700 21.05942300 0.00000000 CLA 134.13284800 20.29817500 0.00000000 CLA 139.12975100 18.15044400 0.00000000 CLA 140.84325800 17.41013300 0.00000000 CLA 142.52041200 16.67583600 0.00000000 CLA 144.16058200 15.94802200 0.00000000 CLA 145.76315200 15.22712800 0.00000000 CLA 147.32751100 14.51356500 0.00000000 CLA 148.85306200 13.80771400 0.00000000 CLA 150.33921700 13.10992800 0.00000000 CLA 151.78540100 12.42053200 0.00000000 CLA 153.19104900 11.73982500 0.00000000 CLA 157.77094000 9.51969600 0.00000000 CLA 159.08933500 8.87263300 0.00000000 CLA 160.36567200 8.23521200 0.00000000 CLA 161.59944400 7.60762000 0.00000000 CLA 162.79016200 6.99001600 0.00000000 CLA 168.25884800 4.10019400 0.00000000 CLA 169.31360100 3.53291500 0.00000000 CLA 170.32361200 2.97624700 0.00000000 CLA 171.28847200 2.43022900 0.00000000 CLA 172.20778900 1.89488100 0.00000000 CLA 173.08118800 1.37020400 0.00000000 CLA 173.90830900 0.85618200 0.00000000 CLA 174.68881100 0.35278100 0.00000000 CLA 175.42236900 0.14004600 0.00000000 CLA 176.10867700 0.62236100 0.00000000 CLA 176.74744700 1.09424200 0.00000000 CLA 177.33840900 1.55577700 0.00000000 CLA 177.88131100 2.00706600 0.00000000 CLA 178.37592300 2.44822100 0.00000000 CLA 178.82203000 2.87936300 0.00000000 CLA 179.21943900 3.30062300 0.00000000 CLA 179.56797700 3.71213700 0.00000000 CLA 179.86749000 4.11405300 0.00000000 CLA 180.11784600 4.50652200 0.00000000 CLA 180.31893000 4.88970200 0.00000000 CLA 180.47065100 5.26375500 0.00000000 CLA 180.57293600 5.62884900 0.00000000 CLA 180.62573500 5.98515500 0.00000000 CLA 180.62901800 6.33284500 0.00000000 CLA 180.33196700 9.56040600 0.00000000 CLA 180.27786300 9.81759200 0.00000000 CLA 180.17435700 10.06691200 0.00000000 CLA 180.02149000 10.30860600 0.00000000 CLA 179.81932900 10.54291500 0.00000000 CLA 179.56796000 10.77007600 0.00000000 CLA 179.26749000 10.99032400 0.00000000 CLA 178.91804700 11.20389000 0.00000000 CLA 178.51978200 11.41100300 0.00000000 CLA 178.07286600 11.61188400 0.00000000 CLA 177.57749000 11.80675200 0.00000000 CLA 177.03386800 11.99581700 0.00000000 CLA 176.44223200 12.17928800 0.00000000 CLA 175.80283600 12.35736300 0.00000000 CLA 175.11595400 12.53023600 0.00000000 CLA 174.38187900 12.69809300 0.00000000 CLA 173.60092400 12.86111400 0.00000000 CLA 172.77342100 13.01947100 0.00000000 CLA 171.89972000 13.17333000 0.00000000 CLA 170.98019200 13.32284900 0.00000000 CLA 170.01522300 13.46817800 0.00000000 CLA 169.00522000 13.60946100 0.00000000 CLA 167.95060400 13.74683400 0.00000000 CLA 166.85181400 13.88042800 0.00000000 CLA 165.70930800 14.01036400 0.00000000 CLA 164.52355600 14.13675900 0.00000000 CLA 163.29504700 14.25972400 0.00000000 CLA 162.02428100 14.37936100 0.00000000 CLA 160.71177700 14.49576800 0.00000000 CLA 159.35806500 14.60903800 0.00000000 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18.06652700 0.00000000 CLA 37.30221200 18.07669900 0.00000000 CLA 34.65069400 18.08508600 0.00000000 CLA 31.99491000 18.09168300 0.00000000 CLA 29.33547200 18.09648300 0.00000000 CLA 26.67299600 18.09947600 0.00000000 CLA 24.00809900 18.10065300 0.00000000 CLA 24.00809900 18.10065300 0.00000000 CLA 26.67299600 18.09947600 0.00000000 CLA 29.33547200 18.09648300 0.00000000 CLA 31.99491000 18.09168300 0.00000000 CLA 34.65069400 18.08508600 0.00000000 CLA 37.30221200 18.07669900 0.00000000 CLA 39.94885600 18.06652700 0.00000000 CLA 42.59001700 18.05457500 0.00000000 CLA 45.22509000 18.04084600 0.00000000 CLA 47.85346800 18.02534000 0.00000000 CLA 50.47454600 18.00805700 0.00000000 CLA 53.08772000 17.98899400 0.00000000 CLA 55.69238400 17.96814600 0.00000000 CLA 58.28792900 17.94551000 0.00000000 CLA 60.87374900 17.92107700 0.00000000 CLA 63.44923300 17.89484000 0.00000000 CLA 66.01376800 17.86678700 0.00000000 CLA 68.56673900 17.83690900 0.00000000 CLA 71.10752900 17.80519100 0.00000000 CLA 73.63551600 17.77162000 0.00000000 CLA 76.15007600 17.73618100 0.00000000 CLA 78.65057900 17.69885600 0.00000000 CLA 81.13639500 17.65962900 0.00000000 CLA 83.60688700 17.61847900 0.00000000 CLA 86.06141500 17.57538800 0.00000000 CLA 88.49933400 17.53033300 0.00000000 CLA 90.91999500 17.48329300 0.00000000 CLA 93.32274600 17.43424400 0.00000000 CLA 95.70692900 17.38316200 0.00000000 CLA 98.07188300 17.33002300 0.00000000 CLA 100.41694300 17.27479900 0.00000000 CLA 102.74144100 17.21746500 0.00000000 CLA 105.04470300 17.15799200 0.00000000 CLA 107.32605400 17.09635200 0.00000000 CLA 109.58481400 17.03251500 0.00000000 CLA 111.82030400 16.96645000 0.00000000 CLA 114.03183800 16.89812500 0.00000000 CLA 116.21873100 16.82751000 0.00000000 CLA 118.38029500 16.75456800 0.00000000 CLA 120.51584300 16.67926800 0.00000000 CLA 122.62468400 16.60157100 0.00000000 CLA 124.70613000 16.52144200 0.00000000 CLA 126.75949200 16.43884200 0.00000000 CLA 128.78408300 16.35373200 0.00000000 CLA 130.77921500 16.26607100 0.00000000 CLA 132.74420600 16.17581600 0.00000000 CLA 134.67837300 16.08292400 0.00000000 CLA 136.58103900 15.98734800 0.00000000 CLA 138.45153000 15.88904100 0.00000000 CLA 140.28917500 15.78795200 0.00000000 CLA 148.77551600 15.32076500 0.00000000 CLA 150.40176700 15.22729100 0.00000000 CLA 151.99086900 15.13119100 0.00000000 CLA 153.54220900 15.03240400 0.00000000 CLA 155.05518600 14.93086500 0.00000000 CLA 156.52920600 14.82650700 0.00000000 CLA 157.96368900 14.71925700 0.00000000 CLA 159.35806500 14.60903800 0.00000000 CLA 160.71177700 14.49576800 0.00000000 CLA 162.02428100 14.37936100 0.00000000 CLA 163.29504700 14.25972400 0.00000000 CLA 164.52355600 14.13675900 0.00000000 CLA 165.70930800 14.01036400 0.00000000 CLA 166.85181400 13.88042800 0.00000000 CLA 167.95060400 13.74683400 0.00000000 CLA 169.00522000 13.60946100 0.00000000 CLA 170.01522300 13.46817800 0.00000000 CLA 170.98019200 13.32284900 0.00000000 CLA 171.89972000 13.17333000 0.00000000 CLA 172.77342100 13.01947100 0.00000000 CLA 173.60092400 12.86111400 0.00000000 CLA 174.38187900 12.69809300 0.00000000 CLA 175.11595400 12.53023600 0.00000000 CLA 175.80283600 12.35736300 0.00000000 CLA 176.44223200 12.17928800 0.00000000 CLA 177.03386800 11.99581700 0.00000000 CLA 177.57749000 11.80675200 0.00000000 CLA 178.07286600 11.61188400 0.00000000 CLA 178.51978200 11.41100300 0.00000000 CLA 178.91804700 11.20389000 0.00000000 CLA 179.26749000 10.99032400 0.00000000 CLA 179.56796000 10.77007600 0.00000000 CLA 179.81932900 10.54291500 0.00000000 CLA 180.02149000 10.30860600 0.00000000 CLA 180.17435700 10.06691200 0.00000000 CLA 180.27786300 9.81759200 0.00000000 CLA 180.33196700 9.56040600 0.00000000 CLA 180.62901800 6.33284500 0.00000000 CLA 180.62573500 5.98515500 0.00000000 CLA 180.57293600 5.62884900 0.00000000 CLA 180.47065100 5.26375500 0.00000000 CLA 180.31893000 4.88970200 0.00000000 CLA 180.11784600 4.50652200 0.00000000 CLA 179.86749000 4.11405300 0.00000000 CLA 179.56797700 3.71213700 0.00000000 CLA 179.21943900 3.30062300 0.00000000 CLA 178.82203000 2.87936300 0.00000000 CLA 178.37592300 2.44822100 0.00000000 CLA 177.88131100 2.00706600 0.00000000 CLA 177.33840900 1.55577700 0.00000000 CLA 176.74744700 1.09424200 0.00000000 CLA 176.10867700 0.62236100 0.00000000 CLA 175.42236900 0.14004600 0.00000000 CLA 174.68881100 0.35278100 0.00000000 CLA 173.90830900 0.85618200 0.00000000 CLA 173.08118800 1.37020400 0.00000000 CLA 172.20778900 1.89488100 0.00000000 CLA 171.28847200 2.43022900 0.00000000 CLA 170.32361200 2.97624700 0.00000000 CLA 169.31360100 3.53291500 0.00000000 CLA 168.25884800 4.10019400 0.00000000 CLA 162.79016200 6.99001600 0.00000000 CLA 161.59944400 7.60762000 0.00000000 CLA 160.36567200 8.23521200 0.00000000 CLA 159.08933500 8.87263300 0.00000000 CLA 157.77094000 9.51969600 0.00000000 CLA 153.19104900 11.73982500 0.00000000 CLA 151.78540100 12.42053200 0.00000000 CLA 150.33921700 13.10992800 0.00000000 CLA 148.85306200 13.80771400 0.00000000 CLA 147.32751100 14.51356500 0.00000000 CLA 145.76315200 15.22712800 0.00000000 CLA 144.16058200 15.94802200 0.00000000 CLA 142.52041200 16.67583600 0.00000000 CLA 140.84325800 17.41013300 0.00000000 CLA 139.12975100 18.15044400 0.00000000 CLA 134.13284800 20.29817500 0.00000000 CLA 132.34357700 21.05942300 0.00000000 CLA 130.51988200 21.82485700 0.00000000 CLA 128.66243200 22.59388900 0.00000000 CLA 126.77190300 23.36590300 0.00000000 CLA 124.84897500 24.14025500 0.00000000 CLA 122.89433700 24.91627500 0.00000000 CLA 120.90868100 25.69326600 0.00000000 CLA 118.89270500 26.47050500 0.00000000 CLA 116.84710900 27.24724600 0.00000000 CLA 114.77260000 28.02271900 0.00000000 CLA 112.66988600 28.79613300 0.00000000 CLA 110.53967800 29.56667400 0.00000000 CLA 107.24914300 30.74414800 0.00000000 CLA 105.08762600 31.51699400 0.00000000 CLA 102.90010300 32.28505400 0.00000000 CLA 100.68729600 33.04745700 0.00000000 CLA 98.44992800 33.80332300 0.00000000 CLA 96.18871900 34.55175500 0.00000000 CLA 93.90439200 35.29184800 0.00000000 CLA 91.59766700 36.02268900 0.00000000 CLA 89.26926400 36.74335900 0.00000000 CLA 86.91990000 37.45293200 0.00000000 CLA 84.55029100 38.15048500 0.00000000 CLA 82.16115000 38.83509200 0.00000000 CLA 79.75318800 39.50583000 0.00000000 CLA 77.32711100 40.16178300 0.00000000 CLA 73.99496400 41.04868100 0.00000000 CLA 71.54813700 41.69128700 0.00000000 CLA 69.08470900 42.31710800 0.00000000 CLA 66.60538000 42.92525600 0.00000000 CLA 64.11084700 43.51485800 0.00000000 CLA 61.60180100 44.08505900 0.00000000 CLA 59.07892900 44.63502300 0.00000000 CLA 56.54291400 45.16393500 0.00000000 CLA 53.99443400 45.67100300 0.00000000 CLA 51.43416400 46.15546400 0.00000000 CLA 48.86277100 46.61658100 0.00000000 CLA 46.28092200 47.05364500 0.00000000 CLA 42.92556700 47.59903300 0.00000000 CLA 40.33193500 48.01158900 0.00000000 CLA 37.72929300 48.39866000 0.00000000 CLA 35.11829400 48.75964300 0.00000000 CLA 32.49958900 49.09397300 0.00000000 CLA 29.87382300 49.40112300 0.00000000 CLA 27.24163700 49.68060900 0.00000000 CLA 24.60366900 49.93198400 0.00000000 CLA 21.96055600 50.15484900 0.00000000 CLA 19.31292800 50.34884700 0.00000000 CLA 16.66141500 50.51366500 0.00000000 CLA 13.29566300 50.69728600 0.00000000 CLA 10.64026700 50.83195500 0.00000000 CLA 7.98237900 50.93692400 0.00000000 CLA 5.32262300 51.01202200 0.00000000 CLA 2.66162300 51.05712900 0.00000000 CLA

(81) TABLE-US-00014 TABLE 9 Stop polygon AS X[mm] Y[mm] Z[mm] Type 227.91573000 165.46964900 0.00000000 CLA 227.20570600 177.07028400 0.00000000 CLA 225.89504300 188.70208500 0.00000000 CLA 223.97406700 200.33118800 0.00000000 CLA 221.43499800 211.92240400 0.00000000 CLA 218.27195900 223.43912600 0.00000000 CLA 214.48127800 234.84332200 0.00000000 CLA 210.06189400 246.09584400 0.00000000 CLA 205.01484800 257.15653500 0.00000000 CLA 199.34429100 267.98472500 0.00000000 CLA 193.05688700 278.53883600 0.00000000 CLA 186.16251100 288.77708100 0.00000000 CLA 178.67405200 298.65757200 0.00000000 CLA 170.60750600 308.13892000 0.00000000 CLA 161.98229300 317.17983100 0.00000000 CLA 152.82083500 325.74011900 0.00000000 CLA 143.14897400 333.78069700 0.00000000 CLA 132.99576300 341.26408800 0.00000000 CLA 122.39337200 348.15452000 0.00000000 CLA 111.37687400 354.41853100 0.00000000 CLA 99.98426300 360.02496900 0.00000000 CLA 88.25634100 364.94569400 0.00000000 CLA 76.23601500 369.15568000 0.00000000 CLA 63.96850500 372.63301500 0.00000000 CLA 51.50093800 375.35980200 0.00000000 CLA 38.88184600 377.32165800 0.00000000 CLA 26.16076100 378.50812100 0.00000000 CLA 13.38842900 378.91304000 0.00000000 CLA 13.38842900 378.91304000 0.00000000 CLA 26.16076100 378.50812100 0.00000000 CLA 38.88184600 377.32165800 0.00000000 CLA 51.50093800 375.35980200 0.00000000 CLA 63.96850500 372.63301500 0.00000000 CLA 76.23601500 369.15568000 0.00000000 CLA 88.25634100 364.94569400 0.00000000 CLA 99.98426300 360.02496900 0.00000000 CLA 111.37687400 354.41853100 0.00000000 CLA 122.39337200 348.15452000 0.00000000 CLA 132.99576300 341.26408800 0.00000000 CLA 143.14897400 333.78069700 0.00000000 CLA 152.82083500 325.74011900 0.00000000 CLA 161.98229300 317.17983100 0.00000000 CLA 170.60750600 308.13892000 0.00000000 CLA 178.67405200 298.65757200 0.00000000 CLA 186.16251100 288.77708100 0.00000000 CLA 193.05688700 278.53883600 0.00000000 CLA 199.34429100 267.98472500 0.00000000 CLA 205.01484800 257.15653500 0.00000000 CLA 210.06189400 246.09584400 0.00000000 CLA 214.48127800 234.84332200 0.00000000 CLA 218.27195900 223.43912600 0.00000000 CLA 221.43499800 211.92240400 0.00000000 CLA 223.97406700 200.33118800 0.00000000 CLA 225.89504300 188.70208500 0.00000000 CLA 227.20570600 177.07028400 0.00000000 CLA 227.91573000 165.46964900 0.00000000 CLA 218.96183500 152.82525200 0.00000000 CLA 224.06330000 145.36750000 0.00000000 CLA 230.88330000 134.16890000 0.00000000 CLA 237.01280000 122.76050000 0.00000000 CLA 242.43390000 111.18030000 0.00000000 CLA 247.13070000 99.46550000 0.00000000 CLA 251.09000000 87.65220000 0.00000000 CLA 254.30090000 75.77540000 0.00000000 CLA 256.75560000 63.86940000 0.00000000 CLA 258.44930000 51.96710000 0.00000000 CLA 259.38010000 40.10040000 0.00000000 CLA 259.54960000 28.30030000 0.00000000 CLA 258.96260000 16.59660000 0.00000000 CLA 257.62740000 5.01790000 0.00000000 CLA 255.55540000 6.40820000 0.00000000 CLA 252.76110000 17.65520000 0.00000000 CLA 249.26230000 28.69770000 0.00000000 CLA 245.07930000 39.51170000 0.00000000 CLA 240.23500000 50.07390000 0.00000000 CLA 234.75450000 60.36280000 0.00000000 CLA 228.66480000 70.35740000 0.00000000 CLA 221.99440000 80.03840000 0.00000000 CLA 214.77300000 89.38730000 0.00000000 CLA 207.03120000 98.38680000 0.00000000 CLA 198.80000000 107.02060000 0.00000000 CLA 190.11060000 115.27340000 0.00000000 CLA 180.99430000 123.13090000 0.00000000 CLA 171.48180000 130.57960000 0.00000000 CLA 161.60350000 137.60700000 0.00000000 CLA 151.38900000 144.20150000 0.00000000 CLA 140.86730000 150.35200000 0.00000000 CLA 130.06640000 156.04850000 0.00000000 CLA 119.01330000 161.28160000 0.00000000 CLA 107.73430000 166.04280000 0.00000000 CLA 96.25480000 170.32420000 0.00000000 CLA 84.59910000 174.11880000 0.00000000 CLA 72.79120000 177.42040000 0.00000000 CLA 60.85400000 180.22340000 0.00000000 CLA 48.81000000 182.52330000 0.00000000 CLA 36.68120000 184.31610000 0.00000000 CLA 24.48910000 185.59880000 0.00000000 CLA 12.25500000 186.36930000 0.00000000 CLA 0.00000000 186.62630000 0.00000000 CLA 12.25500000 186.36930000 0.00000000 CLA 24.48910000 185.59880000 0.00000000 CLA 36.68120000 184.31610000 0.00000000 CLA 48.81000000 182.52330000 0.00000000 CLA 60.85400000 180.22340000 0.00000000 CLA 72.79120000 177.42040000 0.00000000 CLA 84.59910000 174.11880000 0.00000000 CLA 96.25480000 170.32420000 0.00000000 CLA 107.73430000 166.04280000 0.00000000 CLA 119.01330000 161.28160000 0.00000000 CLA 130.06640000 156.04850000 0.00000000 CLA 140.86730000 150.35200000 0.00000000 CLA 151.38900000 144.20150000 0.00000000 CLA 161.60350000 137.60700000 0.00000000 CLA 171.48180000 130.57960000 0.00000000 CLA 180.99430000 123.13090000 0.00000000 CLA 190.11060000 115.27340000 0.00000000 CLA 198.80000000 107.02060000 0.00000000 CLA 207.03120000 98.38680000 0.00000000 CLA 214.77300000 89.38730000 0.00000000 CLA 221.99440000 80.03840000 0.00000000 CLA 228.66480000 70.35740000 0.00000000 CLA 234.75450000 60.36280000 0.00000000 CLA 240.23500000 50.07390000 0.00000000 CLA 245.07930000 39.51170000 0.00000000 CLA 249.26230000 28.69770000 0.00000000 CLA 252.76110000 17.65520000 0.00000000 CLA 255.55540000 6.40820000 0.00000000 CLA 257.62740000 5.01790000 0.00000000 CLA 258.96260000 16.59660000 0.00000000 CLA 259.54960000 28.30030000 0.00000000 CLA 259.38010000 40.10040000 0.00000000 CLA 258.44930000 51.96710000 0.00000000 CLA 256.75560000 63.86940000 0.00000000 CLA 254.30090000 75.77540000 0.00000000 CLA 251.09000000 87.65220000 0.00000000 CLA 247.13070000 99.46550000 0.00000000 CLA 242.43390000 111.18030000 0.00000000 CLA 237.01280000 122.76050000 0.00000000 CLA 230.88330000 134.16890000 0.00000000 CLA 224.06330000 145.36750000 0.00000000 CLA 218.96183500 152.82525200 0.00000000 CLA

(82) The projection optical unit 7 has an image-side numerical aperture of 0.55. In an imaging light plane parallel to the xz-plane (sagittal view according to FIG. 5), the projection optical unit 8 has a reduction factor .sub.x of 4.00. In the yz-plane perpendicular thereto (meridional plane according to FIG. 2), the projection optical unit 7 has a reduction factor .sub.y of 8.00. An object-side chief ray angle is 5.1. This angle denotes the angle of a chief ray of a central object field point with respect to a normal to the object plane 5. A pupil obscuration of the projection optical unit 7 is 13% of the numerical aperture of the projection optical unit 7. Hence, a surface portion of 0.13.sup.2 of a pupil of the projection optical unit 7 is obscured. An object-image offset do's is approximately 2050 mm. The mirrors of the projection optical unit 7 can be accommodated in a parallelepiped having xyz-edge lengths of 924 mm2452 mm1639 mm.

(83) The object plane 5 runs parallel to the image plane 9.

(84) A working distance between the mirror M9 closest to the wafer and the image plane 9 is 90 mm. A mean wavefront aberration rms is 5.80 m, that is to say is defined in a manner dependent on the design wavelength.

(85) The mirrors M1, M5, M6, M8 and M10 have negative radius values, that is to say in principle are concave mirrors. The mirrors M2 and M9 have positive radius values, that is to say in principle are convex mirrors.

(86) The mirrors M3, M4 and M7 have different signs with regard to their x- and y-radius values, that is to say have a saddle surface basic shape.

(87) The stop AS is arranged spatially between the penultimate mirror M9 in the beam path and the last mirror M10 in the beam path.

(88) The stop AS serves for predefining a section 18 of an outer marginal contour 19 of the pupil of the projection optical unit 7. The marginal contour 19 of the pupil lies in the stop plane E.sub.AS and is shown in the sectional illustration according to FIG. 4. In this case, the marginal contour section 18 provided by the stop AS covers an azimuth angle B around an intersection point Z of the coordinate axis z through the stop plane E.sub.AS, which lies at a pupil center. In this azimuth angle range B, the stop AS delimits an imaging light partial beam 3.sub.M9M10 in the beam path between the mirrors M9 and M10 (cf. FIGS. 2 and 3). In the rest of the azimuth angle range M (cf. FIG. 4), the stop AS does not have a stop effect for the imaging light 3, that is to say in particular does not delimit an imaging light partial beam 3.sub.M10W between the mirror M10 and the image field 8, that is to say the wafer 11. In this remaining azimuth angle range M, the system pupil is delimited by the other stops AS2 to AS4.

(89) The stop azimuth range B corresponds to an azimuth range around a center of the pupil that is greater than 180. In the embodiment according to FIG. 4, the azimuth range around the center of the pupil that covers the outer marginal contour of the pupil from the stop AS is approximately 240. The azimuth range can alternatively also be 200, 210, 220 or 230 and can also be greater than 240, for example 250, 260, 280, 300, 320, 340, and can also be even greater. In particular, the azimuth range can be 360, such that the entire outer marginal contour of the pupil of the imaging optical unit is predefined in an embodiment of the stop AS.

(90) The stop AS is embodied in a plane fashion, that is to say in a manner lying in exactly one plane.

(91) The stop AS, in the x-direction perpendicular to the object displacement direction y, delimits both extreme marginal positions E(x) and E(x) of the outer marginal contour 19 of the pupil (cf. FIG. 4).

(92) FIG. 5 shows a sagittal view of the projection optical unit 7.

(93) With reference to FIG. 6, an explanation is given below of a further embodiment of a projection optical unit 20, which can be used instead of the projection optical unit 7 in the projection exposure apparatus 1 according to FIG. 1. Components and functions which have already been explained above in the context of FIGS. 1 to 5 are denoted, where applicable, by the same reference signs and are not discussed again in detail.

(94) The mirrors M1 to M10 are once again embodied as free-form surface mirrors for which the free-form surface equation (1) indicated above holds true. The optical design data from the projection optical unit 20 can be gathered from the following tables, which, in terms of their design, correspond to the tables for the projection optical unit 7 according to FIG. 2.

(95) TABLE-US-00015 TABLE 1 for FIG. 6 Exemplary embodiment FIG. 6 NA 0.55 Wavelength 13.5 nm Field dimension x 26.0 mm Field dimension y 1.0 mm Field curvature 0.012345 1/mm Stop AS

(96) TABLE-US-00016 TABLE 2 for FIG. 6 Operating Surface Radius_x[mm] Power_x[1/mm] Radius_y[mm] Power_y[1/mm] mode M10 924.4981198 0.0021492 841.5674623 0.0023921 REFL M9 1845.8313982 0.0010835 356.4114777 0.0056115 REFL M8 807.7853011 0.0006289 16794.6817783 0.0004689 REFL M7 633.7019549 0.0007380 20332.8433550 0.0004206 REFL M6 1159.7877847 0.0003528 7078.0588424 0.0013813 REFL M5 7911.6202298 0.0000533 2197.1749958 0.0043148 REFL M4 6252.7176733 0.0000660 2753.7274849 0.0035212 REFL M3 1718.6984546 0.0002678 10060.7554809 0.0008638 REFL M2 1592.6268445 0.0002500 2592.5626309 0.0038746 REFL M1 2135.9876330 0.0009216 1377.1202039 0.0014756 REFL

(97) TABLE-US-00017 TABLE 3a for FIG. 6 Coeffi- M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 924.49811980 1845.83139800 807.78530110 C7 5.32161644e09 7.17957299e07 3.61958396e07 C9 1.2051462e08 1.48021766e06 4.61852728e08 C10 4.28738318e12 3.94779844e10 1.36275822e10 C12 3.49709402e11 2.67402017e09 4.92199166e11 C14 9.81786584e12 6.31481582e09 4.23949539e10 C16 3.40219667e15 2.74047503e12 1.12548598e12 C18 1.60335869e14 2.04228406e14 3.71761249e13 C20 1.30399612e14 3.2725238e11 2.05971586e12 C21 1.15274335e17 2.35879877e15 1.09054091e15 C23 6.9260806e17 1.00239611e14 1.70911423e15 C25 7.13524377e17 5.05529889e14 3.62622238e15 C27 1.67322747e17 1.78538542e13 7.36849912e15 C29 7.92528578e21 4.11347975e18 2.59696939e18 C31 1.27834004e20 5.83032641e17 1.25679501e17 C33 3.27119661e20 1.71591989e16 1.04543394e17 C35 1.71377495e20 1.22876874e15 3.91086555e17 C36 1.89551894e23 4.14843428e22 5.26679107e21 C38 1.11996388e22 1.06656248e19 2.8502374e20 C40 1.96750203e22 2.08419251e19 6.3260457e20 C42 1.2392523e22 8.95301505e19 4.7233819e21 C44 2.47458966e23 8.36809183e18 2.27707911e19 C46 9.77909864e27 1.02394711e22 1.39450428e23 C48 5.19824336e27 7.95041789e23 1.68839235e22 C50 5.59498452e26 8.75666056e22 2.79254271e22 C52 6.43656264e26 4.60087068e21 9.11661464e23 C54 1.96031627e26 4.50459082e20 1.98458883e22 C55 1.9734083e29 2.61667221e26 4.54521391e26 C57 1.39192995e28 1.48955085e25 1.23387971e24 C59 3.49342237e28 2.18616238e24 4.57708029e24 C61 3.79015472e28 8.50729665e24 6.06052772e24 C63 1.77868817e28 2.63725246e23 9.61661588e26 C65 2.61320106e29 1.37431086e22 9.18355997e24 C67 1.75320584e32 1.91491617e28 2.00093096e27 C69 1.49695509e32 5.27938029e27 2.16982668e27 C71 6.84912486e32 5.29216183e27 7.30096104e27 C73 1.54586906e31 4.04146338e26 4.93769708e27 C75 1.15783975e31 2.37812676e25 4.16594376e26 C77 4.14587364e32 1.20314674e24 1.62235584e25 C78 5.34426777e35 4.49836368e31 6.13330316e30 C80 4.27488688e34 1.29694668e29 1.62333428e29 C82 1.25436413e33 3.24280489e29 1.68167617e28 C84 1.71502766e33 3.00254831e29 4.89454528e28 C86 1.25734127e33 7.46446045e28 6.5895393e28 C88 5.19929261e34 5.84363659e27 1.5416679e27 C90 9.42013117e35 2.61240017e26 3.38007496e27 C92 1.00872668e38 4.95175891e33 1.78435553e32 C94 1.45968234e39 2.0913161e33 1.10022934e32 C96 2.49294655e38 9.54156933e32 1.00044858e30 C98 1.25738947e37 7.47916509e33 1.98972461e30 C100 1.6844889e37 7.35199153e30 3.47483305e30 C102 7.66863005e38 5.82871085e29 1.47027148e29 C104 1.4887687e38 2.15570834e28 2.0886266e29 C105 3.84331333e41 2.72151554e36 1.09100622e34 C107 4.50330303e40 6.8970507e35 3.91399908e34 C109 1.60900752e39 2.41557224e34 4.01031765e33 C111 2.46751199e39 1.07560857e33 1.8289791e32 C113 1.94052198e39 8.96263507e33 2.87152163e32 C115 9.9606188e40 4.77961552e32 4.19223781e33 C117 4.55475999e40 2.14647641e31 4.42634085e32 C119 9.96424428e41 6.08163641e31 4.46533131e32 C121 6.67748909e44 0 0 C123 1.35652075e43 0 0 C125 1.98636308e43 0 0 C127 1.25607622e42 0 0 C129 2.10051386e42 0 0 C131 1.77289428e42 0 0 C133 7.94693346e43 0 0 C135 1.74862061e43 0 0 C136 1.77390976e46 0 0 C138 2.00142247e45 0 0 C140 8.6258998e45 0 0 C142 1.91465627e44 0 0 C144 2.50271596e44 0 0 C146 2.03958823e44 0 0 C148 1.04613962e44 0 0 C150 3.18867421e45 0 0 C152 4.17582475e46 0 0

(98) TABLE-US-00018 TABLE 3b for FIG. 6 Coeffi- M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 633.70195490 1159.78778500 7911.62023000 C7 3.6838108e08 8.9762673e08 1.29208819e08 C9 1.66051547e07 5.4606184e08 4.52621083e08 C10 2.70786958e11 4.84436976e10 5.84676904e10 C12 4.05365907e10 4.4034394e11 3.29353371e11 C14 1.17570885e09 8.49494866e10 3.27657845e11 C16 5.32058235e13 1.22366579e12 4.06185258e13 C18 2.33907349e12 3.31495258e12 3.05655881e13 C20 1.03622586e11 4.74017946e12 9.90515078e14 C21 1.84951658e17 4.70815441e16 6.8177486e16 C23 1.97362743e16 5.63918759e15 1.78311332e16 C25 4.50645748e14 2.04438614e14 1.92769745e15 C27 1.22197136e13 4.46320586e14 1.11134948e15 C29 8.3397015e19 3.12037967e18 1.20925734e18 C31 5.73336291e17 2.52930984e17 2.68755339e18 C33 4.26965471e16 2.57659349e16 5.94759876e18 C35 1.12309508e15 3.62043368e16 4.78247891e18 C36 2.54002154e21 2.33285817e21 8.64176325e21 C38 6.58698589e22 6.78093367e21 2.69603122e21 C40 9.19834216e19 6.09316184e19 1.90190625e20 C42 5.20603364e18 2.48560476e18 2.06136053e20 C44 1.95177251e17 3.71987432e18 1.52178482e20 C46 5.11031274e23 2.36475219e24 1.40723013e23 C48 5.22351362e22 1.08955249e21 1.74886691e23 C50 1.29955621e20 6.28062297e21 1.31280422e22 C52 7.19352591e20 2.83502526e20 1.33189978e22 C54 3.01583882e19 4.05968238e20 5.11578136e23 C55 3.2378259e26 5.04920803e26 9.74226056e26 C57 2.56114803e26 1.66126857e24 1.25073538e25 C59 2.15568526e23 1.21962666e23 3.61644254e25 C61 7.54597503e23 7.85294647e23 6.17670028e25 C63 1.37768633e21 2.60819335e22 3.1972004e25 C65 9.91159698e22 3.82043453e22 5.14604952e26 C67 8.86143266e29 1.38719494e27 4.85096213e29 C69 2.95926995e28 1.1409927e26 1.52883817e29 C71 4.08946521e25 1.70193798e25 2.99192047e28 C73 1.1764e24 5.79647838e25 1.27326956e27 C75 1.82271068e23 1.8185183e24 2.14215183e27 C77 6.0476105e23 2.47496013e24 2.43586456e28 C78 1.46974123e31 2.48880617e30 2.2910216e30 C80 1.62035317e29 3.63910799e30 2.10355105e30 C82 2.64119709e28 1.39124488e28 3.56165247e30 C84 2.75435112e27 9.92371827e28 1.25073816e29 C86 6.06493358e26 2.9562807e27 1.02346615e29 C88 1.82794269e25 7.99387324e27 1.25693216e30 C90 8.10897778e25 1.01333935e26 6.64972771e30 C92 5.94852836e33 2.20554773e33 1.22259104e33 C94 7.23973112e32 1.10525284e31 1.24849687e32 C96 7.40539289e30 4.613537e32 3.29652704e32 C98 4.88216265e30 4.80483016e30 8.41705133e32 C100 9.65449531e28 6.23756899e30 1.57134898e31 C102 1.70876067e27 2.1445453e29 1.2032548e31 C104 2.67082934e26 2.28654521e29 3.36577402e32 C105 2.35094421e36 2.08468354e35 1.08251776e35 C107 3.37747137e34 1.04397603e34 3.142163e35 C109 7.70896596e34 2.85346997e34 8.01180965e35 C111 6.84579774e32 8.80664689e35 3.89769754e34 C113 9.31004972e32 9.19882787e33 7.80016296e34 C115 5.48180337e30 1.39857273e33 7.27970094e34 C117 9.40923091e30 2.85191959e32 3.44660803e34 C119 1.58250782e28 2.04899764e32 5.28320959e35

(99) TABLE-US-00019 TABLE 3c for FIG. 6 Coeffi- M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 6252.71767300 1718.69845500 1592.62684400 C7 2.02039657e07 7.72442186e08 2.81200257e07 C9 6.26194854e08 6.39011454e08 4.33420894e07 C10 1.17096485e10 5.38504965e10 2.16914992e10 C12 1.65918593e10 1.54474735e10 2.43233271e10 C14 2.6047855e11 5.67012949e11 1.0908048e09 C16 1.53352973e13 1.28128634e12 1.3249687e12 C18 6.85280998e14 3.29016521e13 2.3245033e12 C20 1.33134745e14 7.9135182e14 2.74288101e12 C21 9.63392843e16 2.23006179e16 3.54173468e16 C23 2.56356327e16 8.08610012e16 5.15456653e15 C25 4.93143601e16 1.64061139e16 1.06774698e14 C27 3.50827102e17 8.3638218e18 5.96789915e15 C29 1.32470314e18 2.06883208e18 1.70541615e18 C31 1.08456401e18 3.75046097e18 2.42446489e17 C33 3.23480928e19 1.52741866e18 4.43191025e17 C35 3.72075346e19 1.62584985e18 1.05861269e17 C36 3.85707039e21 2.85425871e21 1.53834046e21 C38 7.16357253e21 4.79674043e21 1.1251108e20 C40 1.76766744e21 6.62315222e22 1.18315789e19 C42 5.70159933e21 2.6546097e21 1.77703731e19 C44 3.65158025e21 1.5355861e20 1.37862764e20 C46 2.99726604e23 7.26058549e23 2.55922076e23 C48 4.17503344e23 9.21476496e23 1.00193833e22 C50 4.7884568e23 2.35567601e22 5.31735424e22 C52 6.91516977e24 1.35526865e22 6.79507546e22 C54 1.98546253e23 9.61975988e23 4.01660209e23 C55 1.94031018e26 1.56888015e25 1.38213528e26 C57 3.42382432e25 2.2750218e25 1.79376182e25 C59 2.2756817e25 1.23549695e25 5.94897934e25 C61 2.01539859e25 2.29974662e25 2.27901415e24 C63 4.95631548e25 8.59833428e25 2.22922414e24 C65 1.12176727e25 1.26876311e24 7.70058057e25 C67 9.06942404e28 9.3079309e28 3.74223228e28 C69 1.9957938e27 4.99157193e27 9.62902214e28 C71 3.12476201e27 1.58761398e26 2.15189986e27 C73 4.54981924e27 1.53821757e26 8.59545995e27 C75 6.59335485e28 3.62238546e27 5.36715829e27 C77 1.58015986e27 1.19949042e27 5.14863336e27 C78 4.37655985e30 2.15256015e30 6.68041182e32 C80 8.62343063e30 8.27474872e30 2.88698633e30 C82 1.3965552e29 1.85964202e29 2.97808799e30 C84 1.2610299e29 5.63075807e29 9.25513518e30 C86 4.82567841e30 7.58802797e29 2.1567675e29 C88 1.35566233e29 6.2816052e29 8.2378632e30 C90 8.35698293e31 2.48292667e29 1.8363031e29 C92 6.20912191e33 1.53848466e33 2.72722676e33 C94 3.03339233e32 5.56751434e32 9.35668771e33 C96 4.15846221e32 2.81174802e31 1.01318148e32 C98 1.20240425e31 5.69729421e31 4.31201041e32 C100 1.23999978e31 3.40400557e31 2.58821352e32 C102 1.77507014e33 9.97858945e32 6.91936623e33 C104 3.83557979e32 1.09580074e31 3.45333625e32 C105 1.52261212e35 5.38313447e37 2.4018539e36 C107 7.96360046e35 8.5583118e35 1.94949839e35 C109 2.50162343e34 3.84351739e34 2.7269109e35 C111 2.81541874e34 1.85492006e33 5.57867255e35 C113 6.28531061e34 2.60940268e33 8.0628501e35 C115 2.25293161e35 2.55655776e33 6.48059264e36 C117 7.79107372e35 1.01920129e33 2.46632816e36 C119 1.12500845e34 7.43677377e34 2.70846382e35

(100) TABLE-US-00020 TABLE 3d for FIG. 6 Coefficient M1 KY 0.00000000 KX 0.00000000 RX 2135.98763300 C7 3.62667214e08 C9 8.77001096e09 C10 7.9878408e12 C12 3.57622422e11 C14 5.67666306e11 C16 1.00670933e14 C18 6.43363507e14 C20 3.49263438e14 C21 1.83622059e18 C23 1.63146414e17 C25 2.33281554e16 C27 2.13403252e16 C29 7.17734463e22 C31 7.76916167e20 C33 2.45391831e19 C35 9.06895125e19 C36 2.87240432e24 C38 5.67479156e24 C40 2.53075334e22 C42 2.33441297e22 C44 4.90816027e21 C46 1.82993123e26 C48 1.40735408e25 C50 1.62994831e25 C52 4.12295522e24 C54 2.26175423e23 C55 6.84620783e30 C57 8.9211373e29 C59 3.99552919e28 C61 2.87701829e26 C63 7.90515964e26 C65 4.93963599e26 C67 8.37008672e32 C69 9.8548077e31 C71 7.50758997e30 C73 6.72582496e30 C75 2.5702957e28 C77 1.08487883e27 C78 4.88158898e36 C80 1.55182242e33 C82 1.52095525e32 C84 1.27781492e31 C86 1.81913568e30 C88 5.89459163e30 C90 2.69055495e30 C92 4.03243187e38 C94 3.64827588e36 C96 3.2629352e35 C98 1.58289449e34 C100 1.41502554e34 C102 7.52721979e33 C104 1.42550505e32 C105 9.85463233e41 C107 4.7133732e39 C109 9.62905307e38 C111 4.88592887e38 C113 5.89605443e36 C115 4.37586765e35 C117 1.2944388e34 C119 5.79847892e35

(101) TABLE-US-00021 TABLE 4a for FIG. 6 Surface DCX DCY DCZ Image 0.00000000 0.00000000 0.00000000 M10 0.00000000 0.00000000 805.12545493 AS 0.00000000 121.91685762 283.85220626 M9 0.00000000 161.70815863 113.71871405 M8 0.00000000 95.26534725 1237.21684296 M7 0.00000000 33.77425023 1447.75579022 M6 0.00000000 65.18321239 1551.64751609 M5 0.00000000 416.29245364 1699.16961083 M4 0.00000000 1004.20719186 1696.34134424 M3 0.00000000 1452.13094016 1490.08513977 M2 0.00000000 1660.63260708 1219.01552868 M1 0.00000000 1898.51696847 380.25896967 Object 0.00000000 2052.66210418 2142.14593325

(102) TABLE-US-00022 TABLE 4b for FIG. 6 Surface TLA[deg] TLB[deg] TLC[deg] Image 0.00000000 0.00000000 0.00000000 M10 6.58193819 0.00000000 0.00000000 AS 11.93243779 180.00000000 0.00000000 M9 193.02365372 0.00000000 0.00000000 M8 88.30109261 0.00000000 0.00000000 M7 60.05609350 0.00000000 0.00000000 M6 34.59181790 0.00000000 0.00000000 M5 11.25728686 0.00000000 0.00000000 M4 12.50018064 0.00000000 0.00000000 M3 38.57896098 0.00000000 0.00000000 M2 63.29951574 0.00000000 0.00000000 M1 185.41707922 0.00000000 0.00000000 Object 0.00000000 0.00000000 0.00000000

(103) TABLE-US-00023 TABLE 5 for FIG. 6 Surface Angle of incidence[deg] Reflectivity M10 6.54595976 0.66117442 M9 0.00927643 0.66565898 M8 75.28639991 0.80872354 M7 76.47603147 0.82797484 M6 78.19600441 0.85363243 M5 77.82111064 0.84823702 M4 78.09660546 0.85221183 M3 76.69476435 0.83137252 M2 78.51546985 0.85815129 M1 10.19565951 0.65421761 Overall transmis- 0.0849

(104) TABLE-US-00024 TABLE 6 Stop polygon AS in the imaging beam path between M9 and M10 X[mm] Y[mm] Z[mm] Type 0.00000000 186.44396300 0.00000000 CLA 7.35372500 186.35147200 0.00000000 CLA 14.70293000 186.07403500 0.00000000 CLA 22.04308600 185.61182900 0.00000000 CLA 29.36964700 184.96518200 0.00000000 CLA 36.67804500 184.13440100 0.00000000 CLA 43.96368200 183.12003500 0.00000000 CLA 51.22191700 181.92270400 0.00000000 CLA 58.44805800 180.54312300 0.00000000 CLA 65.63737700 178.98213000 0.00000000 CLA 72.78506700 177.24065500 0.00000000 CLA 79.88623100 175.31975300 0.00000000 CLA 86.93596800 173.22057400 0.00000000 CLA 93.92919900 170.94433700 0.00000000 CLA 100.86081300 168.49243500 0.00000000 CLA 107.72561700 165.86632300 0.00000000 CLA 114.51817800 163.06745500 0.00000000 CLA 121.23320200 160.09761200 0.00000000 CLA 127.86509600 156.95849800 0.00000000 CLA 134.40820300 153.65200500 0.00000000 CLA 140.85671700 150.17999100 0.00000000 CLA 147.20471200 146.54456300 0.00000000 CLA 153.44628600 142.74788800 0.00000000 CLA 159.57526400 138.79218000 0.00000000 CLA 165.58539900 134.67982000 0.00000000 CLA 171.47033600 130.41326100 0.00000000 CLA 177.22373200 125.99505700 0.00000000 CLA 182.83880500 121.42778500 0.00000000 CLA 188.30943000 116.71453300 0.00000000 CLA 193.62848600 111.85789200 0.00000000 CLA 198.78943200 106.86098000 0.00000000 CLA 203.78559400 101.72694700 0.00000000 CLA 208.61006200 96.45897500 0.00000000 CLA 213.25621900 91.06052500 0.00000000 CLA 217.71726100 85.53509300 0.00000000 CLA 221.64901400 80.02685000 0.75883100 CLA 224.92026500 74.62899500 2.51098300 CLA 227.96741300 69.17817200 4.24784700 CLA 227.95344500 65.14191000 12.02424500 CLA 227.12122900 61.57814900 20.84485000 CLA 226.13600200 58.16537900 29.29174900 CLA 225.00391900 54.89925100 37.37569500 CLA 223.73072400 51.77538400 45.10754800 CLA 222.32096800 48.78916600 52.49869000 CLA 220.77884700 45.93608000 59.56032000 CLA 219.10785500 43.21147900 66.30394300 CLA 217.31114600 40.61084100 72.74070800 CLA 215.39130600 38.12963900 78.88190200 CLA 213.35065800 35.76334400 84.73869500 CLA 211.19147600 33.50760700 90.32183800 CLA 208.91541000 31.35813700 95.64194500 CLA 206.52437200 29.31065100 100.70964500 CLA 204.01998900 27.36108900 105.53499200 CLA 201.40409200 25.50539800 110.12799200 CLA 198.67828500 23.73971400 114.49825000 CLA 195.84432600 22.06021900 118.65512200 CLA 192.90404400 20.46324100 122.60777000 CLA 189.85948300 18.94530500 126.36481000 CLA 186.71258400 17.50289700 129.93489500 CLA 183.46561700 16.13274600 133.32612800 CLA 180.12097900 14.83174200 136.54624500 CLA 176.68110900 13.59664400 139.60322200 CLA 173.14867400 12.42461700 142.50407800 CLA 169.52649800 11.31290900 145.25565800 CLA 165.81747500 10.25866300 147.86498500 CLA 162.02456000 9.25931400 150.33846500 CLA 158.15106700 8.31237400 152.68225100 CLA 154.20002700 7.41549400 154.90205700 CLA 150.17487800 6.56640100 157.00369200 CLA 146.07892700 5.76289700 158.99242700 CLA 141.91554000 5.00295700 160.87334600 CLA 137.68807700 4.28459200 162.65135200 CLA 133.39999600 3.60596600 164.33101000 CLA 129.05467700 2.96531800 165.91665100 CLA 124.65533100 2.36095400 167.41255500 CLA 120.20527800 1.79126700 168.82252900 CLA 115.70776900 1.25482400 170.15030200 CLA 111.16585800 0.75015100 171.39936900 CLA 106.58255900 0.27593600 172.57309400 CLA 101.96080900 0.16912300 173.67466600 CLA 97.30348300 0.58612700 174.70677900 CLA 92.61320100 0.97618500 175.67221000 CLA 87.89258900 1.34039400 176.57364900 CLA 83.14404000 1.67974700 177.41357200 CLA 78.36997500 1.99507900 178.19405200 CLA 73.57255500 2.28728800 178.91731600 CLA 68.75389700 2.55709000 179.58512000 CLA 63.91599300 2.80527500 180.19940100 CLA 59.06068500 3.03248700 180.76176400 CLA 54.18980800 3.23932800 181.27369700 CLA 49.30495700 3.42635500 181.73660500 CLA 44.40776200 3.59407000 182.15171600 CLA 39.49967000 3.74294100 182.52018300 CLA 34.72856800 5.38995400 181.76530200 CLA 29.78751600 5.57165600 181.99973400 CLA 24.83568700 5.70520100 182.21115500 CLA 19.85720500 5.45684800 182.63399600 CLA 14.87055900 4.88189700 183.22816000 CLA 9.89854300 4.30609100 183.76604500 CLA 4.94917700 4.28491600 183.86163300 CLA 0.00000000 4.29338300 183.88257600 CLA 4.94917700 4.28491600 183.86163600 CLA 9.89854300 4.30609100 183.76604500 CLA 14.87055900 4.88189700 183.22816000 CLA 19.85720500 5.45684800 182.63399600 CLA 24.83568700 5.70520100 182.21115500 CLA 29.78751600 5.57165600 181.99973400 CLA 34.72856800 5.38995400 181.76530200 CLA 39.49967000 3.74294100 182.52018300 CLA 44.40776200 3.59407000 182.15171600 CLA 49.30495700 3.42635500 181.73660500 CLA 54.18980800 3.23932800 181.27369700 CLA 59.06068500 3.03248700 180.76176400 CLA 63.91599100 2.80527500 180.19940100 CLA 68.75389500 2.55709000 179.58512000 CLA 73.57255800 2.28727100 178.91729500 CLA 78.36997500 1.99507900 178.19405200 CLA 83.14404000 1.67974700 177.41357200 CLA 87.89258900 1.34039400 176.57364900 CLA 92.61320100 0.97618500 175.67221000 CLA 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192.90404400 20.46324100 122.60777000 CLA 195.84432600 22.06021900 118.65512200 CLA 198.67828500 23.73971400 114.49825000 CLA 201.40409200 25.50539800 110.12798100 CLA 204.01998900 27.36108900 105.53499200 CLA 206.52437200 29.31065100 100.70965600 CLA 208.91541000 31.35813700 95.64195600 CLA 211.19147600 33.50760700 90.32183800 CLA 213.35065800 35.76334400 84.73868400 CLA 215.39130600 38.12963900 78.88190700 CLA 217.31114600 40.61084100 72.74071900 CLA 219.10785500 43.21147900 66.30393200 CLA 220.77884700 45.93608000 59.56031000 CLA 222.32096800 48.78916600 52.49869000 CLA 223.73072400 51.77538400 45.10753500 CLA 225.00391900 54.89925100 37.37569500 CLA 226.13600200 58.16537900 29.29174900 CLA 227.12122900 61.57814900 20.84483900 CLA 227.95344500 65.14191000 12.02423400 CLA 227.96741000 69.17817300 4.24784700 CLA 224.92026200 74.62899500 2.51098200 CLA 221.64901100 80.02685100 0.75883000 CLA 217.71726100 85.53509300 0.00000000 CLA 213.25621500 91.06052500 0.00000000 CLA 208.61005500 96.45897500 0.00000000 CLA 203.78559400 101.72694700 0.00000000 CLA 198.78942700 106.86098000 0.00000000 CLA 193.62848300 111.85789200 0.00000000 CLA 188.30942700 116.71453300 0.00000000 CLA 182.83880500 121.42778500 0.00000000 CLA 177.22372500 125.99505700 0.00000000 CLA 171.47033100 130.41326100 0.00000000 CLA 165.58539100 134.67982000 0.00000000 CLA 159.57526500 138.79218000 0.00000000 CLA 153.44628100 142.74788800 0.00000000 CLA 147.20470800 146.54456300 0.00000000 CLA 140.85671700 150.17999100 0.00000000 CLA 134.40815300 153.65196000 0.00000000 CLA 127.86507800 156.95847900 0.00000000 CLA 121.23319300 160.09759500 0.00000000 CLA 114.51820300 163.06746100 0.00000000 CLA 107.72555500 165.86627400 0.00000000 CLA 100.86080300 168.49243500 0.00000000 CLA 93.92919400 170.94433800 0.00000000 CLA 86.93605000 173.22065200 0.00000000 CLA 79.88623100 175.31975300 0.00000000 CLA 72.78506700 177.24065500 0.00000000 CLA 65.63737700 178.98213000 0.00000000 CLA 58.44805800 180.54312300 0.00000000 CLA 51.22191700 181.92270400 0.00000000 CLA 43.96368200 183.12003500 0.00000000 CLA 36.67804500 184.13440100 0.00000000 CLA 29.36964700 184.96518200 0.00000000 CLA 22.04308600 185.61182900 0.00000000 CLA 14.70293000 186.07403500 0.00000000 CLA 7.35372500 186.35147200 0.00000000 CLA

(105) An overall reflectivity of the projection optical unit 20 is approximately 8.49%.

(106) The projection optical unit 20 has an image-side numerical aperture of 0.55. The image field 8 has an x-extent of two-times 13.0 mm and a y-extent of 1 mm. The projection optical unit 20 is optimized for an operating wavelength of the illumination light 3 of 13.5 nm.

(107) Instead of four stops AS to AS4 in the case of the projection optical unit 7 according to FIGS. 2 to 5, the projection optical unit 20 has exactly one stop AS (cf. FIG. 7), which is arranged spatially between the penultimate mirror M9 in the beam path and the last mirror M10 in the beam path.

(108) The stop AS of the projection optical unit 20 delimits the outer marginal contour of the pupil of the projection optical unit 20 in an azimuth range of 360, that is to say fully circumferentially. The stop AS of the projection optical unit 20 thus predefines the entire outer marginal contour of the pupil.

(109) The stop AS of the projection optical unit 20 is embodied in a plane fashion in sections and includes two plane stop sections 21, 22 and a further plane carrying section 23. The stop AS of the projection optical unit 20 delimits a marginal contour 24 of the pupil of the projection optical unit 20 in more than one plane, namely in stop planes E.sub.AS.sup.1 and E.sub.AS.sup.2.

(110) FIG. 8 shows a projection of the marginal contour 24 of the pupil of the projection optical unit 20 onto the stop plane E.sub.AS.sup.1. An outer marginal contour of the stop AS, that is to say a contour of the stop AS where it is not beam-delimiting, is not illustrated in greater detail, but rather indicated by a broken line.

(111) In the first stop plane E.sub.AS.sup.1, the stop AS delimits the pupil marginal contour 24 by stopping down the imaging light partial beam 3.sub.M9M10 between the mirrors M9 an M10 with the stop section 21.

(112) The stop AS of the projection optical unit 20 runs in a bent fashion between the stop sections 21 and 22. The sections 21, 22, on the one hand, and the sections 22, 23, on the other hand, of the stop AS of the projection optical unit 20 run at obtuse angles with respect to one another. The extreme marginal positions E(x), E(x) of the outer pupil marginal contour 24 lie in the bend region between the stop sections 21 and 22.

(113) In the second stop plane E.sub.AS.sup.2, the stop AS delimits the pupil marginal contour of the projection optical unit 20 by outer stopping down likewise of the imaging light partial beam 3.sub.M9M10. In the region of very small y-values, namely exactly between the two imaging light partial beams 3.sub.M9M10 and 3.sub.M10W, the stop AS of the projection optical unit 20 is embodied in a narrow fashion, such that it does not delimit the imaging light partial beam 3.sub.M10W. In the region between the imaging light partial beams 3.sub.M9M10 and 3.sub.M10W, the stop AS of the projection optical unit 20 is embodied as a narrow web S. The carrying section 23 is led past the imaging light partial beam 3.sub.M10W on both sides, that is to say for negative and for positive x-values.

(114) FIG. 9 is once again a sagittal view of the projection optical unit 20.

(115) With reference to FIG. 10, an explanation is given below of a further embodiment of a projection optical unit 25, which can be used instead of the projection optical unit 7 in the projection exposure apparatus 1 according to FIG. 1. Components and functions which have already been explained above in the context of FIGS. 1 to 9 are denoted, where applicable, by the same reference signs and are not discussed again in detail.

(116) The mirrors M1 to M10 are once again configured as free-form surfaces for which the free-form surface equation (1) indicated above holds true. The optical design data from the projection optical unit 21 can be gathered from the following tables, which, in terms of their design, correspond to the tables for the projection optical unit 7 according to FIG. 2.

(117) TABLE-US-00025 TABLE 1 for FIG. 10 Exemplary embodiment FIG. 10 NA 0.55 Wavelength 13.5 nm Field dimension x 26.0 mm Field dimension y 1.0 mm Field curvature 0.012345 1/mm Stop AS

(118) TABLE-US-00026 TABLE 2 for FIG. 10 Surface Radius_x[mm] Power_x[1/mm] Radius_y[mm] Power_y[1/mm] Operating mode M10 924.4981198 0.0021492 841.5674623 0.0023921 REFL M9 1845.8313982 0.0010835 356.4114777 0.0056115 REFL M8 807.7853011 0.0006289 16794.6817783 0.0004689 REFL M7 633.7019549 0.0007380 20332.8433550 0.0004206 REFL M6 1159.7877847 0.0003528 7078.0588424 0.0013813 REFL M5 7911.6202298 0.0000533 2197.1749958 0.0043148 REFL M4 6252.7176733 0.0000660 2753.7274849 0.0035212 REFL M3 1718.6984546 0.0002678 10060.7554809 0.0008638 REFL M2 1592.6268445 0.0002500 2592.5626309 0.0038746 REFL M1 2135.9876330 0.0009216 1377.1202039 0.0014756 REFL

(119) TABLE-US-00027 TABLE 3a for FIG. 10 Coefficient M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 924.49811980 1845.83139800 807.78530110 C7 5.32161644e09 7.17957299e07 3.61958396e07 C9 1.2051462e08 1.48021766e06 4.61852728e08 C10 4.28738318e12 3.94779844e10 1.36275822e10 C12 3.49709402e11 2.67402017e09 4.92199166e11 C14 9.81786584e12 6.31481582e09 4.23949539e10 C16 3.40219667e15 2.74047503e12 1.12548598e12 C18 1.60335869e14 2.04228406e14 3.71761249e13 C20 1.30399612e14 3.2725238e11 2.05971586e12 C21 1.15274335e17 2.35879877e15 1.09054091e15 C23 6.9260806e17 1.00239611e14 1.70911423e15 C25 7.13524377e17 5.05529889e14 3.62622238e15 C27 1.67322747e17 1.78538542e13 7.36849912e15 C29 7.92528578e21 4.11347975e18 2.59696939e18 C31 1.27834004e20 5.83032641e17 1.25679501e17 C33 3.27119661e20 1.71591989e16 1.04543394e17 C35 1.71377495e20 1.22876874e15 3.91086555e17 C36 1.89551894e23 4.14843428e22 5.26679107e21 C38 1.11996388e22 1.06656248e19 2.8502374e20 C40 1.96750203e22 2.08419251e19 6.3260457e20 C42 1.2392523e22 8.95301505e19 4.7233819e21 C44 2.47458966e23 8.36809183e18 2.27707911e19 C46 9.77909864e27 1.02394711e22 1.39450428e23 C48 5.19824336e27 7.95041789e23 1.68839235e22 C50 5.59498452e26 8.75666056e22 2.79254271e22 C52 6.43656264e26 4.60087068e21 9.11661464e23 C54 1.96031627e26 4.50459082e20 1.98458883e22 C55 1.9734083e29 2.61667221e26 4.54521391e26 C57 1.39192995e28 1.48955085e25 1.23387971e24 C59 3.49342237e28 2.18616238e24 4.57708029e24 C61 3.79015472e28 8.50729665e24 6.06052772e24 C63 1.77868817e28 2.63725246e23 9.61661588e26 C65 2.61320106e29 1.37431086e22 9.18355997e24 C67 1.75320584e32 1.91491617e28 2.00093096e27 C69 1.49695509e32 5.27938029e27 2.16982668e27 C71 6.84912486e32 5.29216183e27 7.30096104e27 C73 1.54586906e31 4.04146338e26 4.93769708e27 C75 1.15783975e31 2.37812676e25 4.16594376e26 C77 4.14587364e32 1.20314674e24 1.62235584e25 C78 5.34426777e35 4.49836368e31 6.13330316e30 C80 4.27488688e34 1.29694668e29 1.62333428e29 C82 1.25436413e33 3.24280489e29 1.68167617e28 C84 1.71502766e33 3.00254831e29 4.89454528e28 C86 1.25734127e33 7.46446045e28 6.5895393e28 C88 5.19929261e34 5.84363659e27 1.5416679e27 C90 9.42013117e35 2.61240017e26 3.38007496e27 C92 1.00872668e38 4.95175891e33 1.78435553e32 C94 1.45968234e39 2.0913161e33 1.10022934e32 C96 2.49294655e38 9.54156933e32 1.00044858e30 C98 1.25738947e37 7.47916509e33 1.98972461e30 C100 1.6844889e37 7.35199153e30 3.47483305e30 C102 7.66863005e38 5.82871085e29 1.47027148e29 C104 1.4887687e38 2.15570834e28 2.0886266e29 C105 3.84331333e41 2.72151554e36 1.09100622e34 C107 4.50330303e40 6.8970507e35 3.91399908e34 C109 1.60900752e39 2.41557224e34 4.01031765e33 C111 2.46751199e39 1.07560857e33 1.8289791e32 C113 1.94052198e39 8.96263507e33 2.87152163e32 C115 9.9606188e40 4.77961552e32 4.19223781e33 C117 4.55475999e40 2.14647641e31 4.42634085e32 C119 9.96424428e41 6.08163641e31 4.46533131e32 C121 6.67748909e44 0 0 C123 1.35652075e43 0 0 C125 1.98636308e43 0 0 C127 1.25607622e42 0 0 C129 2.10051386e42 0 0 C131 1.77289428e42 0 0 C133 7.94693346e43 0 0 C135 1.74862061e43 0 0 C136 1.77390976e46 0 0 C138 2.00142247e45 0 0 C140 8.6258998e45 0 0 C142 1.91465627e44 0 0 C144 2.50271596e44 0 0 C146 2.03958823e44 0 0 C148 1.04613962e44 0 0 C150 3.18867421e45 0 0 C152 4.17582475e46 0 0

(120) TABLE-US-00028 TABLE 3b for FIG. 10 Coeffi- M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 633.70195490 1159.78778500 7911.62023000 C7 3.6838108e08 8.9762673e08 1.29208819e08 C9 1.66051547e07 5.4606184e08 4.52621083e08 C10 2.70786958e11 4.84436976e10 5.84676904e10 C12 4.05365907e10 4.4034394e11 3.29353371e11 C14 1.17570885e09 8.49494866e10 3.27657845e11 C16 5.32058235e13 1.22366579e12 4.06185258e13 C18 2.33907349e12 3.31495258e12 3.05655881e13 C20 1.03622586e11 4.74017946e12 9.90515078e14 C21 1.84951658e17 4.70815441e16 6.8177486e16 C23 1.97362743e16 5.63918759e15 1.78311332e16 C25 4.50645748e14 2.04438614e14 1.92769745e15 C27 1.22197136e13 4.46320586e14 1.11134948e15 C29 8.3397015e19 3.12037967e18 1.20925734e18 C31 5.73336291e17 2.52930984e17 2.68755339e18 C33 4.26965471e16 2.57659349e16 5.94759876e18 C35 1.12309508e15 3.62043368e16 4.78247891e18 C36 2.54002154e21 2.33285817e21 8.64176325e21 C38 6.58698589e22 6.78093367e21 2.69603122e21 C40 9.19834216e19 6.09316184e19 1.90190625e20 C42 5.20603364e18 2.48560476e18 2.06136053e20 C44 1.95177251e17 3.71987432e18 1.52178482e20 C46 5.11031274e23 2.36475219e24 1.40723013e23 C48 5.22351362e22 1.08955249e21 1.74886691e23 C50 1.29955621e20 6.28062297e21 1.31280422e22 C52 7.19352591e20 2.83502526e20 1.33189978e22 C54 3.01583882e19 4.05968238e20 5.11578136e23 C55 3.2378259e26 5.04920803e26 9.74226056e26 C57 2.56114803e26 1.66126857e24 1.25073538e25 C59 2.15568526e23 1.21962666e23 3.61644254e25 C61 7.54597503e23 7.85294647e23 6.17670028e25 C63 1.37768633e21 2.60819335e22 3.1972004e25 C65 9.91159698e22 3.82043453e22 5.14604952e26 C67 8.86143266e29 1.38719494e27 4.85096213e29 C69 2.95926995e28 1.1409927e26 1.52883817e29 C71 4.08946521e25 1.70193798e25 2.99192047e28 C73 1.1764e24 5.79647838e25 1.27326956e27 C75 1.82271068e23 1.8185183e24 2.14215183e27 C77 6.0476105e23 2.47496013e24 2.43586456e28 C78 1.46974123e31 2.48880617e30 2.2910216e30 C80 1.62035317e29 3.63910799e30 2.10355105e30 C82 2.64119709e28 1.39124488e28 3.56165247e30 C84 2.75435112e27 9.92371827e28 1.25073816e29 C86 6.06493358e26 2.9562807e27 1.02346615e29 C88 1.82794269e25 7.99387324e27 1.25693216e30 C90 8.10897778e25 1.01333935e26 6.64972771e30 C92 5.94852836e33 2.20554773e33 1.22259104e33 C94 7.23973112e32 1.10525284e31 1.24849687e32 C96 7.40539289e30 4.613537e32 3.29652704e32 C98 4.88216265e30 4.80483016e30 8.41705133e32 C100 9.65449531e28 6.23756899e30 1.57134898e31 C102 1.70876067e27 2.1445453e29 1.2032548e31 C104 2.67082934e26 2.28654521e29 3.36577402e32 C105 2.35094421e36 2.08468354e35 1.08251776e35 C107 3.37747137e34 1.04397603e34 3.142163e35 C109 7.70896596e34 2.85346997e34 8.01180965e35 C111 6.84579774e32 8.80664689e35 3.89769754e34 C113 9.31004972e32 9.19882787e33 7.80016296e34 C115 5.48180337e30 1.39857273e33 7.27970094e34 C117 9.40923091e30 2.85191959e32 3.44660803e34 C119 1.58250782e28 2.04899764e32 5.28320959e35

(121) TABLE-US-00029 TABLE 3c for FIG. 10 Coeffi- M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 6252.71767300 1718.69845500 1592.62684400 C7 2.02039657e07 7.72442186e08 2.81200257e07 C9 6.26194854e08 6.39011454e08 4.33420894e07 C10 1.17096485e10 5.38504965e10 2.16914992e10 C12 1.65918593e10 1.54474735e10 2.43233271e10 C14 2.6047855e11 5.67012949e11 1.0908048e09 C16 1.53352973e13 1.28128634e12 1.3249687e12 C18 6.85280998e14 3.29016521e13 2.3245033e12 C20 1.33134745e14 7.9135182e14 2.74288101e12 C21 9.63392843e16 2.23006179e16 3.54173468e16 C23 2.56356327e16 8.08610012e16 5.15456653e15 C25 4.93143601e16 1.64061139e16 1.06774698e14 C27 3.50827102e17 8.3638218e18 5.96789915e15 C29 1.32470314e18 2.06883208e18 1.70541615e18 C31 1.08456401e18 3.75046097e18 2.42446489e17 C33 3.23480928e19 1.52741866e18 4.43191025e17 C35 3.72075346e19 1.62584985e18 1.05861269e17 C36 3.85707039e21 2.85425871e21 1.53834046e21 C38 7.16357253e21 4.79674043e21 1.1251108e20 C40 1.76766744e21 6.62315222e22 1.18315789e19 C42 5.70159933e21 2.6546097e21 1.77703731e19 C44 3.65158025e21 1.5355861e20 1.37862764e20 C46 2.99726604e23 7.26058549e23 2.55922076e23 C48 4.17503344e23 9.21476496e23 1.00193833e22 C50 4.7884568e23 2.35567601e22 5.31735424e22 C52 6.91516977e24 1.35526865e22 6.79507546e22 C54 1.98546253e23 9.61975988e23 4.01660209e23 C55 1.94031018e26 1.56888015e25 1.38213528e26 C57 3.42382432e25 2.2750218e25 1.79376182e25 C59 2.2756817e25 1.23549695e25 5.94897934e25 C61 2.01539859e25 2.29974662e25 2.27901415e24 C63 4.95631548e25 8.59833428e25 2.22922414e24 C65 1.12176727e25 1.26876311e24 7.70058057e25 C67 9.06942404e28 9.3079309e28 3.74223228e28 C69 1.9957938e27 4.99157193e27 9.62902214e28 C71 3.12476201e27 1.58761398e26 2.15189986e27 C73 4.54981924e27 1.53821757e26 8.59545995e27 C75 6.59335485e28 3.62238546e27 5.36715829e27 C77 1.58015986e27 1.19949042e27 5.14863336e27 C78 4.37655985e30 2.15256015e30 6.68041182e32 C80 8.62343063e30 8.27474872e30 2.88698633e30 C82 1.3965552e29 1.85964202e29 2.97808799e30 C84 1.2610299e29 5.63075807e29 9.25513518e30 C86 4.82567841e30 7.58802797e29 2.1567675e29 C88 1.35566233e29 6.2816052e29 8.2378632e30 C90 8.35698293e31 2.48292667e29 1.8363031e29 C92 6.20912191e33 1.53848466e33 2.72722676e33 C94 3.03339233e32 5.56751434e32 9.35668771e33 C96 4.15846221e32 2.81174802e31 1.01318148e32 C98 1.20240425e31 5.69729421e31 4.31201041e32 C100 1.23999978e31 3.40400557e31 2.58821352e32 C102 1.77507014e33 9.97858945e32 6.91936623e33 C104 3.83557979e32 1.09580074e31 3.45333625e32 C105 1.52261212e35 5.38313447e37 2.4018539e36 C107 7.96360046e35 8.5583118e35 1.94949839e35 C109 2.50162343e34 3.84351739e34 2.7269109e35 C111 2.81541874e34 1.85492006e33 5.57867255e35 C113 6.28531061e34 2.60940268e33 8.0628501e35 C115 2.25293161e35 2.55655776e33 6.48059264e36 C117 7.79107372e35 1.01920129e33 2.46632816e36 C119 1.12500845e34 7.43677377e34 2.70846382e35

(122) TABLE-US-00030 TABLE 3d for FIG. 10 Coefficient M1 KY 0.00000000 KX 0.00000000 RX 2135.98763300 C7 3.62667214e08 C9 8.77001096e09 C10 7.9878408e12 C12 3.57622422e11 C14 5.67666306e11 C16 1.00670933e14 C18 6.43363507e14 C20 3.49263438e14 C21 1.83622059e18 C23 1.63146414e17 C25 2.33281554e16 C27 2.13403252e16 C29 7.17734463e22 C31 7.76916167e20 C33 2.45391831e19 C35 9.06895125e19 C36 2.87240432e24 C38 5.67479156e24 C40 2.53075334e22 C42 2.33441297e22 C44 4.90816027e21 C46 1.82993123e26 C48 1.40735408e25 C50 1.62994831e25 C52 4.12295522e24 C54 2.26175423e23 C55 6.84620783e30 C57 8.9211373e29 C59 3.99552919e28 C61 2.87701829e26 C63 7.90515964e26 C65 4.93963599e26 C67 8.37008672e32 C69 9.8548077e31 C71 7.50758997e30 C73 6.72582496e30 C75 2.5702957e28 C77 1.08487883e27 C78 4.88158898e36 C80 1.55182242e33 C82 1.52095525e32 C84 1.27781492e31 C86 1.81913568e30 C88 5.89459163e30 C90 2.69055495e30 C92 4.03243187e38 C94 3.64827588e36 C96 3.2629352e35 C98 1.58289449e34 C100 1.41502554e34 C102 7.52721979e33 C104 1.42550505e32 C105 9.85463233e41 C107 4.7133732e39 C109 9.62905307e38 C111 4.88592887e38 C113 5.89605443e36 C115 4.37586765e35 C117 1.2944388e34 C119 5.79847892e35

(123) TABLE-US-00031 TABLE 4a for FIG. 10 Surface DCX DCY DCZ Image 0.00000000 0.00000000 0.00000000 M10 0.00000000 0.00000000 805.12545493 AS 0.00000000 121.91685762 283.85220626 M9 0.00000000 161.70815863 113.71871405 M8 0.00000000 95.26534725 1237.21684296 M7 0.00000000 33.77425023 1447.75579022 M6 0.00000000 65.18321239 1551.64751609 M5 0.00000000 416.29245364 1699.16961083 M4 0.00000000 1004.20719186 1696.34134424 M3 0.00000000 1452.13094016 1490.08513977 M2 0.00000000 1660.63260708 1219.01552868 M1 0.00000000 1898.51696847 380.25896967 Object 0.00000000 2052.66210418 2142.14593325

(124) TABLE-US-00032 TABLE 4b for FIG. 10 Surface TLA[deg] TLB[deg] TLC[deg] Image 0.00000000 0.00000000 0.00000000 M10 6.58193819 0.00000000 0.00000000 AS 33.06787638 180.00000000 0.00000000 M9 193.02365372 0.00000000 0.00000000 M8 88.30109261 0.00000000 0.00000000 M7 60.05609350 0.00000000 0.00000000 M6 34.59181790 0.00000000 0.00000000 M5 11.25728686 0.00000000 0.00000000 M4 12.50018064 0.00000000 0.00000000 M3 38.57896098 0.00000000 0.00000000 M2 63.29951574 0.00000000 0.00000000 M1 185.41707922 0.00000000 0.00000000 Object 0.00000000 0.00000000 0.00000000

(125) TABLE-US-00033 TABLE 5 for FIG. 10 Surface Angle of incidence[deg] Reflectivity M10 6.54595976 0.66117442 M9 0.00927824 0.66565898 M8 75.28640231 0.80872358 M7 76.47602867 0.82797480 M6 78.19600462 0.85363243 M5 77.82112299 0.84823720 M4 78.09659958 0.85221174 M3 76.69475350 0.83137235 M2 78.51548223 0.85815147 M1 10.19566395 0.65421760 Overall transmis- 0.0849

(126) TABLE-US-00034 TABLE 6 for FIG. 10: Stop polygon AS in the imaging beam path between M9 and M10 X[mm] Y[mm] Z[mm] Type 0.00000000 131.83589200 131.83589200 CLA 7.35374100 131.77048700 131.77048700 CLA 14.70296100 131.57431400 131.57431400 CLA 22.04313100 131.24749000 131.24749000 CLA 29.36970700 130.79021600 130.79021600 CLA 36.67812000 130.20277000 130.20277000 CLA 43.96377000 129.48550800 129.48550800 CLA 51.22201700 128.63886500 128.63886500 CLA 58.44817700 127.66335300 127.66335300 CLA 65.63750700 126.55956000 126.55956000 CLA 72.78520400 125.32814900 125.32814900 CLA 79.88639400 123.96985800 123.96985800 CLA 86.93612800 122.48549900 122.48549900 CLA 93.92937000 120.87595600 120.87595600 CLA 100.86099500 119.14218500 119.14218500 CLA 107.72578000 117.28521600 117.28521600 CLA 114.51840200 115.30614500 115.30614500 CLA 121.23342700 113.20614300 113.20614300 CLA 127.86531200 110.98644900 110.98644900 CLA 134.40839900 108.64837300 108.64837300 CLA 140.85691200 106.19329300 106.19329300 CLA 147.20495800 103.62266000 103.62266000 CLA 153.44653000 100.93799400 100.93799400 CLA 159.57550100 98.14088700 98.14088700 CLA 165.58563900 95.23300400 95.23300400 CLA 171.47060200 92.21608300 92.21608300 CLA 177.22395400 89.09193600 89.09193600 CLA 182.83916900 85.86245400 85.86245400 CLA 188.30964600 82.52960300 82.52960300 CLA 193.62872100 79.09543300 79.09543300 CLA 198.78968100 75.56207400 75.56207400 CLA 203.78578300 71.93174200 71.93174200 CLA 208.61027600 68.20674000 68.20674000 CLA 213.25641600 64.38946000 64.38946000 CLA 217.71749400 60.48238700 60.48238700 CLA 221.98685600 56.48810300 56.48810300 CLA 226.05793100 52.40928400 52.40928400 CLA 229.92425500 48.24870700 48.24870700 CLA 233.57949800 44.00925100 44.00925100 CLA 237.01749200 39.69389700 39.69389700 CLA 240.23226000 35.30573300 35.30573300 CLA 243.21803600 30.84795100 30.84795100 CLA 245.96930200 26.32385100 26.32385100 CLA 248.48080600 21.73684100 21.73684100 CLA 250.74758900 17.09043500 17.09043500 CLA 252.76501100 12.38825600 12.38825600 CLA 254.52877100 7.63403200 7.63403200 CLA 256.03492600 2.83160000 2.83160000 CLA 257.27991400 2.01510200 2.01510200 CLA 258.26056300 6.90202700 6.90202700 CLA 258.97411000 11.82502800 11.82502800 CLA 259.41821000 16.77985300 16.77985300 CLA 259.59094200 21.76215200 21.76215200 CLA 259.49081700 26.76747100 26.76747100 CLA 259.11677800 31.79125700 31.79125700 CLA 258.46820200 36.82885800 36.82885800 CLA 257.54489300 41.87552300 41.87552300 CLA 256.34708200 46.92640000 46.92640000 CLA 254.87541300 51.97654200 51.97654200 CLA 253.13093700 57.02090100 57.02090100 CLA 251.11510000 62.05433300 62.05433300 CLA 248.82972800 67.07159700 67.07159700 CLA 246.27701400 72.06735500 72.06735500 CLA 243.45950400 77.03617900 77.03617900 CLA 240.38007900 81.97254400 81.97254400 CLA 237.04194200 86.87084100 86.87084100 CLA 231.96108600 91.93003900 87.66439900 CLA 215.75319900 97.95558800 57.71637300 CLA 200.50494000 102.97145500 29.26997800 CLA 187.50396000 107.03629500 6.21712400 CLA 176.16536800 110.38803000 12.79151000 CLA 166.08539300 113.19140700 28.69025100 CLA 156.97673300 115.56411200 42.14652500 CLA 148.62973700 117.59244200 53.64975800 CLA 140.88812900 119.34110800 63.56693800 CLA 133.63328500 120.85957600 72.17859500 CLA 126.77374700 122.18629300 79.70278000 CLA 120.23804100 123.35158400 86.31147700 CLA 113.96964400 124.37968000 92.14209800 CLA 107.92338600 125.29016100 97.30569100 CLA 102.06283300 126.09901100 101.89290600 CLA 96.35834900 126.81939500 105.97841200 CLA 90.78564100 127.46224600 109.62420100 CLA 85.32465800 128.03670200 112.88210200 CLA 79.95873600 128.55045100 115.79571500 CLA 74.67394200 129.00999300 118.40190700 CLA 69.45855200 129.42085000 120.73199200 CLA 64.30264200 129.78772800 122.81266100 CLA 59.19775900 130.11464900 124.66672400 CLA 54.13665500 130.40505600 126.31370400 CLA 49.11308000 130.66189700 127.77032000 CLA 44.12159800 130.88769300 129.05087400 CLA 39.15744700 131.08459700 130.16757100 CLA 34.21642400 131.25443500 131.13077000 CLA 29.29477500 131.39874700 131.94920200 CLA 24.38912200 131.51881300 132.63013400 CLA 19.49638000 131.61568300 133.17950800 CLA 14.61370400 131.69018800 133.60204800 CLA 9.73842500 131.74296200 133.90134800 CLA 4.86800800 131.77445100 134.07993100 CLA 0.00000000 131.78491900 134.13929300 CLA 4.86800800 131.77445100 134.07993100 CLA 9.73842500 131.74296200 133.90134800 CLA 14.61370400 131.69018800 133.60204800 CLA 19.49638000 131.61568300 133.17950800 CLA 24.38912200 131.51881300 132.63013400 CLA 29.29477500 131.39874700 131.94920200 CLA 34.21642400 131.25443500 131.13077000 CLA 39.15744700 131.08459700 130.16757100 CLA 44.12159800 130.88769300 129.05087400 CLA 49.11308000 130.66189700 127.77032000 CLA 54.13665500 130.40505600 126.31370400 CLA 59.19775900 130.11464900 124.66672400 CLA 64.30264200 129.78772800 122.81266100 CLA 69.45855200 129.42085000 120.73199200 CLA 74.67394200 129.00999300 118.40190700 CLA 79.95873600 128.55045100 115.79571500 CLA 85.32465800 128.03670200 112.88210200 CLA 90.78564100 127.46224600 109.62420100 CLA 96.35834900 126.81939500 105.97841200 CLA 102.06283300 126.09901100 101.89290600 CLA 107.92338600 125.29016100 97.30569100 CLA 113.96964400 124.37968000 92.14209800 CLA 120.23804100 123.35158400 86.31147700 CLA 126.77374700 122.18629300 79.70278000 CLA 133.63328500 120.85957600 72.17859500 CLA 140.88812900 119.34110800 63.56693800 CLA 148.62973700 117.59244200 53.64975800 CLA 156.97673300 115.56411200 42.14652500 CLA 166.08539300 113.19140700 28.69025100 CLA 176.16536800 110.38803000 12.79151000 CLA 187.50396000 107.03629500 6.21712400 CLA 200.50494000 102.97145500 29.26997800 CLA 215.75319900 97.95558800 57.71637300 CLA 231.96108600 91.93003900 87.66439900 CLA 237.04194200 86.87084100 86.87084100 CLA 240.38007900 81.97254400 81.97254400 CLA 243.45950400 77.03617900 77.03617900 CLA 246.27701400 72.06735500 72.06735500 CLA 248.82972800 67.07159700 67.07159700 CLA 251.11510000 62.05433300 62.05433300 CLA 253.13093700 57.02090100 57.02090100 CLA 254.87541300 51.97654200 51.97654200 CLA 256.34708200 46.92640000 46.92640000 CLA 257.54489300 41.87552300 41.87552300 CLA 258.46820200 36.82885800 36.82885800 CLA 259.11677800 31.79125700 31.79125700 CLA 259.49081700 26.76747100 26.76747100 CLA 259.59094200 21.76215200 21.76215200 CLA 259.41821000 16.77985300 16.77985300 CLA 258.97411000 11.82502800 11.82502800 CLA 258.26056300 6.90202700 6.90202700 CLA 257.27991400 2.01510200 2.01510200 CLA 256.03492600 2.83160000 2.83160000 CLA 254.52877100 7.63403200 7.63403200 CLA 252.76501100 12.38825600 12.38825600 CLA 250.74758900 17.09043500 17.09043500 CLA 248.48080600 21.73684100 21.73684100 CLA 245.96930200 26.32385100 26.32385100 CLA 243.21803600 30.84795100 30.84795100 CLA 240.23226000 35.30573300 35.30573300 CLA 237.01749200 39.69389700 39.69389700 CLA 233.57949800 44.00925100 44.00925100 CLA 229.92425500 48.24870700 48.24870700 CLA 226.05793100 52.40928400 52.40928400 CLA 221.98685600 56.48810300 56.48810300 CLA 217.71749400 60.48238700 60.48238700 CLA 213.25641600 64.38946000 64.38946000 CLA 208.61027600 68.20674000 68.20674000 CLA 203.78578300 71.93174200 71.93174200 CLA 198.78968100 75.56207400 75.56207400 CLA 193.62872100 79.09543300 79.09543300 CLA 188.30964600 82.52960300 82.52960300 CLA 182.83916900 85.86245400 85.86245400 CLA 177.22395400 89.09193600 89.09193600 CLA 171.47060200 92.21608300 92.21608300 CLA 165.58563900 95.23300400 95.23300400 CLA 159.57550100 98.14088700 98.14088700 CLA 153.44653000 100.93799400 100.93799400 CLA 147.20495800 103.62266000 103.62266000 CLA 140.85691200 106.19329300 106.19329300 CLA 134.40839900 108.64837300 108.64837300 CLA 127.86531200 110.98644900 110.98644900 CLA 121.23342700 113.20614300 113.20614300 CLA 114.51840200 115.30614500 115.30614500 CLA 107.72578000 117.28521600 117.28521600 CLA 100.86099500 119.14218500 119.14218500 CLA 93.92937000 120.87595600 120.87595600 CLA 86.93612800 122.48549900 122.48549900 CLA 79.88639400 123.96985800 123.96985800 CLA 72.78520400 125.32814900 125.32814900 CLA 65.63750700 126.55956000 126.55956000 CLA 58.44817700 127.66335300 127.66335300 CLA 51.22201700 128.63886500 128.63886500 CLA 43.96377000 129.48550800 129.48550800 CLA 36.67812000 130.20277000 130.20277000 CLA 29.36970700 130.79021600 130.79021600 CLA 22.04313100 131.24749000 131.24749000 CLA 14.70296100 131.57431400 131.57431400 CLA 7.35374100 131.77048700 131.77048700 CLA

(127) An overall reflectivity of the projection optical unit 25 is approximately 8.49%.

(128) The image field 8 has an x-extent of two-times 13.0 mm and a y-extent of 1.0 mm. The projection optical unit 25 is optimized for an operating wavelength of the illumination light 3 of 13.5 nm.

(129) FIG. 11 shows the profile of the stop AS in the case of the projection optical unit 25. The differences of this stop AS of the projection optical unit 25 with respect to those of the stop AS of the projection optical unit 20 are explained below.

(130) Between the stop sections 21 and 22, on the one hand, and the stop section 22 and the carrying section 23, on the other hand, the stop AS of the projection optical unit 25 is bent in each case to a significantly greater extent than in the case of the stop AS of the projection optical unit 20. In the case of the stop AS of the projection optical unit 25, the bending angles are in each case such that the sections 21, 22, on the one hand, and the sections 22, 23, on the other hand, run at acute angles with respect to one another.

(131) The stop section 21 delimits the pupil marginal contour of the projection optical unit 25 beyond the two extreme marginal positions E(x), E(x), approximately as far as maximum marginal positions R.sub.max(x) and R.sub.max(x) (cf. FIG. 4). Starting from these maximum marginal positions R.sub.max(x) and R.sub.max(x), the stop contour makes way for the imaging light partial beam 3.sub.M10W on the one hand in the negative z-direction and on the other hand in the positive y-direction and delimits the rest of the pupil marginal contour in accordance with the stop AS of the projection optical unit 21. Following the marginal positions R.sub.max(x) and R.sub.max(x), the stop AS of the projection optical unit 25 thus transitions into the web region S of the stop embodiment of the projection optical unit 20 according to FIGS. 7 and 8.

(132) The marginal contours of the stops AS of the projection optical units 20 and 25 have a three-dimensional profile. The marginal contours of the stops AS of the projection optical units 20 and 25 are embodied in each case in a plane fashion in sections. The stops AS of the projection optical units 20 and 25 delimit the pupil marginal contour 24 in more than one plane.

(133) FIG. 12 shows a sagittal view of the projection optical unit 25.

(134) A further embodiment of a projection optical unit 26, which can be used in the projection exposure apparatus 1 according to FIG. 1 instead of the projection optical unit 7, is explained in the following text on the basis of FIGS. 13 to 15. Components and functions which have already been explained above in the context of FIGS. 1 to 12 are denoted, where applicable, by the same reference signs and are not discussed again in detail.

(135) The mirrors M1 to M10 are once again configured as free-form surfaces for which the free-form surface equation (1) indicated above holds true. The optical design data from the projection optical unit 26 can be gathered from the following tables, which, in terms of their design, correspond to the tables for the projection optical unit 7 according to FIG. 2.

(136) TABLE-US-00035 TABLE 1 for FIG. 13 Exemplary embodiment FIG. 13 NA 0.55 Wavelength 13.5 nm Field dimension x 26.0 mm Field dimension y 1.0 mm Field curvature 0.012345 1/mm Stop AS

(137) TABLE-US-00036 TABLE 2 for FIG. 13 Surface Radius_x[mm] Power_x[1/mm] Radius_y[mm] Power_y[1/mm] Operating mode M10 924.4981198 0.0021492 841.5674623 0.0023921 REFL M9 1845.8313982 0.0010835 356.4114777 0.0056115 REFL M8 807.7853011 0.0006289 16794.6817783 0.0004689 REFL M7 633.7019549 0.0007380 20332.8433550 0.0004206 REFL M6 1159.7877847 0.0003528 7078.0588424 0.0013813 REFL M5 7911.6202298 0.0000533 2197.1749958 0.0043148 REFL M4 6252.7176733 0.0000660 2753.7274849 0.0035212 REFL M3 1718.6984546 0.0002678 10060.7554809 0.0008638 REFL M2 1592.6268445 0.0002500 2592.5626309 0.0038746 REFL M1 2135.9876330 0.0009216 1377.1202039 0.0014756 REFL

(138) TABLE-US-00037 TABLE 3a for FIG. 13 Coeffi- M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 924.49811980 1845.83139800 807.78530110 C7 5.32161644e09 7.17957299e07 3.61958396e07 C9 1.2051462e08 1.48021766e06 4.61852728e08 C10 4.28738318e12 3.94779844e10 1.36275822e10 C12 3.49709402e11 2.67402017e09 4.92199166e11 C14 9.81786584e12 6.31481582e09 4.23949539e10 C16 3.40219667e15 2.74047503e12 1.12548598e12 C18 1.60335869e14 2.04228406e14 3.71761249e13 C20 1.30399612e14 3.2725238e11 2.05971586e12 C21 1.15274335e17 2.35879877e15 1.09054091e15 C23 6.9260806e17 1.00239611e14 1.70911423e15 C25 7.13524377e17 5.05529889e14 3.62622238e15 C27 1.67322747e17 1.78538542e13 7.36849912e15 C29 7.92528578e21 4.11347975e18 2.59696939e18 C31 1.27834004e20 5.83032641e17 1.25679501e17 C33 3.27119661e20 1.71591989e16 1.04543394e17 C35 1.71377495e20 1.22876874e15 3.91086555e17 C36 1.89551894e23 4.14843428e22 5.26679107e21 C38 1.11996388e22 1.06656248e19 2.8502374e20 C40 1.96750203e22 2.08419251e19 6.3260457e20 C42 1.2392523e22 8.95301505e19 4.7233819e21 C44 2.47458966e23 8.36809183e18 2.27707911e19 C46 9.77909864e27 1.02394711e22 1.39450428e23 C48 5.19824336e27 7.95041789e23 1.68839235e22 C50 5.59498452e26 8.75666056e22 2.79254271e22 C52 6.43656264e26 4.60087068e21 9.11661464e23 C54 1.96031627e26 4.50459082e20 1.98458883e22 C55 1.9734083e29 2.61667221e26 4.54521391e26 C57 1.39192995e28 1.48955085e25 1.23387971e24 C59 3.49342237e28 2.18616238e24 4.57708029e24 C61 3.79015472e28 8.50729665e24 6.06052772e24 C63 1.77868817e28 2.63725246e23 9.61661588e26 C65 2.61320106e29 1.37431086e22 9.18355997e24 C67 1.75320584e32 1.91491617e28 2.00093096e27 C69 1.49695509e32 5.27938029e27 2.16982668e27 C71 6.84912486e32 5.29216183e27 7.30096104e27 C73 1.54586906e31 4.04146338e26 4.93769708e27 C75 1.15783975e31 2.37812676e25 4.16594376e26 C77 4.14587364e32 1.20314674e24 1.62235584e25 C78 5.34426777e35 4.49836368e31 6.13330316e30 C80 4.27488688e34 1.29694668e29 1.62333428e29 C82 1.25436413e33 3.24280489e29 1.68167617e28 C84 1.71502766e33 3.00254831e29 4.89454528e28 C86 1.25734127e33 7.46446045e28 6.5895393e28 C88 5.19929261e34 5.84363659e27 1.5416679e27 C90 9.42013117e35 2.61240017e26 3.38007496e27 C92 1.00872668e38 4.95175891e33 1.78435553e32 C94 1.45968234e39 2.0913161e33 1.10022934e32 C96 2.49294655e38 9.54156933e32 1.00044858e30 C98 1.25738947e37 7.47916509e33 1.98972461e30 C100 1.6844889e37 7.35199153e30 3.47483305e30 C102 7.66863005e38 5.82871085e29 1.47027148e29 C104 1.4887687e38 2.15570834e28 2.0886266e29 C105 3.84331333e41 2.72151554e36 1.09100622e34 C107 4.50330303e40 6.8970507e35 3.91399908e34 C109 1.60900752e39 2.41557224e34 4.01031765e33 C111 2.46751199e39 1.07560857e33 1.8289791e32 C113 1.94052198e39 8.96263507e33 2.87152163e32 C115 9.9606188e40 4.77961552e32 4.19223781e33 C117 4.55475999e40 2.14647641e31 4.42634085e32 C119 9.96424428e41 6.08163641e31 4.46533131e32 C121 6.67748909e44 0 0 C123 1.35652075e43 0 0 C125 1.98636308e43 0 0 C127 1.25607622e42 0 0 C129 2.10051386e42 0 0 C131 1.77289428e42 0 0 C133 7.94693346e43 0 0 C135 1.74862061e43 0 0 C136 1.77390976e46 0 0 C138 2.00142247e45 0 0 C140 8.6258998e45 0 0 C142 1.91465627e44 0 0 C144 2.50271596e44 0 0 C146 2.03958823e44 0 0 C148 1.04613962e44 0 0 C150 3.18867421e45 0 0 C152 4.17582475e46 0 0

(139) TABLE-US-00038 TABLE 3b for FIG. 13 Coeffi- M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 633.70195490 1159.78778500 7911.62023000 C7 3.6838108e08 8.9762673e08 1.29208819e08 C9 1.66051547e07 5.4606184e08 4.52621083e08 C10 2.70786958e11 4.84436976e10 5.84676904e10 C12 4.05365907e10 4.4034394e11 3.29353371e11 C14 1.17570885e09 8.49494866e10 3.27657845e11 C16 5.32058235e13 1.22366579e12 4.06185258e13 C18 2.33907349e12 3.31495258e12 3.05655881e13 C20 1.03622586e11 4.74017946e12 9.90515078e14 C21 1.84951658e17 4.70815441e16 6.8177486e16 C23 1.97362743e16 5.63918759e15 1.78311332e16 C25 4.50645748e14 2.04438614e14 1.92769745e15 C27 1.22197136e13 4.46320586e14 1.11134948e15 C29 8.3397015e19 3.12037967e18 1.20925734e18 C31 5.73336291e17 2.52930984e17 2.68755339e18 C33 4.26965471e16 2.57659349e16 5.94759876e18 C35 1.12309508e15 3.62043368e16 4.78247891e18 C36 2.54002154e21 2.33285817e21 8.64176325e21 C38 6.58698589e22 6.78093367e21 2.69603122e21 C40 9.19834216e19 6.09316184e19 1.90190625e20 C42 5.20603364e18 2.48560476e18 2.06136053e20 C44 1.95177251e17 3.71987432e18 1.52178482e20 C46 5.11031274e23 2.36475219e24 1.40723013e23 C48 5.22351362e22 1.08955249e21 1.74886691e23 C50 1.29955621e20 6.28062297e21 1.31280422e22 C52 7.19352591e20 2.83502526e20 1.33189978e22 C54 3.01583882e19 4.05968238e20 5.11578136e23 C55 3.2378259e26 5.04920803e26 9.74226056e26 C57 2.56114803e26 1.66126857e24 1.25073538e25 C59 2.15568526e23 1.21962666e23 3.61644254e25 C61 7.54597503e23 7.85294647e23 6.17670028e25 C63 1.37768633e21 2.60819335e22 3.1972004e25 C65 9.91159698e22 3.82043453e22 5.14604952e26 C67 8.86143266e29 1.38719494e27 4.85096213e29 C69 2.95926995e28 1.1409927e26 1.52883817e29 C71 4.08946521e25 1.70193798e25 2.99192047e28 C73 1.1764e24 5.79647838e25 1.27326956e27 C75 1.82271068e23 1.8185183e24 2.14215183e27 C77 6.0476105e23 2.47496013e24 2.43586456e28 C78 1.46974123e31 2.48880617e30 2.2910216e30 C80 1.62035317e29 3.63910799e30 2.10355105e30 C82 2.64119709e28 1.39124488e28 3.56165247e30 C84 2.75435112e27 9.92371827e28 1.25073816e29 C86 6.06493358e26 2.9562807e27 1.02346615e29 C88 1.82794269e25 7.99387324e27 1.25693216e30 C90 8.10897778e25 1.01333935e26 6.64972771e30 C92 5.94852836e33 2.20554773e33 1.22259104e33 C94 7.23973112e32 1.10525284e31 1.24849687e32 C96 7.40539289e30 4.613537e32 3.29652704e32 C98 4.88216265e30 4.80483016e30 8.41705133e32 C100 9.65449531e28 6.23756899e30 1.57134898e31 C102 1.70876067e27 2.1445453e29 1.2032548e31 C104 2.67082934e26 2.28654521e29 3.36577402e32 C105 2.35094421e36 2.08468354e35 1.08251776e35 C107 3.37747137e34 1.04397603e34 3.142163e35 C109 7.70896596e34 2.85346997e34 8.01180965e35 C111 6.84579774e32 8.80664689e35 3.89769754e34 C113 9.31004972e32 9.19882787e33 7.80016296e34 C115 5.48180337e30 1.39857273e33 7.27970094e34 C117 9.40923091e30 2.85191959e32 3.44660803e34 C119 1.58250782e28 2.04899764e32 5.28320959e35

(140) TABLE-US-00039 TABLE 3c for FIG. 13 Coeffi- M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 6252.71767300 1718.69845500 1592.62684400 C7 2.02039657e07 7.72442186e08 2.81200257e07 C9 6.26194854e08 6.39011454e08 4.33420894e07 C10 1.17096485e10 5.38504965e10 2.16914992e10 C12 1.65918593e10 1.54474735e10 2.43233271e10 C14 2.6047855e11 5.67012949e11 1.0908048e09 C16 1.53352973e13 1.28128634e12 1.3249687e12 C18 6.85280998e14 3.29016521e13 2.3245033e12 C20 1.33134745e14 7.9135182e14 2.74288101e12 C21 9.63392843e16 2.23006179e16 3.54173468e16 C23 2.56356327e16 8.08610012e16 5.15456653e15 C25 4.93143601e16 1.64061139e16 1.06774698e14 C27 3.50827102e17 8.3638218e18 5.96789915e15 C29 1.32470314e18 2.06883208e18 1.70541615e18 C31 1.08456401e18 3.75046097e18 2.42446489e17 C33 3.23480928e19 1.52741866e18 4.43191025e17 C35 3.72075346e19 1.62584985e18 1.05861269e17 C36 3.85707039e21 2.85425871e21 1.53834046e21 C38 7.16357253e21 4.79674043e21 1.1251108e20 C40 1.76766744e21 6.62315222e22 1.18315789e19 C42 5.70159933e21 2.6546097e21 1.77703731e19 C44 3.65158025e21 1.5355861e20 1.37862764e20 C46 2.99726604e23 7.26058549e23 2.55922076e23 C48 4.17503344e23 9.21476496e23 1.00193833e22 C50 4.7884568e23 2.35567601e22 5.31735424e22 C52 6.91516977e24 1.35526865e22 6.79507546e22 C54 1.98546253e23 9.61975988e23 4.01660209e23 C55 1.94031018e26 1.56888015e25 1.38213528e26 C57 3.42382432e25 2.2750218e25 1.79376182e25 C59 2.2756817e25 1.23549695e25 5.94897934e25 C61 2.01539859e25 2.29974662e25 2.27901415e24 C63 4.95631548e25 8.59833428e25 2.22922414e24 C65 1.12176727e25 1.26876311e24 7.70058057e25 C67 9.06942404e28 9.3079309e28 3.74223228e28 C69 1.9957938e27 4.99157193e27 9.62902214e28 C71 3.12476201e27 1.58761398e26 2.15189986e27 C73 4.54981924e27 1.53821757e26 8.59545995e27 C75 6.59335485e28 3.62238546e27 5.36715829e27 C77 1.58015986e27 1.19949042e27 5.14863336e27 C78 4.37655985e30 2.15256015e30 6.68041182e32 C80 8.62343063e30 8.27474872e30 2.88698633e30 C82 1.3965552e29 1.85964202e29 2.97808799e30 C84 1.2610299e29 5.63075807e29 9.25513518e30 C86 4.82567841e30 7.58802797e29 2.1567675e29 C88 1.35566233e29 6.2816052e29 8.2378632e30 C90 8.35698293e31 2.48292667e29 1.8363031e29 C92 6.20912191e33 1.53848466e33 2.72722676e33 C94 3.03339233e32 5.56751434e32 9.35668771e33 C96 4.15846221e32 2.81174802e31 1.01318148e32 C98 1.20240425e31 5.69729421e31 4.31201041e32 C100 1.23999978e31 3.40400557e31 2.58821352e32 C102 1.77507014e33 9.97858945e32 6.91936623e33 C104 3.83557979e32 1.09580074e31 3.45333625e32 C105 1.52261212e35 5.38313447e37 2.4018539e36 C107 7.96360046e35 8.5583118e35 1.94949839e35 C109 2.50162343e34 3.84351739e34 2.7269109e35 C111 2.81541874e34 1.85492006e33 5.57867255e35 C113 6.28531061e34 2.60940268e33 8.0628501e35 C115 2.25293161e35 2.55655776e33 6.48059264e36 C117 7.79107372e35 1.01920129e33 2.46632816e36 C119 1.12500845e34 7.43677377e34 2.70846382e35

(141) TABLE-US-00040 TABLE 3d for FIG. 13 Coefficient M1 KY 0.00000000 KX 0.00000000 RX 2135.98763300 C7 3.62667214e08 C9 8.77001096e09 C10 7.9878408e12 C12 3.57622422e11 C14 5.67666306e11 C16 1.00670933e14 C18 6.43363507e14 C20 3.49263438e14 C21 1.83622059e18 C23 1.63146414e17 C25 2.33281554e16 C27 2.13403252e16 C29 7.17734463e22 C31 7.76916167e20 C33 2.45391831e19 C35 9.06895125e19 C36 2.87240432e24 C38 5.67479156e24 C40 2.53075334e22 C42 2.33441297e22 C44 4.90816027e21 C46 1.82993123e26 C48 1.40735408e25 C50 1.62994831e25 C52 4.12295522e24 C54 2.26175423e23 C55 6.84620783e30 C57 8.9211373e29 C59 3.99552919e28 C61 2.87701829e26 C63 7.90515964e26 C65 4.93963599e26 C67 8.37008672e32 C69 9.8548077e31 C71 7.50758997e30 C73 6.72582496e30 C75 2.5702957e28 C77 1.08487883e27 C78 4.88158898e36 C80 1.55182242e33 C82 1.52095525e32 C84 1.27781492e31 C86 1.81913568e30 C88 5.89459163e30 C90 2.69055495e30 C92 4.03243187e38 C94 3.64827588e36 C96 3.2629352e35 C98 1.58289449e34 C100 1.41502554e34 C102 7.52721979e33 C104 1.42550505e32 C105 9.85463233e41 C107 4.7133732e39 C109 9.62905307e38 C111 4.88592887e38 C113 5.89605443e36 C115 4.37586765e35 C117 1.2944388e34 C119 5.79847892e35

(142) TABLE-US-00041 TABLE 4a for FIG. 13 Surface DCX DCY DCZ Image 0.00000000 0.00000000 0.00000000 M10 0.00000000 0.00000000 805.12545493 AS 0.00000000 229.02635233 308.90327698 M9 0.00000000 161.70815863 113.71871405 M8 0.00000000 95.26534725 1237.21684296 M7 0.00000000 33.77425023 1447.75579022 M6 0.00000000 65.18321239 1551.64751609 M5 0.00000000 416.29245364 1699.16961083 M4 0.00000000 1004.20719186 1696.34134424 M3 0.00000000 1452.13094016 1490.08513977 M2 0.00000000 1660.63260708 1219.01552868 M1 0.00000000 1898.51696847 380.25896967 Object 0.00000000 2052.66210418 2142.14593325

(143) TABLE-US-00042 TABLE 4b for FIG. 13 Surface TLA[deg] TLB[deg] TLC[deg] Image 0.00000000 0.00000000 0.00000000 M10 6.58193819 0.00000000 0.00000000 AS 55.06787638 180.00000000 0.00000000 M9 193.02365372 0.00000000 0.00000000 M8 88.30109261 0.00000000 0.00000000 M7 60.05609350 0.00000000 0.00000000 M6 34.59181790 0.00000000 0.00000000 M5 11.25728686 0.00000000 0.00000000 M4 12.50018064 0.00000000 0.00000000 M3 38.57896098 0.00000000 0.00000000 M2 63.29951574 0.00000000 0.00000000 M1 185.41707922 0.00000000 0.00000000 Object 0.00000000 0.00000000 0.00000000

(144) TABLE-US-00043 TABLE 5 for FIG. 13 Surface Angle of incidence[deg] Reflectivity M10 6.54595976 0.66117442 M9 0.00927824 0.66565898 M8 75.28640231 0.80872358 M7 76.47602867 0.82797480 M6 78.19600462 0.85363243 M5 77.82112299 0.84823720 M4 78.09659958 0.85221174 M3 76.69475350 0.83137235 M2 78.51548223 0.85815147 M1 10.19566395 0.65421760 Overall transmis- 0.0849

(145) TABLE-US-00044 TABLE 6 Stop polygon AS in the imaging beam path between M9 and M10 X[mm] Y[mm] Z[mm] Type 0.00000000 353.51387100 0.00000000 CLA 12.96238300 352.78667200 0.00000000 CLA 25.85530400 350.61342700 0.00000000 CLA 38.61060800 347.01896200 0.00000000 CLA 51.16270500 342.04388900 0.00000000 CLA 63.44972800 335.74349800 0.00000000 CLA 75.41455000 328.18629200 0.00000000 CLA 87.00562600 319.45221900 0.00000000 CLA 98.17764100 309.63070300 0.00000000 CLA 108.89195400 298.81854400 0.00000000 CLA 119.11683100 287.11777800 0.00000000 CLA 128.82747700 274.63358000 0.00000000 CLA 138.00590000 261.47227200 0.00000000 CLA 146.64060400 247.73949500 0.00000000 CLA 154.72616300 233.53858800 0.00000000 CLA 162.26269100 218.96920100 0.00000000 CLA 169.25524900 204.12615200 0.00000000 CLA 175.71320100 189.09853000 0.00000000 CLA 181.64955800 173.96904400 0.00000000 CLA 187.08033200 158.81358700 0.00000000 CLA 192.02390600 143.70100000 0.00000000 CLA 196.50044400 128.69301600 0.00000000 CLA 200.53134900 113.84434200 0.00000000 CLA 204.13877400 99.20286700 0.00000000 CLA 207.34519000 84.80996300 0.00000000 CLA 210.17301200 70.70085100 0.00000000 CLA 212.64428600 56.90502000 0.00000000 CLA 214.78042700 43.44667100 0.00000000 CLA 216.60201000 30.34518200 0.00000000 CLA 218.12860900 17.61556600 0.00000000 CLA 219.37867800 5.26892700 0.00000000 CLA 220.36947300 6.68710700 0.00000000 CLA 221.11699800 18.24796700 0.00000000 CLA 221.63599400 29.41175400 0.00000000 CLA 221.93993900 40.17888700 0.00000000 CLA 222.04107500 50.55176400 0.00000000 CLA 221.95044900 60.53447000 0.00000000 CLA 221.67796800 70.13250500 0.00000000 CLA 221.23246600 79.35254200 0.00000000 CLA 220.62177400 88.20221800 0.00000000 CLA 219.85279900 96.68994000 0.00000000 CLA 218.93160700 104.82472400 0.00000000 CLA 217.86350300 112.61605400 0.00000000 CLA 216.65311600 120.07375400 0.00000000 CLA 215.30448300 127.20788700 0.00000000 CLA 213.82112600 134.02866400 0.00000000 CLA 212.20613200 140.54636700 0.00000000 CLA 210.46222800 146.77128700 0.00000000 CLA 208.59184900 152.71367000 0.00000000 CLA 206.59720300 158.38367400 0.00000000 CLA 204.48033700 163.79132900 0.00000000 CLA 202.24318600 168.94651100 0.00000000 CLA 199.88762700 173.85891600 0.00000000 CLA 197.41552400 178.53803800 0.00000000 CLA 194.82876600 182.99315700 0.00000000 CLA 192.12929800 187.23332000 0.00000000 CLA 189.31915400 191.26733600 0.00000000 CLA 186.40047400 195.10376400 0.00000000 CLA 183.37552100 198.75090800 0.00000000 CLA 180.24669500 202.21681200 0.00000000 CLA 177.01653700 205.50925400 0.00000000 CLA 173.68773300 208.63574800 0.00000000 CLA 170.26310600 211.60353800 0.00000000 CLA 166.74561700 214.41960100 0.00000000 CLA 163.13835200 217.09064600 0.00000000 CLA 159.44450600 219.62311500 0.00000000 CLA 155.66737600 222.02318800 0.00000000 CLA 151.81033800 224.29678000 0.00000000 CLA 147.87683200 226.44955100 0.00000000 CLA 143.87034100 228.48690600 0.00000000 CLA 139.79437800 230.41400200 0.00000000 CLA 135.65245800 232.23575100 0.00000000 CLA 131.44809000 233.95682800 0.00000000 CLA 127.18474800 235.58167300 0.00000000 CLA 122.86586500 237.11450300 0.00000000 CLA 118.49481100 238.55931300 0.00000000 CLA 114.07488000 239.91988600 0.00000000 CLA 109.60928000 241.19979600 0.00000000 CLA 105.10112300 242.40242000 0.00000000 CLA 100.55341100 243.53093800 0.00000000 CLA 95.96903600 244.58834400 0.00000000 CLA 91.35076900 245.57745200 0.00000000 CLA 86.70126100 246.50089900 0.00000000 CLA 82.02303800 247.36115400 0.00000000 CLA 77.31850200 248.16052200 0.00000000 CLA 72.58993100 248.90114800 0.00000000 CLA 67.83948100 249.58502600 0.00000000 CLA 63.06919300 250.21399800 0.00000000 CLA 58.28099200 250.78976400 0.00000000 CLA 53.47669600 251.31388100 0.00000000 CLA 48.65802100 251.78777000 0.00000000 CLA 43.82658700 252.21271800 0.00000000 CLA 38.98392900 252.58987900 0.00000000 CLA 34.13149800 252.92028200 0.00000000 CLA 29.27067600 253.20482600 0.00000000 CLA 24.40278100 253.44429000 0.00000000 CLA 19.52907500 253.63932700 0.00000000 CLA 14.65077700 253.79047200 0.00000000 CLA 9.76906600 253.89813800 0.00000000 CLA 4.88509600 253.96261900 0.00000000 CLA 0.00000000 253.98409300 0.00000000 CLA 4.88509600 253.96261900 0.00000000 CLA 9.76906600 253.89813800 0.00000000 CLA 14.65077700 253.79047200 0.00000000 CLA 19.52907500 253.63932700 0.00000000 CLA 24.40278100 253.44429000 0.00000000 CLA 29.27067600 253.20482600 0.00000000 CLA 34.13149800 252.92028200 0.00000000 CLA 38.98392900 252.58987900 0.00000000 CLA 43.82658700 252.21271800 0.00000000 CLA 48.65802100 251.78777000 0.00000000 CLA 53.47669600 251.31388100 0.00000000 CLA 58.28099200 250.78976400 0.00000000 CLA 63.06919300 250.21399800 0.00000000 CLA 67.83948100 249.58502600 0.00000000 CLA 72.58993100 248.90114800 0.00000000 CLA 77.31850200 248.16052200 0.00000000 CLA 82.02303800 247.36115400 0.00000000 CLA 86.70126100 246.50089900 0.00000000 CLA 91.35076900 245.57745200 0.00000000 CLA 95.96903600 244.58834400 0.00000000 CLA 100.55341100 243.53093800 0.00000000 CLA 105.10112300 242.40242000 0.00000000 CLA 109.60928000 241.19979600 0.00000000 CLA 114.07488000 239.91988600 0.00000000 CLA 118.49481100 238.55931300 0.00000000 CLA 122.86586500 237.11450300 0.00000000 CLA 127.18474800 235.58167300 0.00000000 CLA 131.44809000 233.95682800 0.00000000 CLA 135.65245800 232.23575100 0.00000000 CLA 139.79437800 230.41400200 0.00000000 CLA 143.87034100 228.48690600 0.00000000 CLA 147.87683200 226.44955100 0.00000000 CLA 151.81033800 224.29678000 0.00000000 CLA 155.66737600 222.02318800 0.00000000 CLA 159.44450600 219.62311500 0.00000000 CLA 163.13835200 217.09064600 0.00000000 CLA 166.74561700 214.41960100 0.00000000 CLA 170.26310600 211.60353800 0.00000000 CLA 173.68773300 208.63574800 0.00000000 CLA 177.01653700 205.50925400 0.00000000 CLA 180.24669500 202.21681200 0.00000000 CLA 183.37552100 198.75090800 0.00000000 CLA 186.40047400 195.10376400 0.00000000 CLA 189.31915400 191.26733600 0.00000000 CLA 192.12929800 187.23332000 0.00000000 CLA 194.82876600 182.99315700 0.00000000 CLA 197.41552400 178.53803800 0.00000000 CLA 199.88762700 173.85891600 0.00000000 CLA 202.24318600 168.94651100 0.00000000 CLA 204.48033700 163.79132900 0.00000000 CLA 206.59720300 158.38367400 0.00000000 CLA 208.59184900 152.71367000 0.00000000 CLA 210.46222800 146.77128700 0.00000000 CLA 212.20613200 140.54636700 0.00000000 CLA 213.82112600 134.02866400 0.00000000 CLA 215.30448300 127.20788700 0.00000000 CLA 216.65311600 120.07375400 0.00000000 CLA 217.86350300 112.61605400 0.00000000 CLA 218.93160700 104.82472400 0.00000000 CLA 219.85279900 96.68994000 0.00000000 CLA 220.62177400 88.20221800 0.00000000 CLA 221.23246600 79.35254200 0.00000000 CLA 221.67796800 70.13250500 0.00000000 CLA 221.95044900 60.53447000 0.00000000 CLA 222.04107500 50.55176400 0.00000000 CLA 221.93993900 40.17888700 0.00000000 CLA 221.63599400 29.41175400 0.00000000 CLA 221.11699800 18.24796700 0.00000000 CLA 220.36947300 6.68710700 0.00000000 CLA 219.37867800 5.26892700 0.00000000 CLA 218.12860900 17.61556600 0.00000000 CLA 216.60201000 30.34518200 0.00000000 CLA 214.78042700 43.44667100 0.00000000 CLA 212.64428600 56.90502000 0.00000000 CLA 210.17301200 70.70085100 0.00000000 CLA 207.34519000 84.80996300 0.00000000 CLA 204.13877400 99.20286700 0.00000000 CLA 200.53134900 113.84434200 0.00000000 CLA 196.50044400 128.69301600 0.00000000 CLA 192.02390600 143.70100000 0.00000000 CLA 187.08033200 158.81358700 0.00000000 CLA 181.64955800 173.96904400 0.00000000 CLA 175.71320100 189.09853000 0.00000000 CLA 169.25524900 204.12615200 0.00000000 CLA 162.26269100 218.96920100 0.00000000 CLA 154.72616300 233.53858800 0.00000000 CLA 146.64060400 247.73949500 0.00000000 CLA 138.00590000 261.47227200 0.00000000 CLA 128.82747700 274.63358000 0.00000000 CLA 119.11683100 287.11777800 0.00000000 CLA 108.89195400 298.81854400 0.00000000 CLA 98.17764100 309.63070300 0.00000000 CLA 87.00562600 319.45221900 0.00000000 CLA 75.41455000 328.18629200 0.00000000 CLA 63.44972800 335.74349800 0.00000000 CLA 51.16270500 342.04388900 0.00000000 CLA 38.61060800 347.01896200 0.00000000 CLA 25.85530400 350.61342700 0.00000000 CLA 12.96238300 352.78667200 0.00000000 CLA

(146) An overall reflectivity of the projection optical unit 26 is approximately 8.49%.

(147) The image field 8 has an x-extent of two-times 13 mm and a y-extent of 1 mm. The projection optical unit 26 is optimized for an operating wavelength of the illumination light 3 of 13.5 nm.

(148) The stop AS of the projection optical unit 26 is once again arranged spatially between the penultimate mirror M9 in the beam path and the last mirror M10 in the beam path and delimits the system pupil fully circumferentially in the region of the imaging light partial beam 3.sub.M9M10. The stop AS is the sole stop for predefining the outer pupil marginal contour. The stop AS is embodied in a plane fashion in its entirety and lies in the stop plane E.sub.AS (cf. FIG. 14). The stop plane E.sub.AS forms an angle of approximately 55 with the image plane 9. An intersection line SL between the stop plane E.sub.AS and the image plane 9 runs in the region of the image field 8. The stop AS of the projection optical unit 26 also has a web section S between the imaging light partial beams 3.sub.M9M10 and 3.sub.M10W, which likewise lies in the plane E.sub.AS according to FIG. 14.

(149) A further embodiment of a projection optical unit 27, which can be used in the projection exposure apparatus 1 according to FIG. 1 instead of the projection optical unit 7, is explained in the following text on the basis of FIGS. 16 to 20. Components and functions which have already been explained above in the context of FIGS. 1 to 15 are denoted, where applicable, by the same reference signs and are not discussed again in detail.

(150) The mirrors M1 to M10 are once again configured as free-form surfaces for which the free-form surface equation (1) indicated above holds true.

(151) The two tables below summarize the parameters Maximum angle of incidence, Extent of the reflection surface in the x-direction, Extent of the reflection surface in the y-direction and Maximum mirror diameter for the mirrors M1 to M10 of the projection optical unit 27.

(152) TABLE-US-00045 M1 M2 M3 M4 M5 Maximum 13.2 81.1 78.2 82.5 82.1 angle of incidence [] Extent of the reflection 626.4 459.1 411.9 375.1 422.4 surface in the x-direction [mm] Extent of the reflection 258.8 310.4 381.0 315.7 304.6 surface in the y-direction [mm] Maximum mirror 626.5 459.6 464.1 414.1 423.5 diameter [mm] M6 M7 M8 M9 M10 Maximum 82.1 80.1 78.6 22.0 15.8 angle of incidence [] Extent of the reflection 439.4 420.9 365.3 389.8 699.5 surface in the x-direction [mm] Extent of the reflection 201.0 93.9 174.2 205.1 689.9 surface in the y-direction [mm] Maximum mirror 439.4 420.9 365.3 389.9 700.6 diameter [mm]

(153) The mirror M10 that predefines the image-side numerical aperture has the largest maximum mirror diameter, with a diameter of 700.6 mm. None of the other mirrors M1 to M9 has a maximum diameter that is greater than 630 mm. Eight of the ten mirrors, namely the mirrors M2 to M9, have a maximum mirror diameter that is less than 470 mm. Two of the ten mirrors, namely the mirrors M8 and M9, have a maximum mirror diameter that is less than 400 mm.

(154) The optical design data of the projection optical unit 27 can be gathered from the following tables.

(155) Table 1 additionally indicates the two imaging scales .sub.x, .sub.y of the projection optical unit 27 in the xz-plane and in the yz-plane. The sign of the respective imaging scale indicates whether an image inversion takes place (negative sign) or not (positive sign). Table 1 for the embodiment according to FIG. 16 additionally indicates a maximum wavefront aberration rms over the image field of 6.5 m.

(156) In a manner similar to that in the case of the embodiment according to FIGS. 13 to 15, the imaging optical unit 27 also has a stop AS that is arranged spatially between the penultimate mirror M9 in the imaging light beam path and the last mirror M10 in the imaging light beam path. The stop AS simultaneously serves as an aperture stop and as an obscuration stop. The stop AS shades the imaging light 3 during the effect as an aperture stop in the partial beam path 3.sub.M9M10. During the effect as an obscuration stop, the stop AS shades the imaging light 3 in an upstream partial beam path 3.sub.M8M9, that is to say the partial beam path between the antepenultimate or third from last mirror M8 and the penultimate mirror M9 of the imaging optical unit 27. Depending on whether the stop AS acts as an aperture stop or as an obscuration stop, the stop AS thus shades a different partial beam path of the imaging light 3.

(157) The sixth table indicates a boundary of the stop AS as a polygon progression in local coordinates xyz, with indication of, on the one hand (type CLA), an outer aperture stop boundary and, on the other hand (type OBS), an inner obscuration stop boundary.

(158) TABLE-US-00046 TABLE 1 for FIG. 16 Exemplary embodiment FIG. 16 NA 0.55 Wavelength 13.5 nm marginal position x 4.0 marginal position y 8.0 Field dimension x 26.0 mm Field dimension y 1.2 mm Field curvature 0.012345 1/mm Rms 6.5 ml Stop AS

(159) TABLE-US-00047 TABLE 2 for FIG. 16 Surface Radius_x[mm] Power_x[1/mm] Radius_y[mm] Power_y[1/mm] Operating M10 734.4004894 0.0026410 657.0202697 0.0031390 REFL M9 12562.3978818 0.0001592 460.9714044 0.0043387 REFL M8 575.3229751 0.0009298 5791.7291983 0.0012911 REFL M7 606.8691199 0.0008524 3174.1309526 0.0024362 REFL M6 1436.3061494 0.0003090 11822.7733555 0.0007623 REFL M5 9362.1535679 0.0000472 1971.1259111 0.0045943 REFL M4 6861.0562164 0.0000649 3555.8466750 0.0025276 REFL M3 2563.4374143 0.0001911 4556.7426213 0.0017916 REFL M2 2144.5772392 0.0001956 1778.2511025 0.0053634 REFL M1 2250.8223229 0.0008710 1234.0328093 0.0016534 REFL

(160) TABLE-US-00048 TABLE 3a for FIG. 16 Coeffi- M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 734.40048940 12562.39788000 575.32297510 C7 3.69063959e08 1.2415416e06 8.08885419e07 C9 2.66875657e08 4.96623107e07 6.65643923e07 C10 2.9547202e11 7.16764893e10 3.26524288e10 C12 1.23835916e10 2.80108561e10 5.2511967e11 C14 4.04124392e11 8.30415899e10 3.45807814e09 C16 4.94171988e14 5.31867408e13 1.86022203e12 C18 1.00169592e13 1.86998622e13 5.65074321e12 C20 6.59876526e14 1.75493769e11 2.90258207e11 C21 2.64924221e17 7.39160615e16 5.30674539e16 C23 2.87951218e16 4.52997751e15 2.2356219e15 C25 4.07410513e16 2.93129363e14 3.3142465e14 C27 9.34250924e17 3.65825069e14 2.51601087e13 C29 1.22857674e19 1.03235642e17 9.32984402e18 C31 9.80843812e20 2.34402809e17 5.36488954e17 C33 3.62733816e19 7.87362284e17 4.59915021e16 C35 1.66523364e19 1.74531656e16 2.18402354e15 C36 2.16918403e22 2.33698767e22 6.89496337e21 C38 7.61751871e22 5.69813915e20 9.46720654e21 C40 1.64583614e21 5.46056869e20 4.20382245e19 C42 1.13822065e21 3.30030364e19 4.64308428e18 C44 2.34451904e22 2.33237083e18 1.85298325e17 C46 8.75776859e26 5.70493913e23 7.61314101e23 C48 4.00067035e26 1.46948197e22 5.19316088e22 C50 1.09288997e24 1.03336009e22 3.88873449e21 C52 1.1330853e24 1.09551134e20 3.16378948e20 C54 3.03020173e25 1.25291997e21 1.29630949e19 C55 3.58358372e29 7.31506816e26 3.09744226e26 C57 2.21538575e27 7.81233903e25 7.350488e25 C59 4.70796873e27 4.91236495e25 6.62741382e24 C61 5.96335162e27 2.4312637e23 2.49868147e23 C63 3.50703353e27 1.43128106e23 2.87275346e22 C65 6.99450709e28 1.80452447e23 6.5185382e22 C67 1.61117994e30 1.84677697e28 2.64402679e27 C69 1.16473081e30 2.19286675e27 7.15898772e27 C71 2.37008454e31 3.33316033e26 5.03624411e26 C73 3.00335849e30 3.92884481e26 9.04008197e25 C75 3.19629075e30 2.1801091e25 6.23218519e24 C77 7.65128241e31 3.76183171e25 2.7940315e24 C78 1.91587489e33 6.53917767e31 5.1401291e31 C80 6.3352757e33 7.70691096e30 1.30087901e29 C82 2.68605738e32 2.72123325e29 2.86409772e29 C84 4.03473776e32 5.09790538e29 1.12849703e27 C86 2.81045215e32 6.57928887e28 2.04737375e26 C88 8.65461633e33 7.35194127e28 8.31543064e26 C90 1.49793169e33 1.85196124e27 1.58129737e26 C92 4.53012982e36 1.02285876e33 4.93314114e32 C94 2.54612905e36 3.6722778e32 1.14717524e31 C96 1.70326511e35 9.50345059e32 2.57037531e30 C98 2.30381702e35 1.08039148e30 1.52877695e29 C100 1.27582326e35 9.29374103e32 1.79359716e28 C102 1.61856789e36 8.25859184e30 5.11599223e28 C104 7.47484269e37 1.66224976e30 7.80016027e29 C105 1.74529262e39 3.09714859e36 2.53274907e35 C107 5.88732768e39 4.80419849e35 3.82070681e34 C109 5.70551644e38 2.17962248e35 5.26183475e34 C111 9.34482358e38 1.11472973e33 1.87948261e32 C113 4.17320032e38 4.45403337e34 5.17877418e32 C115 4.20494195e38 7.28326516e33 5.42189824e31 C117 4.24589053e38 1.29581947e32 1.18221722e30 C119 4.39618163e39 1.46429864e32 1.65226721e31 C121 1.26480599e41 0 0 C123 2.83350034e41 0 0 C125 7.90818614e41 0 0 C127 7.59247942e41 0 0 C129 3.20227297e41 0 0 C131 1.13904543e40 0 0 C133 7.84876975e41 0 0 C135 1.6589155e41 0 0 C136 1.01570835e44 0 0 C138 1.10607557e43 0 0 C140 5.34690554e43 0 0 C142 1.25422813e42 0 0 C144 1.76071049e42 0 0 C146 1.35061054e42 0 0 C148 5.21059182e43 0 0 C150 7.02519947e44 0 0 C152 7.91158758e45 0 0

(161) TABLE-US-00049 TABLE 3b for FIG. 16 Coeffi- M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 606.86911990 1436.30614900 9362.15356800 C7 1.99960334e07 1.57128053e07 6.04832777e08 C9 4.27141747e07 3.34981946e09 8.66725882e08 C10 4.96508598e11 5.60920252e10 5.19419734e10 C12 3.38689422e10 9.43006288e11 2.92728662e10 C14 1.80994732e09 3.39581207e10 9.5562028e11 C16 8.88853426e13 8.74520619e13 4.55344074e13 C18 5.45383685e13 8.9652743e13 5.63011302e13 C20 1.01953855e11 2.52232581e13 1.68302363e13 C21 2.2753959e16 6.47555202e16 6.64814497e16 C23 7.13626682e16 1.32836218e16 9.16606761e16 C25 1.87578681e14 1.18754896e15 2.23227763e15 C27 4.34450496e14 1.10389387e14 2.23964772e15 C29 5.19911313e18 7.75824639e19 5.59817103e19 C31 1.2379654e17 1.94031366e17 5.93474728e18 C33 6.38224202e17 4.26085874e17 1.41084199e17 C35 7.32954226e16 5.92235543e17 1.2803738e17 C36 1.69523033e21 2.63128096e21 1.48907853e20 C38 2.35620799e20 5.31525209e20 4.9858925e21 C40 1.73539713e19 5.4304615e20 1.61264378e20 C42 9.99259336e19 1.5835119e19 5.95552526e20 C44 7.42793604e18 2.40981179e19 4.03029095e20 C46 4.78484276e24 9.252226e23 1.9680316e23 C48 1.05986029e22 1.97027352e22 1.00547236e23 C50 6.79849158e21 3.51758796e22 1.91267262e22 C52 1.58604135e22 1.34212548e21 2.39856755e22 C54 2.88945615e19 7.34510578e21 4.65208006e24 C55 3.56030953e26 5.34769718e26 1.24196789e25 C57 1.44299981e25 1.46733898e25 1.39131389e26 C59 1.25039871e24 8.94977481e25 1.87925685e25 C61 3.79170632e23 8.34824517e24 4.61534248e26 C63 2.28394342e22 3.96940469e23 7.19198667e25 C65 7.9281819e21 1.71260448e23 9.4740782e25 C67 1.3085233e28 1.25830166e28 3.89993279e28 C69 2.38761271e27 1.17222643e26 7.7510764e28 C71 1.72496753e25 8.06944964e26 1.58629087e28 C73 9.96853074e25 1.777645e25 2.67086221e27 C75 4.0486111e24 3.51749177e25 3.02506968e27 C77 1.05436189e22 8.60396189e25 1.05267475e27 C78 3.33000529e31 3.39100031e31 6.99474964e31 C80 9.05678997e31 1.36090632e29 1.11788544e30 C82 1.68879173e29 2.20044136e28 5.43878014e30 C84 2.18032628e27 1.03960723e27 1.23660546e29 C86 4.36181405e28 2.39900221e28 5.48029981e29 C88 6.73559091e26 7.22531169e27 1.09865111e28 C90 3.69111464e24 9.40283051e27 5.64640637e29 C92 2.85489276e33 4.0464514e33 4.14302887e33 C94 1.88972554e32 1.29123817e31 8.05699222e33 C96 1.50455069e30 1.69956303e30 1.38058454e32 C98 2.25705081e29 3.60111295e30 1.61814701e31 C100 1.49931011e28 8.18553152e30 5.63634809e31 C102 3.16012215e27 4.04642225e29 7.51287066e31 C104 9.51596316e27 3.61186108e29 2.69646399e31 C105 1.29510753e36 3.9496471e36 6.76545884e37 C107 9.63058299e37 5.41859042e36 1.71209639e35 C109 9.48011591e35 5.41090443e34 8.84555232e35 C111 3.58236003e32 3.85862042e33 1.48083159e34 C113 2.64292004e32 2.33823444e33 6.79453681e34 C115 2.88402028e30 2.47168085e32 1.29842501e33 C117 3.81171481e29 7.40994837e32 1.39664061e33 C119 2.0730927e28 4.85802094e32 4.18556612e34

(162) TABLE-US-00050 TABLE 3c for FIG. 16 Coeffi- M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 6861.05621600 2563.43741400 2144.57723900 C7 1.47174165e07 1.54543937e08 2.02349511e07 C9 9.71264337e08 1.3262412e07 6.85116155e07 C10 4.29421164e10 2.59981694e10 1.08486268e10 C12 3.22000121e12 1.26264564e10 2.19370571e10 C14 1.61657252e11 3.08175659e10 2.39600029e09 C16 9.11518252e14 6.19660886e13 1.93335656e13 C18 1.97539527e13 3.79403726e13 3.50480797e13 C20 3.10246067e14 6.91098785e13 8.84706639e12 C21 7.73697664e16 1.20632123e18 1.59763018e16 C23 2.62452743e16 5.37789494e16 2.23737227e16 C25 7.65808804e18 8.58775544e16 1.91043224e15 C27 1.0729483e16 2.17568078e15 3.41011771e14 C29 1.29228359e19 5.15438214e19 1.5173488e18 C31 1.56954396e18 2.20721288e18 1.81450703e18 C33 1.88777908e19 2.70328561e18 1.34327987e17 C35 1.09375115e18 5.82231391e18 1.35927823e16 C36 1.81284194e20 3.29151135e21 1.18313413e21 C38 1.31941357e21 9.99987503e22 1.21847818e20 C40 1.74075218e21 1.20404474e21 1.52570279e20 C42 5.21546896e22 8.70959764e21 1.07126011e19 C44 5.35455563e21 1.7557778e20 5.55501799e19 C46 1.62256468e23 3.84578437e24 3.0366606e24 C48 5.6305645e24 4.55124425e24 4.8303596e23 C50 3.24732012e23 7.24135312e24 8.75469222e23 C52 3.1476626e23 3.61120405e23 6.66706205e22 C54 8.25712315e23 4.58224601e23 2.83924503e21 C55 1.22035422e25 3.61523663e26 1.53678664e26 C57 2.1979079e26 1.43276371e26 1.45270248e26 C59 2.21460597e25 3.97624231e26 1.93243765e25 C61 1.40360697e25 3.93632804e26 6.56765218e25 C63 6.63180659e26 1.60710475e25 1.42738574e24 C65 1.16293011e24 1.5094228e25 1.86196799e23 C67 2.39452189e28 5.95221041e29 4.99747994e30 C69 2.11360977e28 4.63199416e29 3.8415391e28 C71 1.53493255e27 2.12042836e28 6.9991556e28 C73 1.73258825e27 8.82768575e29 6.92676904e27 C75 1.89943748e27 2.05658318e28 1.20583672e26 C77 6.78409159e27 7.68900425e28 1.03657365e25 C78 8.31622879e31 4.38762936e31 1.50485978e31 C80 4.12396608e31 1.09189223e31 6.7274722e31 C82 5.98730083e30 1.2942667e30 2.09103814e30 C84 3.91382918e30 1.73477097e30 4.71768609e30 C86 1.96586366e29 2.08448538e30 4.63042169e29 C88 1.26298975e29 5.40127174e31 1.00368421e28 C90 2.15725037e29 2.97171076e30 3.73712248e28 C92 7.71587297e34 8.3168184e34 1.65391189e34 C94 8.18026324e34 6.44354839e35 3.71718537e33 C96 2.23668044e32 3.05694518e33 1.10594865e32 C98 3.93915728e32 1.65211987e33 2.96793072e32 C100 5.00804831e32 2.54387617e33 1.51653474e31 C102 2.64483916e32 8.14112074e33 2.90810312e31 C104 3.59102851e32 6.83029173e33 7.51639723e31 C105 1.5481755e35 3.17144487e36 8.04711407e37 C107 3.7039998e36 4.20690395e36 8.17820926e36 C109 5.90401086e35 8.72773964e36 3.28218214e35 C111 9.78370689e35 2.19860783e35 5.9280819e35 C113 2.25712946e34 2.25057433e35 6.28444259e35 C115 1.78901202e35 1.48798494e35 1.91142178e34 C117 1.50146406e35 1.98990075e35 3.09789778e34 C119 2.41265654e35 8.37356178e36 6.40868585e34

(163) TABLE-US-00051 TABLE 3d for FIG. 16 Coefficient M1 KY 0.00000000 KX 0.00000000 RX 2250.82232300 C7 4.47155696e08 C9 8.34709137e08 C10 9.51355472e12 C12 1.84572916e11 C14 6.91893219e11 C16 1.01331703e14 C18 5.03659529e14 C20 6.81027324e13 C21 4.12139115e18 C23 5.96632077e19 C25 1.67854518e16 C27 3.26198923e15 C29 1.23539866e20 C31 1.01642369e19 C33 2.08707523e18 C35 1.35676632e17 C36 5.2487886e24 C38 2.59100948e23 C40 1.50895827e21 C42 2.04328939e21 C44 8.18228919e21 C46 1.9037731e26 C48 1.81860592e24 C50 3.86233996e24 C52 2.94340802e23 C54 2.45607103e22 C55 6.02718749e29 C57 1.58630158e28 C59 1.13966571e26 C61 3.93947663e26 C63 3.90241817e26 C65 1.32487977e24 C67 1.93153235e32 C69 1.324697e29 C71 6.67848073e29 C73 2.28671694e28 C75 1.06954529e27 C77 4.01723503e27 C78 3.44314733e34 C80 4.61934621e33 C82 9.7553163e32 C84 7.08087843e31 C86 3.48735757e30 C88 3.05193351e30 C90 3.77785192e29 C92 3.87662297e37 C94 4.38344066e35 C96 4.33488416e34 C98 1.30804231e33 C100 4.57893447e33 C102 2.45658352e32 C104 3.68415437e34 C105 9.00084302e40 C107 2.62614251e38 C109 3.8585807e37 C111 3.27892795e36 C113 1.32806263e35 C115 7.94200305e35 C117 8.71651492e35 C119 3.41812727e34

(164) TABLE-US-00052 TABLE 4a for FIG. 16 Surface DCX DCY DCZ Image 0.00000000 0.00000000 0.00000000 M10 0.00000000 0.00000000 598.57071024 AS 0.00000000 202.29481132 222.08172673 M9 0.00000000 231.66148179 167.42769065 M8 0.00000000 207.63742504 984.08231388 M7 0.00000000 198.51055106 1174.06780570 M6 0.00000000 106.26479039 1317.59235964 M5 0.00000000 160.17552127 1481.68299334 M4 0.00000000 753.93262524 1545.23844995 M3 0.00000000 1366.71155383 1326.97530031 M2 0.00000000 1630.05529066 1034.85014372 M1 0.00000000 1856.46963860 330.67373023 Object 0.00000000 1998.82967814 1957.85225693

(165) TABLE-US-00053 TABLE 4b for FIG. 16 Surface TLA[deg] TLB[deg] TLC[deg] Image 0.00000000 0.00000000 0.00000000 M10 14.12499901 0.00000000 0.00000000 AS 36.95215262 180.00000000 0.00000000 M9 208.26345756 0.00000000 0.00000000 M8 102.76327555 0.00000000 0.00000000 M7 72.26003214 0.00000000 0.00000000 M6 44.44889698 0.00000000 0.00000000 M5 18.86850591 0.00000000 0.00000000 M4 6.74776434 0.00000000 0.00000000 M3 33.78564218 0.00000000 0.00000000 M2 60.07095714 0.00000000 0.00000000 M1 186.41209027 0.00000000 0.00000000 Object 0.00001275 0.00000000 0.00000000

(166) TABLE-US-00054 TABLE 5 for FIG. 16 Surface Angle of incidence[deg] Reflectivity M10 14.12499901 0.64240969 M9 0.01345953 0.66565923 M8 74.48635845 0.79498205 M7 75.01039813 0.80405884 M6 77.17846671 0.83874066 M5 77.24114222 0.83968118 M4 77.14258753 0.83820081 M3 75.81953462 0.81751767 M2 77.89515042 0.84931075 M1 11.41210302 0.65108552 Overall transmis- 0.0729

(167) TABLE-US-00055 TABLE 6 for FIG. 16: Stop polygon AS in the imaging beam path between M9 and M10 X[mm] Y[mm] Z[mm] Type 0.000000 195.347128 0.000000 CLA 42.137103 191.039534 0.000000 CLA 82.205613 178.570519 0.000000 CLA 118.439996 159.196693 0.000000 CLA 149.574372 134.707339 0.000000 CLA 174.881008 107.089977 0.000000 CLA 194.075160 78.230577 0.000000 CLA 207.161234 49.709932 0.000000 CLA 214.296520 22.713209 0.000000 CLA 215.716174 1.969968 0.000000 CLA 211.722455 23.895460 0.000000 CLA 202.711588 42.897786 0.000000 CLA 189.203024 59.021423 0.000000 CLA 171.843764 72.451749 0.000000 CLA 151.375243 83.447357 0.000000 CLA 128.567630 92.281415 0.000000 CLA 104.141000 99.200076 0.000000 CLA 78.697779 104.400439 0.000000 CLA 52.685218 108.024919 0.000000 CLA 26.395569 110.165919 0.000000 CLA 0.000000 110.874228 0.000000 CLA 26.395569 110.165919 0.000000 CLA 52.685218 108.024919 0.000000 CLA 78.697779 104.400439 0.000000 CLA 104.141000 99.200076 0.000000 CLA 128.567630 92.281415 0.000000 CLA 151.375243 83.447357 0.000000 CLA 171.843764 72.451749 0.000000 CLA 189.203024 59.021423 0.000000 CLA 202.711588 42.897786 0.000000 CLA 211.722455 23.895460 0.000000 CLA 215.716174 1.969968 0.000000 CLA 214.296520 22.713209 0.000000 CLA 207.161234 49.709932 0.000000 CLA 194.075160 78.230577 0.000000 CLA 174.881008 107.089977 0.000000 CLA 149.574372 134.707339 0.000000 CLA 118.439996 159.196693 0.000000 CLA 82.205613 178.570519 0.000000 CLA 42.137103 191.039534 0.000000 CLA 0.000000 26.092784 0.000000 OBS 6.279154 25.735734 0.000000 OBS 12.386749 24.677462 0.000000 OBS 18.157185 22.955801 0.000000 OBS 23.436432 20.631201 0.000000 OBS 28.086992 17.783133 0.000000 OBS 31.991969 14.505604 0.000000 OBS 35.058106 10.902221 0.000000 OBS 37.217730 7.081254 0.000000 OBS 38.429615 3.151068 0.000000 OBS 38.678827 0.783773 0.000000 OBS 37.975684 4.625572 0.000000 OBS 36.353951 8.285669 0.000000 OBS 33.868462 11.685750 0.000000 OBS 30.592343 14.758415 0.000000 OBS 26.614036 17.447155 0.000000 OBS 22.034328 19.705924 0.000000 OBS 16.963532 21.498470 0.000000 OBS 11.518961 22.797594 0.000000 OBS 5.822745 23.584440 0.000000 OBS 0.000000 23.847938 0.000000 OBS 5.822745 23.584440 0.000000 OBS 11.518961 22.797594 0.000000 OBS 16.963532 21.498470 0.000000 OBS 22.034328 19.705924 0.000000 OBS 26.614036 17.447155 0.000000 OBS 30.592343 14.758415 0.000000 OBS 33.868462 11.685750 0.000000 OBS 36.353951 8.285669 0.000000 OBS 37.975684 4.625572 0.000000 OBS 38.678827 0.783773 0.000000 OBS 38.429615 3.151068 0.000000 OBS 37.217730 7.081254 0.000000 OBS 35.058106 10.902221 0.000000 OBS 31.991969 14.505604 0.000000 OBS 28.086992 17.783133 0.000000 OBS 23.436432 20.631201 0.000000 OBS 18.157185 22.955801 0.000000 OBS 12.386749 24.677462 0.000000 OBS 6.279154 25.735734 0.000000 OBS

(168) An overall reflectivity of the projection optical unit 27 is approximately 7.29%.

(169) The image field 8 has an x-extent of 213 mm and a y-extent of 1.2 mm. The projection optical unit 27 is optimized for an operating wavelength of the illumination light 3 of 13.5 nm.

(170) The stop AS of the projection optical unit 27, with its aperture stop boundary 28 (cf. FIG. 20, for example), delimits fully circumferentially the system pupil of the projection optical unit 27 in the region of the imaging light partial beam 3.sub.M9M10. The stop AS is the sole stop for predefining the outer pupil marginal contour. The stop AS is embodied in a plane fashion in its entirety and lies in a stop plane E.sub.AS (cf. FIG. 16). The stop plane E.sub.AS forms an angle of approximately 37 with the image plane 9. The angle deviates only insignificantly from a tilting angle of the mirror M9 about the x-axis relative to the image plane 9.

(171) FIG. 19 illustrates a spatial arrangement of the stop AS between the mirrors M9 and M10. A central obscuration region 29 of the stop AS having the obscuration stop boundary 30 is carried by web or wire structures (not illustrated in the drawing) via an outer ring region 31 of the stop AS. Alternatively, the central obscuration region 29 can be carried by a holding structure (not illustrated in the drawing) that is supported on the adjacent mirror M9 and is carried by the latter. A corresponding holding structure proceeding from the mirror M9 can lie completely in the imaging light shadow of the central obscuration region 29, such that the holding structure does not shade the imaging light 3 in an undesired manner.

(172) In accordance with an outer beam cross section of the imaging light partial beam 3.sub.M9M10, the aperture stop boundary is not embodied mirror-symmetrically in relation to the local xz-plane of the stop AS, but rather, where the stop AS is closest adjacent to the imaging light partial beam 3.sub.M10W, is embodied such that it is flatter in an aperture stop boundary section 28a than in an opposite aperture stop boundary section 28b. In the aperture stop boundary section 28b remote from the imaging light partial beam 3.sub.M10W, the aperture stop boundary 28 has an approximately circular profile. For clarification purposes, the aperture stop boundary 28 is inscribed in a circle K in FIG. 20. A midpoint of the circle K coincides with a center Z of the central obscuration region 29 of the stop AS. A maximum diameter D of the aperture stop boundary 28, the maximum diameter running in the x-direction, corresponds to the circle diameter.

(173) An object-side chief ray angle is 5.1 in the case of the projection optical unit 27. A pupil obscuration of the projection optical unit 27 is 19% of the numerical aperture of the projection optical unit 27. Hence, a surface portion of 0.19.sup.2 of a pupil of the projection optical unit 27 is obscured. An object-image offset d.sub.OIS is approximately 2000 mm. The mirrors of the projection optical unit 27 can be accommodated in a parallelepiped having xyz-edge lengths of 699 mm2275 mm1434 mm.

(174) The object plane 5 runs parallel to the image plane 9.

(175) A working distance between the mirror M9 closest to the wafer and the image plane 9 is 121 mm.

(176) The mirrors M1, M5, M6, M7 and M10 have negative radius values, that is to say in principle are concave mirrors. The mirror M2 has positive radius values, that is to say in principle is a convex mirror. The further mirrors M3, M4, M8 and M9 have different signs with regard to their x- and y-radius values, that is to say have a saddle surface basic shape.

(177) A mirror sequence with regard to an angle of incidence classification (N:NI mirror; G:GI mirror) is NGGGGGGGNN in the case of the mirrors M1 to M10 of the projection optical unit 27. A sequence of deflecting effects for the imaging light chief ray of a central field point (L: Deflection effect in the clockwise direction; R: Deflection effect in the counterclockwise direction) is LRRRRRRROR in the case of the mirrors M1 to M10 of the projection optical unit 27. The GI mirrors M2 to M8 thus all have the same orientation of their deflecting effect.

(178) In order to produce a microstructured or nanostructured component, the projection exposure apparatus 1 is used as follows: First, the reflection mask 10 or the reticle and the substrate or the wafer 11 are provided. Subsequently, a structure on the reticle 10 is projected onto a light-sensitive layer of the wafer 11 with the aid of the projection exposure apparatus 1. Then, a microstructure or nanostructure on the wafer 11, and hence the microstructured component, is produced by developing the light-sensitive layer.

Imaging optical unit and projection exposure apparatus including same

Assignee

Inventors

Cpc classification

Classification Explorer

G03F7/70233

PHYSICS

Classification Explorer

G02B13/143

PHYSICS

Classification Explorer

G02B5/005

PHYSICS

Classification Explorer

G02B17/0663

PHYSICS

Classification Explorer

G03F7/7025

PHYSICS

International classification

Classification Explorer

G02B5/10

PHYSICS

Classification Explorer

G02B17/06

PHYSICS

Classification Explorer

G02B5/00

PHYSICS

Classification Explorer

G02B13/14

PHYSICS

Classification Explorer

G03F7/20

PHYSICS

Abstract

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