ADHESIVE TAPES FOR RECEIVING DISCRETE COMPONENTS
20230017084 · 2023-01-19
Inventors
Cpc classification
H01L2221/68368
ELECTRICITY
C09J2203/326
CHEMISTRY; METALLURGY
H01L2221/68363
ELECTRICITY
C09J7/403
CHEMISTRY; METALLURGY
H01L2221/68381
ELECTRICITY
H01L21/67132
ELECTRICITY
International classification
Abstract
A system includes a vacuum chuck; and a tape. The tape includes a flexible polymer substrate; and an adhesive die catching film disposed on the flexible polymer substrate facing a front surface of the flexible polymer substrate. The tape is held on the vacuum chuck by suction applied to a rear surface of the flexible polymer substrate.
Claims
1.-43. (canceled)
44. A tape for receiving a discrete component, the tape comprising: a flexible polymer substrate; an adhesive die catching film disposed on the flexible polymer substrate, in which the adhesive die catching film comprises one or more of a viscoelastic adhesive material, a viscoplastic adhesive material, or an elastic adhesive material; and a protective film disposed on the adhesive die catching film.
45. The tape of claim 44, in which the adhesive die catching film comprises a pressure-sensitive adhesive.
46. The tape of claim 44, in which the adhesive die catching film comprises a Bingham fluid.
47. The tape of claim 44, in which the adhesive die catching film comprises a crosslinking promoter.
48. The tape of claim 44, in which the crosslinking promoter comprises a photosensitive polymer.
49. The tape of claim 44, in which the crosslinking promoter comprises a chemical catalyst.
50. The tape of claim 44, in which the adhesive die catching film is disposed on a front surface of the flexible polymer substrate, and in which a rear surface of the flexible polymer substrate comprises an adhesive material.
51. The tape of claim 50, comprising a rigid substrate, in which the flexible polymer substrate is adhered to the rigid substrate by the adhesive material.
52. The tape of claim 44, in which the flexible polymer substrate is held onto a vacuum chuck by suction.
53. The tape of claim 44, in which the tape comprises a dynamic release structure disposed on the flexible polymer substrate, and in which the adhesive die catching film is disposed on the dynamic release structure.
54. The tape of claim 44, in which the adhesive die catching film is configured to release the discrete component responsive to irradiation of the one or more of the viscoelastic adhesive material, the viscoplastic adhesive material, or the elastic adhesive material.
55. The tape of claim 44, in which the adhesive die catching film is disposed on a first surface of the flexible polymer substrate, and in which the tape comprises a dynamic release structure disposed on a second surface of the flexible polymer substrate.
56. The tape of claim 44, in which the flexible polymer substrate is removable from the adhesive die catching film.
57. The tape of claim 44, in which the protective film is removable from the adhesive die catching film.
58.-76. (canceled)
77. A tape for receiving a discrete component, the tape comprising: a flexible polymer substrate; and a film disposed on the flexible polymer substrate, in which the film comprises one or more of a viscoelastic adhesive material, a viscoplastic adhesive material, or an elastic adhesive material, and in which the film is configured to undergo a structural, phase, or chemical change responsive to irradiation of the film.
78. The tape of claim 77, in which the film is configured to form a blister responsive to absorption of incident radiation.
79. A tape for receiving a discrete component, the tape comprising: a flexible polymer substrate; a dynamic release structure disposed on the flexible polymer substrate; and an adhesive die catching film disposed on the dynamic release structure.
80. The tape of claim 79, in which the adhesive die catching film comprises one or more of a viscoelastic adhesive material, a viscoplastic adhesive material, or an elastic adhesive material.
81. The tape of claim 79, in which the dynamic release structure is configured to undergo a structural, phase, or chemical change responsive to irradiation of the dynamic release structure.
82. The tape of claim 79, in which the dynamic release structure is configured to form a blister responsive to absorbing incident radiation.
83. A tape for receiving a discrete component, the tape comprising: a flexible polymer substrate; an adhesive die catching film disposed on a first surface of the flexible polymer substrate; and a dynamic release structure disposed on a second surface of the flexible polymer substrate.
84. The tape of claim 83, in which the adhesive die catching film comprises one or more of a viscoelastic adhesive material, a viscoplastic adhesive material, or an elastic adhesive material.
85. The tape of claim 83, in which the dynamic release structure is configured to undergo a structural, phase, or chemical change responsive to irradiation of the dynamic release structure.
86. The tape of claim 83, in which the dynamic release structure is configured to form a blister responsive to absorbing incident radiation.
Description
BRIEF DESCRIPTION OF DRAWINGS
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[0078]
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DETAILED DESCRIPTION
[0081] We describe here tapes for receiving discrete components, such as light emitting diodes (LEDs), transferred onto the tapes by a laser-assisted transfer process. The tapes include an adhesive die catching film that can include a viscoelastic adhesive material, a viscoplastic adhesive material, or an elastic adhesive material.
[0082] In general, discrete components transferred via laser-assisted transfer processes travel at high speed vertically (e.g., downwards) across a gap between a support and a target substrate. Due to materials imperfections, imperfections in the transfer process, or both, the direction of travel of the discrete component in a laser-assisted transfer process can sometimes have a lateral (e.g., horizontal) component. This lateral component to the direction of travel of the discrete component can cause the discrete component to move laterally once it hits the target substrate, e.g., by skidding or sliding; to bounce off the substrate; to rotate such that the discrete component no longer lies flat on the tape (sometimes referred to as “tombstoning”), or a combination of two or more of these effects. Moreover, even when the direction of travel of a discrete component is entirely vertical, the discrete component can still be susceptible to one or more of these effects because of surface imperfections or surface hardness of the target substrate. These effects can have adverse effects on the accuracy of placement of discrete components on the target substrate, the yield of the laser-assisted transfer process, or both.
[0083] The use of a tapes including adhesive die catching films can help to reduce the occurrence of these adverse effects, e.g., to reduce spontaneous shifting of the position of the transferred discrete component, bouncing of the discrete component off of the surface of a tape upon arrival onto the tape, or “tombstoning” of the discrete component. As a result, high precision placement of discrete components onto the tapes can be achieved. In addition, the use of tapes as receiving substrates for laser-assisted transfer of discrete components, in comparison to gel-coated substrates, for example, can improve the efficiency of the laser-assisted transfer processes, because the tapes can be disposable and thereby eliminate the need for substrate cleaning and reconfiguration for repeated receipt of transferred discrete components.
[0084] Referring to
[0085] The tape 100 can be intended for use as a target substrate for receiving a discrete component 110 transferred via a laser-assisted transfer process. The term discrete component refers generally to, for example, any unit that is to become part of a product or electronic device, for example, electronic, electromechanical, photovoltaic, photonic, or optoelectronic components, modules, or systems, for example any semiconductor material having a circuit formed on a portion of the semiconducting material. In some examples, the discrete components can be light emitting diodes (LEDs). The discrete components can be ultra-thin, meaning having a maximum thickness of 50 μm or less, 40 μm or less, 30 μm or less, 25 μm or less, 20 μm or less, 10 μm or less, or 5 μm or less. The discrete components can be ultra-small, meaning having a maximum length or width dimension less than or equal to 300 μm per side, 100 μm per side, 50 μm per side, 20 μm per side, or 5 μm per side. The discrete components can be both ultra-thin and ultra-small.
[0086] In the laser-assisted transfer process, the discrete component 110 is adhered to a support 112 by a dynamic release structure 114, forming a discrete component assembly 115. A back side of the support 112 is irradiated with radiation, such as laser light, causing a change in the dynamic release structure (discussed in more detail below) that releases the discrete component 110 from the support 112. The discrete component 110 is propelled away from the support 112 (e.g., in a downward direction) and lands on the adhesive die catching film 104 of the tape 100. The adhesive die catching film 104 receives the discrete component 110 and keeps it in its targeted position while reducing post-transfer movement of the discrete component 110 on the tape 100, bouncing of the discrete component 110 off of the tape 100, tombstoning of the discrete component, or a combination of any two or more of them.
[0087] The adhesive die catching film 104 is composed of a die catching material, which is a material that has an adhesive property that enables the adhesive die catching film 104 to receive an incident discrete component, retain the discrete component substantially in the same position once the discrete component is received, and cause the discrete component to lie flat on the tape, e.g., preventing shifting, bouncing, or tombstoning of the discrete component. For instance, the die catching material can be a viscoelastic adhesive material, a viscoplastic adhesive material, or an elastic adhesive material.
[0088] In some examples, the adhesive die catching film 104 includes a viscoelastic adhesive die catching material. A viscoelastic material is a viscous material that exhibits elasticity responsive to an applied force. Viscoelastic materials are generally hard (e.g., harder than viscoplastic materials), such that discrete components transferred onto a viscoelastic material may bounce. The adhesive properties of the viscoelastic materials used in the adhesive die catching film 104 can help prevent such bouncing. Viscoelastic materials can have the advantage that when transferred discrete components are removed from a viscoelastic adhesive die catching film, the viscoelastic adhesive material remains on the tape and does not transfer to the removed discrete component, such that cleaning the discrete component to remove the adhesive may not be necessary.
[0089] In a specific example, the adhesive die catching film 104 includes a viscoelastic adhesive die catching material such as a pressure sensitive adhesive. For instance, when the viscoelastic adhesive die catching material is a pressure sensitive adhesive, when the discrete component 110 lands on the adhesive die catching film 104, the discrete component 110 exerts a force on the pressure sensitive adhesive 104, activating the pressure sensitive adhesive to adhere to the discrete component 110. As a result, post-transfer bouncing and movement of the discrete component 110 is limited.
[0090] In some examples, the adhesive die catching film 104 includes a viscoplastic adhesive die catching material having a yield stress, such as a Bingham plastic or pseudoplastic material. A viscoplastic material is a viscous material that exhibits plastic deformation when the applied force exceeds its yield stress. Examples of viscoplastic materials include tacky fluxes and gels (e.g., alcogels, hydrogels, organogels, or other types of gels).
[0091] In some examples, the adhesive die catching film includes a material (e.g., a viscoelastic or a viscoplastic adhesive material) that solidifies after receiving a transferred discrete component so as to hold the discrete component in position, e.g., by crosslinking or drying. For instance, the adhesive die catching film can include a viscoelastic or viscoplastic adhesive die catching material that includes a crosslinking promoter, such as a photosensitive polymer (e.g., an ultraviolet (UV) photosensitizer) or a chemical catalyst that promotes crosslinking, which initiates the photopolymerization, or cross-linking, reaction. After the discrete component has been transferred onto the adhesive die catching film, the die catching material can be converted into solid material by activation of the crosslinking promoter, e.g., by application of light (e.g., UV light) that by chemical exposure (e.g., by exposure to the chemical catalyst), or in another way. In some examples, the die catching film can be crosslinked by heat curing. In some examples, the adhesive die catching film can include a material that dries, e.g., solidifies by evaporation.
[0092] In some examples, the adhesive die catching film 104 includes an elastic adhesive material, such as a solid, elastic material with high tack and sufficiently elasticity to absorb the impact of the discrete component, e.g., preventing the discrete component 110 from bouncing. An elastic material is a material that deforms elastically responsive to an applied force. Examples of elastic adhesive materials include silicone-based polymers such as polydimethylsiloxane (PDMS). An elastic adhesive die catching material reacts elastically when receiving the discrete component 110, meaning that there is little to no structural change (e.g., structural damage) to the adhesive die catching film 104. An adhesive die catching film 104 including an elastic adhesive material can be reused for multiple laser transfer processes because of the minimal structural change that occurs in the adhesive die catching film 104 upon receipt of a discrete component 110. For instance, a tape 100 (or other substrate, such as a rigid substrate) having an adhesive die catching film 104 including an elastic adhesive material can be a reusable component in the laser transfer process, improving efficiency of the process by eliminating the step of preparing a receiving substrate having an adhesive die catching film 104 disposed thereon for each laser transfer.
[0093] Referring to
[0094] Referring again to
[0095] The discrete component support fixture 150 is disposed between the tape 100 and an optical system 160. The optical system 160 includes a light source 162, such as a laser, and one or more optical elements 164, such as lenses or diffractive optical elements (e.g., beam splitters). Light from the light source 162 is incident on the one or more optical elements 164, which direct the light onto the back side of the support 112. The support 112 is transparent to the wavelength of the incident light from the light source 162, meaning that at least some radiation of the given wavelength passes through the support 112. The radiation passes through the support 112 and is incident on an area of the dynamic release structure 114.
[0096] The incident light causes a structural, phase, or chemical change in at least a partial thickness of the dynamic release structure 114 in the area on which the radiation is incident, resulting in release of the discrete component 110 from the support 112. In some examples, the incident light can cause ablation of at least a partial thickness of the dynamic release structure 114 in the area on which the radiation is incident. The ablation generates confined gas, which expands, generating a stress in the dynamic release structure 114. The stress causes at least some of the material of the dynamic release structure 114 to deform, forming one or more blisters that exert a mechanical force on the discrete component 110. When the mechanical force exerted by the blister is sufficient to overcome the adhesion between the discrete component 110 and the dynamic release structure 114, the mechanical force exerted by the blister (in combination with gravity) propels the discrete component 110 away from the support 112 (e.g., in a downward direction) for transfer to the tape 100. In some examples, the incident light can cause a change in a morphology, such as a surface morphology, of the dynamic release structure 114. For instance, the change in surface morphology can include formation of blisters on the surface of the dynamic release structure. In some examples, the incident light can induce a phase transition, e.g., melting or sublimation, in at least a partial thickness of the dynamic release structure 114. In some examples, the incident light can induce a chemical change, such as thermal decomposition or photodegradation, of at least a partial thickness of the dynamic release structure 114. In some examples, the structural, phase, or chemical change in at least a partial thickness of the dynamic release structure 114 can be induced at least partially by heat, e.g., by a combination of light and heat.
[0097] Further description of laser-assisted transfer processes can be found in U.S. Patent Publication No. US 2014/0238592, the contents of which are incorporated here by reference in their entirety.
[0098] During the laser-assisted transfer process, the tape 100 can be disposed on a vacuum chuck 130 such that discrete components 110 are transferred onto the tape 100 held on the vacuum chuck 130. For instance, the tape 100 can be held in place on the vacuum chuck 130 by suction applied to a rear surface 132 of the flexible polymer substrate 102.
[0099] The tape 100, with one or more discrete components 110 attached thereto, can be used as a source tape for transferring the discrete components 110 to another substrate. In an example, the tape 100 with attached discrete components 110 can be provided to a die placement system, such as a die bonding, die mixing, die sorting, or die re-pitching system, for transfer of the discrete components from the tape 100 onto one or more other substrates. By die re-pitching, we mean placing discrete components onto a target substrate such that the pitch of the discrete components is different than the pitch of the discrete components on their source substrate. In another example, the tape 100 with attached discrete components 110 can be used as a stamp in a die stamping process, in which the tape 100 with attached discrete components 110 is pressed against a receiving substrate, such as a printed circuit board, and the discrete components 110 are interconnected to the receiving substrate. In another example, the tape 100 can serve as an intermediate carrier substrate from which the discrete components 110 are transferred (e.g., by a pick-and-place process) from the tape 100 to a second flexible or rigid carrier substrate. Once the discrete components 110 are on the second carrier substrate, the second carrier substrate can be provided to a die placement system, such as a die bonding, die mixing, die sorting, or die re-pitching system, or can be used as a stamp in a die stamping process, for transfer of the discrete components onto a target substrate. The compatibility of the tape 100 with downstream processing operations such as die placement operations, e.g., die bonding, die mixing, die sorting, or die re-pitching, facilitates the performance of such operations easily, quickly, and inexpensively following laser-assisted transfer of discrete components onto the tape 100.
[0100] Referring to
[0101] A protective film 140 is disposed over the adhesive die catching film 104 to prevent the adhesive die catching film 104 from inadvertently adhering to other objects prior to receiving a discrete component, to prevent the die catching material from contamination or environmentally-induced material degradation, or both. The protective film 140 can be removed from the adhesive die catching film 104 while leaving the adhesive die catching film intact. The protective film 140 can be a free-standing flexible film, such as a release-coated liner. In some examples, the protective film can be formed of a polymer with low interfacial adhesion and non-stick properties, such as a thermoplastic polymer such as polytetrafluoroethylene or similar fluoropolymers, polyethylene, polyvinylchloride, polypropylene, or other suitable polymers. In some examples, the protective film can be a polymer that is provided with non-stick and low adhesion properties by a treatment, such as by coating the protective film with a non-stick release agent. The protective film can have properties such as low permeability, moisture protection properties, ultraviolet (UV) light protection properties, or other properties that can help prevent the degradation of the underlying die catching material that can result, for instance, from exposure to the environment. The protective film 140 is removed prior to the laser-assisted transfer process, such as prior to placing the tape 100 on a vacuum chuck.
[0102]
[0103]
[0104]
[0105] Referring to
[0106] Referring to
[0107]
[0108] The tape 700 with attached discrete components then can be used as a source tape in a subsequent laser-assisted transfer process to transfer the discrete components 110 to another substrate. For instance, an optical system can be used to illuminate a rear surface 710 of the flexible polymer substrate 702. The flexible polymer substrate 702 is transparent to the wavelength of the incident light such that the light passes through the flexible polymer substrate and is incident on an area of the film 704. The film 704 undergoes a chemical, phase, or structural change in at least a portion of the irradiated area, causing a discrete component 110 to be released from the tape 700. For instance, the film 704 is formed of or includes a material that is configured to absorb the incident light, resulting in generation of gas and formation of a blister in the material.
[0109]
[0110] Referring to
[0111] Die catching tapes such as those described here can have advantages over other die catching substrates, such as rigid substrates having a die catching fluid or gel disposed thereon. For instance, an adhesive die catching film can be applied to another substrate, such as a rigid substrate, quickly, easily, and inexpensively, e.g., by removing a rear protective film and applying the adhesive die catching film to the rigid substrate. An adhesive die catching film can also be removed from another substrate, such as a rigid substrate, quickly, easily, and inexpensively, e.g., by peeling the film off of the substrate.
[0112] Particular embodiments of the subject matter have been described. Other embodiments are within the scope of the following claims. For example, the actions recited in the claims can be performed in a different order and still achieve desirable results. As one example, the processes depicted in the accompanying figures do not necessarily require the particular order shown, or sequential order, to achieve desirable results. In certain implementations, multitasking and parallel processing may be advantageous.