Method and Mould for Encapsulating Electronic Components Mounted on a Carrier
20230211531 · 2023-07-06
Inventors
- Wilhelmus Gerardus Joseph Gal (Braamt, NL)
- Johannes Lambertus Gerardus Maria Venrooij (Duiven, NL)
- Jan Roelofsen (Zevenaar, NL)
Cpc classification
H01L21/566
ELECTRICITY
B29C45/40
PERFORMING OPERATIONS; TRANSPORTING
B29C45/02
PERFORMING OPERATIONS; TRANSPORTING
B29C45/14655
PERFORMING OPERATIONS; TRANSPORTING
B29C45/77
PERFORMING OPERATIONS; TRANSPORTING
International classification
B29C45/14
PERFORMING OPERATIONS; TRANSPORTING
B29C45/40
PERFORMING OPERATIONS; TRANSPORTING
B29C45/76
PERFORMING OPERATIONS; TRANSPORTING
B29C45/77
PERFORMING OPERATIONS; TRANSPORTING
B29C45/02
PERFORMING OPERATIONS; TRANSPORTING
Abstract
The invention relates to a method for encapsulating electronic components mounted on a carrier, including the steps of: placing the carrier with electronic components in a mould, introducing a liquid encapsulating material into the at least one mould cavity, wherein the pressure on an upper side remote from the carrier of at least one calibration component mounted on the carrier is measured by at least one pressure sensor located in the contact surface of a mould part. The invention also relates to a mould for encapsulating electronic components mounted on a carrier with such a method.
Claims
1. A method for encapsulating electronic components mounted on a carrier, comprising the steps of: A) placing the carrier with electronic components in a mould, such that the carrier with electronic components lies between a contact surface of a first mould part and a contact surface of a second mould part, B) moving the mould parts toward each other and then holding the mould parts in a closed position under the influence of a closing force, wherein the contact surface of at least one of the mould parts encloses together with the carrier at least one mould cavity which wholly encloses the electronic components, C) introducing a liquid encapsulating material into the at least one mould cavity, D) allowing the encapsulating material around the electronic components to cure, and E) moving the mould parts apart and taking the carrier with encapsulated electronic components from the mould, wherein the pressure on an upper side remote from the carrier of at least one component mounted on the carrier is measured during at least one of the steps B) to D) by at least one pressure sensor located in the contact surface of one of the mould parts at the position of said upper side of the at least one component, wherein at least one component, a pressure exerted on which is measured, is a reference or calibration component.
2. The method according to claim 1, wherein at least one reference or calibration component is formed by a solid component mounted on the carrier.
3. The method according to claim 1, wherein upper side of the at least one calibration component protrudes above the upper side of the electronic components which is remote from the carrier.
4. The method according to claim 3, wherein at least one pressure sensor located in the contact surface of one of the mould parts at the position of the upper side of a calibration component also lies partially to the side of the calibration component.
5. The method according to claim 3, wherein the closing force of the mould parts is controlled during at least one of the steps B) to D) subject to the pressure on the upper side of the at least one calibration component measured by the at least one pressure sensor.
6. The method according to claim 5, wherein the closing force of the mould parts during step D) is chosen such that the final pressure on the upper side of the at least one calibration component measured by the at least one pressure sensor is greater, and preferably 1.5 to 2.5 times greater, than an isotropic pressure prevailing in the encapsulating material.
7. The method according to claim 6, wherein the pressure on the upper side of a plurality of calibration components is measured during at least one of the steps B) to D) by means of a plurality of pressure sensors distributed over the contact surface of one of the mould parts.
8. The method according to claim 7, wherein the pressure on at least one calibration component mounted centrally on the carrier is measured by a first pressure sensor arranged centrally in the contact surface, and that the pressure on a calibration component mounted laterally on the carrier is measured by a second pressure sensor arranged laterally in the contact surface at the position of a venting provision.
9. The method according to claim 7, wherein a difference in detected pressures between the plurality of pressure sensors is compensated by a redistribution of the closing force over the mould parts.
10. The method according to claim 9, wherein the distance between the contact surfaces of the mould parts in the mould cavity are adjusted during step B) such that the pressure on the upper side of the at least one calibration component measured by the at least one pressure sensor takes on a value matching a predetermined closing force of the mould parts.
11. The method according to claim 9, wherein after step A) a foil material is arranged between the carrier with the electronic components and the contact surface of the mould part in which the at least one pressure sensor is located.
12. The method according to claim 9, wherein the introduction of a liquid encapsulating material into the mould cavity as according to step C) is done by displacing the encapsulating material in liquid form to the mould cavity by means of exerting a pressure on the encapsulating material using a plunger.
13. The method according to claim 9, wherein the measurement values detected by at least one pressure sensor or the differences in detected measurement values between multiple pressure sensors are stored.
14. A mould for encapsulating electronic components mounted on a carrier with a method according to claim 9, comprising at least two mould parts movable relative to each other and each provided with a contact surface, wherein recessed into the contact surface of at least one of the mould parts is at least one mould cavity configured to wholly enclose the electronic components together with the carrier in a closed position of the mould parts, wherein provided in a part of the contact surface of at least one of the mould parts located at the mould cavity is at least one pressure sensor, configured to register a pressure prevailing at the contact surface at the position of the pressure sensor, which pressure sensor has a pressure-sensitive sensor surface.
15. The mould according to claim 14, wherein the pressure-sensitive sensor surface of the pressure sensor lies in the same plane as the contact surface of the mould.
16. The mould according to claim 14, wherein at least one of the mould parts is provided with a plurality of pressure sensors distributed over the part of the contact surface, located at the mould cavity, of said at least one mould part.
17. The mould according to claim 16, wherein at least one of the pressure sensors is arranged centrally in the part of the contact surface of one of the mould parts located at the mould cavity, and one of the pressure sensors is arranged laterally at the position of a venting provision in the part of the contact surface of said mould part located at the mould cavity.
18. The mould according to claim 16, wherein the mould comprises a drive system for exerting a closing force on the mould parts in closed position of the mould parts, which drive system comprises at least two individually controllable actuators configured to change the distribution of the closing force exerted on the mould parts by the drive system.
19. The mould according to claim 18, wherein the drive system is configured to control the at least two individually controllable actuators on the basis of the pressure registered by the plurality of pressure sensors.
20. The mould according to claim 15, wherein the mould comprises an adjusting mechanism for adjusting a distance between the contact surfaces of the respective mould parts which is present in the at least one mould cavity in a closed position of the mould parts.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0029] The invention will be further elucidated on the basis of the non-limitative exemplary embodiments shown in the following figures. Corresponding elements are designated in the figures with corresponding reference numerals. In the figures:
[0030]
[0031]
[0032]
[0033]
[0034]
DESCRIPTION OF THE INVENTION
[0035]
[0036] On the underside carrier 2 is supported by a part of a lower mould part 5. The shown segment of the upper mould part 1 is lined on the contact surface 6 facing toward the electronic component 3 with a foil material 7, for instance to prevent contamination of the upper mould part, to obtain a good seal, to simplify releasing of encapsulated electronic components, and so on. In upper mould part 1 a pressure sensor 8 is arranged in the contact surface 6. This pressure sensor 8 is positioned in the contact side 6 such that it is able to detect the pressure at the position of calibration component 9. This makes it possible to measure the pressure exerted with upper mould part 1 on calibration component 9 and thereby better control the quality of the encapsulating process than was possible according to the prior art.
[0037]
[0038]
[0039]
[0040] Arranged in mould cavity 45 is a pressure sensor 49 which is arranged such that it projects from the side 48 of mould cavity 45 facing toward the calibration component 50. The projecting part of pressure sensor 49 is likewise shielded by foil layer 47. This makes it possible to cover the, in this
[0041]