Method of characterizing the anisotropic, complex dielectric constant for materials with small dimensions
10475710 ยท 2019-11-12
Assignee
Inventors
Cpc classification
H01L21/02636
ELECTRICITY
G01N21/41
PHYSICS
H01L22/12
ELECTRICITY
International classification
H01L21/02
ELECTRICITY
G01N21/41
PHYSICS
Abstract
A dielectric-coating based technique determines the refractive index of small dimension materials. The technique utilizes a sample of the small dimension material coated with the dielectric and an uncoated sample, where reflectivity is determined for each. The real and imaginary components of the refractive index can be determined for the small-dimension material itself.
Claims
1. A method of determining a refractive index of a two-dimensional organic-inorganic hybrid perovskite comprising: selecting a dielectric material with a known refractive index; depositing a coating of the dielectric material on a first sample of the two-dimensional organic-inorganic hybrid perovskite, forming a coated sample having a thickness; engaging the coated sample with a laser of an optical testing device, the laser having a wavelength and a thickness of the coating being no more than of the wavelength; determining a reflectivity of the coated sample; determining a reflectivity of an uncoated sample of the two-dimensional organic-inorganic hybrid perovskite; determining a change in reflectivity (R) by comparing the reflectivity of the coated sample and the reflectivity of the uncoated sample; and determining the refractive index of the two-dimensional organic-inorganic hybrid perovskite at the wavelength based upon R and the reflectivity of the uncoated sample.
2. The method of claim 1, wherein the two-dimensional organic-inorganic hybrid perovskite is optically flat.
3. The method of claim 1, wherein the coating is applied to only a portion of the two-dimensional organic-inorganic hybrid perovskite.
4. The method of claim 1, wherein the coated sample and the second uncoated sample are a contiguous structure.
5. The method of claim 1, wherein the coated sample and the uncoated sample are non-contiguous structures and the uncoated sample has a second thickness that is greater than an optical penetration depth of the laser at the wavelength wherein the method further comprises engaging with the optical testing device the uncoated sample.
6. The method of claim 1, wherein the depositing of the coating of the coated sample is by thermal evaporation or atomic layer deposition.
7. The method of claim 1, wherein the coating of dielectric material is less optically absorbing than the two-dimensional organic-inorganic hybrid perovskite.
8. The method of claim 1, wherein the coated sample of the two-dimensional organic-inorganic hybrid perovskite has a thickness that is greater than an optical penetration depth of the laser at the wavelength.
9. The method of claim 1, wherein the coated sample of the two-dimensional organic-inorganic hybrid perovskite has a thickness within an order of magnitude of an optical penetration depth of the laser at the wavelength, the method further comprising determining the thickness of the coated sample.
10. The method of claim 1, wherein determining the refractive index comprises: 1) identifying, from the determined reflectivity of the coated sample, pairs of n and k values; 2) from the identified pairs of n and k values, determining a unique pair that yields a calculated R value that matches a determined change in reflectivity; and 3) determining the refractive index of the uncoated sample by identifying the unique pair of n and k.
11. A method of determining a refractive index of a small dimension material comprising: selecting a dielectric material with a known refractive index; depositing a coating of the dielectric material on a the small-dimension material so that a portion of the small dimension material is coated with the dielectric material and a second portion of the small dimension material is uncoated by the dielectric material; engaging the portion of the small dimension material coated with the dielectric material with a laser of an optical testing device, the laser having a wavelength and a thickness of the coating being no more than of the wavelength; determining a reflectivity of the portion of the small dimension material; determining a reflectivity of the second portion of the small dimension material; determining a change in reflectivity (R) representing a phase shift exhibited by a comparison of a reflectivity of the portion of the small-dimension material and a reflectivity of the second portion of the small-dimension material; and determining the refractive index of the second portion of the small-dimension material at the wavelength based upon R and the reflectivity of the second portion of the small-dimension material.
12. The method of claim 11, wherein the small dimension material is selected from a group consisting of colloidal nanoplatelets, highly ordered organic semiconductors, two-dimensional transition metal dichalcogenides, two-dimensional organic-inorganic hybrid perovskite, and two-dimensional group IV monochalcogenides.
13. The method of claim 11, wherein the portion of the small-dimension material and the second portion of the small-dimension material are a contiguous structure.
14. The method of claim 11, wherein the portion of the small-dimension material and the second portion of the small-dimension material are non-contiguous structures and the second portion of the small-dimension material has a second thickness that is greater than an optical penetration depth of the laser at the wavelength wherein the method further comprises engaging with the optical testing device the second portion of the small-dimension material.
15. The method of claim 11, wherein the depositing of the coating of the portion of the small-dimension material is by thermal evaporation or atomic layer deposition.
16. The method of claim 11, wherein the coating of dielectric material is less optically absorbing than the small dimension material.
17. The method of claim 11, wherein the first portion of the small dimension material has a thickness that is greater than an optical penetration depth of the laser at the wavelength.
18. The method of claim 11, wherein the portion of the small dimension material has a thickness within an order of magnitude of an optical penetration depth of the laser at the wavelength, the method further comprising determining the thickness of the portion of the small-dimension material.
19. The method of claim 11, wherein determining the refractive index comprises: 1) identifying, from the determined reflectivity of the portion of the small-dimension material, pairs of n and k values; 2) from the identified pairs of n and k values, determining the unique pair that yields a calculated R value that matches a determined change in reflectivity; and 3) determining the refractive index of the second portion of the small-dimension material by adding the unique pair of n and k.
Description
BRIEF DESCRIPTION OF DRAWINGS
(1) The foregoing and other features of the present disclosure will become more fully apparent from the following description and appended claims, taken in conjunction with the accompanying drawings. Understanding that these drawings depict only several implementations in accordance with the disclosure and are therefore, not to be considered limiting of its scope, the disclosure will be described with additional specificity and detail through use of the accompanying drawings.
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(18) Reference is made to the accompanying drawings throughout the following detailed description. In the drawings, similar symbols typically identify similar components, unless context dictates otherwise. The illustrative implementations described in the detailed description, drawings, and claims are not meant to be limiting. Other implementations may be utilized, and other changes may be made, without departing from the spirit or scope of the subject matter presented here. It will be readily understood that the aspects of the present disclosure, as generally described herein, and illustrated in the figures, can be arranged, substituted, combined, and designed in a wide variety of different configurations, all of which are explicitly contemplated and made part of this disclosure.
DETAILED DESCRIPTION OF VARIOUS EMBODIMENTS
(19) Knowledge of the refractive index is of crucial importance for the design of any optoelectronic and photonic devices including lenses, mirrors, photovoltaic cells, and light emitting diodes and lasers. Embodiments described herein relate generally to systems and methods for determining refractive index for materials with small dimensions. In particular, some embodiments provide method for determining refractive index for optically absorbing materials with dimensions below 50 microns, ultimately down to a couple times the optical wavelength of interest.
(20) As used herein, small dimension materials mean solid-state materials including but not limited to single crystals, thin films, or nanoparticles, that have an optically flat and smooth surface, whose lateral dimension is on the order of or larger than several wavelengths. Here, the wavelength means the wavelength at which the index of refraction (or refractive index) is to be determined, and being optically flat means that the surface roughness is at least one order of magnitude smaller than the wavelength. There is no constraint on the composition of candidate materials or the optical penetration depth, so small dimension materials may comprise a wide variety of materials; these include single crystals (isotropic or anisotropic), thin films, particles, and so on. Many material systems fall into this category, these include three-dimensional single crystals (with any crystal structures), thin films (physically or chemically grown), two-dimensional organic-inorganic hybrid perovskites (2DHPs), two-dimensional transition metal chalcogenides, superatomic solids, and so on. Described herein are specific embodiments that demonstrate the technique with two-dimensional organic-inorganic hybrid perovskites (2DHPs). The 2DHPs may comprise inorganic perovskite layers (such as made of lead iodide octahedra) and an organic spacer material. The organic material may be a cation spacer that forms ionic bonds with the perovskite layers, for example but not limited to BA (butylamine), BZA (benzylammonium), HA (histammonium), G (guanidinium) and 3AMP (3-(aminomethyl)piperidinium).
(21) The methods described herein for determining refractive index are suitable for absorbing media (e.g., in the above bandgap region of a semiconductor) and can be applied to the emerging and wide-ranging super-molecular single crystals and exfoliated 2D-TMDs, with achievable sizes typically below tens of microns.
(22) For illustrative purposes, 2DHPs are described regarding experiments and theoretical models. The macroscopic crystals of 2DHPs examined here comprise chemical compositions of (BA).sub.2(MA).sub.N1Pb.sub.NI.sub.3N+1, where N=14, BA=CH.sub.3(CH.sub.2).sub.3NH.sub.3.sup.+ and MA=CH.sub.3NH.sub.3.sup.+ (
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where .sub.xx=.sub.yy.sub.zz, and x, y and z are defined to be parallel to the {right arrow over (a)}, {right arrow over (b)} and {right arrow over (c)} axes (
(24) While this presents a problem, one embodiment solves this problem by performing reflection measurements on small-dimension material before and after coating a thin dielectric layer on top of it. For a strongly optically absorbing medium (such as the above bandgap range of direct-bandgap semiconductors), an ultrathin (<</4 where is the wavelength) dielectric coating on the absorbing medium produces non-trivial phase shift at the interface, and with it a large change in R (denoted as R). It is preferably that the dielectric coating has a smaller optical absorption coefficient than the material whose refractive index is to be determined. In one embodiment, a separate non-coated sample is measured. In another embodiment, the same sample is measured before coating then measured after coating. In yet another embodiment, a sample is only coated partially so a coated and uncoated portion with measurements taken from both areas.
(25) The reflection measurements can be performed with a customized microscope with a white light source (the spectral range of the light source can be ultraviolet, visible, near-infrared, mid-infrared, and beyond) or a laser source, provided that the objective and other components of the microscope are compatible with the spectral coverage of the light source. Commercial microscopes can also be used; the present results were obtained using a Filmetrics F40 microscopic reflectometer. The detailed procedure in extracting the correct n and k from the measured R and R for a particular wavelength is the following. (1) In the two-dimensional data (R as a function of n and k), identify the pair of n and k values, that will yield calculated R that matches the experimental value. (2) Among the identified pairs of n and k values from step (1), find those that will give the calculated R value that matches the experimental counterpart. Because the dielectric coating has different refractive index than the underlying material, a unique solution can be found, as illustrated in
(26) In one embodiment, to determine the refractive index for materials that have weak optical absorption coefficient, such as the below bandgap range for a direct-bandgap semiconductor or a dielectric material (not to be confused with the dielectric coating), the above technique can still be employed; however, in these cases, the material thickness needs to be determined such that the only unknowns in predicting its reflection before and after the dielectric coating are n and k of the material. Best sensitivity of the method can be obtained by choosing a dielectric coating that has the most different n and k values than the n and k values to be determined, and the thickness of the dielectric coating should be adjusted (for example, by trial and error) to yield R to be on the same order of magnitude as R.
(27) However, while providing small-dimension material with a coating of dielectric could provide beneficial insight, the coating of a dielectric layer on 2DHPs is non-trivial.
(28) The thickness and the refractive index of the dielectric coating were extracted from X-ray reflectivity measurements and ellipsometric measurements, respectively. Other thickness determination methods include cross-sectional transmission or scanning electron microscopy. Thickness can also be known using a quartz crystal microbalance (well-calibrated for the dielectric coating material). The refractive index of certain well-known dielectric materials may also be found in standard references. Referring again to the illustrative embodiment, thickness and RI (
(29) For 2DHPs, the strength of the excitonic resonance, manifested as a dip in n and a peak in k, strongly increases with decreasing N. It was found that lower members (N=12) exhibit some of the strongest dispersions from exciton resonances among known materials, which can be useful for control of the group velocity of light.
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(31) The organic cations of 2DHPs occupying the interlayer space offers an effective tuning knob of the exciton binding energy and dielectric confinement, and with them a change of the optical properties (i.e., refractive index) of the materials.
(32) To probe the out-of-plane permittivity (.sub.zz), reflectivity was measured from the ac-plane with the incident light propagating along {right arrow over (b)} and polarized along {right arrow over (c)} (
(33) Near the exciton transition, .sub.xx=.sub.yy<0 and .sub.zz>0 for N=12 (
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The surface has an ellipsoidal shape at 400 nm where N=1 is normally uniaxial, and turns into a hyperboloid at 513 nm (the negative peak of .sub.xx). In both cases the shapes are perturbed by optical losses. The simulated near-field at 513 nm (
(35) Type-II hyperbolic metamaterials composed of metal-dielectric multilayers were shown to enhance the radiative decay rates of nearby quantum emitters. Here, the highly anisotropic excitonic transitions in 2DHPs produce photonic environments that can inherently facilitate the radiative decay of excitons in the media. This effect was evaluated by calculating the Purcell factors for 2D and 3D perovskites with finite-element simulations. As shown in
(36) The hyperbolic regimes for N=1 and 2 (
(37) At room temperature, homogeneous broadening due to electron-phonon interactions determines the linewidth and magnitude of exciton resonances in 2DHPs and hence the achievable negativity of the in-plane . To explore excitonic linewidths and enhanced negative , performed measurements at lower temperatures. As shown in
(38) Our work sheds light on how crystal orientations may influence the optical absorption and emission of thin-film photovoltaic and light-emitting devices with 2DHPs as the active layer. We expect that exciton-induced in-plane negative can exist in a variety of material systems including colloidal nanoplatelets, highly ordered organic semiconductors, two-dimensional transition metal dichalcogenides (e.g., ReS.sub.2), two-dimensional organic-inorganic hybrid perovskite, and two-dimensional group IV monochalcogenides, wherein excitons are preserved in the bulk. Thus, in various embodiments, the developed refractive index characterization technique can be applied to these materials classes. For materials that have thickness several times larger than the optical penetration depth (as similar to the case of 2DHPs), the procedure described herein can be directly applied. For materials whose thickness is on the same order of the optical penetration depth, the thickness of the materials needs to be determined by other imaging techniques (such as cross-sectional scanning electron microscopy), in order to construct
Experimental and Analytical Processes
(39) The experiments described above and the analytical processes referred to above were performed using the techniques and parameters described below.
(40) Synthesis of 2D Hybrid Perovskite Single Crystals.
(41) The synthesis of (C.sub.3N.sub.2H.sub.4CH.sub.2CH.sub.2NH.sub.3)PbI.sub.4 (or HAPbI.sub.4) and (C.sub.6H.sub.5CH.sub.2NH.sub.3).sub.2PbI.sub.4 (or (BZA).sub.2PbI.sub.4) followed previous report. The synthesis of BA based 2DHPs (N=1 to 4) followed a separate report. The purity and orientation of the single crystals was confirmed by powder X-ray diffraction as well as single crystal 6-26 X-ray diffraction (Bruker D8 Discover).
(42) For the synthesis of 3AMP-PbI.sub.4, an amount of 111.5 mg (0.5 mmol) 99.9% PbO powder was dissolved in 3 ml of hydroiodic acid and 0.5 ml hypophosphorous acid solution by heating under stirring for 5 minutes at 160 C. until the solution turned to clear bright yellow. 0.5 ml hydroiodic acid was added to 57 mg (0.5 mmol) 3AMP in a separate vial under stirring. The protonated 3AMP solution was slowly added into the previous solution while hot. Red plate-like crystals precipitate during slow cooling to room temperature, with a yield of 152 mg (36.6% based on total Pb content).
(43) Synthesis of 3D Perovskite Single Crystals
(44) The preparation of MAPbBr.sub.3 single crystals followed the experimental procedure reported in literature. The growth of MAPbCl.sub.3 single crystals followed the method reported in literature with modifications. Specifically, equimolar of CH.sub.3NH.sub.3Cl and PbCl.sub.2 were first dissolved in 1:1 volumetric ratios of DMF/DMSO to form 1M solution. The mixture solution was heated to 60 C. on a hot plate to initiate crystallization. After 1-2 hours, seed crystals (1 mm size) were selected and taken out of precursor solution. Meanwhile, saturated mother liquors were prepared by dissolving 3 mmol of CH.sub.3NH.sub.3Cl and PbCl.sub.2 in 1 mL of DMSO under rigorous stirring overnight. Saturated liquors were then obtained by filtering the solutions with syringe filter (Millipore, 0.2 m pore size). Seed crystals were then loaded into filtered liquor solutions for continuous growth at room temperature. After a week, crystals in the size of 3 mm by 3 mm were formed, taken out of solution, and followed by washing with toluene and air drying. CsPbBr.sub.3 single crystals were prepared via antisolvent vapor-assisted crystallization, by following the procedure reported in literature.
(45) Thermal Evaporation of MoO.sub.x
(46) MoO.sub.x layer was deposited by thermal evaporation of MoO.sub.3 (99.99%, Sigma-Aldrich) under a pressure of 810.sup.6 Torr at a rate of 0.1 /s. Cooling water was utilized to maintain a substrate temperature of 25 C. during the deposition. The perovskite flakes were attached to Si wafers via carbon tapes. Si and/or GaAs witness wafers were placed adjacent to the perovskite samples. Note that the stoichiometry of thermally evaporated molybdenum oxide is dependent on the pressure, deposition rate and evaporation temperature, hence we use MoO.sub.x, rather than MoO.sub.3, to represent the evaporated film here.
(47) Optical Characterization
(48) Specular reflection spectra were acquired with Filmetrics F40 microscope (15 objective). For each composition, reflection results were averaged over more than 20 spots, and we found <5% spot-to-spot variations. For reflection measurements on the cross-section (ac-plane) of the single crystal flakes, a wire-grid polarizer was used to control the polarization of the incident beam. For low temperature reflection measurements, samples were placed in a liquid-nitrogen cooled cryostat. Room temperature photoluminescence spectra were collected using a customized microscope with 440 nm excitation produced from a Fianium supercontinuum laser source with a spot size of several m. Temperature dependent photoluminescence spectra were measured with 400 nm excitation, produced by second harmonic generation of an Ti:sapphire amplifier output with a spot size of 1 mm, and the samples were mounted in a 4K closed-cycle cryostat. Ellipsometric measurements of the MoO.sub.x/Si samples were performed with a J.A. Woollam M2000U system.
(49) Reflection Calculation, and Optical Simulation
(50) A customized transfer-matrix code was used to calculate the reflection of pristine as well as MoO.sub.x coated 2DHPs, at both normal and oblique incidences. The Purcell factor was calculated from finite-element simulations (COMSOL Multiphysics). In the 3D simulations, a point dipole (oriented either parallel or perpendicular to the optic axis) was placed inside the anisotropic medium. Integration of the Poynting vector was performed over a spherical surface centered at the dipole with a radius of 10 nm.
(51) X-Ray Reflectivity
(52) The X-ray reflectivity measurements were conducted on a 9 kW Rigaku SmartLab Workstation. Highly collimated incident X-ray beam (flux: 10.sup.9 cps, slits: 0.1 mm by 5 mm) were generated from a Cu rotating anode and projected onto the sample surfaces. The X-ray reflectivity measurements employed the Bragg-Brentano geometry, and the collected data and subsequent electron density modeling were processed using Igor-based Motofit packages. The reflected intensity is plotted as a function of momentum transfer, Q=4.Math.sin(2)/, where 2 is the scattering angle and is the wavelength (1.542 ). The origin of the electron density profile (
Definitions
(53) As used herein, the singular forms a, an, and the include plural referents unless the context clearly dictates otherwise. Thus, for example, the term a member is intended to mean a single member or a combination of members, a material is intended to mean one or more materials, or a combination thereof.
(54) As used herein, the terms about and approximately generally mean plus or minus 10% of the stated value. For example, about 0.5 would include 0.45 and 0.55, about 10 would include 9 to 11, about 1000 would include 900 to 1100.
(55) It should be noted that the term exemplary as used herein to describe various embodiments is intended to indicate that such embodiments are possible examples, representations, and/or illustrations of possible embodiments (and such term is not intended to connote that such embodiments are necessarily extraordinary or superlative examples).
(56) The terms coupled, connected, and the like as used herein mean the joining of two members directly or indirectly to one another. Such joining may be stationary (e.g., permanent) or moveable (e.g., removable or releasable). Such joining may be achieved with the two members or the two members and any additional intermediate members being integrally formed as a single unitary body with one another or with the two members or the two members and any additional intermediate members being attached to one another.
(57) It is important to note that the construction and arrangement of the various exemplary embodiments are illustrative only. Although only a few embodiments have been described in detail in this disclosure, those skilled in the art who review this disclosure will readily appreciate that many modifications are possible (e.g., variations in sizes, dimensions, structures, shapes and proportions of the various elements, values of parameters, mounting arrangements, use of materials, colors, orientations, etc.) without materially departing from the novel teachings and advantages of the subject matter described herein. Other substitutions, modifications, changes, and omissions may also be made in the design, operating conditions, and arrangement of the various exemplary embodiments without departing from the scope of the present invention.
(58) While this specification contains many specific implementation details, these should not be construed as limitations on the scope of any inventions or of what may be claimed, but rather as descriptions of features specific to particular implementations of particular inventions. Certain features described in this specification in the context of separate implementations can also be implemented in combination in a single implementation. Conversely, various features described in the context of a single implementation can also be implemented in multiple implementations separately or in any suitable subcombination. Moreover, although features may be described above as acting in certain combinations and even initially claimed as such, one or more features from a claimed combination can in some cases be excised from the combination, and the claimed combination may be directed to a subcombination or variation of a subcombination.