Method for producing GaN layered substrate

Abstract

Provided is a method for producing a GaN layered substrate, comprising the steps of: subjecting a C-plane sapphire substrate 11 having an off-angle of 0.5? to 5? to a high-temperature nitriding treatment at 800? C. to 1,000? C. to carry out a surface treatment of the C-plane sapphire substrate; carrying out epitaxial growth of GaN on the surface of the surface-treated C-plane sapphire substrate 11 to produce a GaN film carrier having a surface of an N polar face; forming an ion implantation region 13.sub.ion by carrying out ion implantation on the GaN film 13; laminating and joining a support substrate 12 with the GaN film-side surface of the ion-implanted GaN film carrier; and separating at the ion-implanted region 13.sub.ion in the GaN film 13 to transfer a GaN thin film 13a onto the support substrate 12, to produce a GaN layered substrate 10 having, on the support substrate 12, a GaN thin film 13a having a surface of a Ga polar face. A GaN layered substrate having a good crystallinity and a surface of a Ga face is obtained by a single transfer process.

Claims

1. A method for producing a GaN layered substrate, comprising the steps of: subjecting a C-plane sapphire substrate having an off-angle of 0.5 to 5 degrees to a high-temperature nitriding treatment at 800? C. to 1,000? C. and/or a treatment for deposition of crystalline AlN on the C-plane sapphire substrate to carry out a surface treatment of the C-plane sapphire substrate; carrying out epitaxial growth of GaN on the surface of the surface-treated C-plane sapphire substrate, so that a GaN film is formed on the surface of the surface-treated C-plane sapphire substrate, whereby a GaN film carrier having a surface of an N polar face is produced; forming an ion implantation region by carrying out ion implantation on the GaN film of the GaN film carrier; laminating and bonding a support substrate with a surface of the GaN film of the GaN film carrier, to which the ion implantation has been carried out; and performing delamination at the ion-implanted region in the GaN film to transfer a GaN thin film onto the support substrate, to obtain a GaN layered substrate having, on the support substrate, the GaN thin film whose surface is a Ga polar face.

2. The method for producing a GaN layered substrate according to claim 1, wherein the GaN epitaxial growth is carried out at a higher temperature than the high-temperature nitriding treatment.

3. The method for producing a GaN layered substrate according to claim 1, wherein the GaN epitaxial growth is carried out by a MOCVD method.

4. The method for producing a GaN layered substrate according to claim 1, wherein after the surface treatment of the C-plane sapphire substrate is carried out, a GaN buffer layer is formed at 700? C. or lower, and the GaN epitaxial growth is then carried out on the GaN buffer layer.

5. The method for producing a GaN layered substrate according to claim 4, wherein the thickness of the GaN buffer layer is 15 nm to 30 nm.

6. The method for producing a GaN layered substrate according to claim 1, wherein after the GaN film is formed by the epitaxial growth, a silicon oxide film is further formed on the GaN film to obtain the GaN film carrier.

7. The method for producing a GaN layered substrate according to claim 1, wherein before the ion implantation, the surface of the GaN film is smoothed to an arithmetic mean roughness Ra of 0.3 nm or less.

8. The method for producing a GaN layered substrate according to claim 1, wherein the ion implantation is a treatment using hydrogen ions (H.sup.+) and/or hydrogen-molecule ions (H.sub.2.sup.+) at an implantation energy of 100 keV to 160 keV and a dose of 1.0?10.sup.17 atom/cm.sup.2 to 3.0?10.sup.17 atom/cm.sup.2.

9. The method for producing a GaN layered substrate according to claim 1, wherein the support substrate is made of Si, Al.sub.2O.sub.3, SiC, AlN or SiO.sub.2.

10. The method for producing a GaN layered substrate according to claim 9, wherein the support substrate has a silicon oxide film formed on a bonding surface with the GaN film carrier except for cases where the support substrate is made of SiO.sub.2.

11. The method for producing a GaN layered substrate according to claim 1, wherein thickness of the GaN thin film is 500 nm or greater and less than thickness of the GaN film.

Description

BRIEF DESCRIPTION OF DRAWINGS

(1) FIG. 1 is a diagram showing a production process in an embodiment of a method for producing a GaN layered substrate according to the present invention, where (a) shows preparation of a C-plane sapphire substrate and a support substrate, (b) shows surface treatment of a C-plane sapphire substrate, (c) shows epitaxial growth of GaN, (d) shows ion implantation treatment, (e) shows lamination and bonding, and (f) shows delamination and transfer of a GaN thin film.

DESCRIPTION OF EMBODIMENTS

(2) Hereinafter, a method for producing a GaN layered substrate according to the present invention is described. Here, the value range A to B includes the values at both ends of the range, and means A or more and B or less.

(3) The method for producing a GaN layered substrate according to the present invention includes the steps of: subjecting a C-plane sapphire substrate having an off-angle of 0.5 to 5 degrees to a high-temperature nitriding treatment at 800? C. to 1,000? C. and/or a treatment for deposition of crystalline AlN on the C-plane sapphire substrate to carry out a surface treatment of the C-plane sapphire substrate; carrying out epitaxial growth of GaN on the surface of the surface-treated C-plane sapphire substrate to produce a GaN film carrier having a surface of an N polar face; forming an ion implantation region by carrying out ion implantation on the GaN film; laminating and bonding a support substrate with the GaN film-side surface of the ion-implanted GaN film carrier; and performing delamination at the ion-implanted region in the GaN film to transfer a GaN thin film onto the support substrate, to produce a GaN layered substrate having, on the support substrate, a GaN thin film whose surface is a Ga polar face.

(4) Hereinafter, the method for producing a GaN layered substrate according to the present invention is described in detail with reference to FIG. 1.

(5) As shown in FIG. 1, the method for producing a GaN layered substrate according to the present invention includes carrying out the following steps in the order presented: (a) preparation of a C-plane sapphire substrate and a support substrate (step 1), (b) surface treatment of the C-plane sapphire substrate (step 2), (c) epitaxial growth of GaN (step 3), (d) ion implantation treatment (step 4), (e) lamination and bonding (step 5), and (f) delamination and transfer of a GaN thin film (step 6).

(6) (Step 1: Preparation of C-Plane Sapphire Substrate and Support Substrate)

(7) First, a C-plane sapphire substrate 11 and a support substrate 12 are prepared (FIG. 1 (a)).

(8) Here, the C-plane sapphire substrate 11 is a substrate made of sapphire (?-Al.sub.2O.sub.3), whose substrate surface is a C-plane ((0001) plane). The c-axis off-angle (hereinafter, off-angle) of the C-plane sapphire substrate 11 is 0.5 to 5 degrees, preferably 2 to 3 degrees. When the off-angle is within the above-mentioned range, the surface of a GaN film 13 subsequently formed on the C-plane sapphire substrate 11 is an N polar face (hereinafter N face), the GaN film 13 is an epitaxially grown film having good smoothness and good crystallinity, and a GaN thin film 13a which is a transferred thin film with the GaN film 13 partially delaminated by an ion implantation delamination method and transferred to a support substrate 12 has excellent smoothness. The off-angle is an angle at which the substrate surface (face to be subjected to crystal growth) is slightly inclined in a specific direction from the close-packed face, and the c-axis off-angle is a magnitude of an inclination of the c-axis (normal-line axis of the C-plane) of the C-plane sapphire substrate 11 in the a-axis direction.

(9) In addition, the arithmetic mean roughness Ra (JIS B0601: 2013, the same applies hereinafter) of the surface of the C-plane sapphire substrate 11 is preferably 0.5 nm or less. This enables firmer bonding when the sapphire substrate 11 is laminated and bonded to the support substrate 12 because the surface of the epitaxially deposited GaN film 13 becomes smoother.

(10) The support substrate 12 is a substrate that ultimately supports the GaN thin film 13a, and is preferably made of Si, Al.sub.2O.sub.3, SiC, AlN or SiO.sub.2. The constituent material thereof may be appropriately selected according to a use of a semiconductor device prepared by using the obtained GaN layered substrate.

(11) The arithmetic mean roughness Ra of the surface of the support substrate 12 is preferably 0.5 nm or less. This enables firmer bonding when the C-plane sapphire substrate 11 is bonded to a GaN layer carrier having the GaN layer 13.

(12) In addition, a bond film formed of silicon oxide (SiOx thin film (0<x?2)) may be provided on the outermost layer of the support substrate 12 (except for cases where the support substrate 12 is made of SiO.sub.2). Further, if the surface roughness of the support substrate 12 itself is not sufficiently small (e.g., the arithmetic mean roughness Ra of the surface of the support substrate 12 is more than 0.5 nm), this bond film may be treated by chemical mechanical polishing (CMP) or the like to smooth the surface of the support substrate 12. This enables further enhancement of the bonding strength between the C-plane sapphire substrate 11 and a GaN layer carrier having the GaN layer 13.

(13) The thickness of this bond film is preferably about 300 nm to 1,000 nm.

(14) (Step 2: Surface Treatment of C-Plane Sapphire Substrate)

(15) Next, a surface treatment of the C-plane sapphire substrate 11 is carried out (FIG. 1 (b)).

(16) That is, a high-temperature nitriding treatment of the C-plane sapphire substrate 11 at 800? C. to 1,000? C. and/or a treatment for depositing crystalline AlN on the C-plane sapphire substrate 11 are carried out.

(17) Of these, the high-temperature nitriding treatment of the C-plane sapphire substrate 11 is a treatment in which the C-plane sapphire substrate 11 is heated to a temperature slightly lower than a deposition temperature for GaN epitaxial growth which is subsequently carried out, specifically 800? C. to 1,000? C., in a nitrogen-containing atmosphere to form an AlN film as the surface treatment layer 11a on the surface of the C-plane sapphire substrate 11. Preferably, the treatment is carried out in situ in the same treatment chamber of the MOCVD apparatus for epitaxial growth of the GaN film, and the treatment is carried out at a temperature (800? C. to 1,000? C.) slightly lower than a temperature for GaN epitaxial growth (1,050? C. to 1,100? C.). Here, if the treatment temperature is lower than 800? C., N-pole growth of the GaN film does not occur, and if the treatment temperature is higher than 1,000? C., smoothness deteriorates due to generation of GaN in epitaxial growth which is subsequently carried out. As a process gas, pure nitrogen is used, but ammonia gas can also be used. Use of ammonia gas enables generation of more active N atoms, leading to improvement of the surface morphology (crystal structure) of the GaN film. The high-temperature nitriding treatment time is preferably about 30 seconds to 30 minutes. By lengthening the treatment time, the surface morphology (crystal structure) of the GaN film can be improved.

(18) The treatment for depositing crystalline AlN on the C-plane sapphire substrate 11 is a treatment in which a crystalline AlN film as a surface treatment layer 11a is formed on the C-plane sapphire substrate 11 by a chemical vapor deposition method (CVD method) or a physical vapor deposition method (PVD). This deposition treatment may be carried out under formation conditions allowing the surface of the C-plane sapphire substrate 11 to be covered with a crystalline AlN film (surface treatment layer 11a).

(19) It is preferable that after a crystalline AlN film as the surface treatment layer 11a is deposited on the C-plane sapphire substrate 11 as described above and before epitaxial growth of GaN, heat treatment is carried out to stabilize the crystalline AlN film.

(20) (Step 3: Epitaxial Growth of GaN)

(21) Next, GaN is epitaxially grown on the surface of the surface-treated C-plane sapphire substrate 11 to form a GaN film 13 whose surface is an N polar face. In this way, a GaN film carrier is prepared.

(22) As methods for epitaxially growing the GaN film, a molecular beam epitaxy (MBE) method, hydride vapor phase epitaxy (HVPE) method, and metal organic chemical vapor deposition (MOCVD) method are known, and the MOCVD method is most suitable and preferable for growing a low-defect GaN thin film directly on the sapphire substrate 11.

(23) Here, it is preferable that the epitaxial growth of the GaN film 13 by the MOCVD method is carried out at a temperature higher than that of the high-temperature nitriding treatment in the step 2 (i.e. higher than 1,000? C.), and a temperature of higher than 1,000? C. and 1,100? C. or lower, at which good balance is achieved between the film quality of the GaN film 13 and the deposition rate. In addition, trimethylgallium (TMG) and ammonia (NH.sub.3) may be used as the process gas, and hydrogen may be used as the carrier gas.

(24) The thickness of the GaN film 13 depends on the thickness of the GaN thin film 13a to be finally obtained, and is, for example, 0.5 ?m to 10 ?m.

(25) It is preferable that after the C-plane sapphire substrate 11 is subjected to the surface treatment in step 2, a GaN buffer layer is formed at a low temperature, for example 700? C. or lower, and GaN is then epitaxially grown on the GaN buffer layer by the MOCVD method to form the GaN film 13.

(26) Here, in deposition of the GaN buffer layer, the GaN film 13 on the buffer layer does not grow well at an N pole if the deposition temperature is higher than 700? C., and deposition itself does not proceed if the deposition temperature is lower than 400? C. Therefore, the GaN buffer layer is deposited preferably at 400? C. to 700? C., more preferably at 400? C. to 600? C. In addition, a buffer effect may not be obtained if the thickness of the GaN buffer layer is excessively small, and the film quality may be deteriorated if the thickness of the GaN buffer layer is excessively large. Therefore, the thickness of the GaN buffer layer is preferably 15 nm to 30 nm, more preferably 20 nm to 25 nm.

(27) Through the foregoing series of steps of forming the GaN film 13, the GaN film 13 with very good crystallinity whose surface is an N face is deposited on the C-plane sapphire substrate 11 (FIG. 1(c) shows the process up to this point).

(28) Here, the crystal surface of a compound semiconductor such as GaN has polarity. For example, the surfaces of a single-crystal GaN film composed of constituent elements Ga and N inevitably have a polar face which is formed of (terminated with) Ga atoms and on which dangling bonds of the Ga atoms are exposed (Ga polar face (also referred to as a Ga face)) and a polar face which is formed of (terminated with) N atoms and on which dangling bonds of the N atoms are exposed (N polar face (also referred to as an N face)).

(29) In addition, GaN has a hexagonal crystal structure, and the polar face thereof appears on the close-packed face of the crystal lattice. The close-packed face of a hexagonal compound semiconductor crystal is a {0001} plane, and the (0001) plane is not equivalent to a (000-1) plane. The former is a plane on which cation atoms are exposed, and the latter is a plane on which anion atoms are exposed. In gallium nitride (GaN), the (0001) plane is a Ga face and the (000-1) plane is an N face.

(30) After the GaN film 13 is formed by the epitaxial growth, a silicon oxide (SiOx (0<x?2)) film as a bond layer for lamination to the support substrate 12 may be further formed on the GaN film 13 to obtain the GaN film carrier. Here, the thickness of the silicon oxide film is preferably 200 nm to 1,000 nm.

(31) (Step 4: Ion Implantation to GaN Film 13)

(32) Next, ion implantation is performed to the surface of the GaN film 13 of the GaN film carrier to form a layered ion implantation region 13.sub.ion in the GaN film 13 (FIG. 1(d)).

(33) At this time, it is preferable to use hydrogen ions (H.sup.+) and/or hydrogen molecule ions (H.sub.2.sup.+) as injection ions.

(34) The implantation energy determines the ion implantation depth (i.e. the thickness of the delaminated film (GaN thin film 13a)), and is preferably 110 keV to 160 keV. If the implantation energy is 100 keV or more, the thickness of the GaN thin film 13a can be 500 nm or more. On the other hand, if the implantation energy is more than 160 keV, implantation damage may expand, leading to deterioration of the crystallinity of the delaminated thin film.

(35) The dose is preferably 1.0?10.sup.17 atom/cm.sup.2 to 3.0?10.sup.17 atom/cm.sup.2. This enables formation of an ion implantation region 13.sub.ion as a separating layer (embrittlement layer) in the GaN film 13 and suppression of a rise in temperature of the GaN film carrier. The ion implantation temperature is room temperature. Since the GaN film carrier may break at a high temperature, the GaN film carrier may be cooled.

(36) Here, the ion implantation treatment may be carried out on the GaN film carrier with the GaN film 13 as formed in step 3, but if the surface of the GaN film 13 as formed is rough, the ion implantation depth becomes uneven depending on irregularities on the surface, leading to expansion of irregularities on the delaminated face (surface) of the GaN thin film 13a after delamination.

(37) Thus, before the ion implantation, the ion implantation face of the GaN film carrier may be smoothed to an arithmetic mean roughness of preferably 0.3 nm or less, more preferably 0.2 nm or less.

(38) For example, the surface of the GaN film 13 formed in step 3 may be polished by CMP and/or etched or the like to smooth the surface to an arithmetic average roughness Ra of preferably 0.3 nm or less, more preferably 0.2 nm or less.

(39) Alternatively, when a silicon oxide film is formed as a bond layer on the GaN film 13 (i.e. the GaN film 13 as formed or smoothed by polishing and/or etching), the surface of the silicon oxide film may be polished by CMP and/or etched or the like to smooth the surface to an arithmetic average roughness Ra of preferably 0.3 nm or less, more preferably 0.2 nm or less. The smoothing is particularly effective in a case where the thickness of the GaN film 13 is small and it is difficult to flatten the surface by polishing or the like.

(40) By smoothing a face of the GaN film carrier which is to be subjected to ion implantation (i.e. the surface of the GaN film 13 or the silicon oxide film as the bond layer), the ion implantation depth can be made uniform in the ion implantation treatment that is subsequently carried out, and hence, a delamination and transfer layer (GaN thin film 13a) having a smooth surface (small surface roughness) can be obtained when the GaN carrier is laminated to the support substrate 12 and then delaminated.

(41) (Step 5: Lamination and Bonding of GaN Film Carrier and Support Substrate 12)

(42) Next, the GaN film 13-side surface of the GaN film carrier, which has been subjected to ion implantation, is laminated and bonded to the support substrate 12 (FIG. 1(e)).

(43) Here, when the GaN film carrier, on which the bond layer (silicon oxide film) is not formed, is laminated to the support substrate 12, the surface (N face) of the GaN film 13 of the GaN film carrier is bonded to the surface of the support substrate 12. That is, a laminated structure of C-plane sapphire substrate 11/surface-treated layer 11a/(GaN buffer layer)/GaN film 13 (N face)/support substrate 12 is obtained.

(44) In addition, when the GaN film carrier with the bond layer (silicon oxide film) formed on at least one of the surfaces is laminated to the support substrate 12, the surface (N face) of the GaN film 13 of the GaN film carrier is bonded to the surface of the support substrate 12 with the bond layer (silicon oxide film) interposed therebetween. That is, a laminated structure of C-plane sapphire substrate 11/surface-treated layer 11a/(GaN buffer layer)/GaN film 13 (N face)/bond layer (silicon oxide film)/support substrate 12 is obtained.

(45) It is preferable that before the lamination, one or both of the ion implantation face of the GaN film carrier and the bonding face of the support substrate 12 are subjected to a plasma treatment as a surface activation treatment.

(46) For example, the GaN film carrier and/or the support substrate 12 to be subjected to the surface activation treatment is set in a common parallel plate type plasma chamber, a high frequency of about 13.56 MHz with 100 W is applied, and Ar, N.sub.2, and O.sub.2 are introduced as process gases to carry out the treatment. The treatment time is 5 seconds to 30 seconds. This activates the surface of a target substrate, leading to an increase in bonding strength after lamination.

(47) In addition, when annealing is carried out after lamination at about 200? C. to 300? C., firmer bonding is performed.

(48) (Step 6: Delamination and Transfer of GaN Thin Film)

(49) Next, the GaN thin film 13a is transferred onto the support substrate 12 by delamination at the ion implantation region 13.sub.ion in the GaN film 13 (FIG. 1(f)).

(50) The delamination treatment may be a treatment commonly carried out by an ion implantation delamination method. It is possible to apply, for example, mechanical delamination such as insertion of a blade, optical delamination by laser light irradiation or the like, or physical impact delamination with the aid of a jet water flow, an ultrasonic wave, or the like.

(51) This enables preparation of the GaN layered substrate 10 in which the GaN thin film 13a with good crystallinity and a smooth surface, whose surface is a Ga polar face, is present on the support substrate 12.

(52) While the surface of the GaN thin film 13a transferred after delamination is sufficiently smooth, the surface may be made smoother by polishing or the like depending on required characteristics of a device in which the GaN layered substrate 10 is used. A GaN film can be further epitaxially grown on the GaN layered substrate 10 to produce a low-defect and thick GaN substrate.

(53) As a method for determining the polar face of the surface of the GaN thin film 13a of the GaN layered substrate 10, a determination may be made by, for example, observing a difference in etching rate with a KOH aqueous solution. That is, the etching rate of the N face is higher than that of the Ga face. For example, the polar face can be determined from the fact that when the substrate is immersed in a 2 mol/L KOH aqueous solution at 40? C. for 45 minutes, the Ga face is not etched, whereas the N face is etched.

EXAMPLES

(54) Although Examples and Comparative Examples are given below to more concretely illustrate the invention, the invention is not limited by these Examples.

Example 1

(55) A GaN layered substrate was prepared under the following conditions.

Example 1-1

(56) A C-plane sapphire substrate with a diameter of 100 mm, a thickness of 525 ?m, an arithmetic mean roughness Ra of 0.3 nm and a C-axis off-angle of 3 degrees was prepared. The substrate was cleaned by RCA cleaning, and then subjected to a high-temperature nitriding treatment (process gas: pure nitrogen) at a substrate temperature of 900? C. for 30 minutes by use of a MOCVD apparatus, and a GaN buffer layer was subsequently deposited with a thickness of 20 nm at a substrate temperature of 400? C., and then epitaxially grown at a substrate temperature of 1,050? C. by use of TMG and NH.sub.3 as process gases to deposit a GaN film with a thickness of 2 ?m. The arithmetic mean roughness Ra of the GaN film was 8 nm.

(57) Subsequently, a silicon oxide film with a thickness of 1 ?m was deposited on the GaN film by a plasma CVD method, and the silicon oxide film was then polished to 200 nm with a CMP apparatus. The arithmetic mean roughness Ra of the obtained GaN film carrier was 0.3 nm.

(58) Next, the GaN film carrier was ion-implanted with hydrogen molecule ions H.sub.2.sup.+ to the silicon oxide film surface at an implantation energy of 160 keV and a dose of 3.0?10.sup.+17 atom/cm.sup.2.

(59) Next, a Si substrate with a diameter of 100 mm and a thickness of 525 ?m was prepared, and a thermal oxide film with a thickness of 300 nm was formed on the Si substrate. The arithmetic mean roughness Ra of the Si substrate after formation of the thermal oxide film was 0.5 nm.

(60) An Ar plasma treatment were carried out on the thermal oxide film surface of the Si substrate and the silicon oxide film (ion implantation face) surface of the GaN film carrier, respectively. Subsequently, the Ar plasma-treated surfaces were bonded together, and then annealed at 200? C. for 12 hours in a nitrogen atmosphere. After annealing, delamination was performed by inserting a metal blade into the ion implantation region of the GaN film, and the GaN thin film was transferred onto the Si substrate to obtain a GaN layered substrate.

(61) The arithmetic mean roughness Ra of the surface of the GaN thin film of the obtained GaN layered substrate was 8 nm. In addition, the crystallinity of the GaN thin film of the obtained GaN layered substrate was evaluated by an X-ray locking curve method. Specifically, a tilt distribution (half-value width) in the locking curve (? scan) of reflection at the GaN (0002) plane of the GaN thin film was determined by X-ray diffraction, and the result showed a good crystallinity of 300 arcsec.

(62) In addition, for determining the polar face of the surface of the GaN thin film, the sample was immersed in a 2 mol/L KOH aqueous solution at 40? C. for 45 minutes, and the surface was then observed. The result showed that the surface of the GaN thin film was not etched, and the surface of the GaN thin film was a Ga face.

Example 1-2

(63) With respect to Example 1-1, a GaN film with a thickness of 2 ?m was epitaxially grown, the surface of the GaN film was then polished so that the surface had an arithmetic mean roughness Ra of 0.2 nm, and the GaN film was transferred. Except for the above, the same procedure as in Example 1-1 was carried out to obtain a GaN layered substrate.

(64) The arithmetic mean roughness Ra of the surface of the GaN thin film of the obtained GaN layered substrate was 0.3 nm. In addition, the crystallinity of the GaN thin film of the obtained GaN layered substrate was evaluated by an X-ray locking curve method as in Example 1-1, and the result showed that the FWHM was 250 arcsec. Thus, the GaN thin film was comparable in crystallinity to that of Example 1.

(65) In addition, the polar face of the surface of the GaN thin film was determined in the same manner as in Example 1-1, and the result showed that the polar face was a Ga face.

Comparative Example 1-1

(66) With respect to Example 1-1, a C-plane sapphire substrate having a c-axis off-angle of 0.05 degrees (an arithmetic mean roughness Ra of 0.3 nm) was used. Except for the above, the same procedure as in Example 1-1 was carried out to obtain a GaN layered substrate. The arithmetic mean roughness Ra of the GaN film after deposition of the GaN film was 60 nm, and the arithmetic mean roughness Ra of the GaN film carrier in which the silicon oxide film was polished by CMP was 0.2 nm.

(67) The arithmetic mean roughness Ra of the surface of the GaN thin film of the obtained GaN layered substrate was 60 nm. In addition, the crystallinity of the GaN thin film of the obtained GaN layered substrate was evaluated by an X-ray locking curve method as in Example 1-1, and the result showed that the FWHM was 600 arcsec. Thus, the GaN thin film had poor crystallinity.

(68) In addition, the polar face of the surface of the GaN thin film was determined in the same manner as in Example 1-1, and the result showed that the polar face was a Ga face.

Comparative Example 1-2

(69) With respect to Example 1-1, a C-plane sapphire substrate having a c-axis off-angle of 6 degrees (an arithmetic mean roughness Ra of 0.3 nm) was used. Except for the above, the same procedure as in Example 1-1 was carried out to obtain a GaN layered substrate. The arithmetic mean roughness Ra of the GaN film after deposition of the GaN film was 80 nm, and the arithmetic mean roughness Ra of the GaN film carrier in which the silicon oxide film was polished by CMP was 0.3 nm.

(70) The arithmetic mean roughness Ra of the surface of the GaN thin film of the obtained GaN layered substrate was 80 nm. In addition, the crystallinity of the GaN thin film of the obtained GaN layered substrate was evaluated by an X-ray locking curve method as in Example 1-1, and the result showed that the FWHM was 800 arcsec. Thus, the GaN thin film had poor crystallinity.

(71) In addition, the polar face of the surface of the GaN thin film was determined in the same manner as in Example 1-1, and the result showed that the polar face was a Ga face.

(72) The above results are shown in Table 1. It is clearly shown that the present invention provided a GaN layered substrate having excellent smoothness and crystallinity can be provided. The surface roughness Ra in the table is an arithmetic means roughness Ra

(73) TABLE-US-00001 TABLE 1 Evaluation GaN film carrier result of High- GaN film GaN transfer C-plane temperature GaN Surface Silicon oxide Support thin film sapphire nitriding buffer roughness film Surface substrate Surface substrate treatment layer Ra Polishing Polishing rough- Substrate rough- c-axis Treatment Thickness Deposition after film by Depo- by ness configu- ness Crystal- off-angle conditions (nm) temperature deposition CMP sition CMP Ra ration Ra linity* Example 1-1 3 900? C./ 20 nm 1,050? C. 8 nm None Done Done 0.3 nm Si 8 nm 300 degrees 30 min substrate arcsec (Thermal oxide formation) Example 1-2 3 900? C./ 20 nm 1,050? C. 6 nm Done None None 0.2 nm Si 0.3 nm 250 degrees 30 min substrate arcsec (Thermal oxide formation) Comparative 0.05 900? C./ 20 nm 1,050? C. 60 nm None Done Done 0.2 nm Si 60 nm 600 Example 1-1 degrees 30 min substrate arcsec (Thermal oxide formation) Comparative 6 900? C./ 20 nm 1,050? C. 80 nm None Done Done 0.3 nm Si 80 nm 800 Example 1-2 degrees 30 min substrate arcsec (Thermal oxide formation) *Full width at half maximum (FWHM) in locking curve (to scan) of reflection at GaN (0002) plane

(74) While the present invention has been described with the embodiments described above, the present invention is not limited to these embodiments, and changes such as other embodiments, additions, modifications and deletions can be made as long as they are conceivable by a person skilled in the art. Any of the aspects is within the scope of the present invention as long as the effects of the present invention are exhibited.

REFERENCE SIGNS LIST

(75) 10 GaN composite substrate 11 C-plane sapphire substrate 11a Surface-treated layer 12 Support substrate 13 GaN film 13a GaN thin film 13.sub.ion Ion implantation region