Magnetic trap for cylindrical diamagnetic materials
10468301 ยท 2019-11-05
Assignee
Inventors
Cpc classification
H01L21/76897
ELECTRICITY
H01L2924/0002
ELECTRICITY
B82Y40/00
PERFORMING OPERATIONS; TRANSPORTING
H01L2221/1094
ELECTRICITY
H01L2924/00
ELECTRICITY
H01L2924/0002
ELECTRICITY
H01L21/76838
ELECTRICITY
F16C32/0478
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
F16C32/0423
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
H01F7/0284
ELECTRICITY
H01L21/283
ELECTRICITY
H01L2924/00
ELECTRICITY
Y10S977/762
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
International classification
H01L21/768
ELECTRICITY
F16C32/04
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
B82Y40/00
PERFORMING OPERATIONS; TRANSPORTING
H01L21/02
ELECTRICITY
Abstract
A magnetic trap is configured to arrange at least one diamagnetic rod. The magnetic trap includes first and second magnets on a substrate that forms the magnetic trap defining a template configured to self-assemble diamagnetic material. Each of the first and second magnets extends along a longitudinal direction to define a magnet length, and contact each other to define a contact line. The first magnet and the second magnet have a diametric magnetization in a direction perpendicular to the contact line and the longitudinal direction so as to generate a longitudinal energy potential that traps the diamagnetic rod along the longitudinal direction.
Claims
1. A method of arranging a diamagnetic rod comprising: arranging first and second magnets on a substrate so as to form at least one magnetic trap defining a template for self-assembling diamagnetic material, each of the first and second magnets extending along a longitudinal direction to define magnet lengths, respectively; levitating a diamagnetic rod in a vertical direction perpendicular above a contact line located where the first magnet directly contacts the second magnet, the first magnet and the second magnet having a diametric magnetization in a direction perpendicular to the contact line and the longitudinal direction so as to generate a longitudinal energy potential that traps the diamagnetic rod along the longitudinal direction, the longitudinal energy potential having a camel-back shaped energy profile, wherein the longitudinal energy potential confines the diamagnetic rod in a three-dimensional confinement within the magnetic trap to perform a self-assembling process, positioning the diamagnetic rod being levitated above the contact line against a target substrate to form wiring on the target substrate, wherein the first magnet has a first outer surface extending along the magnet lengths between respective opposing ends, wherein the second magnet has a second outer surface extending along the magnet lengths between respective opposing ends, wherein the first outer surface of the first magnet is in continuous direct contact with the second outer surface of the second magnet.
2. The method of claim 1, wherein the first magnet and the second magnet make up one magnetic trap among an array of magnetic traps mounted on a template substrate.
3. The method of claim 1, further comprising filtering a rod length of the diamagnetic rod based on the magnet lengths.
4. The method of claim 1, wherein the camel-back shaped energy profile includes a trough region.
5. The method of claim 4, wherein the trough region is interposed between a pair of peak regions.
6. The method of claim 5, wherein the longitudinal energy potential confines the diamagnetic rod between the peak regions.
7. The method of claim 6, wherein the diamagnetic rod is levitated at approximately the trough portion.
8. The method of claim 7, wherein the camel-back shaped energy profile determines a length of the diamagnetic rod to be trapped.
9. The method of claim 8, wherein the rod length of the trapped diamagnetic rod satisfies a length ratio.
10. The method of claim 9, wherein the length ratio is determined with respect to the magnet length.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) Features characterizing embodiments of the present invention are described in the specification and claims which follow. These features, and advantages of embodiments of the invention are apparent from the following detailed description taken in conjunction with the accompanying drawings in which:
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DETAILED DESCRIPTION
(16) Conventional systems and methods have difficulty assembling large numbers of carbon nanotubes or semiconductor wires to form integrated circuits. Carbon nanotubes and most semiconductors are diamagnetic, with magnetic susceptibility <0. Embodiments of the invention relate to suspension of diamagnetic rods by diametrically magnetized magnets (magnetic polarization along the diameter of the magnet) to align the diamagnetic rods.
(17)
(18) In embodiments of the invention, the diamagnetic rod 103 is trapped in such a way that the rod 103 levitates above the contact line 104 in a vertical direction y, and maintains its location in each of a longitudinal direction z and a lateral or width direction x. In addition, in embodiments of the invention, the first and second magnets 101 and 102 have a uniform shape along the longitudinal direction z. In other words, if the first and second magnets 101 and 102 have a cylindrical shape as illustrated in
(19) In embodiments of the invention, the longitudinal direction z corresponds to a length axis of the diamagnetic rod 103, an origin axis, center length axis or center-of-gravity axis of the first and second magnets 101 and 102 and the contact line 104 where the first magnet 101 contacts the second magnet 102. The first and second magnets 101 and 102 are magnetized diametrically, parallel to the lateral or width axis x and perpendicular to the longitudinal axis z.
(20)
(21) The trapping potential in the vertical direction in the magnetic trap system with cylindrical magnets is given as:
(22)
(23) where b is the radius of the rod, l is the length of the rod, .sub.R is the mass density of the rod, is the magnetic susceptibility of the rod, g is the gravitational acceleration, .sub.0 is the magnetic permeability in vacuum, M is the volume magnetization of the magnets and =y/a, where y is the vertical position of the rod and a is the radius of the magnet.
(24) The equilibrium point y.sub.EQ where the rod is trapped or levitates can be obtained by solving for .sub.EQ using:
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(27) The longitudinal potential is given as:
(28)
(29) where B.sub.tot(z)=B.sub.1(z)+B.sub.2(z) is the magnetic field on the rod using dipole line model approximation, which only has x component with:
(30)
(31) where L is the length of the magnet and {circumflex over (x)} is the unit vector along x direction. This longitudinal potential has a form of camel-back potential which creates a confinement with a minimum point at the center and two peaks at both ends as shown in
(32) According to another embodiment, the longitudinal potential may be determined as:
(33)
(34) Where, B.sub.T(0, y, z) is the total magnetic field on the rod at the center of the trap (x=0). Due to system symmetry, the magnetic field only has x component. This magnetic field is given as:
B.sub.T(y,z)=B.sub.M(a,y,z)+B.sub.M(a,y,z)
(35) where B.sub.M is the magnetic field due to a single cylindrical diametric magnet centered at origin given as:
(36)
(37) where, L is the length of the magnet, s.sup.2=(xa cos ).sup.2+(ya sin ).sup.2 and u.sub.1,2=zL/2. As described above, the longitudinal potential has a form of camel-back potential which creates a confinement with a minimum point at the center and two peaks at both ends as shown in
(38) The shape of the camel-back potential determines a length of a diamagnetic rod 103 that may be trapped, since only a diamagnetic rod 103 with a length of less then around eighty percent (80%) but more than ten percent (10%) of the length L of the magnets 101 and 102 could be trapped in stable condition in the magnetic trap 100. Accordingly, in embodiments of the invention, the length L of the magnets 101 and 102 may be selected to filter the length of diamagnetic rods that a user or system desires to trap. The three dimensional confinement in the magnetic trap 100 is exploited to trap and self assemble semiconductor structures which are mostly diamagnetic materials.
(39) This system can also be utilized to measure the magnetic susceptibility of the rod (), which is a parameter that that is difficult to measure using other techniques especially for a very small particle. The magnetic susceptibility of a diamagnet has a value of <0, while a magnetic susceptibility of a ferromagnet material has a value of >0. The camel-back potential of the system gives rise to an oscillation for the rod along the longitudinal (z) direction with a period T. This information can be used to extract the magnetic susceptibility () of the rod using the following approximation:
(40)
(41) According to another embodiment, the magnetic susceptibility of the rod may be determined using a more exact expression as:
(42)
where is a dimensionless geometric parameter defined as:
=2L.sup.2/.sub.0.sup.2M.sup.2.sup.2B.sub.T.sup.2(0,y.sub.EQ,0)/z.sup.2
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(44) In block 801 of
(45) In
(46) As illustrated in
(47) In block 802 of
(48) In block 803 of
(49) In one embodiment, the diamagnetic rods 513 are carbon nanotubes wrapped in a surfactant and are selectively placed on the target substrate 520 based on an ion exchange between a functional surface monolayer and the surfactant-wrapped carbon nanotubes in an aqueous solution. Strong electrostatic interaction between the surface monolayer and the nanotube surfactant leads to the placement of individual nanotubes. In one embodiment, the monolayer is formed of 4-(N-hydroxycarboxamido)-1-methylpyridinium iodide (NMPI) molecules. The monolayer may include a hydroxamic acid end group that self-assembles on metal oxide surfaces, but not silicon dioxide (SiO.sub.2). An anion of NMPI may be exchanged with the anionic surfactant wrapped around the nanotubes, which results in a strong coulombic attraction between a negatively charged surfactant and a positively charged monolayer.
(50) As illustrated in
(51) Embodiments of the present invention trap diamagnetic wires or rods with magnets or ferromagnets. The diamagnetic wires or rods may then be applied to a substrate to form the basis for an integrated circuit. Embodiments include a system to trap and filter cylindrical diamagnetic materials or rods including pair of magnets, such as cylindrical magnets, block magnets, or thin film magnets. The magnets have diametric magnetization, i.e., the magnetization is along the diameter of the magnets, perpendicular to the direction of the trapped rods. The magnets have a finite length and flat faces on both ends to create longitudinal confinement of the rods. The magnets are designed to capture rods of predetermined lengths, where only rods having a length between around 10% and 80% of the magnets may be trapped.
(52) Embodiments also include an array of magnetic traps on a substrate to form a template for self-assembly of diamagnetic materials, such as semiconductor nanowires or carbon nanotubes. Embodiments also include methods for performing self-assembly of diamagnetic materials including depositing cylindrical diamagnetic materials on an array of magnetic traps, cleaning or filtering non-assembled diamagnetic materials and transferring the captured diamagnetic materials to a substrate to form wiring for a semiconductor circuit.
(53) As will be appreciated by one skilled in the art, aspects of the present invention may be embodied as an apparatus, system, method or computer program product. For example, the method of capturing diamagnetic materials and forming wiring may be performed by a system controlled by a computer executing computer code that controls the system to execute the method. Accordingly, aspects of the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment (including firmware, resident software, micro-code, etc.) or an embodiment combining software and hardware aspects that may all generally be referred to herein as a circuit, module or system. Furthermore, aspects of the present invention may take the form of a computer program product embodied in one or more computer readable medium(s) having computer readable program code embodied thereon.
(54) Any combination of one or more computer readable medium(s) may be utilized. The computer readable medium may be a computer readable signal medium or a computer readable storage medium. A computer readable storage medium may be, for example, but not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any suitable combination of the foregoing. More specific examples (a non-exhaustive list) of the computer readable storage medium would include the following: an electrical connection having one or more wires, a portable computer diskette, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or Flash memory), an optical fiber, a portable compact disc read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing. In the context of this document, a computer readable storage medium may be any tangible medium that can contain, or store a program for use by or in connection with an instruction execution system, apparatus, or device.
(55) A computer readable signal medium may include a propagated data signal with computer readable program code embodied therein, for example, in baseband or as part of a carrier wave. Such a propagated signal may take any of a variety of forms, including, but not limited to, electro-magnetic, optical, or any suitable combination thereof. A computer readable signal medium may be any computer readable medium that is not a computer readable storage medium and that can communicate, propagate, or transport a program for use by or in connection with an instruction execution system, apparatus, or device.
(56) Program code embodied on a computer readable medium may be transmitted using any appropriate medium, including but not limited to wireless, wireline, optical fiber cable, RF, etc., or any suitable combination of the foregoing.
(57) Computer program code for carrying out operations for aspects of the present invention may be written in any combination of one or more programming languages, including an object oriented programming language such as Java, Smalltalk, C++ or the like and conventional procedural programming languages, such as the C programming language or similar programming languages. The program code may execute entirely on the user's computer, partly on the user's computer, as a stand-alone software package, partly on the user's computer and partly on a remote computer or entirely on the remote computer or server. In the latter scenario, the remote computer may be connected to the user's computer through any type of network, including a local area network (LAN) or a wide area network (WAN), or the connection may be made to an external computer (for example, through the Internet using an Internet Service Provider).
(58) Aspects of the present invention have been described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems) and computer program products. It will be understood that each block of the flowchart illustrations and/or block diagrams, and combinations of blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions/acts specified in the flowchart and/or block diagram block or blocks.
(59) These computer program instructions may also be stored in a computer readable medium that can direct a computer, other programmable data processing apparatus, or other devices to function in a particular manner, such that the instructions stored in the computer readable medium produce an article of manufacture including instructions which implement the function/act specified in the flowchart and/or block diagram block or blocks.
(60) The computer program instructions may also be loaded onto a computer, other programmable data processing apparatus, or other devices to cause a series of operational steps to be performed on the computer, other programmable apparatus or other devices to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide processes for implementing the functions/acts specified in the flowchart and/or block diagram block or blocks.
(61) The flowchart and block diagrams in the Figures illustrate the architecture, functionality, and operation of possible implementations of systems, methods and computer program products according to various embodiments of the present invention. In this regard, each block in the flowchart or block diagrams may represent a module, segment, or portion of code, which comprises one or more executable instructions for implementing the specified logical function(s). It should also be noted that, in some alternative implementations, the functions noted in the blocks may occur out of the order noted in the figures. For example, two blocks shown in succession may, in fact, be executed substantially concurrently, or the blocks may sometimes be executed in the reverse order, depending upon the functionality involved. It will also be noted that each block of the block diagrams and/or flowchart illustration, and combinations of blocks in the block diagrams and/or flowchart illustration, can be implemented by special purpose hardware-based systems that perform the specified functions or acts, or combinations of special purpose hardware and computer instructions.
(62) The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms a, an and the are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms comprises and/or comprising, when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one more other features, integers, steps, operations, element components, and/or groups thereof.
(63) The corresponding structures, materials, acts, and equivalents of all means or step plus function elements in the claims below are intended to include any structure, material, or act for performing the function in combination with other claimed elements as specifically claimed. The description of the present invention has been presented for purposes of illustration and description, but is not intended to be exhaustive or limited to the disclosure in the form disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the invention. The embodiment was chosen and described in order to best explain the principles of the invention and the practical application, and to enable others of ordinary skill in the art to understand the invention for various embodiments with various modifications as are suited to the particular use contemplated.
(64) While a preferred embodiment has been described, it will be understood that those skilled in the art, both now and in the future, may make various improvements and enhancements which fall within the scope of the claims which follow.