Exfoliation
10421875 ยท 2019-09-24
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Inventors
Cpc classification
H01L29/78681
ELECTRICITY
C01B17/20
CHEMISTRY; METALLURGY
B82Y40/00
PERFORMING OPERATIONS; TRANSPORTING
B05D7/24
PERFORMING OPERATIONS; TRANSPORTING
Y10S977/755
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
C09D11/03
CHEMISTRY; METALLURGY
H01L31/1136
ELECTRICITY
Y10S977/948
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
C09D11/38
CHEMISTRY; METALLURGY
C01B21/0648
CHEMISTRY; METALLURGY
Y10S977/90
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y02E10/50
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
H01L31/0445
ELECTRICITY
H01L31/113
ELECTRICITY
H01L31/0324
ELECTRICITY
B82Y30/00
PERFORMING OPERATIONS; TRANSPORTING
C01P2004/24
CHEMISTRY; METALLURGY
H01L29/78696
ELECTRICITY
C01P2004/64
CHEMISTRY; METALLURGY
International classification
B05D7/24
PERFORMING OPERATIONS; TRANSPORTING
C01B17/20
CHEMISTRY; METALLURGY
H01L31/0445
ELECTRICITY
C09D11/38
CHEMISTRY; METALLURGY
H01L29/786
ELECTRICITY
H01L31/0304
ELECTRICITY
H01L31/032
ELECTRICITY
H01L31/113
ELECTRICITY
H01L31/0352
ELECTRICITY
Abstract
This invention relates to a method for exfoliating inorganic layered compounds to form two-dimensional (2D) inorganic compounds. The exfoliation is carried out in aqueous media in the present of polycyclic aromatic compounds. The invention also relates to aqueous suspensions of two-dimensional compounds which arise from the exfoliation method. The invention further relates to methods of forming thin films of two-dimensional compounds from suspensions and to devices comprising thin films of two-dimensional (2D) inorganic compounds.
Claims
1. A method of producing an aqueous suspension of particles of a two-dimensional inorganic compound, the method comprising: a) providing multilayered particles of the inorganic compound in an aqueous medium which comprises at least one polycyclic aromatic compound, or a salt thereof; wherein the polycyclic aromatic compound is present in the aqueous medium in an amount from 1 10.sup.4 mol/L to 200 10.sup.4 mol/L, wherein the or each polycyclic aromatic compound independently has a ring system which comprises from 2 to 10 fused benzene rings, the ring system being substituted with from 1 to 4 independently selected hydrophilic groups, each hydrophilic group consisting of less than 20 atoms; b) subjecting the multilayered particles of the inorganic compound in the aqueous medium to energy to obtain a suspension; c) when the suspension obtained in step b) also comprises multilayered particles of the inorganic compound, the method further comprises the step of reducing the amount of multilayered particles of the inorganic compound in the suspension to obtain an aqueous suspension comprising particles of the two-dimensional inorganic compound and the at least one polycyclic aromatic compound.
2. A method of claim 1, wherein the ring system of the polycyclic aromatic compound contains 3 to 6 fused benzene rings and at least one ring contains two atoms in common with each of two or more other rings.
3. A method of claim 1, wherein the independently selected hydrophilic groups of the polycyclic aromatic compound may consist of less than 6 atoms independently selected from S, O, P, H, C, N, B and I.
4. A method of claim 1, wherein at least one hydrophilic group is a sulfonic acid or a base addition salt of a sulfonic acid.
5. A method of claim 1, wherein the polycyclic aromatic compound is selected from: ##STR00002##
6. A method of claim 1, wherein the polycyclic aromatic compound is present in the aqueous medium in an amount from 1 10.sup.4 mol/L to 66 10.sup.4 mol/L.
7. A method of claim 1, wherein the aqueous medium comprises an alcohol and wherein the alcohol may form from 10 to 30% by volume of the aqueous media.
8. A method of claim 1, wherein the aqueous medium is deuterated water.
9. A method of claim 1, wherein the aqueous medium has a pH in the range from 1 to 7.
10. A method of claim 1, wherein greater than 75% by weight of the particles of the two dimensional inorganic compound have a diameter between 50 and 750 nm.
11. A method of claim 1, wherein the inorganic compound is h-BN.
12. A method of claim 11, wherein greater than 75% by weight of the two dimensional inorganic compound has a thickness of from 1 to 3 molecular layers.
13. A method of claim 1, wherein the inorganic compound is a transition metal dichalcogenide.
14. A method of claim 13, wherein greater than 75% by weight of the two dimensional inorganic compound has a thickness of from 4 to 6 molecular layers.
15. A method of claim 1, wherein the energy is sonic energy.
16. A suspension of particles of a two-dimensional inorganic compound in an aqueous medium comprising at least one polycyclic aromatic compound; wherein the or each polycyclic aromatic compound independently has a ring system which comprises from 2 to 6 fused benzene rings, the ring system being substituted with from 1 to 4 hydrophilic groups each independently consisting of less than 20 atoms.
17. A suspension of claim 16, wherein the suspension has been made by a method comprising: a) providing multilayered particles of the inorganic compound in an aqueous medium which comprises at least one polycyclic aromatic compound, or a salt thereof; wherein the polycyclic aromatic compound is present in the aqueous medium in an amount from 1 10.sup.4 mol/L to 200 10.sup.4 mol/L, wherein the or each polycyclic aromatic compound independently has a ring system which comprises from 2 to 10 fused benzene rings, the ring system being substituted with from 1 to 4 independently selected hydrophilic groups, each hydrophilic group consisting of less than 20 atoms; b) subjecting the multilayered particles of the inorganic compound in the aqueous medium to energy to obtain a suspension; c) when the suspension obtained in step b) also comprises multilayered particles of the inorganic compound, the method further comprises the step of reducing the amount of multilayered particles of the inorganic compound in the suspension to obtain an aqueous suspension comprising particles of the two-dimensional inorganic compound and the at least one polycyclic aromatic compound.
18. An electronic device, the device comprising at least one thin film layer which comprises a plurality of particles of a two-dimensional inorganic compound, wherein the or each thin film contains at least one polycyclic aromatic compound; wherein the or each polycyclic aromatic compound independently has a ring system which comprises from 2 to 6 fused benzene rings, the ring system being substituted with from 1 to 4 hydrophilic groups each independently consisting of less than 20 atoms.
19. A method of forming a thin film comprising a plurality of particles of a two-dimensional inorganic compound, the method comprising a) obtaining an aqueous suspension of particles of a two-dimensional inorganic compound using the method of claim 1; and b) depositing the suspension of particles of the two-dimensional inorganic compound in an aqueous medium onto a substrate to form the thin film comprising a plurality of particles of the two-dimensional inorganic compound.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) Embodiments of the invention are further described hereinafter with reference to the accompanying drawings, in which:
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DETAILED DESCRIPTION
(28) The two-dimensional or single or few layered particles formed in the processes of the first aspect of the invention may also be described as nanosheets.
(29) The term two-dimensional inorganic compound may mean an inorganic compound in a form which is so thin that it exhibits different properties than the same compound when in bulk. Not all of the properties of the compound will differ between a few-layered particle and a bulk compound but one or more properties are likely to be different. Typically, two-dimensional inorganic compounds are in a form which is single- or few layers thick, i.e. up to 10 molecular layers thick. A two-dimensional crystal of a layered material (e.g. an inorganic compound or graphene) is a single or few layered particle of that material. The terms two-dimensional and single or few layered are used interchangeably throughout this specification.
(30) Two-dimensional materials are not truly two dimensional, but they exist in the form of particles which have a thickness that is significantly smaller than their other dimensions. The term two-dimensional has become customary in the art.
(31) The term few-layered particle may mean a particle which is so thin that it exhibits different properties than the same compound when in bulk. Not all of the properties of the compound will differ between a few-layered particle and a bulk compound but one or more properties are likely to be different. A more convenient definition would be that the term few layered refers to a crystal that is from 2 to 9 molecular layers thick (e.g. 2 to 5 layers thick). Crystals of graphene which have more than 9 molecular layers (i.e. 10 atomic layers; 3.5 nm) generally exhibit properties more similar to graphite than to graphene. A molecular layer is the minimum thickness chemically possible for that compound. In the case of boron-nitride one molecular layer is a single atom thick. In the case of the transition metal dichalcogenides (e.g. MoS.sub.2 and WS.sub.2), a molecular layer is three atoms thick (one transition metal atom and two chalcogen atoms). Thus, few-layer particles crystals are generally less than 50 nm thick, depending on the compound and are preferably less than 20 nm thick, e.g. less than 10 or 5 nm thick.
(32) The term multi-layered particle refers to a particle which exhibits similar properties to the same compound when in bulk. A more convenient definition would be that the term multi-layered particle refers to a particle that is 10 or more molecular layers thick.
(33) The inorganic compounds referred to throughout this specification are inorganic layered compounds. Thus, the term inorganic compound refers to any compound made up of two or more elements which forms layered structures in which the bonding between atoms within the same layer is stronger than the bonding between atoms in different layers. Many examples of inorganic layered compounds have covalent bonds between the atoms within the layers but van der Waals bonding between the layers. The term inorganic layered compound is not intended to encompass graphene.
(34) Many inorganic compounds exist in a number of allotropic forms, some of which are layered and some of which are not. For example boron nitride can exist in a layered graphite-like structure or as a diamond-like structure in which the boron and nitrogen atoms are tetrahedral orientated.
(35) Examples of layered inorganic compounds to which the present invention can be applied include: hexagonal boron nitride, bismuth strontium calcium copper oxide (BSCCO), transition metal dichalcogenides (TMDCs), Sb.sub.2Te.sub.3, Bi.sub.2Te.sub.3 and MnO.sub.2.
(36) TMDCs are structured such that each layer of the compound consists of a three atomic planes: a layer of transition metal atoms (for example Mo, Ta, W . . . ) sandwiched between two layers of chalcogen atoms (for example S, Se or Te). Thus in one embodiment, the TMDC is a compound of one or more of Mo, Ta and W with one or more of S, Se and Te. There is strong covalent bonding between the atoms within each layer of the transition metal chalcogenide and predominantly weak Van der Waals bonding between adjacent layers. Exemplary TMDCs include NbSe.sub.2, WS.sub.2, MoS.sub.2, TaS.sub.2, PtTe.sub.2, VTe.sub.2.
(37) The term hydrophilic group means a group which has an affinity for water. A hydrophilic group is typically charge polarised and is typically capable of hydrogen bonding.
(38) The term two-dimensional heterostructure refers to a plurality of two dimensional crystals (i.e. mono- or few-layered particles) arranged in a stack. A heterostructure comprises at least two different materials (e.g. one or more inorganic compounds and/or graphene). The two dimensional crystals may be arranged such that they are substantially parallel, being arranged face-to-face, forming a laminate. Such heterostructures may also be called vertical heterostructures. Any layer of the heterostructure may be a single crystal (e.g. that formed by CVD) or it may be a thin layer of mono- or few-layered particles. Various structures may be intercalated between the crystals e.g. nanoparticles, nanotubes, quantum dots and wires. It may be, however, that the heterostructure is formed entirely of two-dimensional crystals. This does not preclude the heterostructure from being mounted on a substrate and/or have a protective coating. Nor does it preclude the possibility that nanostructures are present but are not intercalated between the layers. A two-dimensional heterostructure is so-called because it is comprised of two-dimensional crystals. A two-dimensional heterostructure may therefore be called a heterostructure of 2D crystals (i.e. mono- or few-layered particles). It will itself, of course, be a three dimensional structure. A heterostructure according to the invention may comprise graphene in addition to the inorganic layered compounds made according to the first aspect.
(39) A layer of graphene consists of a sheet of sp.sup.2-hybridized carbon atoms. Each carbon atom is covalently bonded to three neighboring carbon atoms to form a honeycomb network of tessellated hexagons. Carbon nanostructures which have more than 10 graphene layers (i.e. 10 atomic layers; 3.5 nm interlayer distance) generally exhibit properties more similar to graphite than to mono-layer graphene. Thus, throughout this specification, the term graphene is intended to mean a carbon nanostructure with up to 10 graphene layers. Graphene is often referred to as a 2-dimensional structure because it represents a single sheet or layer of carbon of nominal (one atom) thickness. Graphene can be considered to be a single sheet of graphite.
(40) Separate aqueous dispersions of h-BN, MoS.sub.2, WS.sub.2, MoTe.sub.2 and MoSe.sub.2 were typically prepared by exfoliating the relevant starting powder in aqueous pyrene solutions with the aid of an ultra-sonic bath. Three pyrene derivatives were selected for investigation. These derivatives are functionalized with side-groups featuring different steric structure, water-solubility, electronegativity and pH response to the respective molecule as shown in
(41) After sonication, all dispersions were centrifuged to remove unexfoliated starting powder and the supernatants were collected as shown in
(42) In all cases Py-4SO.sub.3 gives the lowest exfoliation efficiency, while Py-2SO.sub.3 the highest. Without wishing to be bound by theory we believe that the hydrophobic interaction of the pyrene core with water is the key factor that facilitates the adsorption of the pyrene molecules on the surfaces. Namely, the presence of the SO.sub.3 groups polarizes the pyrene core and facilitates the electrostatic interaction of the core with the surrounding water molecules, while it reduces the hydrophobic interaction by shielding the core from the solvent environment. The overall effect is an increased solubility in water and a smaller affinity for the surfaces.
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(44) We also performed exfoliation in water without using pyrene as control experiment (See examples). Table 2 shows that the exfoliation efficiency of h-BN in water is comparable to that of Py-4SO.sub.3 (as expected because this type of pyrene does not contribute to the exfoliation process), but much lower than that of Py-1SO.sub.3 and Py-2SO.sub.3, which indicates that these pyrene molecules act as dispersant, allowing exfoliation and stabilization of the 2D crystals dispersions. Therefore, the choice of the organic dye will influence the exfoliation yield: Py-1SO.sub.3 and Py-2SO.sub.3 gave the best exfoliation efficiency for a large variety of 2D-crystals.
(45) The exfoliation yield can be further increased by tuning the pH. Table 1 in the Examples reports the changes in concentration when the pH of the pyrene solution is changed by adding HCl or KOH (with corresponding change of colour). The exfoliation efficiency of Py-2SO.sub.3 is highest at pH 2 and decreases strongly with increasing pH. In contrast, the concentration of BNNS/Py-1SO.sub.3 did not change noticeably upon a change in pH, as expected because this organic dye is not pH sensitive. The strong dependence on the exfoliation yield on the pH can be attributed to a protonation effect. In order to confirm this idea, another control experiment was carried out by exfoliating h-BN in two different aqueous solutions without molecules at pH=2 and pH=12 under the same conditions (See Examples). The pure water-based BNNS dispersion shows that the highest concentration is obtained in neutral conditions; by adding Py-2SO.sub.3 a strong pH dependence is observed: now the highest concentration is obtained at pH 2 (Table 2 in the Examples). The strong pH dependence of BNNS/pyrene suspensions is very different from the case graphene/pyrene, where all the organic dyes show the same pH dependence. In the case of graphene, the highest concentration was obtained in neutral condition and the concentration decreased heavily in acidic and basic conditions (See examples), indicating that protonation effect in the case of graphene is not fundamental to stabilize the flakes in dispersion. It should be noticed that BN bonds in BN are more polarized than CC bonds in graphene, and thus it will interact differently with the charged proton groups of Py-2SO.sub.3.
(46) In contrast to the above results obtained for BN, MoS.sub.2 showed a pH dependence similar to that of graphene, i.e. the highest concentrations were obtained at neutral conditions, as shown in table 2 below.
(47) The electrostatic stability of BNNS/Py-2SO.sub.3 dispersion was also investigated by measuring the zeta potentials. This increases with decreasing pH (from 32.9 mV (pH 2), to 56.8 mV (pH7), to 75.7 mV (pH 12) mV, in agreement with previous results obtained with other type of molecules. The BNNS dispersions at pH 2 with zeta potential of 32 mV shows the highest concentration, which is consistent with the formation of stable colloidal dispersions.
(48) After removing the pyrene molecules with a water rinse with the aid of centrifugation, the exfoliated 2D nanosheets were characterized by transmission electron microscopy (TEM),
(49) The structure and surface chemistry of the 2D nanosheets were further investigated by Raman spectroscopy and X-ray photo-electron spectroscopy (XPS). The Raman spectra show the typical Raman features of the 2D nanosheets and in some case a weak photoluminescence background, related to the molecules residual (
(50) The use of BNNS thin films prepared via the method of the first aspect in an in-plane graphene photo-detector has also been demonstrated.
(51) A facile and low-cost exfoliation method has been developed to prepare BN, WS.sub.2, MoS.sub.2, MoSe.sub.2, and MoTe.sub.2 thin flakes in water using commercial organic dyes. BNNS films produced by this method have a breakdown field similar to that of SiO.sub.2, which allows them to be used as a gating dielectric in a graphene-based photo-detector. The versatility of the solvent-exfoliation method makes it easy to create various hybrid dispersions and films, which can be used to make low cost and mass scalable hetero-structures devices.
(52) Heterostructures can be produced based on 2D atomic crystals obtained by LPE, e.g. by the methods of the first aspect of the invention. Example of such heterostructures and devices can be created by depositing LPE 2D crystals via spray-coating and drop-coating, ink-jet printing and vacuum filtration. In particular, it would be possible to make use of graphene (Gr), transition metal dichalcogenides (TMDC, such as WS.sub.2 and MoS.sub.2), and hexagonal-boron nitride (h-BN) inks. These crystals have been selected because of their complementary electronic and dielectric properties, ranging from the high transparency and conductivity of graphene, to the high optical absorption of TMDC and the high transparency and resistivity of h-BN. Different types of device with the following general structure could be made: BGr/Barrier/TGr, where TGr and BGr refer to top and bottom graphene electrodes, respectively (
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(54) Three low cost and scalable methods can be used for the deposition of LPE 2D crystals: spray-coating and drop-casting, ink-jet printing, and vacuum filtration,
(55) A type of heterostructure device where LPE hBN is used as a gate dielectric has also been demonstrated. The dielectric properties of hBN, added to its excellent chemical and thermal stability, mechanical and thermal properties, make hBN thin films a promising dielectric alternative in the next generation of nanodevices. Here Si/SiO.sub.2/BGr/hBn/Au devices were tested, where LPE hBN (prepared through filtering of a hBN suspension made using the methods of the invention, with subsequent transfer of the hBN paper from the filter to the device) served as transparent dielectric between the channel (BGr, CVD graphene) and the gate (Au), (
(56) Resistivity of the BGr channel as a function of top gate voltage V.sub.gt is presented on
(57) Illustrative TMDC Devices
(58) Devices comprising TMDC thin films formed from suspensions of exfoliated materials have been shown to be capable of forming electronic devices, and in particular electronic devices comprising heterostructures. This is shown in the following six paragraphs. The devices described in these paragraphs have not been obtained using suspensions made according to the first aspect of the invention. It is believed, however, that they demonstrate in principal that two-dimensional materials derived from liquid phase exfoliation can form effective electronic devices.
(59) The TMDC dispersions used for the devices in the next six paragraphs project were mostly prepared by using liquid phase exfoliation in a mixed-solvent of ethanol and DI water. In the case of WS.sub.2 dispersion, 300 mg of WS.sub.2 powder (2 m, 99%, purchased from Sigma-Aldrich) were sonicated in 100 mL of 35 vol % of ethanol with DI water (18.2 M, from a Milli-Q Plus system (Millipore)) for 5 days with the aid of a bath sonicator (DAWE INSTRUMENTS LTD, 6290 A300/150 W). A similar process, but with different volume fraction of ethanol in water (based on the Hansen solubility theory), was used to obtain MoS.sub.2 dispersions. The starting MoS.sub.2 powder: <2 m, 99%, purchased from Sigma-Aldrich. The nanosheet dispersion was collected after centrifugation at 8000 rpm for 20 minutes. The concentration was measured by carrying out UV-Vis absorption spectroscopy (Perkin-Elmer -900 UV-Vis-NIR spectrophotometer) using an extinction coefficient .sub.626 nm=2756 L g.sup.1 m.sup.1 for WS.sub.2 and .sub.672 nm=3400 L g.sup.1 m.sup.1. This gives a concentration around 0.04 mg/mL for the WS.sub.2 dispersion and 0.056 mg/mL for the MoS.sub.2 dispersion.
(60) Tunnelling junctions and tunnelling transistors which have a structure of Si/SiO.sub.2/BGr/WS.sub.2/TGr (MoS.sub.2-based devices demonstrate similar characteristics) have been prepared. Tunnelling junctions may have both BGr and TGr produced by either of the methods mentioned above, whereas tunnelling transistors require exactly monolayer graphene to be used as BGr in order not to screen the gate voltage (and as such are prepared from CVD or mechanically exfoliated graphene). The current-bias voltage (I-V.sub.b) characteristics for these devices are strongly non-linear (
(61) For devices where BGr was made of monolayer graphene, gating with the Si back gate (through 300 nm SiO.sub.2) is possible,
(62) Similar structures have been used for photovoltaic applications. Again, this discussion is limited to Si/SiO.sub.2/BGr/WS.sub.2/Gr type heterostructures, although this has also been carried out with MoS.sub.2. Upon illumination, electron-hole pairs generated mostly in the TMDC layer (due to its high optical absorption) can decay into separate electrodes (provided there is an electric field to separate the charges), producing a photovoltage. Under illumination the I-V.sub.b characteristics become increasingly linear,
(63) Zero-bias photocurrent was recorded as a function of the position of the laser spot (less than 1 m in diameter) on the device by using a 100 microscope objective. Zero-bias photocurrent maps, taken at different back gate voltages, demonstrate that the photocurrent is produced only in the regions where all three layers (BGr, TMDC and TGr) overlap. Similar to the case of the transistor, the back gate voltage controls the value and the direction of the electric field across WS.sub.2, and thus the magnitude and the polarity of the photocurrent, (
(64) Although the photoresponsivity of these devices is significantly smaller than that obtained in known photovoltaic devices or in similar heterostructures based on monocrystalline WS.sub.2, the advantage of these structures is that they can be produced by different cheap and scalable methods, and are compatible with flexible substrates. Thus PET/BGr/WS.sub.2/TGr heterostructures were fabricated on a flexible PET substrate (thickness 0.2 mm) (
(65) As in the previous experiment a laser was scanned across the sample while simultaneously recording the photocurrent, (
(66) The TMDC dispersions used for the devices in the previous six paragraphs project were mostly prepared by using liquid phase exfoliation in a mixed-solvent of ethanol and DI water. In the case of WS.sub.2 dispersion, 300 mg of WS.sub.2 powder (2 m, 99%, purchased from Sigma-Aldrich) were sonicated in 100 mL of 35 vol % of ethanol with DI water (18.2 M, from a Milli-Q Plus system (Millipore)) for 5 days with the aid of a bath sonicator (DAWE INSTRUMENTS LTD, 6290 A300/150 W). A similar process, but with different volume fraction of ethanol in water (based on the Hansen solubility theory), was used to obtain MoS.sub.2 dispersions. The starting MoS.sub.2 powder: <2 m, 99%, purchased from Sigma-Aldrich. The nanosheet dispersion was collected after centrifugation at 8000 rpm for 20 minutes. The concentration was measured by carrying out UV-Vis absorption spectroscopy (Perkin-Elmer -900 UV-Vis-NIR spectrophotometer) using an extinction coefficient .sub.629 nm=2756 L g.sup.1 m.sup.1 for WS.sub.2 and .sub.672 nm=3400 L g.sup.1 m.sup.1. This gives a concentration around 0.04 mg/mL for the WS.sub.2 dispersion and 0.056 mg/mL for the MoS.sub.2 dispersion.
(67) Methods of Preparing of Thin Films/Laminates of TMDCs
(68) Nanosheet-based thin films can be fabricated from the dispersions formed in the first aspect of the invention using a wide variety of methods. These methods include: (i) vacuum filtration; (ii) drop-casting; (iii) spray-coating; (iv) ink-jet printing.
(69) Vacuum Filtration
(70) Thin films can be fabricated by vacuum filtration of the as-prepared dispersions. The thickness of the film is controlled by using the delamination and fishing method: the laminate supported on the cellulose filter is vertically immersed in deionized (DI) water, which allows a thin section of the TMDC (e.g. WS.sub.2) film to delaminate and to appear as a free-standing film on the water surface.
(71) The floating TMDC (e.g. WS.sub.2) film can finally be collected by fishing with arbitrary substrates, including Si/SiO.sub.2, plastics and quartz. This method allows us to control the thickness of the TMDC (e.g. WS.sub.2) films by stacking several thin films together, for example obtained by sequential delamination of the same laminate. However, it may be that the thinnest films contain a proportion of holes, making a single delaminated film (N=1) unsuitable for the fabrication of the heterostructures. By sequentially stacking the delaminated layers, the holes are covered. With a minimal chance of the holes overlapping, the staked layers constitute a homogenous barrier and the film becomes suitable for device fabrication.
(72) Drop Casting
(73) A drop casting process can be used to produce large-area thin films. In the case of h-BN thin films, the dispersion is drop cast onto a preheated Si/SiO.sub.2 substrate at 90 C. The thickness of the film depends on the volume of the droplet, concentration of the dispersion, and the contact angle of the substrate. The thin film can be transferred onto any other substrate for device fabrication. It is worth noting that, if desired, the Py-1SO.sub.3 molecules can be washed away using water with the aid of centrifugation before preparing the thin films. Large-scale TMDC (e.g. WS.sub.2) thin films can also be fabricated by the same method but the temperature should be kept below 60 C. to avoid aggregation and structural modification by reaction with air.
(74) Ink-Jet Printing
(75) A Dimatix DMP-2800 inkjet printer can be used (Fujifilm Dimatix, Inc., Santa Clara, USA). This can create and define patterns over an area of about 200300 mm and handle substrates up to 25 mm thick being adjustable in the Z direction. The temperature of the vacuum platen, which secures the substrate in place, can be adjusted up to 60 C. Additionally, a waveform editor and a drop-watch camera system allows manipulation of the electronic pulses to the piezo jetting device for optimization of the drop characteristics as it is ejected from the nozzle. The nozzle plate consists of a single row of 16 nozzles of 23 m diameter spaced 254 m with typical drop size of 10 pL. The most remarkable feature of the printer is the possibility of varying the distance between two consecutive droplets, the so-called dot spacing, a parameter that has an effect in the continuity, width and thickness of printed features.
(76) Device Fabrication
(77) Devices can be fabricated from the dispersions formed in the first aspect and from the thin films described above. Illustrative examples include those having the structure: top electrode/Liquid-phase exfoliated TMDC/bottom electrode. Both gold and graphene can be used to serve as the bottom electrode. Different types of graphene can be used in the devices: micro-mechanically exfoliated (MME), chemical vapour deposited (CVD), single-layers to few-layer graphene (FLG) and graphene laminates made by liquid-phase exfoliation (LPE). A combination of wet and dry transfer methods can be used to construct the hetero-structures.
(78) Gold/TMDC/Graphene
(79) Gold strips (WH: 2 m60 nm) can be deposited onto a Si/SiO.sub.2 substrate using photolithography. The liquid-phase exfoliated TMDC film as prepared could then be fished onto a second Si/SiO.sub.2 wafer. For multilayer thin films the fishing process can be repeated multiple times until the holes density is strongly reduced. In the final step a MME or CVD graphene sheet can be transferred on top of the whole structure by standard transfer technique (dry for MME-Gr and wet for CVD-Gr). Hetero-structures using both WS.sub.2 and MoS.sub.2 as the photoactive material can be prepared.
(80) MME-Gr/TMD/MME-Gr
(81) Firstly a graphene flake can be deposited onto a Si/SiO.sub.2 substrate via MME after which Cr/Au (5 nm/70 nm) contacts can be deposited using photolithography. Drop-casting, spray-coating, and direct fishing can be used to place the TMDC film on the MME graphene. For the direct fishing, the liquid-phase exfoliated TMDC film can be fished onto a second Si/SiO.sub.2 wafer. For multilayer thin films the fishing process can be repeated multiple times until the hole density is at a desired level, i.e. to obtain a density which provide a tolerable risk of the device shorting.
(82) The resulting thin film of TMDC can be examined by optical microscopy to select a hole free region and can then be hatched to the desired size of the target device. This can then be transferred onto the target graphene device by wet transfer methods. In the final step a graphene sheet can be transferred on top of the whole structure by dry transfer technique.
(83) Devices with LPE Graphene and CVD Graphene as Electrodes
(84) Heterostructures can also be fabricated using CVD graphene and LPE graphene laminates.
(85) LPE graphene can be either spray coated or drop cast onto a Si/SiO.sub.2 or PET substrate and excess material can be removed leaving thin strips which serve as the bottom electrode. Contacts can then be patterned onto the LPE graphene. A TMDC layer can then be transferred onto the LPE graphene strip. CVD graphene on copper can be etched in 0.1 M aqueous solution of ammonium persulfate contained in a Petri dish for 6 hrs, the CVD graphene can then be transferred onto the device completing the heterostructure.
(86) Throughout the description and claims of this specification, the words comprise and contain and variations of them mean including but not limited to, and they are not intended to (and do not) exclude other moieties, additives, components, integers or steps. Throughout the description and claims of this specification, the singular encompasses the plural unless the context otherwise requires. In particular, where the indefinite article is used, the specification is to be understood as contemplating plurality as well as singularity, unless the context requires otherwise.
(87) Features, integers, characteristics, compounds, chemical moieties or groups described in conjunction with a particular aspect, embodiment or example of the invention are to be understood to be applicable to any other aspect, embodiment or example described herein unless incompatible therewith. All of the features disclosed in this specification (including any accompanying claims, abstract and drawings), and/or all of the steps of any method or process so disclosed, may be combined in any combination, except combinations where at least some of such features and/or steps are mutually exclusive. The invention is not restricted to the details of any foregoing embodiments. The invention extends to any novel one, or any novel combination, of the features disclosed in this specification (including any accompanying claims, abstract and drawings), or to any novel one, or any novel combination, of the steps of any method or process so disclosed.
(88) The reader's attention is directed to all papers and documents which are filed concurrently with or previous to this specification in connection with this application and which are open to public inspection with this specification, and the contents of all such papers and documents are incorporated herein by reference.
EXAMPLES
(89) 1 Materials
(90) Boron nitride powder (1 micro, 99%), Tungsten disulphide powder (WS.sub.2, 2 m, 99%) and Molybdenum disulfide powder (MoS.sub.2, <2 m, 99%) were purchased from Sigma-Aldrich.
(91) Molybdenum selenide (MoSe.sub.2, 99.9%, 325 mesh) and Molybdenum telluride (MoTe.sub.2, 99.9%, 10 microns) were purchased from MATERION ADVANCED CHEMICALS INC.
(92) 1-pyrenesulfonic acid sodium salt (Py-1SO.sub.3, >97.0% (HPLC)), 6, 8-dihydroxy-1, 3-pyrenedisulfonic acid disodium salt (Py-2SO.sub.3, >97.0% (HPLC)), and 1, 3, 6, 8-pyrenetetrasulfonic acid tetrasodium salt (Py-4SO.sub.3, >97.0% (HPLC)), Hydrochloric acid (HCl, ACS reagent, 37%) and Potassium hydroxide (KOH, pellets, 99.99%) were purchased from Sigma-Aldrich.
(93) Unless otherwise stated, other reagents were of analytical grade and were used as received. All aqueous solutions were prepared with ultra-pure water (18.2 MO) from a Milli-Q Plus system (Millipore).
(94) 2 Characterization Techniques
(95) Samples for TEM characterization were prepared in the following way: the aqueous solutions containing the nanosheets were sonicated prior to being drop cast onto holey carbon support grids. Flake size was assessed using low magnification bright field TEM imaging in a Philips CM20 TEM operated at 200 kV. High resolution TEM imaging was performed using a probe side aberration corrected FEI Titan G2 operated at 200 kV with an X-FEG electron source. High angle annular dark field (HAADF) scanning transmission electron microscope (STEM) imaging was performed in the same instrument with convergence angle of 26 mrad and a HAADF inner angle of 52 mrad and a probe current of 200 pA. Energy dispersive x-ray (EDX) spectroscopy was performed in the Titan using a Super-X EDX detector with a collection solid angle of 0.7 srad.
(96) X-ray photoelectron spectroscopy (XPS) was performed using an ESCALAB 250 Xi from Thermo. The pass energy was set to 20 eV and the spot size was 900 m. We used the flood gun for charge compensation and calibrated the binding energy on the carbon 1s peak at 285.0 eV. Raman spectroscopy was performed at 488 nm by using a Witec alpha 300 Raman spectrometer. UV-Vis absorption spectra were obtained by using (Perkin-Elmer -1050 UV-vis-NIR spectrophotometer). Zeta Potential measurement was performed on BNNS dispersions by using Malvern ZetaSizer Instruments. Each zeta measurement is the average of 3 results.
(97) The photocurrent maps were obtained by combing our Witec system together with a Keithley Nanovoltmeter and a Keithly Sourcemeter. The laser (.sub.ex=488 nm) of Witec system acts as the light source after one long distance 100 objective (NA=0.6). The doping level of graphene is tuned by applying a gate voltage through the sourcemeter.
(98) 3 Experimental Methods
(99) 3.1 Exfoliation Process
(100) A schematic of the process for h-BN is shown in
(101) The MoS.sub.2, WS.sub.2, MoTe.sub.2 and MoSe.sub.2 dispersions were prepared by using the same exfoliation process. The 2D nanosheets dispersions were stable, with no evidence of sedimentation for at least a few weeks. However, we observed that h-BN, MoS.sub.2 and WS.sub.2 tend to be more stable than MoTe.sub.2 and MoSe.sub.2.
(102) 3.2 Effect of Solvent
(103) TABLE-US-00001 TABLE 1 The effect of the solvent was tested for the exfoliation of MoS.sub.2 with Py-1SO3: Concentration(mg/mL) (following centrifugation Sample (sonicated for 24 hrs) at 1500 rpm for 20 mins) 0.5 mg/mL of Py-1SO3 in water 0.016 0.5 mg/mL of Py-1SO3 in MeOH 0.0056 0.5 mg/mL of Py-1SO3 in MeOH:water 0.022 20:80 in MeOH:water 20:80 (no pyrene) 0.011 in MeOH (no pyrene) 0.005
3.3 Laminates and Thin Films Preparation
(104) Thin films were prepared by vacuum filtration immediately after centrifugation. In the case of BNNS laminates, 40 mL of BN nanosheets dispersions was filtered through nitrocellulose membranes (pore size 0.3 m) to get a free standing BN film. The deposited films were washed with 100 ml of DI water to remove the pyrene molecules and the BN film can be peeled off from the membrane when it was dried on a hotplate at 60 degrees. For the other materials, only 8 mL of as-prepared dispersions were deposited on the membranes to get the thin films, respectively. These can also be peeled off by dissolving the cellulose membranes using acetone vapour after they get dry. All the 2D crystal-based films in this work are shown in
(105) 3.4 Characterization
(106) 3.4.1 Optical Absorption Spectra
(107) UV-Vis spectroscopy has been used to get the concentration of the suspension and to study the interaction between the molecules and the 2D crystals. Since the molecules show characteristic peaks at short wavelengths,
(108) TABLE-US-00002 TABLE 2 Concentrations of as-prepared h-BN, WS.sub.2, MoS.sub.2, MoSe.sub.2, and MoTe.sub.2 dispersions using three different pyrene derivatives. WS.sub.2, MoS.sub.2, MoSe.sub.2, and MoTe.sub.2 dispersions were made at pH = 7. Concentration (mg/mL) Py-1SO.sub.3 Py-2SO.sub.3 Py-4SO.sub.3 h-BN 0.113 (pH 2) 0.544 (pH 2) 0.048 0.104 (pH 7) 0.347 (pH 7) 0.102 (pH 12) 0.207 (pH 12) h-BN* 0 (pH 2) 0.079 (pH 7) 0.026 (pH 12) WS.sub.2 0.04 0.1 0.007 MoS.sub.2 0.036 0.11 0.02 0.042 (2.sup.nd run: pH 7) 0.008 (pH 2) 0.016 (pH 12) MoTe.sub.2 1.1 1.2 MoSe.sub.2 0.8 1.1 *Control experiment (without polycyclic aromatic compounds)
(109)
(110)
(111) In order to verify that the changes in the exfoliation yield are related to the use of the pH-sensitive organic dyes, we performed also a control experiment, by sonicating BNNS in three different aqueous solutions without molecules at pH=2, pH=12, and pure DI water, under the same conditions. The schematic of the process is shown in
(112)
(113) 3.4.2 Raman Spectroscopy
(114) The as-prepared 2D crystals were washed by DI water with the aid of centrifugation to remove the free pyrene molecules and then the flakes were drop-casted on the cleaned SiO.sub.2/Si substrates for Raman measurements. The typical Raman spectra are shown in
(115) 3.4.3 XPS of BNNS Film and MoS.sub.2 Film
(116) BN: the film drying was performed at 80 degrees for 2 hours in the air before XPS measurement. Survey XPS spectrum of the BNNSs film is presented in
(117) The survey XPS spectrum of the MoS.sub.2@Pyrene film is presented in
(118) In the S2p region of the spectra (
(119)
(120) 3.5 Fabrication of a Device
(121) The fabrication process of a device is shown in
(122) 3.6 Optimised Preparation of 2D Crystals-Based Inks
(123) hBN Dispersions in Water
(124) The h-BN dispersions were produced by using liquid phase exfoliation in water with the help of 1-pyrenesulfonic acid sodium salt (Py-1SO.sub.3, >97.0% (HPLC), purchased from Sigma-Aldrich). We sonicated 30 mg h-BN powder (1 m, 99%, purchased from Sigma-Aldrich) for 48 hrs in 10 mL of aqueous Py-1SO.sub.3 solution with the concentration of 3.310.sup.4 mol/L. After the centrifugation at 3500 rpm for 10 mins, the yellowish h-BN nanosheet dispersion was collected in a bottle. The colour of the as-prepared h-BN dispersions is due to the Py-1SO.sub.3 molecules since the pure h-BN dispersion is milky white. The concentration of the as-prepared h-BN dispersion is calculated based on the optical absorption h-BN dispersion at 550 nm, and it is 0.104 mg/mL.
(125) In a further method, the following chemicals were added to a glass pot which was stoppered and placed into a 600 W bath sonicator for 48 hours: H.sub.2O8 g; ethylene glycol2.0 g; Triton-x1000.6 mg; h-BN (flakes 1 m)30 mg; 1-pyrenesulfonic acid sodium salt1 mg. The solution was centrifuged at 1000 rpm for 20 minutes and the top collected. The collected solution was then centrifuged at 3500 rpm for 20 mins and the top collected. The collected material was placed into a 600 W bath sonicator for 48 hours. UV/Vis was then conducted from 800-200 nm using a Cary 5000 UV-Vis-Near IR spectrometer with the absorption coefficient .sub.550=1000 L g.sup.1 m.sup.1 to determine h-BN concentration. The single- or few-layered h-BN concentration obtained was 0.3 mg/mL.
(126) TMDC Dispersions in Water
(127) Aqueous suspensions of MoS.sub.2, WS.sub.2, MoTe.sub.2 and MoSe.sub.2 have been prepared analogously to the first of the two processes described above for the preparation of aqueous h-BN suspensions and the concentrations of the resultant suspensions are shown in Table 2 above.
(128) In a further method, the following chemicals were added to a glass pot which was stoppered and placed into a 600 W bath sonicator for 72 hours: H.sub.2O47.5 g; ethylene glycol2.0 g; Triton-x1003 mg; MoS.sub.2 (flakes 2 m)150 mg; 1-pyrenesulfonic acid sodium salt6 mg. The solution was centrifuged at 1000 rpm for 20 minutes and the top collected. The collected solution was then centrifuged at 3500 rpm for 20 mins and the top collected. The collected material was placed into a 600 W bath sonicator for 48 hours. UV/Vis was then conducted from 800-200 nm using a Cary 5000 UV-Vis-Near IR spectrometer with the absorption coefficient .sub.672=3400 L g.sup.1 m.sup.1 to determine MoS.sub.2 concentration. The single- or few-layered MoS.sub.2 concentration obtained in the suspension was 0.292 mg/mL.