Freeform surface off-axial three-mirror image-side telecentric optical system

Abstract

A freeform surface off-axial three-mirror image-side telecentric optical system comprises a primary mirror, a secondary mirror, a tertiary mirror and an image sensor. The secondary mirror is the aperture stop. A reflective surface of the primary mirror is a fourth-order polynomial freeform surface of xy. Each of a reflective surface of the secondary mirror and a reflective surface of the tertiary mirror is a sixth-order polynomial freeform surface of xy.

Claims

1. A freeform surface off-axial three-mirror image-side telecentric optical system comprising: a primary mirror configured to reflect an object side light to form a first reflected light, and the first reflected light defining a first reflected light path; a secondary mirror located on the first reflected light path and configured to reflect the first reflected light to form a second reflected light, and the second reflected light defining a second reflected light path, the secondary mirror being an aperture stop; a tertiary mirror located on the second reflected light path and configured to reflect the second reflected light to form a third reflected light, and the third reflected light defining a third reflected light path; and an image sensor located on the third reflected light path and configured to receive the third reflected light; wherein a first three-dimensional rectangular coordinates system (x.sub.1, y.sub.1, z.sub.1) is defined in space; relative to the first three-dimensional rectangular coordinates system (x.sub.1, y.sub.1, z.sub.1), a second three-dimensional rectangular coordinates system (x.sub.2, y.sub.2, z.sub.2) is defined by a primary mirror location; a third three-dimensional rectangular coordinates system (x.sub.3, y.sub.3, z.sub.3) is defined by a secondary mirror location; and a fourth three-dimensional rectangular coordinates system (x.sub.4, y.sub.4, z.sub.4) is defined by a tertiary mirror location, a fifth three-dimensional rectangular coordinates system (x.sub.5, y.sub.5, z.sub.5) is defined by an image sensor location, and a fifth origin of the fifth three-dimensional rectangular coordinates system (x.sub.5, y.sub.5, z.sub.5) is in (0, 6.13399, 29.9344) position of the first three-dimensional rectangular coordinates system (x.sub.1, y.sub.1, z.sub.1), and an z.sub.5-axis positive direction of the fifth three-dimensional rectangular coordinates system (x.sub.5, y.sub.5, z.sub.5) rotates about 9.11067 degrees along the clockwise direction relative to the z.sub.1-axis positive direction of the first three-dimensional rectangular coordinates system (x.sub.1, y.sub.1, z.sub.1); a reflective surface of the primary mirror is a fourth-order polynomial freeform surface of x.sub.2y.sub.2 in the second three-dimensional rectangular coordinates system (x.sub.2, y.sub.z, z.sub.2); a reflective surface of the secondary mirror is a sixth-order polynomial freeform surface of x.sub.3y.sub.3 in the third three-dimensional rectangular coordinates system (x.sub.3, y.sub.3, z.sub.3); and a reflective surface of the tertiary mirror is a sixth-order polynomial freeform surface of x.sub.4y.sub.4 in the fourth three-dimensional rectangular coordinates system (x.sub.4, y.sub.4, z.sub.4).

2. The system as claimed in claim 1, wherein a second origin of the second three-dimensional rectangular coordinates system (x.sub.2, y.sub.2, z.sub.2) is in (0, 49.39999, 122.92696) position of the first three-dimensional rectangular coordinates system (x.sub.1, y.sub.1, z.sub.1).

3. The system as claimed in claim 1, wherein an z.sub.2-axis positive direction of the second three-dimensional rectangular coordinates system (x.sub.2, y.sub.z, z.sub.2) rotates about 17.01294 degrees along a clockwise direction relative to an z.sub.1-axis positive direction of the first three-dimensional rectangular coordinates system (x.sub.1, y.sub.1, z.sub.1).

4. The system as claimed in claim 1, wherein a third origin of the third three-dimensional rectangular coordinates system (x.sub.3, y.sub.3, z.sub.3) is in (0, 36.69253, 16.46708) position of the first three-dimensional rectangular coordinates system (x.sub.1, y.sub.1, z.sub.1).

5. The system as claimed in claim 1, wherein an z.sub.3-axis positive direction of the third three-dimensional rectangular coordinates system (x.sub.3, y.sub.3, z.sub.3) rotates about 0.74805 degrees along a counterclockwise direction relative to an z.sub.1-axis positive direction of the first three-dimensional rectangular coordinates system (x.sub.1, y.sub.1, z.sub.1).

6. The system as claimed in claim 1, wherein a fourth origin of the fourth three-dimensional rectangular coordinates system (x.sub.4, y.sub.4, z.sub.4) is in (0, 44.59531, 47.02867) position of the first three-dimensional rectangular coordinates system (x.sub.1, y.sub.1, z.sub.1).

7. The system as claimed in claim 1, wherein an z.sub.4-axis positive direction of the fourth three-dimensional rectangular coordinates system (x.sub.4, y.sub.4, z.sub.4) rotates about 22.31491 degrees along the clockwise direction relative to an z.sub.1-axis positive direction of the first three-dimensional rectangular coordinates system (x.sub.1, y.sub.1, z.sub.1).

8. The system as claimed in claim 1, wherein the fourth-order polynomial freeform surface of x.sub.2y.sub.2 is $z_2\left(x_2,y_2\right)=\frac{c\left(x_2^2+y_2^2\right)}{1+\sqrt{1-\left(1+k\right)c^2\left(x_2^2+y_2^2\right)}}+A_2{y}_2+A_3{x}_2^2+A_5{y}_2^2+A_7{x}_2^2{y}_2+A_9{y}_2^3+A_{10}{x}_2^4+A_{12}{x}_2^2{y}_2^2+A_{14}{y}_2^4,$ wherein z represents surface sag, c represents surface curvature, k represents conic constant, while A.sub.2, A.sub.3, A.sub.5, A.sub.7, A.sub.9, A.sub.10, A.sub.12, A.sub.14 represent term coefficients.

9. The system as claimed in claim 8, wherein c=2.8642059856E-03, k=3.9274297376E+00, A.sub.2=4.5435688039E-01, A.sub.3=5.3806292422E-04, A.sub.5=4.3722756320E-04, A.sub.7=3.0530404587E-06, A.sub.9=2.3737900997E-07, A.sub.10=8.5265458822E-09, A.sub.12=1.9066201794E-08, and A.sub.14=5.7547889567E-09.

10. The system as claimed in claim 1, wherein the sixth-order polynomial freeform surface of x.sub.3y.sub.3 is $z_3\left(x_3,y_3\right)=\frac{c\left(x_3^2+y_3^2\right)}{1+\sqrt{1-\left(1+k\right)c^2\left(x_3^2+y_3^2\right)}}+A_2{y}_3+A_3{x}_3^2+A_5{y}_3^2+A_7{x}_3^2{y}_3+A_9{y}_3^3+A_{10}{x}_3^4+A_{12}{x}_3^2{y}_3^2+A_{14}{y}_3^4+A_{16}{x}_3^4{y}_3+A_{18}{x}_3^2{y}_3^3+A_{20}{y}_3^5+A_{21}{x}_3^6+A_{23}{x}_3^4{y}_3^2+A_{25}{x}_3^2{y}_3^4+A_{27}{y}_3^6,$ wherein, z.sub.3 represents surface sag, c represents surface curvature, k represents conic constant, while A.sub.2, A.sub.3, A.sub.5, A.sub.7, A.sub.9, A.sub.10, A.sub.12, A.sub.14, A.sub.16, A.sub.18, A.sub.20, A.sub.21, A.sub.23, A.sub.25, A.sub.27 represent term coefficients.

11. The system as claimed in claim 10, wherein c=1.3509388901E-03, k=8.7720946581E+01, A.sub.2=2.9521719735E-02, A.sub.3=3.0546252140E-04, A.sub.5=2.5168419021E-05, A.sub.7=3.9838626726E-06, A.sub.9=9.4441737760E-07, A.sub.10=3 0.4439768073E-08, A.sub.12=4.6398109825E-08, A.sub.14=1.5721550120E-08, A.sub.16=3 0.0796040892E-10, A.sub.18=3.4167907065E-10, A.sub.20=8.6127469499E-11, A.sub.21=9.4044204706E-13, A.sub.23=8.7321134718E-13, A.sub.25=4.0516919551E-13, and A.sub.27=5.5914310564E-13.

12. The system as claimed in claim 1, wherein the sixth-order polynomial freeform surface of x.sub.4y.sub.4 is $z_4\left(x_4,y_4\right)=\frac{c\left(x_4^2+y_4^2\right)}{1+\sqrt{1-\left(1+k\right)c^2\left(x_4^2+y_4^2\right)}}+A_2{y}_4+A_3{x}_4^2+A_5{y}_4^2+A_7{x}_4^2{y}_4+A_9{y}_4^3+A_{10}{x}_4^4+A_{12}{x}_4^2{y}_4^2+A_{14}{y}_4^4+A_{16}{x}_4^4{y}_4+A_{18}{x}_4^2{y}_4^3+A_{20}{y}_4^5+A_{21}{x}_4^6+A_{23}{x}_4^4{y}_4^2+A_{25}{x}_4^2{y}_4^4+A_{27}{y}_4^6,$ wherein, z.sub.4 represents surface sag, c represents surface curvature, k represents conic constant, while A.sub.2, A.sub.3, A.sub.5, A.sub.7, A.sub.9, A.sub.10, A.sub.12, A.sub.14, A.sub.16, A.sub.18, A.sub.20, A.sub.21, A.sub.23, A.sub.25, A.sub.27 represent term coefficients.

13. The system as claimed in claim 12, wherein c=6.0303569933E-03, k=2.2371952711E-01, A.sub.2=2.2430352958E-03, A.sub.3=5.4714931736E-04, A.sub.5=5.6853894214E-04, A.sub.7=4.4859214867E-07, A.sub.9=8.3542437405E-07, A.sub.10=2.7604507 475E-09, A.sub.12=6.2081241869E-09, A.sub.14=2.5484435684E-09, A.sub.16=1.4411288365E-11, A.sub.18=3.1914780755E-11, A.sub.20=1.7498528416E-11, A.sub.21=2.0195053704E-14, A.sub.23=1.7141602857E-13, A.sub.25=2.4828768594E-13, and A.sub.27=1.1001411984E-13.

14. The system as claimed in claim 1, wherein a field angle is about 34.

15. The system as claimed in claim 14, wherein an angle in a horizontal direction is in a range from about 1.5 to about 1.5.

16. The system as claimed in claim 14, wherein an angle in the vertical direction is in a range from about 14 to about 10.

17. The system as claimed in claim 1, wherein a relative aperture is 0.526; and an F-number is 1.9.

18. The system as claimed in claim 1, wherein an effective focal length is about 57 millimeters.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) Implementations of the present technology will now be described, by way of example only, with reference to the attached figures.

(2) FIG. 1 is a schematic view of a light path of a freeform surface off-axial three-mirror image-side telecentric optical system according to one embodiment.

(3) FIG. 2 is a schematic view of a configuration of a freeform surface off-axial three-mirror image-side telecentric optical system according to one embodiment.

(4) FIG. 3 is a graph showing modulation transfer function curves in Visible light band of partial field angles of a freeform surface off-axial three-mirror image-side telecentric optical system according to one embodiment.

DETAILED DESCRIPTION

(5) It will be appreciated that for simplicity and clarity of illustration, where appropriate, reference numerals have been repeated among the different figures to indicate corresponding or analogous elements. In addition, numerous specific details are set forth in order to provide a thorough understanding of the embodiments described herein. However, it will be understood by those of ordinary skill in the art that the embodiments described herein can be practiced without these specific details. In other instances, methods, procedures, and components have not been described in detail so as not to obscure the related relevant feature being described. Also, the description is not to be considered as limiting the scope of the embodiments described herein. The drawings are not necessarily to scale and the proportions of certain parts have been exaggerated to better illustrate details and features of the present disclosure.

(6) Several definitions that apply throughout this disclosure will now be presented.

(7) The term substantially is defined to be essentially conforming to the particular dimension, shape, or other feature that the term modifies, such that the component need not be exact. For example, substantially cylindrical means that the object resembles a cylinder, but can have one or more deviations from a true cylinder. The term comprising, when utilized, means including, but not necessarily limited to; it specifically indicates open-ended inclusion or membership in the so-described combination, group, series and the like.

(8) The present disclosure is described in relation to a freeform surface off-axial three-mirror image-side telecentric optical system 100. The freeform surface off-axial three-mirror image-side telecentric optical system 100 includes a primary mirror 102, a secondary mirror 104, a tertiary mirror 106, and an image sensor 108 as shown in FIGS. 1 and 2. The secondary mirror 104 is located on a reflected light path of the primary mirror 102. The tertiary mirror 106 is located on a reflected light path of the secondary mirror 104. The image sensor 108 is located on a reflected light path of the tertiary mirror 106. A reflective surface of the primary mirror 102, a reflective surface of the secondary mirror 104 and a reflective surface of the tertiary mirror 106 are all freeform surfaces. Freeform surfaces are asymmetric surfaces and have more degrees of freedom for optical design, which can reduce the asymmetric aberrations and simplify a structure of the freeform surface off-axial three-mirror image-side telecentric optical system 100.

(9) A light path of the freeform surface off-axial three-mirror image-side telecentric optical system 100 can be depicted as follows. Firstly, the light comes from the object reaches the reflective surface of the primary mirror 102, and is reflected by the primary mirror 102 to form a first reflected light R.sub.1. Secondly, the first reflected light R.sub.1 reaches the secondary mirror 104, and is reflected by the secondary mirror 104 to form a second reflected light R.sub.2. Thirdly, the second reflected light R.sub.2 reaches the tertiary mirror 106, and is reflected by the tertiary mirror 106 to form a third reflected light R.sub.3. Finally, the third reflected light R.sub.3 is received by the image sensor 108 and imaging. An exit pupil of the freeform surface off-axial three-mirror image-side telecentric optical system 100 is approximately located at an infinite distance. An incident angle of each field of view on an image plane is about 0. The secondary mirror 104 is the aperture stop.

(10) A first three-dimensional rectangular coordinates system (x.sub.1, y.sub.1, z.sub.1) is defined in space. A z.sub.1-axis is along a horizontal line, in the z.sub.1-axis, to the left is negative, and to the right is positive. An y.sub.1-axis is in a plane as shown in FIG. 2, in the y.sub.1-axis, to the upward is positive, and to the downward is negative. An x.sub.1-axis is perpendicular to an y.sub.1z.sub.1 plane, in the x.sub.1-axis, in a direction substantially perpendicular to the y.sub.1z.sub.1 plane, to the inside is positive, and to the outside is negative.

(11) In space relative to the first three-dimensional rectangular coordinates system (x.sub.1, y.sub.1, z.sub.1), a second three-dimensional rectangular coordinates system (x.sub.2, y.sub.2, z.sub.2) is defined by a primary mirror location, a third three-dimensional rectangular coordinates system (x.sub.3, y.sub.3, z.sub.3) is defined by a secondary mirror location, a fourth three-dimensional rectangular coordinates system (x.sub.4, y.sub.4, z.sub.4) is defined by a tertiary mirror location, and a fifth three-dimensional rectangular coordinates system (x.sub.5, y.sub.5, z.sub.5) is defined by an image sensor location.

(12) A second origin of the second three-dimensional rectangular coordinates system (x.sub.2, y.sub.2, z.sub.2) is in (0, 49.39999, 122.92696) position of the first three-dimensional rectangular coordinates system (x.sub.1, y.sub.1, z.sub.1), whose unit is millimeter. A z.sub.2-axis positive direction rotates about 17.01294 degrees along a clockwise direction relative to a z.sub.1-axis positive direction.

(13) A third origin of the third three-dimensional rectangular coordinates system (x.sub.3, y.sub.3, z.sub.3) is in (0, 36.69253, 16.46708) position of the first three-dimensional rectangular coordinates system (x.sub.1, y.sub.1, z.sub.1), whose unit is millimeter. A z.sub.3-axis positive direction rotates about 0.74805 degrees along a counterclockwise direction relative to the z.sub.1-axis positive direction.

(14) A fourth origin of the fourth three-dimensional rectangular coordinates system (x.sub.3, y.sub.3, z.sub.3) is in (0, 44.59531, 47.02867) position of the first three-dimensional rectangular coordinates system (x.sub.1, y.sub.1, z.sub.1), whose unit is millimeter. A z.sub.4-axis positive direction rotates about 22.31491 degrees along the clockwise direction relative to the z.sub.1-axis positive direction.

(15) A fifth origin of the fifth three-dimensional rectangular coordinates system (x.sub.5, y.sub.5, z.sub.5) is in (0, 6.13399, 29.9344) position of the first three-dimensional rectangular coordinates system (x.sub.1, y.sub.1, z.sub.1), whose unit is millimeter. A z.sub.5-axis positive direction rotates about 9.11067 degrees along the clockwise direction relative to the z.sub.1-axis positive direction.

(16) In the second three-dimensional rectangular coordinates system (x.sub.2, y.sub.2, z.sub.2), the reflective surface of the primary mirror 102 is a fourth-order polynomial freeform surface of x.sub.2y.sub.2. The fourth-order polynomial freeform surface of x.sub.2y.sub.2 can be expressed as follows:

(17) $z_2\left(x_2,y_2\right)=\frac{c\left(x_2^2+y_2^2\right)}{1+\sqrt{1-\left(1+k\right)c^2\left(x_2^2+y_2^2\right)}}+A_2{y}_2+A_3{x}_2^2+A_5{y}_2^2+A_7{x}_2^2{y}_2+A_9{y}_2^3+A_{10}{x}_2^4+A_{12}{x}_2^2{y}_2^2+A_{14}{y}_2^4.$

(18) In the fourth-order polynomial freeform surface of x.sub.2y.sub.2, z represents surface sag, c represents surface curvature, k represents conic constant, while A.sub.i represents the ith term coefficient. The freeform surface off-axial three-mirror image-side telecentric optical system 100 is symmetrical about y.sub.2z.sub.2 plane, thus, in the fourth-order polynomial freeform surface of x.sub.2y.sub.2, only the even-order terms of x.sub.2 are retained. In one embodiment, the values of c, k, and A.sub.i in the equation of the fourth-order polynomial of x.sub.2y.sub.2 are listed in TABLE 1. However, the values of c, k, and A in the fifth-order polynomial polynomial freeform surface of x.sub.2y.sub.2 are not limited to TABLE 1.

(19) TABLE-US-00001 TABLE 1 c 2.8642059856E03 k 3.9274297376E+00 A2 4.5435688039E01 A3 5.3806292422E04 A5 4.3722756320E04 A7 3.0530404587E06 A9 2.3737900997E07 A10 8.5265458822E09 A12 1.9066201794E08 A14 5.7547889567E09

(20) In the third three-dimensional rectangular coordinates system (x.sub.3, y.sub.3, z.sub.3), the reflective surface of the secondary mirror 104 is a sixth-order polynomial freeform surface of x.sub.3y.sub.3. The sixth-order polynomial freeform surface of x.sub.3y.sub.3 can be expressed as follows:

(21) $z_3\left(x_3,y_3\right)=\frac{c\left(x_3^2+y_3^2\right)}{1+\sqrt{1-\left(1+k\right)c^2\left(x_3^2+y_3^2\right)}}+A_2{y}_3+A_3{x}_3^2+A_5{y}_3^2+A_7{x}_3^2{y}_3+A_9{y}_3^3+A_{10}{x}_3^4+A_{12}{x}_3^2{y}_3^2+A_{14}{y}_3^4+A_{16}{x}_3^4{y}_3+A_{18}{x}_3^2{y}_3^3+A_{20}{y}_3^5+A_{21}{x}_3^6+A_{23}{x}_3^4{y}_3^2+A_{25}{x}_3^2{y}_3^4+A_{27}{y}_3^6.$

(22) In the sixth-order polynomial freeform surface of x.sub.3y.sub.3, z.sub.3 represents surface sag, c represents surface curvature, k represents conic constant, while A.sub.i represents the ith term coefficient. The freeform surface off-axial three-mirror image-side telecentric optical system 100 is symmetrical about y.sub.3z.sub.3 plane, thus, in the sixth-order polynomial freeform surface of x.sub.3y.sub.3, only the even-order terms of x.sub.3 are retained. In one embodiment, the values of c, k, and A in the sixth-order polynomial of x.sub.3y.sub.3 are listed in TABLE 2. However, the values of c, k, and A.sub.i in the sixth-order polynomial freeform surface of x.sub.3y.sub.3 are not limited to TABLE 2.

(23) TABLE-US-00002 TABLE 2 c 1.3509388901E03 k 8.7720946581E+01 A2 2.9521719735E02 A3 3.0546252140E04 A5 2.5168419021E05 A7 3.9838626726E06 A9 9.4441737760E07 A10 3.4439768073E08 A12 4.6398109825E08 A14 1.5721550120E08 A16 3.0796040892E10 A18 3.4167907065E10 A20 8.6127469499E11 A21 9.4044204706E13 A23 8.7321134718E13 A25 4.0516919551E13 A27 5.5914310564E13

(24) In the fourth three-dimensional rectangular coordinates system (x.sub.4, y.sub.4, z.sub.4), the reflective surface of the tertiary mirror 106 is a sixth-order polynomial freeform surface of x.sub.4y.sub.4. The sixth-order polynomial freeform surface of x.sub.4y.sub.4 can be expressed as follows:

(25) $z_4\left(x_4,y_4\right)=\frac{c\left(x_4^2+y_4^2\right)}{1+\sqrt{1-\left(1+k\right)c^2\left(x_4^2+y_4^2\right)}}+A_2{y}_4+A_3{x}_4^2+A_5{y}_4^2+A_7{x}_4^2{y}_4+A_9{y}_4^3+A_{10}{x}_4^4+A_{12}{x}_4^2{y}_4^2+A_{14}{y}_4^4+A_{16}{x}_4^4{y}_4+A_{18}{x}_4^2{y}_4^3+A_{20}{y}_4^5+A_{21}{x}_4^6+A_{23}{x}_4^4{y}_4^2+A_{25}{x}_4^2{y}_4^4+A_{27}{y}_4^6.$

(26) In the sixth-order polynomial freeform surface of x.sub.4y.sub.4, z.sub.4 represents surface sag, c represents surface curvature, k represents conic constant, while A.sub.i represents the ith term coefficient. The freeform surface off-axial three-mirror image-side telecentric optical system 100 is symmetrical about y.sub.4z.sub.4 plane, thus, in the sixth-order polynomial freeform surface of x.sub.4y.sub.4, only the even-order terms of x.sub.4 are retained. In one embodiment, the values of c, k, and A.sub.i in the sixth-order polynomial of x.sub.4y.sub.4 are listed in TABLE 3. However, the values of c, k, and A.sub.i in the sixth-order polynomial freeform surface of x.sub.4y.sub.4 are not limited to TABLE 3.

(27) TABLE-US-00003 TABLE 3 c 6.0303569933E03 k 2.2371952711E01 A.sub.2 2.2430352958E03 A.sub.3 5.4714931736E04 A.sub.5 5.6853894214E04 A.sub.7 4.4859214867E07 A.sub.9 8.3542437405E07 A.sub.10 2.7604507475E09 A.sub.12 6.2081241869E09 A.sub.14 2.5484435684E09 A.sub.16 1.4411288365E11 A.sub.18 3.1914780755E11 A.sub.20 1.7498528416E11 A.sub.21 2.0195053704E14 A.sub.23 1.7141602857E13 A.sub.25 2.4828768594E13 A.sub.27 1.1001411984E13

(28) A center of the image sensor 108 is the fifth origin of the fifth three-dimensional rectangular coordinates system (x.sub.5, y.sub.5, z.sub.5). The image sensor 108 is in an x.sub.5y.sub.5 plane of the fifth three-dimensional rectangular coordinates system (X.sub.5, Y.sub.5, Z.sub.5).

(29) The materials of the primary mirror 102, the secondary mirror 104 and the tertiary mirror 106 can be aluminum, beryllium or other metals. The materials of the primary mirror 102, the secondary mirror 104 and the tertiary mirror 106 can also be silicon carbide, quartz or other inorganic materials. A reflection enhancing coating can also be coated on the metals or inorganic materials to enhance the reflectivity performance of the three mirrors. In one embodiment, the reflection enhancing coating is a gold film.

(30) An effective entrance pupil diameter of the freeform surface off-axial three-mirror image-side telecentric optical system 100 is about 30 millimeters.

(31) The freeform surface off-axial three-mirror image-side telecentric optical system 100 adopts an off-axis field of view in a vertical direction. A field angle of the freeform surface off-axial three-mirror image-side telecentric optical system 100 is about 34, wherein an angle in a horizontal direction is in a range from about 1.5 to about 1.5, and an angle in the vertical direction is in a range from about 14 to about 10.

(32) A wavelength of the freeform surface off-axial three-mirror image-side telecentric optical system 100 is not limited, in one embodiment, the wavelength of the freeform surface off-axial three-mirror image-side telecentric optical system 100 is in a range from about 486 nm to about 656 nm.

(33) An effective focal length (EFL) of the freeform surface off-axial three-mirror image-side telecentric optical system 100 is about 57 millimeters.

(34) A relative aperture (D/f) of the freeform surface off-axial three-mirror image-side telecentric optical system 100 is about 0.526; and a F-number of the freeform surface off-axial three-mirror image-side telecentric optical system 100 is a relative aperture (D/f) reciprocal, the F-number is about 1.9.

(35) FIG. 3 illustrates the modulation transfer functions (MTF) of partial field angles of the freeform surface off-axial three-mirror image-side telecentric optical system 100 in visible light band are close to the diffraction limit. An MTF curve for each field is higher than 0.69 at 100 lines/mm. It shows that the imaging quality of the freeform surface off-axial three-mirror image-side telecentric optical system 100 is high.

(36) The freeform surface off-axial three-mirror image-side telecentric optical system 100 has advantages as follows:

(37) Compared with conventional refractive telecentric system, the freeform surface off-axial three-mirror image-side telecentric optical system 100 has smaller volume, higher transmittance, higher thermal stability, and lower radiation sensitivity. The use of freeform surfaces effectively reduce the asymmetric aberrations induced by nonsymmetric configuration image-side.

(38) Compared with coaxial reflective systems, the freeform surface off-axial three-mirror image-side telecentric optical system 100 can eliminate central obscuration, and an energy utilization of the freeform surface off-axial three-mirror image-side telecentric optical system 100 is higher.

(39) The field angle of the freeform surface off-axial three-mirror image-side telecentric optical system 100 is about 34; thereby enabling the freeform surface off-axial three-mirror image-side telecentric optical system 100 to have a larger rectangular field of view, and larger imaging range.

(40) The reflective surface of the primary mirror, the reflective surface of the secondary mirror, and the reflective surface of the tertiary mirror are all freeform surfaces, freeform surfaces have asymmetric surfaces and more degrees of freedom in design, which can reduce asymmetric aberrations and simplify the structure of the optical system. Thus, the asymmetric aberrations of the freeform surface off-axial three-mirror image-side telecentric optical system 100 is small image-side.

(41) The freeform surface off-axial three-mirror image-side telecentric optical system 100 has smaller F-number and larger relative aperture, which allows more light to enter the freeform surface off-axial three-mirror image-side telecentric optical system 100, and enables the freeform surface off-axial three-mirror image-side telecentric optical system 100 to have higher input energy and limiting resolution.

(42) It is to be understood that the above-described embodiments are intended to illustrate rather than limit the present disclosure. Variations may be made to the embodiments without departing from the spirit of the present disclosure as claimed. Elements associated with any of the above embodiments are envisioned to be associated with any other embodiments. The above-described embodiments illustrate the scope of the present disclosure but do not restrict the scope of the present disclosure.