ULTRASOUND TRANSDUCER

Abstract

A method for producing a plurality of piezoelectric ultrasound transducer elements, the method comprising providing or depositing a piezoelectric material on at least part of a surface of a sheet of substrate to form a layered member; and forming the one or more piezoelectric ultrasound transducer elements from the layered member.

Claims

1-48. (canceled)

49. A method for producing a plurality of piezoelectric ultrasound transducer elements, the method comprising the steps of: providing or depositing a piezoelectric material on at least part of a surface of a sheet of substrate to form a layered member; and forming the one or more piezoelectric ultrasound transducer elements from the layered member.

50. The method of claim 49, wherein the piezoelectric material is arranged or deposited on at least the part of the surface of the substrate so as to cover at least a majority or all of the surface of the sheet of substrate.

51. The method of claim 49, further comprising one or more of the steps of: at least one of cutting, stamping, releasing or otherwise forming one or preferably a plurality of shaped portions from the layered member, the shaped portions forming the transducer elements or blanks for producing the transducer elements therefrom; and providing or depositing a layer of dielectric material onto at least some or all of a surface of the piezoelectric material.

52. The method of claim 49, wherein the shaped portions comprise an active part and at least one tab protruding from the active part and the method comprises bending the tab relative to the active part, so that the tab is angled relative to the active part.

53. The method of claim 49, wherein the piezoelectric material is at least one of: an inorganic, crystalline, polycrystalline or non-polymeric material; or in a continuous layer of material having piezoelectric properties in which the piezoelectric material does not comprise discrete domains of piezoelectric material within a matrix of non-piezoelectric material.

54. An ultrasound transducer for imaging an object, the ultrasound transducer comprising: a transducer element, at least one first electrode or electrical contact; and at least one second electrode or electrical contact, wherein: the transducer element comprises: a substrate; and a piezoelectric material, the piezoelectric material being arranged or deposited on at least part of the substrate; and the at least one second electrode or electrical contact is connected, coupled or bonded to the transducer element; and a total or combined surface area of the regions of the at least one second electrode or electrical contact that contact, couple or bond to, or support, the transducer element is less than the surface area of the transducer element.

55. The ultrasound transducer according to claim 54, wherein the ultrasound transducer is configured to at least one of: operate off-resonance; or emit one or more ultrasound wave(s) comprising a frequency in the range from 40 to 120 MHz or from 1 to 10 MHz.

56. The ultrasound transducer according to claim 54, wherein the piezoelectric material is at least one of: an inorganic, crystalline, polycrystalline or non-polymeric material; or in a continuous layer of material having piezoelectric properties in which the piezoelectric material does not comprise discrete domains of piezoelectric material within a matrix of non-piezoelectric material.

57. The ultrasound transducer according to claim 54, wherein the transducer element is at least one of: supported, coupled, bonded or contacted only at discrete or spaced apart contact regions or parts of its surface; or a layered thin film transducer element, the piezoelectric material and the substrate forming layers of the transducer element.

58. The ultrasound transducer according to claim 54, wherein at least some of the transducer element is free, floating or unsupported.

59. The ultrasound transducer according to claim 54, wherein the substrate forms or is connected to the first electrode or electrical contact

60. The ultrasound transducer according to claim 54, wherein the ultrasound transducer is arranged such that the piezoelectric material and substrate are suspended by the second electrode or electrical connector.

61. The ultrasound transducer according to claim 54, wherein the second electrode or electrical connector is arranged on the transducer element such that the second electrode or electrical connector extends in a direction substantially perpendicular to a surface of the transducer element.

62. The ultrasound transducer according to claim 54, wherein the ultrasound transducer comprises at least one of: a dielectric material provided on at least some or all of a surface of the piezoelectric material; a plurality of second electrodes comprising or defining an array of second electrodes or electrical connectors; or a further backing element configured to allow for damping of ultrasound waves generated by the piezoelectric material.

63. The ultrasound transducer according to claim 62, wherein the further backing element is arranged on the piezoelectric material such that the further backing element supports the substrate and the piezoelectric material and/or surrounds the/each second electrode or the plurality of second electrodes.

64. The ultrasound transducer according to claim 62, wherein the further backing element comprises a thermally insulating material.

65. The ultrasound transducer according to claim 54, wherein the ultrasound transducer comprises a housing for receiving at least one of the transducer element, the/each second electrode or the plurality of second electrodes and/or the further backing element.

66. The ultrasound transducer according to claim 65, wherein the ultrasound ransducer comprises an engagement element such as a flexible membrane for engaging or contacting an object, the engagement element being arranged on an end of the housing.

67. The ultrasound transducer according to claim 66, wherein the transducer element and the engagement element are moveably or slidably arranged relative to each other to allow a distance between the engagement element and the transducer element to be varied or adjusted.

68. The ultrasound transducer according to claim 66, wherein the ultrasound transducer comprises a delay material arranged between the engagement element and the substrate.

69. The ultrasound transducer according to claim 68, wherein the material is configured to introduce a time delay between one or more ultrasound wave(s) generated by the ultrasound transducer and one or more ultrasound wave(s) received by the ultrasound transducer.

70. The ultrasound transducer according to claim 54, wherein the piezoelectric material comprises a thickness in the range from 2 to 8 m.

71. The ultrasound transducer according to claim 54, wherein the substrate comprises at least one of: a thickness in the range from 15 to 60 m; a flexible and/or conductive substrate; or a metallic foil and the piezoelectric material is deposited onto the metallic foil.

72. The ultrasound transducer according to claim 54, wherein the second electrode or electrical connector is or comprises a pin.

73. The ultrasound transducer according to claim 72, wherein a head of the pin is at least one of: bonded to the transducer element via an electrically conducting bond; or bonded to the piezoelectric material.

74. A method of producing an ultrasound transducer, the method comprising the steps of: providing a transducer element, the transducer element comprising a piezoelectric material on at least part of a substrate; and connecting at least one second electrode or electrical connection to the transducer element, a total or combined surface area of the regions of the one or more second electrodes or electrical connections that contact, couple or bond to, or support, the transducer element is less than the surface area of the transducer element.

75. The method of claim 74, wherein the method comprises producing the transducer element by: providing or depositing a piezoelectric material on at least part of a surface of a sheet of substrate to form a layered member; and forming the one or more piezoelectric ultrasound transducer elements from the layered member.

76. A method of assembling an ultrasound transducer, the method comprising the steps of: providing a substrate and a piezoelectric material arranged or deposited on at least part of the substrate, the substrate optionally being configured or arranged to form a first electrode of the ultrasound transducer; and connecting at least one second electrode to the piezoelectric material a such that a total or combined surface area of the regions of the one or more second electrodes or electrical connections that contact, couple or bond to, or support, the transducer element is less than the surface area of the transducer element.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0063] At least one embodiment of the invention will not be described, by way of example only, with reference to the accompanying drawings, in which:

[0064] FIG. 1 shows a perspective view of an ultrasonic transducer;

[0065] FIG. 2 shows a side view of the ultrasonic transducer of FIG. 1;

[0066] FIG. 3 shows view of another side of the ultrasonic transducer of FIGS. 1 and 2;

[0067] FIG. 4 shows a top sectional view of the ultrasonic transducer of FIGS. 1 to 3;

[0068] FIG. 5 shows a sectional view through the plane indicated A-A in FIG. 3;

[0069] FIGS. 6(a) to 6(d) show production of a blank for forming a transducer element of the ultrasonic transducer of FIGS. 1 to 5;

[0070] FIG. 7 shows formation of the transducer element from the blank of FIG. 6;

[0071] FIG. 8 shows a perspective the transducer element formed from the blank of FIG. 6;

[0072] FIG. 9 shows a side view of the transducer element of FIG. 8;

[0073] FIG. 10 shows an assembly comprising a pin and the transducer element of FIGS. 8 and 9 for use in the ultrasonic transducer of FIGS. 1 to 5;

[0074] FIG. 11 shows an alternative assembly comprising a plurality of pins and the transducer element of FIGS. 8 and 9;

[0075] FIG. 12(a) shows a perspective view of the ultrasonic transducer of FIGS. 1 to 5;

[0076] FIG. 12(b) shows a perspective front view of an alternative ultrasonic transducer; FIG. 12(c) shows a perspective front view of the ultrasonic transducer of FIGS. 1 to 5;

[0077] FIG. 13 shows the variation of losses with frequency for the ultrasonic transducer of FIGS. 1 to 5;

[0078] FIG. 14 shows the variation of impedance with frequency for the ultrasonic transducer of FIGS. 1 to 5;

[0079] FIG. 15 shows an equivalent circuit for the ultrasonic transducer of FIGS. 1 to 5 when operated at a resonance frequency associated with the thickness of a piezoelectric coating of the transducer element;

[0080] FIG. 16 shows an equivalent circuit for the ultrasonic transducer of FIGS. 1 to 5 when operated off resonance at a frequency other than a resonance frequency associated with the thickness of a piezoelectric coating of the transducer element;

[0081] FIG. 17 shows a schematic diagram of an operating circuit for operating an ultrasonic transducer, such as that of FIGS. 1 to 5; and

[0082] FIG. 18 shows an alternative blank for use in forming a transducer element of the ultrasonic transducer of FIGS. 1 to 5.

DETAILED DESCRIPTION OF THE DRAWINGS

[0083] Throughout the following description, identical reference numerals will be used to identify identical parts.

[0084] FIGS. 1 to 5 show an ultrasonic transducer 5 that comprises a support 10 in the form of a hollow member that defines a cavity 15, wherein the support 10 supports a transducer element 20. The transducer element 20 comprises an active portion 25 that is mounted on one end of the support 10 and extends over an opening in the cavity 15 so as to close the cavity 15 at one end. The transducer element 20 further comprises a connection portion 30 that extends from the active portion 25, along an outer surface of the support 10 to an end of the support 10 that is distal from the end of the support 10 that is provided with the active portion 25.

[0085] In the particular example shown in FIGS. 1 to 5, the support 10 is in the form of a hollow cylindrical tube formed from a ceramic material and the active portion 25 of the transducer element 20 is generally circular and sized to match the end of the support 10. The connection portion 30 is in the form of a tab extending from, and generally perpendicularly to, the active portion 25. The connection portion 30 functions as an electrode, e.g. ground electrode, of the transducer element 20. However, it will be appreciated that other arrangements, e.g. shape, size, and/or configuration, of support 10 and transducer element 20 are possible. For example, the support 10 could be in the form of a cuboid or box section or a polygonal prism or an oval prism and the active portion 25 of the transducer element 20 could be any other suitable shape or shape that corresponds to the end of the support 10 or the cavity therein, e.g. a square, rectangle, or other polygon or an oval.

[0086] The ultrasonic transducer 5 is provided with one or more pins 31 that are provided within the cavity 15. In the example of FIGS. 1 to 5, only a single pin 31 is provided but it will be appreciated that a plurality of pins 31, e.g. an array of pins 31, could be provided. The pins 31 are elongate and the long direction of the pins 31 extends generally in the longitudinal direction of the cavity 15 within the support 10. The pins 31 are preferably metallic (but need not be). In the present example, the pin 31 comprises a shaft 32 and a head 33, e.g. a flat head, wherein the head 33 extends generally perpendicularly to the shaft 32. The head 33 of the pin 31 is bonded to the active portion 25 of the transducer element 20 via an electrically conductive bond 34, which is formed, for example, by a conductive epoxy or other suitable adhesive or bonding agent. The pin 31 acts as electrode for the transducer element 20 and along with the electrode formed by the connection portion 30 act as an electrode pair to provide/receive a potential difference across the transducer element 20. The pin 31 also acts to provide additional damping of the active portion 25 of the transducer element 20.

[0087] Only discrete portions of the active portion 25 of the transducer element 20 are directly supported, in other words only some but not all of the area of the active portion 25 of the transducer element 20 is contacted by a supporting member, such as the end of the support 10 or by the one or more pins 31, and at least a portion, e.g. 10%, 30%, 55% or more, of the active portion 25 of the piezo electric element 20 is left uncontacted by either the support 10 or the pins 31 (albeit supported by a suitable support material such as a gel or resin, preferably an ultrasonically transparent gel or resin, provided in the cavity 15).

[0088] The active portion 25 of the transducer element 20 is provided with a piezoelectric material 36. In particular, the transducer element 20 is a composite, planar, layered thin film transducer element 20 formed from a layer of piezoelectric material 36 provided on a surface of an electrically conductive support layer 37. In a particularly preferred example, the layer of piezoelectric material 36 comprises a zinc oxide (ZnO) layer and the support layer 37 comprises an electrically conductive film or foil, preferably a metallic film or foil such as aluminium foil. The layer of piezoelectric material 36 provides the piezoelectric properties whilst the support layer 37 supports the thin layer of piezoelectric material 36 and modifies the resonance properties of the transducer element 20. The thin layer of piezoelectric material 36 is generally much thinner than the support layer 37. For example, the thin layer of piezoelectric material 36 can be between 2 and 20 m thick and preferably between 2 and 8 m thick, e.g. 4-6 m thick. For example, the support layer 37 can be between 30 and 200 m thick and preferably between 40 and 80 m thick. By way of example, the support layer 37 could be between 2 and 20 times thicker, e.g. between 8 and 12 times thicker, than the layer of piezoelectric material 36. The layered thin film transducer element 20 can be formed by any suitable method for forming layered thin-film structures, but coating and particularly sputter coating the layer of piezoelectric material 36 onto the support layer 37 is preferred. In some embodiments, the ZnO is optionally crystalline, with a columnar structure and a preferred (002) orientation.

[0089] The transducer element 20 is arranged such that the piezoelectric material 36 is on an inner or cavity-ward side of the transducer element 20 relative to the support layer 37 and the support layer 37 is conversely outwardly of the piezoelectric material 36. In an exemplary arrangement, the piezoelectric material 37 is provided with a conductive coating such as a layer of chrome and/or a layer of gold to form a back electrode. In this way, electrical potentials can be applied to, or received from, the transducer element 20/piezoelectric material 36 via the pin 31 and the electrically conductive bond 34. In an alternative arrangement, the transducer element need not comprise the connection portion 30 and instead another form of electric connection, e.g. a wire or conducting paint could be used to provide a conductive pathway between the conductive support layer 37 and the ground or reference voltage.

[0090] The support 10 and the transducer element 20 are optionally provided inside a hollow delay line housing 35. The hollow delay line housing 35 is closed at one end by a flexible membrane 40. The membrane 40 is spaced apart from and faces the active portion 25 of the transducer element 20 such that a delay line chamber 45 is defined by the membrane 40, part of inner walls of the hollow delay line housing 35 and the active portion 25 of the transducer element 20. The delay line chamber 45 can be filled with a gel or other suitable material for delaying or slowing propagation of ultrasonic waves therethrough so as to function as a delay line. The delay properties of the delay line are selectable or may optionally be variable in use, e.g. by varying the dimensions of the delay line chamber 45, particularly the spacing between the active portion 25 of the transducer element 20 and the membrane 40 and/or the type, density, pressure or other property of the gel or other material provided within the delay line chamber 45. The support 10 and the transducer element 20 are optionally slidably, movably and/or removably mounted within the hollow delay line housing 35 or in other embodiments may be fixed within the hollow delay line housing 35. The delay line arrangement described above advantageously allows easier separation of transmitted and received signals but it will be appreciated that it is not essential.

[0091] As shown in FIG. 6(a), the transducer element 20 can be formed by coating the piezoelectric material 36 (e.g. the ZnO) onto a surface of the conductive support layer 37 (e.g. the aluminium foil) for example by sputter coating or other suitable coating technique to form a layered sheet or roll 38. The piezoelectric material 36 forms a thin film on the substrate 37, as shown in FIG. 6(b), which shows a side profile view of the layered sheet or roll 38. Thereafter, a blank 50 of the support layer 37 coated in the piezoelectric material 36 can be cut or punched out, as shown in FIGS. 6(c) and 6(d), wherein FIG. 6(c) shows the cut blanks 50 in the sheet or roll 38, whereas FIG. 6(d) shows an individual blank 50 once it has been separated from the sheet or roll 38. The blank 50 comprises a part 55 that will become the active portion 25 and a tab part 60 that will become the connection portion 30. As shown in FIG. 7, the tab part 60 can be bent relative to the part 55 that will become the active portion 25 so as to be angled or generally perpendicular thereto, e.g. as shown in FIGS. 8 and 9.

[0092] In this way, it will be appreciated that a plurality of blanks 50 may be produced using only a single piezoelectric material 36 deposition process or step. Since, the blanks 50 can then be formed into transducer elements 20, many transducer elements 20 can be formed from a single sheet or roll 38 using a single piezoelectric material 36 deposition process or step. Furthermore the above method using sheets or rolls allows for low cost, mass manufacturing techniques to be used. This makes the transducers 5 cheaper, quicker and easier to mass manufacture.

[0093] The head 33 of the pin 31 is bonded to the part 55 that will become the active portion 25 using the bond 34 (e.g. the conductive epoxy), as shown in FIG. 10. Although the embodiment of the ultrasonic transducer 5 shown in FIGS. 1 to 10 has only a single pin 31, in alternative embodiments, it will be appreciated that multiple pins 31 could be provided. In this case, as shown in FIG. 11, each pin 31 is spaced apart from the other pins 31 and bonded to the piezoelectric material 36 of the active portion 25 of the transducer element 20 via a conductive bond 34. Some of the area of the active portion 25 is contacted or directly supported by the pins 31 or the support 10, whilst some of the area of the active portion 25 between the pins 31 and the support 10 is left floating or free. In an optional embodiment, the volume around part of the pins 31 and bounded by the piezoelectric material 36 is optionally provided with a flexible, deformable and/or pliant material (e.g. a dielectric).

[0094] The active portion 25 of the transducer element 20 is positioned on the end of the ceramic support 10 and bonded to the support. For example, the piezoelectric material 36 or a coating provided thereon, is bonded to the end of the support 10, and the connection portion 30 placed so that extends upwardly, adjacent the outer side surface of the support 10.

[0095] The membrane 40 is bonded to an end of the delay line housing 35 and the gel is provided in the delay line chamber 45. At least part or all of the support 10 and transducer element 20 assembly is then provided into the delay line chamber 45 in the delay line housing 35 such that the active portion 25 of the transducer element 20 faces but is spaced apart from the membrane 40 to thereby form the transducer element 20.

[0096] Further variations of the transducer element 20, 20 of the transducer 5, 5 are possible. For example, a transducer element 20 having a flat active portion 25 is shown in FIGS. 12(a) and 12(c). However, it will be appreciated that a transducer element 20 having a curved or concave active portion 25 could be provided instead, as shown in FIG. 12(b). The curvature of the active portion 25 in this case focuses the ultrasonic waves produced by the transducer 5, which is particularly useful for depth imaging and other such analyses, such as analysing the layers or structure of teeth or other dental imaging. An array of pins 31 can provide additional support to help hold the active portion 25 in the curved configuration. Optionally, some epoxy or conductive epoxy or other suitable material can be provided on the active portion 25 in order to maintain the curved or concave shaped active portion 25.

[0097] The curved or concave shape can be formed during manufacturing, e.g. by using a curved former such as a ball or bearing to form the curved shape, which can optionally be maintained by providing supporting material such as the epoxy within the cavity 15 and the former then removed to leave the curved or concave active portion 25. Whilst this arrangement advantageously provides a focussed beam, other shapes or geometries of active portion 25 could be considered, e.g. convex for applications requiring a highly dispersive or diverging ultrasonic waves.

[0098] The variation of losses with frequency is shown in FIG. 13. It can be seen form this that minimum losses are obtained at the resonant frequency of the active portion 25 of the transducer element 20. However, since the active portion 25 of the transducer element 20 is a very thin film, this resonant frequency tends to be higher than that required for many applications, such as dental and other medical imaging. For example, the resonant frequency due to the thickness of piezoelectric material 36 can be from 200 MHz to GHz levels, whereas lower frequencies, such as between 0.001 to 200 MHz, such as between 20 to 100 MHz, e.g. 40 to 120 MHz are preferred for many medical imaging applications, particularly dental imaging for imaging teeth. Frequencies ranging from 1 to 10 MHz may be preferred, for example, in NDT application. As can be seen from FIG. 14, impedance of the thin film transducer 5 at these useful off-resonance frequencies can be significantly higher than at resonant frequencies.

[0099] This can be explained by the equivalent circuit for the ultrasonic transducer 5 when operated at the resonant frequency (so called thickness mode), as shown in FIG. 15, is compared with the equivalent circuit for operation off-resonance, as shown in FIG. 16. When off-resonance, the ultrasonic transducer 5 is generally equivalent to a capacitance (C.sub.p) in series with an off-resonance resistance (R.sub.OR), as shown in FIG. 16. However, when used at a resonant frequency of the transducer element 20, the ultrasonic transducer 5 operates more similarly to the capacitance C.sub.p from the off-resonance case in parallel with another capacitance C.sub.S that is in turn n series with a thickness mode resistance R.sub.TM and an inductance L, as shown in FIG. 15. As can be seen from FIGS. 13 and 14, operation at a resonant frequency of the transducer element 20 results in lower losses. Operation at the frequencies that are most beneficial for dental imaging, e.g. around 40-120 MHz, results in a very high impedance relative to operation at a resonant frequency. The mechanical and electric transfer for the ultrasonic transducer 5 at resonance is much more efficient than when operation is off-resonance. One way to address this could be to operate the transducer 5 using a high slew rate circuit.

[0100] With the construction of the transducer element 20 described above, the n/2 resonances of the support layer 37 (e.g. the aluminium foil) have a dominant effect, and the operating frequency corresponds to the first and second overtones contributed by /2 resonance in the support layer 37. The resonant frequency of the transducer element is thus influenced by factors such as the thickness of the support layer 37 and to some extent by the thickness of the piezoelectric material 36 that is coated onto the support layer 37. However, other considerations such as durability, processability and ease of construction also affect the choice of thicknesses for these components, so it can often be the case that it is necessary to use the transducer element 20 off resonance, i.e. not in the region of a resonant frequency of the transducer element 20, particularly for certain medical imaging applications, preferably dental imaging, where the ideal operating frequencies are generally in the range from 40 to 120 MHz, whereas the resonant frequencies of the transducer element 20 are generally in the range of 400 MHz to 1 GHz (See FIG. 14).

[0101] In order to improve operation of the ultrasonic transducer 5 in many applications such as certain medical applications and particularly in dental applications that require operation off-resonance, the ultrasonic transducer is used with a control system 65 as shown in FIG. 17. The control system 65 comprises a pulser unit 70 for providing a pulser signal for operating the ultrasonic transducer 5 to transmit an ultrasonic pulse. The control system 65 further comprises a receiver 75 for processing the signals generated by the ultrasonic transducer 5 responsive to, and representative of, ultrasonic signals received by the ultrasonic transducer 5.

[0102] Transmitting and receiving the signals with optimal impedance matching is beneficial. However, conventional impedance matching approaches may be ineffective in the present case as the optimum impedance matching requirements for the pulser 70 are generally very different to those required by the receiver 75. As such, simply matching the impedance at the interface to the ultrasonic transducer 5 would result in sub-optimal matching during transmission and/or reception.

[0103] The control system 65 comprises two different impedance systems 80, 85, the first impedance system 80 being optimally impedance matched for the pulser 70, whilst the second impedance system 85 is optimally impedance matched for the receiver 75. As the impedance requirements for the pulser 70 and receiver 75 are different, it will be appreciated that the impedance systems 80, 85 have different total impedances to each other. The impedance systems 80, 85 are both coupled to a gate circuit 90, the gate circuit 90 in turn being coupled to the pulser 70, the receiver 75 and the ultrasonic transducer 5. The gate circuit 90 is operable to switch between a first configuration in which the first impedance system 80 is switched into an electrical path between the ultrasonic transducer 5 and the pulser 70 via the gate circuit 90 and a second configuration in which the second impedance system 85 is switched into the electrical path between the ultrasonic transducer 5 and the receiver 75 via the gate circuit 90 depending on whether or not the ultrasonic transducer 5 is transmitting or receiving respectively.

[0104] The gate circuit 90 is preferably passive, and acts to determine the direction of signals, i.e. transmitting or receiving and switch in the appropriate impedance system 80, 85 as outlined above. In this way, the appropriate impedance matching is provided, regardless of the current operation of the ultrasonic transducer 5. This can provide very significant performance gains in applications such as dental imaging in which off-resonance operation can be preferred.

[0105] Although various particularly advantageous embodiments are described above, it will be appreciated that alternative arrangements could be used.

[0106] In an example, FIG. 18 shows an alternative to the construction shown in FIGS. 6(a) to 6(d). In particular, the arrangement shown in FIG. 18 is the same as that shown in FIG. 6(b) other than an additional layer of dielectric material 39 is deposited onto a surface of the piezoelectric material 36 that is opposite to the support layer 37. In the embodiment of FIG. 18, the transducer element 20 is formed by coating the piezoelectric material 36 (e.g. the ZnO) onto a surface of the conductive support layer 37 (e.g. the aluminium foil) for example by sputter coating or other suitable coating technique, and then the layer of dielectric material 39 is applied to the surface of the layer of piezoelectric material to form a layered sheet or roll 38. Thereafter, a blank of the layered sheet or roll 38 can be cut or punched out in the manner shown in FIGS. 6(c) and 6(d), and subsequently used to form an ultrasonic transducer as described above, e.g. in relation to FIGS. 7 to 11. Alternatively, the dielectric material 39 may be applied after bonding the electrode(s) 31 to the piezoelectric material 36, which may save having to form openings through the dielectric material 39 in order to provide electrical contact between the electrode(s) 31 and the piezoelectric material 26.

[0107] Examples of suitable dielectric material 39 include polymeric materials, plastic materials, or epoxies such as SU8. The dielectric material has a thickness less than that of the piezoelectric material, e.g. <1 mm. The dielectric material has a high voltage density (i.e. it is an electrical insulator). Application of the dielectric material 39 in the manner described above can be beneficial, e.g. it can conveniently lower the frequency produced by the resultant ultrasonic transducer down to frequencies better suited for certain applications, such as non-destructive testing (NDT), which could be (but not limited to), for example, in the range from 1 to 10 MHz.

[0108] For example, although a thin-film ultrasonic transducer comprising ZnO deposited on an aluminium film are described, it will be appreciated that different piezoelectric materials such as aluminium nitride (AlN) and/or different substrates/support layers, such as films of different metals or conductive polymers, could be used.

[0109] In addition, although manufacturing techniques such as sputter coating are advantageously described, it will be appreciated that other alternative techniques could be used.

[0110] Furthermore, whilst exemplary thicknesses and thickness ratios are described above, it will be appreciated that different thicknesses and thickness ratios could be used depending on considerations such as the application, the materials, used, the manufacturing process used and the like.

[0111] Also, whilst various geometric arrangements, shapes and dimensions of various components are describes, it will appreciated that the invention need not be limited to these arrangements, shapes or dimensions.

[0112] As such, the above specific embodiments are simply provided as non-limiting examples to help the understanding of the invention but the scope of protections is governed by the claims.