ASSEMBLY PLATFORM

Abstract

An assembly platform for arrangement as an interposer device between an integrated circuit and a substrate to interconnect the integrated circuit and the substrate through the assembly platform, the assembly platform comprising: an assembly substrate; a plurality of conducting vias extending through the assembly substrate; at least one nanostructure connection bump on a first side of the assembly substrate, the nanostructure connection bump being conductively connected to the vias and defining connection locations for connection with at least one of the integrated circuit and the substrate, wherein each of the nanostructure connection bumps comprises: a plurality of elongated conductive nanostructures vertically grown on the first side of the assembly substrate, wherein the plurality of elongated nanostructures are embedded in a metal for the connection with at least one of the integrated circuit and the substrate, at least one connection bump on a second side of the assembly substrate, the second side being opposite to the first side, the connection bump being conductively connected to the vias and defining connection locations for connection with at least one of the integrated circuit and the substrate.

Claims

1. An assembly platform for arrangement as an interposer device between an integrated circuit and a substrate to interconnect the integrated circuit and said substrate through said assembly platform, said assembly platform comprising: an assembly substrate; a plurality of conducting vias extending through said assembly substrate; at least one nanostructure connection bump on a first side of said assembly substrate, each nanostructure connection bump being conductively connected to at least one of said vias and defining a connection location for connection with at least one of said integrated circuit and said substrate, wherein each of said nanostructure connection bumps comprises: a plurality of elongated conductive nanostructures vertically grown on said first side of said assembly substrate, wherein said plurality of elongated nanostructures are embedded in a metal for said connection with at least one of said integrated circuit and said substrate, a electrode connected to each nanostructure in said first plurality of nanostructures and connected to said vias; and at least one connection bump on a second side of said assembly substrate, the second side being opposite to the first side, said connection bump being conductively connected to said vias and defining connection locations for connection with at least one of said integrated circuit and said substrate.

2. The assembly platform according to claim 1, further comprising a conductor pattern on said assembly substrate, said conductor pattern being conductively connected to the at least one vias and connecting the nanostructure connection bump to the at least one vias so that the nanostructure connection bump is electrically connected to the connection bump on the second side of the assembly substrate.

3. The assembly platform according to claim 1, wherein said conductive nanostructures are metallic or carbon nanostructures.

4. The assembly platform according to claim 1, wherein the plurality of elongated nanostructures of said nanostructure connection bump and the amount of metal is configured so that the metal is maintained within the connection location by said plurality of elongated nanostructures.

5. The assembly platform according to claim 1, wherein the plurality of elongated nanostructures of said nanostructure connection bump are densely arranged such that the metal when in a liquid state is maintained within the connection location by capillary forces caused by said plurality of elongated nanostructures.

6. The assembly platform according to claim 1, wherein the pitch between two adjacent nanostructure connection bumps on said first side is different from the pitch between two adjacent connection bumps on said second side, each of the two nanostructure connection bumps on said first side are connected to a respective adjacent connection bump on said second side through a respective vias.

7. The assembly platform according to claim 6, wherein the pitch between two adjacent nanostructure connection bumps on said first side is smaller than the pitch between two adjacent connection bumps on said second side.

8. The assembly platform according to claim 1, wherein said at least one connection bump on the second side of said assembly substrate is/are nanostructure connection bump(s).

9. The assembly platform according to claim 1, wherein the height of said nanostructure connection bump is controllable by the growing height of said elongated conductive nanostructures.

10. The assembly platform according to claim 1, further comprising a second plurality of elongated nanostructures vertically grown on said first side of said assembly substrate.

11. The assembly platform according to claim 10, wherein the second plurality of nanostructures are grown in an opening in said assembly structure, whereby the second plurality of nanostructures extend from a bottom part of said opening to above the surface of the first side of the assembly substrate.

12. The assembly platform according to claim 1, further comprising a second plurality of elongated nanostructures vertically grown on said second side of said assembly substrate.

13. The assembly platform according to claim 12, wherein the second plurality of nanostructures are grown in an opening in said assembly structure, whereby the second plurality of nanostructures extend from a bottom part of said opening to above the surface of the second side of the assembly substrate.

14. The assembly platform according to claim 10, wherein said second plurality of nanostructures is embedded in metal.

15. An electronic assembly comprising an assembly platform according to claim 1, and further comprising said integrated circuit and said substrate, wherein said integrated circuit and said substrate are interconnected through said assembly platform.

16. The electronic assembly according to claim 15, further comprising a protective plastic housing, wherein said assembly platform, said integrated circuit and said substrate is over-molded by said housing.

17. A method of manufacturing an assembly platform for arrangement between an integrated circuit and a substrate to interconnect the first integrated circuit and the substrate through said assembly platform, said method comprising the steps of: providing an assembly substrate having a plurality of conducting vias extending through said assembly substrate, forming at least a first plurality of conductive elongated nanostructures on said assembly substrate; embedding each nanostructure in said first plurality of conductive nanostructures in a metal, whereby said first plurality of conductive elongated nanostructures and said metal forms a nanostructure connection bump being conductively connected to said vias and defining connection locations for connection with at least one of said integrated circuit and said substrate; forming a connection bump comprising a metal on a second side of said assembly substrate, the second side being opposite to the first side, said connection bump being conductively connected to said vias and defining connection locations for connection with at least one of said integrated circuit and said substrate.

18. The method according to claim 17, wherein said step of forming said at least first plurality of conductive elongated nanostructures comprises the steps of: providing a patterned catalyst layer on said assembly substrate; and growing each nanostructure in said first plurality of conductive nanostructures from said catalyst layer.

19. The method according to claim 17, wherein said step of forming said at least first plurality of conductive elongated nanostructures comprises: depositing a conducting helplayer on an upper surface of a substrate; depositing a patterned layer of catalyst on the conducting helplayer; growing the one or more nanostructures on the layer of catalyst; and selectively removing the conducting helplayer between and around the one or more nano structures.

20. The method according to claim 19, wherein the layer of catalyst is patterned after it is deposited.

21. The method according to claim 19 or 20, wherein, the substrate additionally comprises a metal underlayer, co-extensive with its upper surface, and which is covered by the conducting helplayer.

22. The method according to claim 17, wherein the step of embedding the metal material comprises: applying heat or pressure or combination of heat and pressure so that the metal liquefies; and solidifying the metal when in contact with the nanostructures, such that the plurality of nanostructures is embedded by said metal.

23. The method according to claim 22, wherein the liquefied metal is brought into the plurality of nanostructures by capillary forces caused by the plurality of nanostructures.

24. An assembly platform for arrangement as an interposer device between an integrated circuit and a substrate to interconnect the integrated circuit and said substrate through said assembly platform, said assembly platform comprising: an assembly substrate; a plurality of conducting vias extending through said assembly substrate; at least one nanostructure connection bump on a first side of said assembly substrate, each nanostructure connection bump being conductively connected to at least one of said vias and defining a connection location for connection with at least one of said integrated circuit and said substrate, wherein each of said nanostructure connection bumps comprises: a plurality of elongated conductive nanostructures vertically grown on said first side of said assembly substrate, wherein said plurality of elongated nanostructures are configured to be embedded in a metal for said connection with at least one of said integrated circuit and said substrate, an electrode connected to each nanostructure in said first plurality of nanostructures and connected to said vias; and at least one connection bump on a second side of said assembly substrate, the second side being opposite to the first side, said connection bump being conductively connected to said vias and defining connection locations for connection with at least one of said integrated circuit and said substrate.

25. The assembly platform according to claim 24, further comprising a conductor pattern on said assembly substrate, said conductor pattern being conductively connected to the at least one vias and connecting the nanostructure connection bump to the at least one vias so that the nanostructure connection bump is electrically connected to the connection bump on the second side of the assembly substrate.

26. The assembly platform according to claim 24, wherein said conductive nanostructures are metallic or carbon nanostructures.

27. The assembly platform according to claim 24, wherein the plurality of elongated nanostructures of said nanostructure connection bump is configured so that a predetermined amount of said metal is maintained within the connection location by said plurality of elongated nanostructures.

28. The assembly platform according to claim 24, wherein the plurality of elongated nanostructures of said nanostructure connection bump are densely arranged such that the metal when in a liquid state is maintained within the connection location by capillary forces caused by said plurality of elongated nanostructures.

29. The assembly platform according to claim 24, wherein the pitch between two adjacent nanostructure connection bumps on said first side is different from the pitch between two adjacent connection bumps on said second side, each of the two nanostructure connection bumps on said first side are connected to a respective adjacent connection bump on said second side through a respective vias.

30. The assembly platform according to claim 29, wherein the pitch between two adjacent nanostructure connection bumps on said first side is smaller than the pitch between two adjacent connection bumps on said second side.

31. The assembly platform according to claim 24, wherein said at least one connection bump on the second side of said assembly substrate is/are nanostructure connection bump(s).

32. The assembly platform according to claim 24, wherein the height of said nanostructure connection bump is controllable by the growing height of said elongated conductive nanostructures.

33. The assembly platform according to claim 24, further comprising a second plurality of elongated nanostructures vertically grown on said first side of said assembly substrate.

34. The assembly platform according to claim 33, wherein the second plurality of nanostructures are grown in an opening in said assembly structure, whereby the second plurality of nanostructures extend from a bottom part of said opening to above the surface of the first side of the assembly substrate.

35. The assembly platform according to claim 24, further comprising a second plurality of elongated nanostructures vertically grown on said second side of said assembly substrate.

36. The assembly platform according to claim 35, wherein the second plurality of nanostructures are grown in an opening in said assembly structure, whereby the second plurality of nanostructures extend from a bottom part of said opening to above the surface of the second side of the assembly substrate.

37. The assembly platform according to claim 33, wherein said second plurality of nanostructures is embedded in metal.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0053] These and other aspects of the present invention will now be described in more detail, with reference to the appended drawings showing an example embodiment of the invention, wherein:

[0054] FIG. 1 schematically illustrates an electronic assembly comprising an assembly platform according to an example embodiment of the present invention;

[0055] FIGS. 2a to 4e schematically illustrate different embodiments of the assembly platform in FIG. 1;

[0056] FIG. 5 schematically illustrates and electronic assembly according to an embodiment of the invention;

[0057] FIG. 6 is a flow-chart of method steps according to an embodiment of the invention;

[0058] FIG. 7 is a flow-chart of method steps according to an embodiment of the invention;

[0059] FIG. 8 schematically illustrates an exemplary assembly platform;

[0060] FIG. 9a schematically illustrates assembling an assembly platform with an integrated circuit or a substrate;

[0061] FIG. 9b is a flow-chart of method steps according to an embodiment of the invention;

[0062] FIG. 10 schematically illustrates an exemplary assembly platform; and

[0063] FIG. 11a-b conceptually illustrates the forming of a nanostructure connection bump.

DETAILED DESCRIPTION OF EXAMPLE EMBODIMENTS

[0064] In the present detailed description, various embodiments of the assembly platform is mainly described with reference to an assembly platform being arranged as an interposer device between an integrated circuit and a substrate. However, it should be noted that this by no means limits the scope of the present invention, which equally well includes that the assembly platform may be arranged to interconnect any two types of electrical components, e.g. a die, silicon chips, integrated circuits, analog and/or digital circuits etc. Such an assembly platform may enable to have heterogeneous integration possibilities.

[0065] FIG. 1 schematically illustrates an electronic assembly 1 comprising a substrate, here in the form of a simplified printed circuit board (PCB) 2, an integrated circuit (IC) 3, and an assembly platform 4 arranaed as an interposer device according to an example embodiment of the present invention. The PCB includes PCB connection pads 6 formed on a PCB-substrate 7, and the IC 3 includes IC connection pads 9. As is schematically indicated in FIG. 1, the spacing between the IC connection pads 9 is considerably smaller than the spacing between the PCB connection pads 6. The assembly platform 4 in FIG. 1 comprises an assembly substrate 11, a plurality of vias 12 extending through the assembly substrate 11, and a conductor pattern 13.

[0066] The conductor pattern 13 is conductively connected to the vias 12 and to nanostructure connection bumps 15 on the first side 14 of the assembly substrate 11. The conductor pattern may generally be refer to as a redistribution layer (RDL). The nanostructure connection bumps 15 are configured to define connection locations for connection with the IC 3 in this exemplary embodiment. On the second side 19 of the assembly platform 4, opposite from the first side 14, there are connection bumps 17 conductively connected to the vias 12 and defining connection locations for the PCB 2. In other words, conductors 13 extend from a first set of bumps being nanostructure connection bumps 15 for connection to the IC connection pads 9 to the vias 12, with the vias here being directly connected through the assembly substrate 11 with a second set of connection bumps 17 for connection to the PCB connection pads 6. The second set of bumps 17 may be nanostructure connection bumps or conventional connection bumps, e.g. metal bumps.

[0067] The nanostructure connection bumps 15 each comprises a plurality of elongated conductive nanostructures 25 vertically grown on the first side of the assembly substrate and a metal embedding the nanostructures. These structures are not explicitly shown in FIG. 1, but will be described in greater detail below with reference to FIG. 2a to FIG. 4b, and in FIG. 11.

[0068] It should be noted that the printed circuit board 2 may be replaced with another assembly platform 4, i.e. several assembly platforms may be stacked if required by the specific application.

[0069] FIG. 2a is a schematic cross-section of at least part of an assembly platform 4 according to an embodiment of the invention. In FIG. 2a there is shown an assembly substrate 11 having a plurality of vias' 12 extending through the assembly substrate 11, from the first side 14 to the second side 19 of the assembly substrate 11. There is also shown a conductor pattern 13 conductively connected to the vias' 12. The conductor pattern may comprise electrodes, but in this embodiment the electrodes are part of the conductor pattern 13. On the first side 14 of the substrate 11, there is a plurality of nanostructures 25 embedded in a metal 29, together forming a nanostructure connection bump 15. The nanostructure connection bumps 15 define the connection location for connection with e.g. the IC 3. The conductive nanostructures 25 are elongated nanostructures vertically grown on the first side 11 of the assembly substrate 11. In one embodiment the conductive nanostructures 25 are carbon nanostructures. In another embodiment the nanostructures are metallic nanostructures, e.g. nanotubes, nanofibers, nanowhiskers or nanowires. On the second side 19 of the interposer substrate 11 there is connection bumps 17 also connected with the vias 12. The connection bumps 17 on the second side 19 define connection points for e.g. a PCB 2. The connection bumps 17 on the second side 19 may be made from a metal without the nanostructures as schematically illustrated in FIG. 2a, or alternatively the connection bumps 17 on the second side 19 may be nanostructure connection bumps as the ones on the first side 11 as is illustrated in FIG. 2b. The only difference between FIG. 2a and FIG. 2b being that the connection bumps on the second side 19 in FIG. 2b are nanostructure connection bumps 15 instead of metal connection bumps 17 not having embedded nanostructures. Furthermore, a combination of metal connection bumps and nanostructure connection bumps is also possible.

[0070] Referring to FIG. 3, there is schematically shown an assembly platform 4 assembled with an IC 3. The assembly platform 4 may the one shown in FIG. 2a. The IC 3 comprises connection terminals 31 to which the nanostructure connection bumps 15 are connected by applying heat or pressure or combination of the two as appropriate to the metal of the nanostructure connection bump so melting the metal, and subsequently allowing the metal to solidify. Furthermore, the connection terminals 31 comprises so-called under bump metallurgy elements 21 for improving the electrical connection between the interposer device 4 and the IC 3. The nanostructure connection bump 15 may become somewhat concave on its outer surface as shown in FIG. 3. This is achieved via proper ratio between the amount of metal 29 relative to the number or amount of nanostructures 25 so that the metal 29 can not escape from the nanostructure connection bump 15. However, a convex outer surface would not compromise the function of the nanostructure connection bump 15, although a concave surface is preferred. In addition, there is a layer of insulating material 20 on the IC 3 overlapping somewhat with the under bump metallurgy elements 21 to prevent short circuits on the assembly substrate 11. Note that the gap between the insulating layer 20 and the assembly substrate 11 is for illustration purposes and in practice there will be no gap.

[0071] Referring to FIG. 4a, there is schematically shown a further embodiment of the invention. In FIG. 4 there is shown an assembly platform 4 which differs from the assembly platform 4 in FIG. 2a in that there is second plurality 41 of elongated nanostructures vertically grown on the first side 14 of the assembly substrate 11. The second plurality of elongated nanostructures may be carbon nanostructures grown directly on the assembly substrate 11 or they may be grown on electrodes (not shown). The second plurality of elongated nanostructures 25 may further be metallic nanotubes, nanowhiskers or nanowires. Furthermore, the second plurality of nanostructures 25 is not embedded in a metal. The second plurality of nanostructures 25 may serve several different purposes, for example the second plurality of nanostructures 25 may be configured to dissipate heat from the IC 3 to the assembly substrate 11, thereby improving thermal dissipation of the electronic device 1. In a second example the second plurality of nanostructures 25 are configured to mechanically support the IC 3 to thereby relieve stress on the nanostructure connection bumps 15 exerted by e.g. the IC 3. In a third example the second plurality of nanostructures 25 are configured to reduce mismatch in coefficient of thermal expansion (CTE). Thus, the nanostructures 25 flexes as a response to thermal expansion of e.g. the IC 3 substrate so that there is some degree of mismatch tolerance. The second plurality of nanostructures 25 may also serve as alignment marks or have optical functions (e.g. light absorbing black materials, frequency dependent/sensitive element). The second plurality of nanostructures may be arranged in a regular array to create structures to mimic artificial photonic crystals to function as optical interconnects or wave guides. To make a functional second plurality of nanostructures they may be designed to grown anywhere on the interposer according to embodiment design and functions. According to an embodiment of the invention, the second plurality of nanostructures may be grown surrounding the at least one nanostructure bumps. Furthermore, the second plurality of nanostructures may be grown from a recessed assembly structure.

[0072] In a further embodiment schematically illustrated in FIG. 4b, the second plurality 41 of nanostructures 25 are arranged, thus has been grown, in an opening 43 in the assembly platform 11. The opening has a bottom 42 on which the second plurality of nanostructures have been vertically grown. The second plurality of nanostructures 25 extend out from the opening to above the surface of the first side 14. Thus, the second plurality of nanostructures 25 will make physical contact with e.g. an IC when it is bonded with the nanostructure connection bumps as shown in e.g. FIG. 3. This way, 25 when arranged in the opening 43, the second plurality of nanostructures can more efficiently transfer e.g. heat to the assembly substrate 11.

[0073] Additional embodiments are illustrated in FIG. 4c-d, in which the difference with FIGS. 4a-b is that the second plurality of nanostructures is arranged on the second side 19 of the assembly substrate 11. Additionally, and as is exemplified in FIG. 4e, the second plurality of nanostructures 41 may further also be coated with or embedded in a metal or a polymeric material. Although not shown, the coated or embedded second plurality of nanostructures may be arranged in an opening 42. The second plurality of nanostructures in FIGS. 4a-d may be grown directly on the assembly substrate 11 or on an electrode (not shown) arranged on the assembly substrate 11.

[0074] Referring again to FIG. 1 and also to FIG. 2c, in one embodiment the pitch p1 (not shown in FIG. 1) between two adjacent nanostructure connection bumps 15a and 15b on the first side 14 is different from the pitch (p2, also shown in FIG. 3 and FIG. 2c) between two adjacent connection bumps 17a and 17b on the second side 19. As also shown, the nanostructures connection bump 15a is connected to the connection bump 17a via a vias and conductive pattern 13. In a similar way, the nanostructures connection bump 15b is connected to the connection bump 17b via a vias and conductive pattern 13. This can also be described as a fan-out configuration, thus the pitch on one side of the interposer device is smaller than on the other side. In this example, the pitch (p1) on the first side 14 is smaller than the pitch (p2) on the second side 19.

[0075] Referring now to FIG. 5 which schematically illustrates an electronic assembly 50 according to an embodiment of the invention. The electronic assembly 50 comprises an assembly platform 4 as previously described with reference to any one of FIGS. 1-4. In FIG. 5, the assembly platform 50 is arranged to interconnect integrated circuits 3 through vias and nanostructure bumps (not shown) as previously described. Although only seven IC's are shown here, any number of IC's may be interconnected using the assembly platform 4 as long as they fit on the assembly platform 4. In addition, the electronic assembly comprises a housing 52 in the form of an over-molded housing covering the assembly platform 4 and the IC's 3. Naturally, there are connection ports (not shown) so that the assembly platform IC's 3 can be connected from the outside of the housing 52. The housing 52 may be comprised of epoxy or a resin.

[0076] FIG. 6 is a flowchart illustrating method steps for manufacturing an assembly platform according to an embodiment of the invention. In a first step S602, an assembly substrate is provided having a plurality of conducting vias extending through the assembly substrate. Subsequently S604, forming at least a first plurality of conductive elongated nanostructures on the assembly substrate. The first plurality of conductive elongated nanostructures are configured to define connection locations on the assembly platform. In step S606, embedding each nanostructure in the first plurality of conductive nanostructures in a metal, whereby the first plurality of conductive elongated nanostructures and the metal forms a nanostructure connection bump being conductively connected to the vias and defining connection locations for connection with at least one of the integrated circuit and the substrate. For enabling connections on the other side of the assembly substrate, S608, forming a connection bump comprising a metal on a second side of the assembly substrate, the second side being opposite to the first side, the connection bump being conductively connected to the vias and defining connection locations for connection with at least one of the integrated circuit and the substrate.

[0077] For example, the forming of the plurality of conductive elongated nanostructures comprises providing a patterned catalyst layer on the assembly substrate. Subsequently, growing each nanostructure in the first plurality of conductive nanostructures from the catalyst layer.

[0078] The invention provides for enabling high aspect ratio connection bumps, this is accomplished by the nanostructures being embedded in a metal. The amount of metal is such that the metal is maintained within the connection location by the plurality of elongated nanostructures 25, for example by capillary forces. As an example, the ratio between the height (h) and the width (w) may be at least 2, such as 3, 4, or 5, or larger. In addition, the height (h) of the nanostructure connection bumps 15 is controllable by controlling the growing height of the elongated nanostructures 25.

[0079] In one aspect of the present invention, the method for making one or more nanostructures includes: depositing a conducting helplayer on an upper surface of a substrate; depositing a patterned layer of catalyst on the conducting helplayer; growing the one or more nanostructures on the layer of catalyst; and selectively removing the conducting helplayer between and around the one or more nanostructures. In some implementations, the layer of catalyst is patterned after it is deposited. In some implementations, the substrate additionally comprises a metal underlayer, co-extensive with its upper surface, and which is covered by the conducting helplayer. In some implementations, the metal underlayer is patterned. In some implementations, the metal underlayer comprises one or more metals selected from: Cu, Ti, W, Mo, Pt, Al, Au, Pd, P, Ni, and Fe. In some implementations, the metal underlayer comprises one or more conducting alloys selected from: TiC, TiN, WN, and AlN. In some implementations, the metal underlayer comprises silicdes e.g. NiSi, MoSi, WSi etc.,In some implementations, the metal underlayer comprises one or more conducting polymers.

[0080] The technology described herein can be utilized with a numberof different materials as the helplayer. It is important to select helplayer materials and etching parameters so that the nanostructures can be used as a self-aligned mask layer during the etching of the helplayer. The choice of the helplayer material can depend on the material lying beneath the help layer.

[0081] The helplayer can also be a catalyst, as the selective removal process can also be used to remove any unwanted catalyst residuals between the grown nanostructures.

[0082] The catalyst can be nickel, iron, platinum, palladium, nickel-siliCide, cobalt, molybdenum, Au or alloys thereof, or can be combined with other materials (e.g., silicon). The catalyst can be optional, as the technology described herein can also be applied in a catalyst-free growth process for nanostructures. Catalyst can also be deposited through spin coating of catalyst particles.

[0083] In some implementations, any of the depositing is carried out by a method selected from: evaporating, plating, sputtering, molecular beam epitaxy, pulsed laser depositing, CVD, ALD and spin-coating. In some implementations, the one or more nanostructures comprises carbon, GaAs, ZnO, InP, InGaAs, GaN, InGaN, or Si. In some implementations, the one or more nanostructures include nanofibers, nanotubes, or nanowires. In some implementations, the conducting helplayer comprises a material selected from: a semiconductor, a conducting polymer, and an alloy. In some implementations, the conducting helplayer is from 1 nm to 100 microns thick. In some implementations, the one or more nanostructures are grown in a plasma. In some implementations, the one or more nanostructures are carbide derived carbon. In some implementations, the selective removal of the conducting helplayer is accomplished by etching. In some implementations, the etching is plasma dry etching. In some implementations, the etching is an electrochemical etching. In some implementations, the etching is photo chemical pyrolysis etching. In some implementations, the etching is pyrolysis etching. In some implementations, the method further includes depositing an additional layer between the conducting help layer and the layer of catalyst.

[0084] According to an aspect, growing a plurality of nanostructures was carried out using the method comprising: depositing a catalyst layer on the electrodes, the catalyst layer comprising grains having a average grain size different from the average grain size of the electrodes, thereby forming a stack of layers comprising the bottom layer and the catalyst layer; heating the stack of layers to a temperature where nanostructures can form and providing a gas comprising a reactant such that the reactant comes into contact with the catalyst layer.

[0085] In some implementation, chlorination process is used to derive carbon nanostructures from metal carbide layer e.g. forming carbon nanostructures from TiC, SiC or any other carbide precursors.

[0086] FIG. 7 is a flowchart illustrating method steps for manufacturing an assembly platform for arrangement between an integrated circuit and a substrate or a second integrated circuit to interconnect the first integrated circuit and the substrate (or the second integrated circuit) through the assembly platform, according to an embodiment of the invention. In a first step S702, an assembly substrate is provided having a plurality of conducting vias extending through the assembly substrate. Subsequently S704, forming at least a first plurality of conductive elongated nanostructures on the assembly substrate. The first plurality of conductive elongated nanostructures is configured to define connection locations on the assembly platform. For enabling connections on the other side of the assembly substrate, S706, forming a connection bump comprising a metal on a second side of the assembly substrate, the second side being opposite to the first side, the connection bump being conductively connected to the vias and defining connection locations for connection with at least one of the integrated circuit and the substrate.

[0087] FIG. 8 shows a cross section of an assembly platform 80 for arrangement as an interposer device between an integrated circuit 3 and a substrate 2 to interconnect the integrated circuit 3 and the substrate 2 through the assembly platform. In this embodiment, the assembly platform 80 comprises an assembly substrate 11 and a plurality of conducting vias 12 extending through the assembly substrate 11. There is further shown at least one nanostructure 25 on a first side 14 of the assembly substrate 11. The plurality of nanostructures 25 will form a nanostructure connection bump 15 comprising the metal embedding the nanostructures at the time of assembly with the integrated circuit (see e.g. FIG. 9a). The nanostructure connection bump 15 is conductively connected to the vias 12 and defining connection locations for connection with at least one of the integrated circuit 3 and the substrate 2. The plurality of elongated conductive nanostructures 25 are vertically grown on the first side 14 of the assembly substrate 11 for the connection with at least one of the integrated circuit 3 and the substrate 2. There is further a electrode 5 connected to each nanostructure 25 in the first plurality of nanostructures and connected to the vias 12. On the second side 19 of the assembly substrate there is at least one connection bump 17. The second side being opposite to the first side and the connection bump 17 is conductively connected to the vias 12 and defining connection locations for connection with at least one of the integrated circuit 3 and the substrate 2.

[0088] Referring to FIG. 9a, there is schematically shown an assembly platform 4 to be assembled with an IC 3. The assembly platform is in this example the one shown in FIG. 8. The IC 3 comprises connection terminals 31 to which the nanostructures are connected by applying heat or pressure to the metal bumps 90 arranaed in the connection terminals 31 to liquefy the metal, and thereafter making contact between the metal bumps 90 and the nanostructures 25 as indicated by the arrow 92, and subsequently allowing the metal 90 to solidify. Furthermore, the connection terminals 31 comprises so-called under bump metallurgy elements 21 for improving the electrical connection between the interposer device 4 and the IC 3.

[0089] FIG. 9b shows a flow-chart with steps for connecting an IC or a substrate with an assembly platform. For example, the IC and the assembly platform may be the ones described with reference to FIG. 3 or the ones described with reference to FIG. 9a. In a first step, the IC or the substrate is brought into contact with the assembly platform, either with the nanostructure connection bump (e.g. FIG. 3) or so that the metal bump 90 is in contact with the nanostructures 25 (FIG. 9a). Next, heat and/or pressure or suitable combination thereof is applied to liquefy the metal, either the metal bumps 90 (FIG. 9a) or the metal 29 embedding the nanostructures 25 (e.g. FIG. 3). Subsequently, the metal is allowed to solidify. In some embodiment, the metal may be liquefied before bringing the IC or the substrate is into contact with the assembly platform.

[0090] FIG. 10 schematically illustrates a cross-section of another assembly platform 100 for arrangement as an interposer device between an integrated circuit 3 and a substrate 2 to interconnect the integrated circuit 3 and the substrate 2 through the assembly platform. In this embodiment, the assembly platform 100 comprises an assembly substrate 11 and a plurality of conducting vias 12 extending through the assembly substrate 11. There is further shown at least one nanostructure 25 on a first side 14 of the assembly substrate 11. The nanostructures are conductively connected to the vias 12 and defining connection locations for connection with at least one of the integrated circuit 3 and the substrate 2. The elongated conductive nanostructures 25 are vertically grown on the first side 14 of the assembly substrate 11 for the connection with at least one of the integrated circuit 3 and the substrate 2. The plurality of nanostructures 25 will form a nanostructure connection bump comprising the metal embedding the nanostructures at the time of assembly with the integrated circuit (see e.g. FIG. 9a). There is further a electrode 5 connected to each nanostructure 25 in the first plurality of nanostructures and connected to the vias 12. On the second side 19 of the assembly substrate there is a further plurality of elongated conductive nanostructures 25. In this assembly platform, the elongated conductive nanostructures 25 are not embedded in metal. The electrode 5 may be part of a conductive pattern 13 (see e.g. FIG. 1).

[0091] With the method described herein, it is possible to manufacture individual nanostructures, arrays of nanostructures or forests of nanostructures.

[0092] FIG. 11b conceptually illustrates a nanostructure connection bump 15 comprising a plurality of elongated conductive nanostructures 25 vertically grown on the first side 14 of an assembly substrate 11. The nanostructures have been grown on an electrode 5 in this case although the nanostructures may also be grown on the conductive pattern 13 (see FIG. 1) in which case the electrode is part of the conductive pattern. In some embodiments the nanostructures may have been grown on another electrode which may be dummy electrode (for example in cases where the nanostructures are used for mechanical support) or an electrode on the second side 19 of the assembly platform 100 (see FIG. 10). FIG. 11a conceptually illustrates the plurality of nanostructures 25 which have been grown on the first side 14 of the assembly substrate 11. The plurality of elongated nanostructures 25 are configured to be embedded in a metal for said connection with at least one of said integrated circuit and said substrate. Metal 29 is provided to the plurality of nanostructures 25 in liquid state or is liquefied on the nanostructures 25. The amount of metal 29 in the liquid state for forming the nanostructure connection bump 15 is such that the plurality of nanostructures 25 maintains the liquid metal within the connection location by capillary forces caused by the plurality of elongated nanostructures 25. The liquid metal solidifies within the connection location defined by the electrode 5 such that a nanostructure connection bump 15 is formed as shown in FIG. 11b.

[0093] Nanostructure is a structure that has at least one dimension in the order of nanometers.

[0094] Nanostructures can include nanofibers, nanotubes or nanowires of carbon, GaAs, ZnO, InP, GaN, InGaN, InGaAs, Si, or other materials. Nanostructure may also be formed by deriving nanostructure from alloys e.g. carbide derived carbon from TiC.

[0095] The vias may be made from any suitable conductive material known in the art, for example, Au, Al, Cu, Tungsten, Silicide, Ni, Mo, etc. In some cases, vias may be surrounded by additional materials as diffusion barriers.

[0096] The assembly platform substrate may be an interposer. The interposer may be based on solid state materials for example comprising Silicon, glass, poly-silicon, AAO (anodized aluminum oxide), alumina, sapphire, SiGe, SiC. The interposer may be based on soft not rigid materials e.g. polymer, epoxy, laminate, flex etc. Interposer may have different thermal expansion of coefficient depending on the type of materials it is made of. The interposer may be made of a composite material that include anisotropic conducting materials. For example, Cu-AAO, nanostructures-AAO composite, nanostructures-polymer, Cu-polymer or any other suitable materials combinations thereof. The interposer may be coated with insulating layer for example, SiO2, SiN where appropriate. The interposer may be oxidized to form SiO2, SiN etc. Solid state interposers may be rigid, not flexible and brittle. Interposer may contain flat surfaces or corrugated surfaces. The interposer may comprise of at least one metal layer as interconnect redistribution layer (RDL). Multiples of interposer layers maybe envisaged to be assembled to create the total assembly platform. Interposer materials are essentially having lower electrical conductivity than the vias so that the electrical current may flow only through the vias.

[0097] The assembly substrate may for example comprise Silicon, a polymer, glass, poly-silicon, epoxy, SiC, etc.

[0098] The assembly platform is envisaged to assemble heterogeneous die assembly possibilities where different die are manufactured utilizing different non compatible technology platforms.

[0099] The person skilled in the art realizes that the present invention by no means is limited to the preferred embodiments described above. On the contrary, many modifications and variations are possible within the scope of the appended claims.

[0100] In the claims, the word comprising does not exclude other elements or steps, and the indefinite article a or an does not exclude a plurality. A single processor or other unit may fulfill the functions of several items recited in the claims. The mere fact that certain measures are recited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage. Any reference signs in the claims should not be construed as limiting the scope.