Air curtain device
10252299 ยท 2019-04-09
Assignee
Inventors
Cpc classification
B08B5/02
PERFORMING OPERATIONS; TRANSPORTING
F26B21/004
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
H01L21/67028
ELECTRICITY
International classification
B08B5/02
PERFORMING OPERATIONS; TRANSPORTING
F26B21/00
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
H01L21/67
ELECTRICITY
Abstract
An air curtain device is provided. The air curtain device comprises a pressure limiting module, and an air curtain body communicating with the pressure limiting module. The pressure limiting module is provided with a pressure limiting chamber, which has an air inlet connected with a gas source and a first air outlet communicating with the air curtain body. The pressure limiting chamber is provided with a pressure linking member, which is capable of changing a cross-sectional area of the first air outlet through which the gas flow passes in accordance with variation of pressure in the pressure limiting chamber, so that the gas flow output from the first air outlet has a pressure which is kept in a preset range. This ensures a stable flux for the gas flow output from the air curtain device, and increases the yield for fabricating the array substrate.
Claims
1. An air curtain device, comprising: a pressure limiting module; and an air curtain body which communicates with the pressure limiting module, wherein the pressure limiting module is provided with a pressure limiting chamber, and the pressure limiting chamber has an air inlet which is connected with a gas source and a first air outlet which communicates with the air curtain body, and wherein the pressure limiting chamber is provided with a pressure linking member, and the pressure linking member is capable of changing a cross-sectional area of the first air outlet through which a gas flow passes in accordance with variation of pressure in the pressure limiting chamber, so that the gas flow which is output from the first air outlet to the air curtain body has a pressure which is kept in a preset range.
2. The air curtain device of claim 1, wherein the pressure linking member comprises a connecting rod which is arranged along an air input direction, and the connecting rod is provided with a floater at an end close to the air inlet and a first air stopper at an end close to the first air outlet, and wherein under an action of the gas flow, the floater drives the first air stopper to move up and down by means of the connecting rod, so that the first air stopper changes the cross-sectional area of the first air outlet through which the gas flow passes.
3. The air curtain device of claim 2, wherein the pressure linking member further comprises a second air stopper which is arranged oppositely to the first air stopper, an air output passage is formed between the first air stopper and the second air stopper, and wherein the second air stopper is connected with a bottom of the pressure limiting chamber through an elastic part, the pressure limiting chamber is further provided with a position limiting part at a bottom, and the position limiting part is capable of contacting the second air stopper.
4. The air curtain device of claim 3, wherein the first air stopper and the second air stopper are formed into an integrated structure, and the air output passage is arranged inside the integrated structure.
5. The air curtain device of claim 2, wherein the air curtain device is provided with a pressure dial on an outer wall, and the connecting rod is provided with a pointer which points to scale marks on the pressure dial.
6. The air curtain device of claim 1, wherein the pressure linking member comprises a hemisphere flying gyro, a fixed bearing which is movably connected with the hemisphere flying gyro, and a balancing weight which is arranged symmetrically with respect to the hemisphere flying gyro, wherein the balancing weight is connected with the hemisphere flying gyro, the fixed bearing is fixed on an inner wall of the pressure limiting chamber, and wherein under an action of the gas flow, the hemisphere flying gyro is capable of rotating in the pressure limiting chamber by taking the fixed bearing as a center, so that the hemisphere flying gyro changes the cross-sectional area of the first air outlet through which the gas flow passes.
7. The air curtain device of claim 6, wherein the pressure limiting chamber has a circular cross section, and an arc length of the hemisphere flying gyro close to the pressure limiting chamber inner wall is larger than or equal to an arc length between the air inlet and the first air outlet of the pressure limiting chamber.
8. The air curtain device of claim 1, wherein the air curtain body is provided with a first gas guiding channel and a second gas guiding channel which communicate with each other, wherein the second gas guiding channel is provided with bionic membrane flaps in cross sectional directions, and when a pressure in the second gas guiding channel is larger than a preset threshold, the bionic membrane flaps open, so that the gas flow is capable of passing through the bionic membrane flaps.
9. The air curtain device of claim 8, wherein the second gas guiding channel comprises a second air outlet, the second gas guiding channel is provided with a linking buckle at a position close to the second air outlet, and the linking buckle contacts the bionic membrane flaps at one end and has a hook shape at another end, and wherein when the bionic membrane flaps open, the bionic membrane flaps touch said another end of the linking buckle so that the bionic membrane flaps are fixed.
10. The air curtain device of claim 9, wherein the air curtain body is provided with a reset screw at a bottom at a position corresponding to the linking buckle, and the reset screw is configured to apply a torque to an end of the linking buckle for closing the bionic membrane flaps.
11. The air curtain device of claim 8, wherein the air curtain body is provided with a third gas guiding channel, and the third gas guiding channel has an end which communicates with the second gas guiding channel, the gas flow in the second gas guiding channel which passes through the bionic membrane flaps can enter the third gas guiding channel, and another end of the third gas guiding channel is a sealed structure, wherein a movable electrically conductive ball is arranged in the third gas guiding channel, the third gas guiding channel is provided with a first electrically conductive plate and an opposite second electrically conductive plate on an inner wall, and when the electrically conductive ball is located between the first electrically conductive plate and the second electrically conductive plate, the electrically conductive ball, an indicator light, and a power supply form a closed electrically conductive circuit.
12. The air curtain device of claim 1, wherein the pressure limiting module communicates with the air curtain body through a gas guiding channel.
13. The air curtain device of claim 2, wherein the air curtain body is provided with a first gas guiding channel and a second gas guiding channel which communicate with each other, wherein the second gas guiding channel is provided with bionic membrane flaps in cross sectional directions, and when a pressure in the second gas guiding channel is larger than a preset threshold, the bionic membrane flaps open, so that the gas flow is capable of passing through the bionic membrane flaps.
14. The air curtain device of claim 3, wherein the air curtain body is provided with a first gas guiding channel and a second gas guiding channel which communicate with each other, wherein the second gas guiding channel is provided with bionic membrane flaps in cross sectional directions, and when a pressure in the second gas guiding channel is larger than a preset threshold, the bionic membrane flaps open, so that the gas flow is capable of passing through the bionic membrane flaps.
15. The air curtain device of claim 4, wherein the air curtain body is provided with a first gas guiding channel and a second gas guiding channel which communicate with each other, wherein the second gas guiding channel is provided with bionic membrane flaps in cross sectional directions, and when a pressure in the second gas guiding channel is larger than a preset threshold, the bionic membrane flaps open, so that the gas flow is capable of passing through the bionic membrane flaps.
16. The air curtain device of claim 5, wherein the air curtain body is provided with a first gas guiding channel and a second gas guiding channel which communicate with each other, wherein the second gas guiding channel is provided with bionic membrane flaps in cross sectional directions, and when a pressure in the second gas guiding channel is larger than a preset threshold, the bionic membrane flaps open, so that the gas flow is capable of passing through the bionic membrane flaps.
17. The air curtain device of claim 2, wherein the pressure limiting module communicates with the air curtain body through a gas guiding channel.
18. The air curtain device of claim 3, wherein the pressure limiting module communicates with the air curtain body through a gas guiding channel.
19. The air curtain device of claim 4, wherein the pressure limiting module communicates with the air curtain body through a gas guiding channel.
20. The air curtain device of claim 5, wherein the pressure limiting module communicates with the air curtain body through a gas guiding channel.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION OF EMBODIMENTS
(14) The specific embodiments of the present disclosure shall be further described in the following text with reference to the figures and the embodiments. The following embodiments are only used for explaining more clearly the technical solution of the present disclosure rather than limiting the protection scope of the present disclosure.
(15) Besides, the terms like first, second are used for purpose of illustrating a feature, and are not interpreted to indicate or imply relative importance or implicitly indicate the number of the feature. Therefore, the feature prefixed with the terms like first, second can explicitly or implicitly comprise one or more said feature. In the context, unless otherwise indicated, a plurality of indicates two or more.
(16) An embodiment of the present disclosure provides an air curtain device. As shown in
(17) The pressure limiting chamber 101 is provided with a pressure linking member 102. The pressure linking member 102 is capable of changing a cross-sectional area of the first air outlet 22 through which a gas flow passes in accordance with variation of pressure in the pressure limiting chamber 101, so that the cross-sectional area of the first air outlet 22 through which the gas flow passes is kept in a preset range. Namely, the flux of gas passing through the first air outlet 22 can be kept in a preset range. Thus, the gas flow output from the first air outlet 22 has a pressure which can also be kept in a certain range, which ensures a stable flux for the gas flow output from the air curtain device, and increases the yield for fabricating the array substrate.
(18) It is noted that the air curtain body 12 may have a structure similar with the prior art, and embodiments of the present disclosure do not intend to make restrictions in this regard.
(19) As an example, still as shown in
(20) The floater 32 operates under a similar principle with a floater flow meter. As shown in
(21) When the gas flow input by the air inlet 21 has a pressure larger than a lower threshold, under the action of the gas flow, the floater 32 drives the first air stopper 33 to move up and down by means of the connecting rod 31. When the gas flow input by the air inlet 21 has a pressure larger than an upper threshold, as shown in
(22) Furthermore, as shown in
(23) When the gas flow input by the air inlet 21 has a pressure larger than the upper threshold, due to the action of the position limiting screw 36, an air output passage is formed between the second air stopper 34 and the first air stopper 33. In this case, the first air stopper 33 can be designed in such a manner that it does not completely block the first air outlet 22, and that the gas flow input by the air inlet 21 passes through the air output passage and is output from the first air outlet 22. In this way, when the gas flow input by the air inlet 21 has a pressure larger than the upper threshold, the pressure linking member 102 can still output a gas flow with a stable pressure to the air curtain body 12.
(24) Furthermore, as shown in
(25) Furthermore, as shown in
(26) An embodiment of the present disclosure further provides another design manner for the pressure linking member 102. As shown in
(27) Furthermore, as shown in
(28) The pressure linking member 102 shown in
(29) Furthermore, by taking the pressure linking member 102 shown in
(30) In this way, when the first gas guiding channel 51 is blocked by foreign, or when the air outlet of the first gas guiding channel 51, i.e., a third air outlet, is relatively narrow, the pressure in the second gas guiding channel 52 which communicates with the first gas guiding channel 51 increases. When the pressure in the second gas guiding channel 52 is larger than a preset threshold, two membrane flaps among the bionic membrane flaps 53 open. Thus, the second gas guiding channel 52 acts as a standby passage for the first gas guiding channel 51. This alleviates or avoids problems like a lack of gas flow of the first gas guiding channel 51 or a breakpoint in the first gas guiding channel 51, and thus ensures that the air curtain body 12 discharges a gas flow continuously and uniformly.
(31) Optionally, the bionic membrane flaps 53 can be made from rubber.
(32) Furthermore, as shown in
(33) In this way, the second gas guiding channel 52 can continuously output the gas flow. Thus, it is possible to avoid problems like a pulsed gas flow which results from closing of the bionic membrane flaps 53 due to their own elasticity.
(34) When it is necessary to close the second gas guiding channel 52, a reset screw 55 is arranged at the bottom of the air curtain body 12 at a position corresponding to the linking buckle 54, as shown in
(35) Furthermore, as shown in
(36) In particular, as shown in
(37) When the bionic membrane flaps 53 open (i.e., the second gas guiding channel 52 is in use), the pressure in the second gas guiding channel 52 increases. The pressure in the third gas guiding channel 61 which communicates with the second gas guiding channel 52 increases accordingly, thus pushing the electrically conductive ball 62 away from the first electrically conductive plate 63 and the second electrically conductive plate 64. In this case, the electrically conductive circuit formed by the electrically conductive ball 62, the indicator light 65, and the power supply is disconnected, The indicator light 65 turns off, indicating to the operating staff that currently the second gas guiding channel 52 is in use.
(38) Optionally, as shown in
(39) To this end, embodiments of the present disclosure provide an air curtain device. The air curtain device particularly comprises a pressure limiting module, and an air curtain body which communicates with the pressure limiting module. The pressure limiting module is provided with a pressure limiting chamber. The pressure limiting chamber has an air inlet which communicates with a gas source, and a first air outlet which communicates with the air curtain body. The pressure limiting chamber is provided with a pressure linking member. The pressure linking member is capable of changing a cross-sectional area of the first air outlet through which the gas flow passes in accordance with variation of pressure in the pressure limiting chamber, so that the gas flow output from the first air outlet has a pressure which is kept in a preset range. In this way, since the cross-sectional area of the first air outlet through which the gas flow passes is kept in a certain range, the gas flow output from the first air outlet has a pressure which can also be kept in a preset range, which ensures a stable flux for the gas flow output from the air curtain device, and increases the yield for fabricating the array substrate.
(40) In the context of the present disclosure, the specific features, structures, materials, or characteristics can be combined appropriately in any one or more embodiments or examples.
(41) Apparently, the person with ordinary skill in the art can make various modifications and variations to the present disclosure without departing from the spirit and the scope of the present disclosure. In this way, provided that these modifications and variations of the present disclosure belong to the scopes of the claims of the present disclosure and the equivalent technologies thereof, the present disclosure also intends to encompass these modifications and variations.