Multilayer wiring board and manufacturing method for the multilayer wiring board

Abstract

A manufacturing method for a multilayer wiring board includes: forming a groove on a surface of a first thermoplastic resin board; forming a modified layer made of resin having a melting point lower than a melting point of resin constituting the first thermoplastic resin board, by applying light to a region of the surface of the first thermoplastic resin board other than a region around the groove; filling the groove of the first thermoplastic resin board with conductive material having fluidity; and bonding a second thermoplastic resin board to the surface of the first thermoplastic resin board, on which the modified layer is formed, by thermocompression bonding.

Claims

1. A manufacturing method for a multilayer wiring board, the manufacturing method comprising: forming a groove on a surface of a first thermoplastic resin board; forming a modified layer made of resin having a melting point lower than a melting point of resin constituting the first thermoplastic resin board, by applying light to a region of the surface of the first thermoplastic resin board other than a region around the groove; filling the groove of the first thermoplastic resin board with conductive material having fluidity; and bonding a second thermoplastic resin board to the surface of the first thermoplastic resin board, on which the modified layer is formed, by thermocompression bonding, wherein a width in plan view of the region around the groove between the groove and the region of the surface of the first thermoplastic resin board other than the region around the groove is 10 m or more.

2. The manufacturing method according to claim 1, wherein the second thermoplastic resin board is heated to a temperature that is higher than the melting point of the resin constituting the modified layer and that is lower than the melting point of the resin constituting the first thermoplastic resin board, in the thermocompression bonding.

3. The manufacturing method according to claim 1, wherein the groove is formed by repeatedly applying ultraviolet laser light having a wavelength of 250 nm or less and having power of 1 W or less per appliance of light.

4. The manufacturing method according to claim 3, wherein the modified layer is formed by applying the ultraviolet laser light used as the light.

5. The manufacturing method according to claim 4, wherein the modified layer is formed by applying the ultraviolet laser light used as the light only once.

6. The manufacturing method according to claim 1, wherein a distance between the groove and the modified layer is 10 m or more.

7. The manufacturing method according to claim 1, wherein a width in plan view of the region around the groove between the groove and the region of the surface of the first thermoplastic resin board other than the region around the groove is 10 m or more and 50 m or less.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) Features, advantages, and technical and industrial significance of exemplary embodiments of the invention will be described below with reference to the accompanying drawings, in which like numerals denote like elements, and wherein:

(2) FIG. 1 is a sectional view illustrating a manufacturing method for a multilayer wiring board according to a first embodiment of the invention;

(3) FIG. 2 is a sectional view illustrating the manufacturing method according to the first embodiment of the invention;

(4) FIG. 3 is a photomicrograph illustrating a state where a trace groove of a first board according to the first embodiment of the invention is filled with conductive ink;

(5) FIG. 4 is a photomicrograph illustrating a state where a trace groove of a first board according to a comparative example is filled with conductive ink;

(6) FIG. 5 is a sectional view illustrating the manufacturing method according to the first embodiment of the invention;

(7) FIG. 6 is a plan view corresponding to FIG. 5;

(8) FIG. 7 is a sectional view illustrating the manufacturing method according to the first embodiment of the invention;

(9) FIG. 8 is a sectional view illustrating the manufacturing method according to the first embodiment of the invention;

(10) FIG. 9 is a sectional view illustrating the manufacturing method according to the first embodiment of the invention;

(11) FIG. 10 is a modified example of the manufacturing method illustrated in FIG. 8; and

(12) FIG. 11 is a modified example of the first board.

DETAILED DESCRIPTION OF EMBODIMENTS

(13) Hereinafter, example embodiments of the invention will be described in detail with reference to the accompanying drawings. However, the invention is not limited to the following embodiments. The following description and the accompanying drawings will be simplified as appropriate in order to provide a clear explanation.

(14) With reference to FIG. 1 to FIG. 9, a manufacturing method for a multilayer wiring board according to a first embodiment of the invention will be described. FIG. 1, FIG. 2, FIG. 5, and FIG. 7 to FIG. 9 are sectional views illustrating the manufacturing method according to the first embodiment. FIG. 3 is a photomicrograph illustrating a state where a trace groove of a first board according to the first embodiment of the invention is filled with conductive ink. FIG. 4 is a photomicrograph illustrating a state where a trace groove of a first board according to a comparative example is filled with conductive ink. FIG. 6 is a plan view corresponding to FIG. 5.

(15) First, as illustrated in FIG. 1, a flat first board 10 made of thermoplastic resin such as liquid crystal polymer resin, polyimide resin, polyamide-imide resin, or polyether ether ketone resin is prepared. The thickness of the first board 10 is, for example, about 30 n to 300 m.

(16) Next, a first surface of the first board 10 is repeatedly subjected to scantling while laser light is applied to the first surface, whereby trace grooves 11 are formed as illustrated in FIG. 2. In an example illustrated in FIG. 2, three trace grooves 11 are formed. The depth of each trace groove 11 is, for example, about 20 m to 200 m. As the laser light, low-power ultraviolet laser light having a wavelength of 250 nm or less is preferably used. Specifically, an excimer laser having power of 1 W or less per scan is preferably used. Under such conditions, the first surface of the first board 10 is cut by, for example, about 0.3 m per scan. Thus, in order to form each trace groove 11 having a depth of 30 m the first surface of the first board 10 is subjected to scanning about 100 times, for example.

(17) By using the ultraviolet laser light having a wavelength of 250 nm or less and having power of 1 W or less per scan, a hydrophilic modified layer 12a is formed on the surface (the side walls and the bottom surface) of each trace groove 11. Thus, when the trace grooves 11 are filled with conductive ink in a step performed later, the conductive ink spreads into every corner of each trace groove 11. As a result, traces 13 (see FIG. 7) that conform to the shapes of the trace grooves 11 are formed. Further, the adhesion between the trace grooves 11 and the traces 13 is improved. FIG. 3 illustrates a state where the trace groove 11 (having a width of 50 m) having a surface on which the hydrophilic modified layer is formed is filled with the conductive ink. The trace groove 11 has satisfactory wettability, and thus the conductive ink spreads to conform to the shape of the trace groove 11.

(18) On the other hand, when the wavelength of laser light is longer than 250 nm, or when the power of laser light per scan is greater than 1 W, the hydrophilic modified layer 12a is not formed and the surface of the trace groove 11 is carbonized. Once the surface of the trace groove 11 is carbonized, it is difficult to make the surface of the trace groove 11 hydrophilic. FIG. 4 illustrates a state where a trace groove (having a width of 50 m) having a carbonized surface is filled with conductive ink. The wettability of the trace groove is poor, and thus the conductive ink fails to spread to conform to the shape of the trace groove.

(19) Next, the first surface of the first board 10, on which the trace grooves 11 are formed, is subjected to scanning only once while laser light is applied to the first surface, whereby a modified layer 12b is formed as illustrated in FIG. 5. The same laser light as that used to form the trace grooves 11 is preferably used. In this case, it is possible to simultaneously form the trace grooves 11 illustrated in FIG. 2 and the modified layer 12b illustrated in FIG. 5.

(20) The modified layer 12b is a film similar to the modified layers 12a, and is hydrophilic. Specifically, due to the laser light application, bonds between polymers in the resin constituting the modified layers 12a and the modified layer 12b are broken, and thus the melting point of the resin constituting the modified layers 12a, 12b is lower than the melting point of the resin constituting the first board 10. For example, if a board made of liquid crystal polymer resin having a melting point of 300 C. is modified in the aforementioned manner, the melting point is reduced by about 10 C. Meanwhile, a hydrophilic group such as a hydroxyl group is bonded to the broken portions. Thus, the modified layers 12a and the modified layer 12b are hydrophilic.

(21) FIG. 6 is a plan view corresponding to FIG. 5. In other words, FIG. 5 is a sectional view taken along the line V-V in FIG. 6. As illustrated in FIG. 5 and FIG. 6, the modified layer 12b formed on the first surface of the first board 10 is not formed in regions around the trace grooves 11. Specifically, the distance between each trace groove 11 and the modified layer 12b is preferably equal to or greater than 10 m, and is, for example, about 50 m. The effects of this configuration will be described later.

(22) The number of times of laser light scanning performed to form the modified layer 12b may be two or more. However, as described above, the first surface of the first board 10 is cut by, for example, 0.3 m per scan. Therefore, the number of times of laser light scanning is preferably as small as possible, and most preferably one.

(23) Next, the entirety of each trace groove 11 is filled with conductive ink containing fine particles of silver, copper, or the like and then the conductive ink is dried, whereby the traces 13 are formed in the trace grooves 11 as illustrated in FIG. 7. Because the hydrophilic modified layers 12a are formed on the surfaces of the trace grooves 11, the conductive ink spreads into every corner of each trace groove 11. When it is not possible to supply a required amount of conductive ink into the trace grooves 11 at one time, the conductive ink may be supplied again into the trace grooves 11 after the conductive ink first supplied is dried. The modified layer 12b may be formed after the formation of the traces 13 instead of being formed before the formation of the traces 13.

(24) Next, as illustrated in FIG. 8, a second surface of a second board 20 is laminated on the first surface of the first board 10. Trace grooves 21a and a via hole 21b are formed on a first surface of the second board 20. The trace grooves 21a and the via hole 21b are formed in the same manner as that for forming the trace grooves 11 of the first board 10. Thus, modified layers 22a are formed on the surface (the side walls and the bottom surface) of each trace groove 21a and on the peripheral wall surface of the via hole 21b. Further, a modified layer 22b is formed on the first surface of the second board 20. The modified layer 22b is formed in the same manner as that for forming the modified layer 12b of the first board 10.

(25) Next, the trace grooves 21a and the via hole 21b of the second board 20 are filled with the conductive ink and then the conductive ink is dried, whereby traces 23a and a buried via 23b are formed respectively in the trace grooves 21a and the via hole 21b as illustrated in FIG. 9. Because the hydrophilic modified layers 22a are formed on the surfaces of the trace grooves 21a and the surface of the via hole 21b, the conductive ink spreads into every corner of each of the trace grooves 21a and the via hole 21b. Note that, in order to form thick traces, a large-diameter via hole, large lands (not illustrated in the drawings), or the like, it is preferable to use conductive ink (also referred to as conductive paste) having a high viscosity and containing conductive material at a high volume ratio.

(26) Then, a third board and the subsequent boards are sequentially laminated in the same manner as that for laminating the second board 20 on the first board 10. After that, all the boards are bonded together at one time through thermocompression bonding. In this way, a multilayer wiring board is manufactured. At the time of thermocompression bonding, the boards are heated to a temperature that is higher than the melting point of the resin constituting the modified layer 12b and the modified layer 22b formed between the boards and that is lower than the melting point of the thermoplastic resin constituting the boards such as the first board 10 and the second board 20.

(27) Thus, at the time of thermocompression bonding, the first board 10 and the second board 20 are not melted and only the modified layer 12b and the modified layer 22b formed between the boards are melted. The modified layer 12b and the modified layer 22b, which are melted at the time of thermocompression bonding, are not formed in the regions around the trace grooves 11, the trace grooves 21a, and the via hole 21b. As a result, at the time of thermocompression bonding, it is possible to effectively reduce the occurrence of deformation of the trace grooves 11, the trace grooves 21a, the via hole 21b, and the like. The modified layers 12b, 22b between the boards are solidified after being once melted. Therefore, the modified layers 12b, 22b remain in the manufactured multilayer wiring board.

(28) Next, with reference to FIG. 10 and FIG. 11, other embodiments of the invention will be described. FIG. 10 is a modified example of the manufacturing method illustrated in FIG. 8. As illustrated in FIG. 10, before the second surface of the second board 20 is laminated on the first surface of the first board 10, a modified layer 22c may be formed on the second surface of the second board 20. As in the case where the modified layer 12a is not formed in the regions around the trace grooves 11, the modified layer 22c is not formed in a region around the via hole 21b.

(29) This configuration makes it possible to further improve the adhesion between the boards while effectively reducing the occurrence of deformation of the trace grooves 11, the trace grooves 21a, the via hole 21b and the like at the time of thermocompression bonding as in the first embodiment. The other configurations of this modified example are the same as those in the first embodiment, and thus the description on the other configurations will not be provided below.

(30) FIG. 11 illustrates a modified example of the first board 10. As illustrated in FIG. 11, two sub-boards, that is, a sub-board 10a and a sub-board 10b may constitute the first board 10 according to the first embodiment. The sub-board 10a is a flat board, and a modified layer 12c is formed on the entirety of a first surface of the sub-board 10a. The modified layer 12c is formed in the same manner as that for forming the modified layer 12b. On the other hand, through-holes are formed in the sub-board 10b. By laminating the sub-board 10b on the sub-board 10a, the trace grooves 11 are formed.

(31) In the modified example illustrated in FIG. 11, the depth of each trace groove 11 is determined by the thickness of the sub-board 10b. Thus, the depth of each trace groove 11 is more easily adjusted in this modified example than in the first embodiment. The other configurations of this modified example are the same as those in the first embodiment, and thus the description on the other configurations will not be provided below.

(32) The invention is not limited to the aforementioned embodiments, and the aforementioned embodiments of the invention may be modified as needed within the scope of the invention. For example, trace grooves, a via hole, and modified layers on a surface of a board may be formed by subjecting the board to one-shot exposure by using a mask and an ultraviolet lamp instead of subjecting the board to laser light scanning. However, in terms of cost, laser light scanning is more advantageous because an expensive mask is unnecessary.