LTCC ELECTRONIC DEVICE UNIT STRUCTURE
20220367363 · 2022-11-17
Assignee
Inventors
Cpc classification
H01L23/3178
ELECTRICITY
H01P11/003
ELECTRICITY
H05K3/4629
ELECTRICITY
H05K3/107
ELECTRICITY
International classification
H01L23/538
ELECTRICITY
Abstract
A low temperature co-fired ceramic (LTCC) electronic device includes a template layer, a base layer and a conductor. The template layer and the base layer are ceramic layers. The template layer has an electrode pattern formed by a hollow groove. A depth of the hollow groove is between 10 μm and 120 μm, and a width of the hollow groove is above 80 μm. The base layer is closely overlapped with the template layer. An overlapping area range of the base layer and the template layer at least covers the electrode pattern. The conductor is filled in the hollow groove of the electrode pattern. A filling thickness of the conductor is above 10 μm.
Claims
1. A low temperature co-fired ceramic (LTCC) electronic device unit structure comprising: a template layer, being a ceramic layer, having an electrode pattern formed by a hollow groove, a depth of the hollow groove being between 10 μm and 120 μm, and a width of the hollow groove being above 80 μm; a base layer, being a ceramic layer, closely overlapped with the template layer, an overlapping area range of the base layer and the template layer at least covering the electrode pattern; and a conductor, filled in the hollow groove, and a filling thickness of the conductor being above 10 μm.
2. The LTCC electronic device unit structure of claim 1, wherein a thickness of the template layer is between 10 μm and 120 μm.
3. The LTCC electronic device unit structure of claim 1, wherein a thickness of the base layer is between 10 μm and 250 μm.
4. The LTCC electronic device unit structure of claim 1, wherein the hollow groove penetrates through an upper surface and a lower surface of the template layer.
5. The LTCC electronic device unit structure of claim 1, wherein the conductor is formed by a liquid conductor precursor, and the conductor precursor contains conductive metal and a solvent.
6. The LTCC electronic device unit structure of claim 5, wherein a material the conductive metal is selected from one or a mixture of gold, silver and an alloy thereof.
7. The LTCC electronic device unit structure of claim 5, wherein the conductor precursor is conductive glue with silver content of more than 80%.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION
[0013] A preferred embodiment of the improved low temperature co-fired ceramic (LTCC) electronic device unit structure with an electrode thickness of 40 μm of the invention are depicted in the drawings. To make the invention more understandable, some elements in the drawings are not drawn in an accurate scale and sizes of some elements are enlarged with respect to other elements. For the sake of clearness, irrelative details are not drawn.
[0014] Please refer to
[0015] The base layer 200 is overlapped on the lower surface 102 of the template layer 100 by a laminating machine. An overlapping area range of the base layer 200 and the template layer 100 covers the electrode pattern to close the lower opening of the hollow groove 110. The base layer 200 provides support to the template layer 100 and enhance the overall structural strength. In the embodiment, a thickness of the base layer 200 is substantially identical to a thickness of the template layer 100.
[0016] Please refer to
[0017] In sum, the LTCC electronic device unit structure of the invention depends on a required electrode thickness of an electronic device to select a template layer with a thickness that is the same as or slightly greater than the required electrode thickness, cuts hollow grooves on the template layer to form an electrode pattern, presses and overlaps a base layer on a surface of the template layer, fills the hollow grooves with a conductive material with specific quantity, and finally bakes and dries the conductive material to form a conductor with a required thickness in the hollow grooves. As a result, an electrode pattern with an electrode thickness can be obtained. Accordingly, the invention is suitable for producing a high power electronic device with a higher electrode thickness.
[0018] It will be appreciated by persons skilled in the art that the above embodiment has been described by way of example only and not in any limitative sense, and that various alterations and modifications are possible without departure from the scope of the invention as defined by the appended claims.