FROST-PREVENTION FILM SYSTEM OF LARGE-APERTURE REFLECTING OPTIC INFRARED TELESCOPE USED IN EXTREMELY LOW TEMPERATURE ENVIRONMENT AND PREPARATION METHOD THEREOF

Abstract

A frost-prevention film system of a large-aperture reflecting optic infrared telescope used in an extremely low temperature environment and a preparation method thereof is disclosed. The frost-prevention film system has the following structure: a transparent conducting film layer, an intermediate insulation layer, a reflecting film layer and an outermost medium protection layer in sequence from a main telescope mirror surface, wherein both sides of the transparent conducting film layer are provided with conducting electrodes. The steps are as follows: (1) a preparation step; (2) a step of plating a conducting film; (3) a step of plating an intermediate insulation layer; (4) a step of plating a reflecting film layer; (5) a step of plating an outermost medium protection layer; and (6) a step of plating conducting electrodes.

Claims

1. A frost-prevention film system of a large-aperture reflecting optic infrared telescope used in an extremely low temperature environment, wherein a transparent conducting film is integrated on a reflector surface of the reflecting optic telescope, and the structure of the transparent conducting film is as follows: a transparent conducting film layer, an intermediate insulation layer, a reflecting film layer and an outermost medium protection layer in sequence from a main telescope surface; and both sides of the transparent conducting film layer are provided with conducting electrodes.

2. The frost-prevention film system of a large-aperture reflecting optic infrared telescope used in an extremely low temperature environment according to claim 1, wherein indium tin oxide is used in the transparent conducting film layer; silicon dioxide is used in the intermediate insulation layer; aluminum or argentum is used in the reflecting film layer; silicon dioxide, tantalum pentoxide and other dielectric oxides are used in the outermost medium protection layer; and the conducting electrodes are made of copper.

3. The frost-prevention film system of a large-aperture reflecting optic infrared telescope used in an extremely low temperature environment according to claim 1, wherein a transparent conducting film layer thickness is 180 nm; an intermediate insulation layer thickness is 200 nm; a reflecting film layer thickness is 100 nm; the outermost medium protection layer is a single layer or in a structure of collocation by film layers with high and low refractive indexes; and a film layer of the conducting electrodes is 300 nm.

4. A preparation method of the frost-prevention film system of a large-aperture reflecting optic infrared telescope used in an extremely low temperature environment according to claim 1, comprising: (1) preparing by (1)-1. cleaning all related parts in a vacuum chamber; (1)-2. adding related film materials; (1)-3. placing in an optic reflecting lens to be plated; and (1)-4. vacuumizing the vacuum chamber; (2) plating the conducting film by evaporating conducting film material after baking, wherein the conducting film material is indium tin oxide and the monitoring thickness is 180 nm; (3) plating the intermediate insulation layer, wherein the plating material of the intermediate insulation layer is silicon dioxide, and the monitoring thickness is 200 nm; (4) plating a reflecting film layer, wherein the plating material of the reflecting film layer is aluminum or argentum, and the monitoring thickness is 100 nm; (5) plating the outermost medium protection layer, wherein the plating material of the outermost medium protection layer is silicon dioxide, or silicon dioxide and tantalum pentoxide, and the outermost medium protection layer is a single layer or is collocated by film layers with high and low refractive indexes; (6) plating the conducting electrodes, wherein the conducting electrodes are made of copper, and the monitoring thickness is 300 nm.

5. The preparation method of the frost-prevention film system of a large-aperture reflecting optic infrared telescope used in an extremely low temperature environment according to claim 4, wherein the adding related to film materials in step (1)-2 in the preparing step refers to respectively adding indium tin oxide, silicon dioxide, aluminum and copper film materials into an oxygen-free copper crucible; and the vacuum degree of vacuumizing the vacuum chamber in the step (1)-4 is superior to 610.sup.4 Pa.

6. The preparation method of the frost-prevention film system of a large-aperture reflecting optic infrared telescope used in an extremely low temperature environment according to claim 4, wherein the technical conditions of the steps (2) to (6) are respectively as follows: (2) the step of plating the conducting film further includes after keeping constant under the baking temperature of 180 C. for 3 h, evaporating the conducting film material, wherein the conducting film material is indium tin oxide, the indium tin oxide comprises 90% In.sub.2O.sub.3 and 10% S.sub.nO.sub.2 by mass percent, a vacuum degree is superior to 610.sup.4 Pa, 40 SCCM oxygen is inflated in a Hall ion source, an anode voltage of an ion source is 180V, and an anode current is 6 A; (3) the step of plating intermediate insulation layer plating step wherein the plating material of the intermediate insulation layer is silicon dioxide, a vacuum degree is superior to 610.sup.4 Pa, 40 SCCM oxygen is inflated in the Hall ion source, the anode voltage of the ion source is 180V, and the anode current is 6 A; (4) the step of plating the reflecting film wherein the plating material of the reflecting film is aluminum or argentum, and the vacuum degree is superior to 610.sup.4 Pa, (5) the step of plating the outermost medium protection layer wherein the material of the outermost medium protection layer is silicon dioxide, or silicon dioxide and tantalum pentoxide, the vacuum degree is superior to 610.sup.4 Pa, 40 SCCM oxygen is inflated in the Hall ion source, the anode voltage of the ion source is 180V, and the anode current is 6 A; and (6) the step of plating the conducting electrodes: the conducting electrodes are made of copper, and the vacuum degree is superior to 610.sup.4 Pa.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0039] FIG. 1-a is a structure diagram of a frost-prevention reflecting film system in embodiment 1;

[0040] FIG. 1-b is a structure diagram of a frost-prevention reflecting film system in embodiment 2;

[0041] FIG. 2-a is spectral reflection curve of a frost-prevention aluminum reflector;

[0042] FIG. 2-b is spectral reflection curve of a frost-prevention Ag reflecting film system;

[0043] FIG. 3 is a transmitted spectrum curve of a transparent conducting film; and

[0044] FIG. 4 is comparison between the frost-prevention reflecting film system and a spectral reflection curve of using a conducting film on an external surface of an ordinary aluminum telescope.

DETAILED DESCRIPTION

[0045] The present invention provides a reflecting film system of a reflecting optic telescope which is integrated with a transparent conducting film. The structure of the transparent conducting film is as follows: a transparent conducting film layer, an intermediate insulation layer, a reflecting film layer and an outermost medium protection layer in sequence from a reflector surface; and both sides of the transparent conducting film layer are provided with conducting electrodes.

[0046] The present invention is described in details hereinafter through specific embodiments.

Embodiment 1

[0047] In the embodiment, the structure of a frost-prevention reflecting film system is rationally designed according to the spectral characteristic of a transparent conducting film (ITO) and in the combination of the working band of a 2.5 m telescope in the Antarctic, thereby guaranteeing the spectral reflection performance of the film system while having the function of frost-prevention. The plating process of the frost-prevention reflecting film system comprises: plating a conducting film, plating an insulation layer and a reflecting film system, and plating electrodes. An optic reflecting film system with the frost-prevention function is provided, and the structure of the optic reflecting film system may refer to FIG. 1, wherein 1 refers to optic reflecting lens, 2 refers to conducting film, 3 refers to intermediate insulation layer, 4 refers to aluminum film, 5 refers to outermost medium protection layer, and 6 refers to conducting electrode.

[0048] The preparation method of the optic reflecting film system (i.e., frost-prevention reflecting film system) with the frost-prevention function is specifically as follows:

[0049] (1) a preparation step of: cleaning a vacuum chamber, a baffle, a clamp and so on, respectively adding indium tin oxide, silicon dioxide, aluminum and copper film materials into a crucible, wiping an optic reflecting lens by a degrease cloth dipped with a mixed solvent of absolute ethyl alcohol and diethyl ether, wiping the lens cleanly, placing the lens into the clamp and then putting the lens into the vacuum chamber;

[0050] (2) a step of vacuumizing and raising the temperature of the optic reflecting lens: starting up a vacuum pump to vacuumize and gradually raise the temperature to 180 C., wherein the step of raising the temperature and the constant temperature time are determined according to the size and shape of the optic lens; and

[0051] (3) a step of plating films in vacuum: wherein the step of plating films comprises the following sub-steps:

[0052] A. a step of plating the conducting film: after keeping constant under a baking temperature of 180 C. for 3 h, evaporating the conducting film material, wherein the technical condition is that: the conducting film material is indium tin oxide (the mass ratio is 90% In.sub.2O.sub.3 and 10% S.sub.nO.sub.2), the vacuum degree is superior to 6104 Pa, the monitoring thickness of the film layer is 180 nm, 40 SCCM oxygen is inflated in a Hall ion source, the anode voltage of the ion source is 180V, and the anode current is 6 A;

[0053] B. a step of plating an insulation layer and a reflecting film: wherein the plating material of the intermediate insulation layer is silicon dioxide, the vacuum degree is superior to 610.sup.4 Pa, the monitoring thickness of the film layer is 200 nm, 40 SCCM oxygen is inflated in the Hall ion source, the anode voltage of the ion source is 180V, and the anode current is 6 A; and the plating material of the reflecting film is aluminum, the vacuum degree is superior to 610.sup.4 Pa, the monitoring thickness of the film layer is 100 nm, a silicon dioxide protection layer is plated after the aluminum film is finished, the vacuum degree is superior to 610.sup.4 Pa, the monitoring thickness of the film layer is 180 nm, 40 SCCM oxygen is inflated in a Hall ion source, the anode voltage of the ion source is 180V, and the anode current is 6 A; and

[0054] C. a step of plating conductive electrodes: wherein the conducting electrodes are made of copper, the vacuum degree is superior to 610.sup.4 Pa, and the monitoring thickness of the film layer is 300 nm.

[0055] After the plating is finished, air needs to be inflated into the vacuum chamber after the reflector elements are completely cooled, and then the door of the vacuum chamber is opened to take out the plated optic reflecting lens.

[0056] FIG. 2-a is a spectral reflection curve of the prepared frost-prevention aluminum reflector; the spectral reflection efficiency information of the frost-prevention aluminum reflector can be seen from the figure, i.e., the average value of the spectral reflection rate of the frost-prevention aluminum reflector is superior to 89% in the band scope ranging from 400 nm to 2000 nm.

[0057] An effect test is conducted on a spherical experimental telescope plated with the frost-prevention reflecting film system.

[0058] The calibre of the spherical experimental telescope is 520 mm, the precision of the surface shape measured by a 4D interferometer is as follows: PV (peak-valley value)=0.11724, and RMS (root-mean-square value)=0.0155, wherein is a wave length detected, which is 632.8 nm.

[0059] Different heating powers (20 W and 30 W) are respectively implemented on the frost-prevention reflector: and the change conditions of the surface shape under different heating power conditions are measured by the 4D interferometer, wherein the results are as follows:

[0060] (1) the heating power is 20 W, after keeping the heating power for 3 h, the surface shape of the spherical telescope is measured by the 4D interferometer, and the result shows that:

[0061] the precision is as follows: PV (peak-valley value)=0.18132, and RMS (root-mean-square value)=0.02222;

[0062] (2) the heating power is 30 W, after keeping the heating power for 3 h, the surface shape of the spherical telescope is measured by the 4D interferometer, and the result shows that:

[0063] the precision is as follows: PV (peak-valley value)=0.24878, and RMS (root-mean-square value)=0.0289.

[0064] It can be known from the frosting condition and the temperature rise condition of the telescope mirror surface that: the frost-prevention power required by the 520 mm spherical experimental telescope is about 20 W; and when the heating power is 30 W, the spherical experimental telescope may still keep a better surface shape precision.

[0065] FIG. 4 is comparison between the frost-prevention reflecting film system and a spectral reflection curve of using a conducting film on an external surface of an ordinary aluminum telescope.

[0066] In conclusion, the surface shape precision of the optic frost-prevention reflector obtained in the embodiment is not affected or is rarely affected on the premise of having the frost-prevention function

Embodiment 2

[0067] In the embodiment, the structure of the optic frost-prevention reflector proposed is the same as that in embodiment 1, but the difference is that Ag is used as the material of the reflecting layer, which has higher reflecting efficiency in the visible light and reflection efficiency band. In the same way, the structure of the frost-prevention reflecting film system is rationally designed, hereby guaranteeing the spectral reflection performance of the Ag film system while having the function of frost-prevention. The plating process of the frost-prevention reflecting film system comprises: plating a conducting film, plating an insulation layer and an Ag reflecting film system, and plating electrodes. The structure of the frost-prevention reflecting film system may refer to FIG. 1-b, wherein 1 refers to optic reflecting lens, 2 refers to conducting film, 3 refers to intermediate insulation layer, 4 refers to connection layer, 5 refers to Ag film system, and 6 refers to conducting electrode.

[0068] The preparation method of the Ag reflecting film system with the frost-prevention function is specifically as follows:

[0069] (1) cleaning a vacuum chamber, a baffle, a clamp and so on, respectively adding indium tin oxide, silicon dioxide, Ag, aluminium oxide, and tantalum pentoxide film materials, wiping an optic reflecting lens by a degrease cloth dipped with a mixed solvent of absolute ethyl alcohol and diethyl ether, wiping the lens cleanly, placing the lens into the clamp and then putting the lens into the vacuum chamber;

[0070] (2) a step of vacuumizing and raising the temperature of the optic reflecting lens: starting up a vacuum pump to vacuumize and gradually raise the temperature to 180 C., wherein the step of raising the temperature and the constant temperature time are determined according to the size and shape of the optic lens; and

[0071] (3) a step of plating films in vacuum: wherein the step of plating films comprises the following sub-steps:

[0072] A. a step of plating the conducting film: after keeping constant under a baking temperature of 180 C. for 3 h, evaporating the conducting film material, wherein the technical condition is that: the conducting film material is indium tin oxide (the mass ratio is 90% In.sub.2O.sub.3 and 10% S.sub.nO.sub.2), the vacuum degree is superior to 6104 Pa, the monitoring thickness of the film layer is 180 nm, 40 SCCM oxygen is inflated in a Hall ion source, the anode voltage of the ion source is 180V, and the anode current is 6 A;

[0073] B. a step of plating an insulation layer and a reflecting film: wherein the plating material of the intermediate insulation layer is silicon dioxide, the vacuum degree is superior to 610.sup.4 Pa, the monitoring thickness of the film layer is 200 nm, 40 SCCM oxygen is inflated in the Hall ion source, the anode voltage of the ion source is 180V, and the anode current is 6 A;

[0074] C. the step of plating the Ag reflecting film: the connection layer is made of aluminium oxide, the vacuum degree is superior to 610.sup.4 Pa, the thickness of the connection layer is 10 nm, then the Ag film is plated, the vacuum degree is superior to 610.sup.4 Pa, the evaporation speed rate is higher than 10 nm/s, the protection layer composed of silicon dioxide and tantalum pentoxide is plated after completion, the vacuum degree is superior to 610.sup.4 Pa, the monitoring thickness of the film layer is determined by the design of the film system, 40 SCCM oxygen is inflated in the Hall ion source, the anode voltage of the ion source is 180V, and the anode current is 6 A; and

[0075] D. a step of plating conductive electrodes: wherein the conducting electrodes are made of copper, the vacuum degree is superior to 610.sup.4 Pa, and the monitoring thickness of the film layer is 300 nm.

[0076] After the plating is finished, air needs to be inflated into the vacuum chamber after the Ag reflector elements are completely cooled, then the door of the vacuum chamber is opened to take out the plated optic reflecting lens.

[0077] FIG. 2-b is a spectral reflection curve of the frost-prevention Ag reflecting film system prepared in the embodiment; the spectral reflection efficiency information of the frost-prevention Ag reflecting film system can be seen from the figure, i.e., the average value of the spectral reflection rate of the frost-prevention Ag reflector is superior to 98% in the band scope ranging from 400 nm to 2000 nm.