Integrated magnetometer and method of detecting a magnetic field
11614500 · 2023-03-28
Assignee
Inventors
Cpc classification
G01R33/091
PHYSICS
G07D7/04
PHYSICS
International classification
Abstract
An integrated magnetometer comprises at least one field sensor unit including a first transducer element for generating, in response to a detected magnetic field, a first electrical output signal. At least one gradient sensor unit of the magnetometer includes at least a pair of second transducer elements which are arranged to detect the magnetic field at two different locations and generate, in response to the detected magnetic field, a second electrical output signal. The first and second transducer elements are formed on a common substrate and are encompassed by a common protective layer and/or housing.
Claims
1. An integrated magnetometer comprising: at least one field sensor unit including a first transducer element for generating, in response to a detected magnetic field, a first electrical output signal; at least one gradient sensor unit including at least a pair of second transducer elements which are arranged to detect the magnetic field at two different locations and adapted to generate, in response to the detected magnetic field, a second electrical output signal, the first and second transducer elements formed on a common substrate; and a plurality of terminals for connecting the integrated magnetometer to external components, first terminals are connected to the at least one field sensor unit and second terminals are connected to the at least one gradient sensor unit, the first terminals are arranged in a pattern corresponding to a pattern of the second terminals rotated 180 degrees around a central axis of the substrate.
2. The integrated magnetometer according to claim 1, wherein the first and second transducer elements are encompassed by a common protective layer and/or housing.
3. The integrated magnetometer according to claim 2, wherein the first transducer element and/or the pair of second transducer elements include at least one magnetoresistive element.
4. The integrated magnetometer according to claim 3, wherein the first transducer element is arranged between the pair of second transducer elements in a scan direction of the magnetometer, the first and second transducer elements being aligned in the scan direction to form a first transducer group.
5. The integrated magnetometer according to claim 4, wherein at least one further transducer group is arranged on the common substrate.
6. The integrated magnetometer according to claim 2, wherein the housing is a surface mounted technology compatible housing.
7. The integrated magnetometer according to claim 2, wherein the substrate further includes electronic components for protecting the sensor and/or electronic components for performing signal processing.
8. The integrated magnetometer according to claim 1, wherein the first transducer element includes two magnetoresistive elements which are positioned adjacent to each other and which are electrically connected to form a half bridge.
9. The integrated magnetometer according to claim 1, wherein the two second transducer elements of the at least one gradient sensor unit include one magnetoresistive element each, which are positioned distanced from each other and are electrically connected to form a half bridge.
10. A magnetometer comprising: a substrate; at least one field sensor unit including a first transducer element formed on the substrate for generating, in response to a detected magnetic field, a first electrical output signal, and at least one gradient sensor unit including a pair of second transducer elements formed on the substrate and arranged to detect the magnetic field at two different locations and adapted to generate, in response to the detected magnetic field, a second electrical output signal, the first transducer element arranged between the pair of second transducer elements in a scan direction of the magnetometer, the first and second transducer elements being aligned in the scan direction to form a first transducer group.
11. The magnetometer according to claim 10, wherein the first transducer element is arranged directly between the pair of second transducer elements, the first transducer element and the pair of second transducer elements each centered along an axis extending in the scan direction.
12. The magnetometer according to claim 10, wherein a second one of the at least one field sensor includes a second first transducer element, and a second one of the at least one gradient sensor unit includes a second pair of second transducers, the second field sensor and the second gradient sensor form a second transducer group spaced apart from the first transducer group in a direction perpendicular to the scan direction, the first and second transduced groups measuring a respective one of a plurality of signal channels.
13. The magnetometer according to claim 10, wherein the entire first transducer element is arranged directly between the pair of second transducer elements.
14. A method of detecting a magnetic field using an integrated magnetometer having a field sensor unit and a gradient sensor unit comprising the steps of: with the field sensor unit including a first transducer element formed on a substrate, measuring a magnetic field strength at a first position of the integrated magnetometer and generating an absolute output signal; with the gradient sensor unit including a pair of second transducer elements formed on the substrate with the first transducer element arranged between and aligned with the pair of second transducer elements in a scan direction of the magnetometer, measuring the magnetic field strength at a second and a third position of the integrated magnetometer and calculating a differential signal; and evaluating the absolute output signal and the differential signal to generate a combined output signal.
15. The method according to claim 14, wherein the step of measuring the magnetic field strength at the first position and the step of measuring the magnetic field strength at the second and the third position are performed simultaneously.
16. The method according to claim 14, wherein the magnetic field to be detected is movable with respect to the integrated magnetometer.
17. The method according to claim 14, further comprising the step of generating a quality signal indicative of the quality of the measurement by comparing the absolute output signal and the differential signal.
18. The method according to claim 14, wherein the combined output signal is a reconstructed field signal which is corrected by cancelling interferences.
19. The method according to claim 14, wherein the magnetic field to be detected is generated by a magnetic safety feature of a document.
20. The method according to claim 14, wherein a plurality of groups formed by first and second transducer elements of the integrated magnetometer is used to measure a plurality of signal channels.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) The invention will now be described by way of example with reference to the accompanying Figures, of which:
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DETAILED DESCRIPTION OF THE EMBODIMENTS
(11) Technical solutions of the present disclosure will be described hereinafter in detail through embodiments and with reference to the attached drawings. In the specification, the same or the like reference numerals refer to the same or the like elements. The illustration of the embodiments of the present disclosure made with reference to the attached drawings is aimed to explain the general inventive concept of the present disclosure, not to be construed as a limitation of the present disclosure.
(12) In addition, in the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the disclosed embodiments. It will be apparent, however, that one or more embodiments may be practiced without these specific details. In other instances, well-known structures and devices are schematically shown in order to simplify the drawings.
(13) Referring to
(14) The diagram of
(15) By way of example, the banknote 100 may be moving in the direction 110 with a velocity of 1 m/s to 10 m/s. The magnetic gradient sensor 104 has two transducer elements 112A, 112B. Each of the transducer elements 112A, 112B detects a magnetic flux in the y-direction. When the magnetic source 102 is in the position A shown in
(16) When the banknote 100 containing the magnetic source 102 moves further in the direction 110, the measurable magnetic flux for the left-hand transducer element 112A becomes smaller, whereas the measurable magnetic flux for the right-hand side transducer element 112B increases. Because the measurement signal δ(t) represents the difference between the signals of the two transducer elements 112A and 112B, the configuration for positon B, where the magnetic source 102 is symmetric with respect to the transducer elements 112A, 112B, results in a zero signal.
(17) A further (positive) maximum of the curve 108 can be seen for position C, where the right-hand side transducer element 112B is in closest proximity to the magnetic source 102.
(18) The advantage of such a gradient measurement is the fact that inherent to the differential measurement disturbing magnetic fields do not impair the accuracy of the measurement. However, the signal amplitude is lower than for magnetic field sensors which detect the absolute value of the flux density.
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(20) Furthermore,
(21) In the shown example, there is not only one pair of transducer elements 112A and 112B, but a second pair of transducer elements 122A and 122B. The distance Δx between the transducer elements 112 and 122 determines the minimal lateral resolution between two magnetic features which are arranged along the x-direction. The output signals of the two pairs of transducer elements 112, 122 form channels, with each channel containing the information about a particular region in the x-direction.
(22) The amount of channels is not limited to one or two, also three channels or more are possible.
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(24) When using AMR magnetoresistive elements, such opposing reaction of the two resistors can be achieved by providing a different tilting direction of the barber poles arranged on the nickel iron strips. In case of GMR and TMR elements, different pinning directions of the pinned layers are used.
(25) With respect to signal evaluation, the magnetoresistive elements 512A, 512B may also be treated as a half-bridge (or voltage divider). At the connecting line between the first and second transducer elements 512A, 512B a central node 526 is connected via electrically conductive leads 534 to contact pads 528. Via the contact pads 528, the central node 526 may be connected to signal processing components (not shown).
(26) The arrangements shown in
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(28) The integrated magnetometer 600 is designed for detecting a two channel magnetic feature with the two separate parts of the feature being distanced apart by a channel distance 602. The channel distance 602 may for instance be 1.75 mm. The integrated magnetometer 600 comprises, for each of the two channels, a magnetic field sensor 604, 606, which comprises as transducer elements two magnetoresistive elements R.sub.H1, R.sub.H2 and R.sub.H3, R.sub.H4, respectively. The two magnetoresistive elements R.sub.H1, R.sub.H2 of the first magnetic field sensor 604 are arranged closely adjacent to each other, and the two magnetoresistive elements R.sub.H3, R.sub.H4 of the second magnetic field sensor 606 are arranged closely adjacent to each other. Thus, the magnetoresistive elements of each magnetic field sensor experience essentially the same magnetic flux to be measured. The voltage measured at the terminal U.sub.oH1 can be evaluated for generating a first output signal indicative of the absolute value of the magnetic field strength.
(29) Furthermore, the integrated magnetometer 600 comprises, for each of the two channels, a magnetic gradient sensor 608, 610, which comprises two magnetoresistive elements R.sub.G1, R.sub.G2 and R.sub.G3, R.sub.G4, respectively. The two magnetoresistive elements R.sub.G1, R.sub.G2 of the first magnetic gradient sensor 608 are arranged distanced apart from each other by a distance Δy, and the two magnetoresistive elements R.sub.G3, R.sub.G4 of the second magnetic field sensor 610 are also arranged distanced apart from each other by the distance Δy. Thus, the magnetoresistive elements of each magnetic gradient sensor work as a gradient sensor as explained above referring to
(30) According to the present disclosure, all transducer elements, the interconnecting electrically conductive leads 612 and the contact pads 614 are integrated on one common substrate 616 an are covered by a common protective layer and/or housing 618. In other words, the integrated magnetometer 600 combines a gradient sensor and a field sensor on one sensor chip.
(31) In order to meet various demands regarding the channel width and number, by combining channels also channel widths being an integer multiple of the channel distance can be realized. In the simplest case, the output signals of neighboring channels can be mixed by directly connecting them. However, individual half bridge signals or paired differential signals analog to a complete Wheatstone bridge may also be generated.
(32) In practice, larger channel widths and a smaller number of channels distributed over the length of the entire sensor array are often used to simplify evaluation. In such cases, the individual outputs of one or more integrated magnetometers can be connected directly to each other. Alternatively, two separate groups of channels, each using one or more connected channel outputs, with opposite signal polarity can be used to generate a differential signal. In order to obtain the same or opposite signal polarities required for this purpose, one can either select the direction of the auxiliary magnetic fields required for the operation of MR sensors accordingly or also operate adjacent integrated magnetometers with the same or opposite supply voltages.
(33) This solution allows the measurement of a high-resolution field signal and a gradient signal whose integral provides a reconstructed field signal with lower resolution but without interference. The advantages of both operating modes can thus be used together without disadvantages.
(34) Furthermore, as can be seen from
(35) The above-described concept enables optimized signal quality and information retrieval. The integration of a field sensor with a gradient sensor does not increase the space requirement as compared to the gradient sensor taken alone. No different sensor types are required for field and gradient measurement. This simplifies and reduces the cost of sensor production, warehousing, and logistics. The pin assignment of this surface-mount technology (SMT) package allows changing the operating mode without PCB modification. This simplifies the adaptation of sensor modules to customer requirements and increases the flexibility in development as well as in production. The inventive concept is in particular suitable for magnetoresistive transducer elements, AMR or TMR transducers.
(36) The operation of the exemplary integrated magnetometer 600 will be explained in more detail with respect to
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(38) As with the arrangement shown in
(39) As shown in
(40) According to the above-described embodiments, the present disclosure provides a device for the detection of ferro- or superparamagnetic structures on material surfaces using magnetic field sensitive sensor elements. These magnetic field sensitive sensor elements are assembled on a common carrier substrate. A spatially small sensor element array is responsive to homogeneous magnetic fields which generates a sensor signal which is initially approximatively proportional to a component of the magnetic field generated by the field generating structures. A second sensor element arrangement reacts to field differences between two respectively spatially small but spaced apart sensor elements. The sensor element arrangement responding to homogeneous fields is arranged in the space between the two sensor elements which form the sensor arrangement sensitive to local field differences. Specifically, the sensor elements each may comprise two resistors connected to a voltage divider arrangement and a magnetoresistive effect is used for signal generation. Further, separate supply voltage terminals may be provided for the sensor element arrays responsive to homogeneous fields and local field differences. An exemplary terminal assignment of the sensor package may be provided, which allows a change between a measurement of local field differences and a measurement of homogeneous fields by means of a 180° rotated placement on a carrier plate.
(41) It should be appreciated by those skilled in this art that the above embodiments are intended to be illustrative, and many modifications may be made to the above embodiments by those skilled in this art, and various structures described in various embodiments may be freely combined with each other without conflicting in configuration or principle.
(42) Although the present disclosure have been described hereinbefore in detail with reference to the attached drawings, it should be appreciated that the disclosed embodiments in the attached drawings are intended to illustrate the preferred embodiments of the present disclosure by way of example, and should not be construed as limitation to the present disclosure.
(43) Although several exemplary embodiments have been shown and described, it would be appreciated by those skilled in the art that various changes or modifications may be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
(44) It should be noted that, the word “comprise” doesn't exclude other elements or steps, and the word “a” or “an” doesn't exclude more than one. In addition, any reference numerals in the claims should not be interpreted as the limitation to the scope of the present disclosure.