High power short pulse fiber laser
09640940 ยท 2017-05-02
Assignee
Inventors
- Xinhua Gu (Danville, CA, US)
- Mark Bendett (Cherry Hill, NJ, US)
- Gyu Cheon Cho (Ann Arbor, MI, US)
- Martin E. Fermann (Dexter, MI)
Cpc classification
H01S3/06741
ELECTRICITY
H01S3/0057
ELECTRICITY
International classification
H01S3/11
ELECTRICITY
H01S3/102
ELECTRICITY
Abstract
A pulsed laser comprises an oscillator and amplifier. An attenuator and/or pre-compressor may be disposed between the oscillator and amplifier to improve performance and possibly the quality of pulses output from the laser. Such pre-compression may be implemented with spectral filters and/or dispersive elements between the oscillator and amplifier. The pulsed laser may have a modular design comprising modular devices that may have Telcordia-graded quality and reliability. Fiber pigtails extending from the device modules can be spliced together to form laser system. In one embodiment, a laser system operating at approximately 1050 nm comprises an oscillator having a spectral bandwidth of approximately 19 nm. This oscillator signal can be manipulated to generate a pulse having a width below approximately 90 fs. A modelocked linear fiber laser cavity with enhanced pulse-width control includes concatenated sections of both polarization-maintaining and non-polarization-maintaining fibers. Apodized fiber Bragg gratings and integrated fiber polarizers are included in the cavity to assist in linearly polarizing the output of the cavity. Very short pulses with a large optical bandwidth are obtained by matching the dispersion value of the fiber Bragg grating to the inverse of the dispersion of the intra-cavity fiber.
Claims
1. A pulsed fiber laser comprising: a modelocked fiber oscillator comprising a gain fiber and a pair of reflective optical elements disposed with respect to said gain fiber to form a resonant cavity, said modelocked fiber oscillator comprising a semiconductor saturable absorber (SAM) optically connected and in close contact with an end of said gain fiber and operably arranged to induce modelocking, said modelocked fiber oscillator producing a train of optical pulses having an average pulse width, said modelocked fiber oscillator comprising a wedge-shaped area between said SAM and said end of said gain fiber, wherein said wedge-shaped area is operably arranged to limit the finesse of an etalon formed with surfaces of said SAM and said gain fiber; a fiber amplifier optically connected to said modelocked fiber oscillator such that said optical pulses can propagate through said amplifier, said fiber amplifier amplifying said optical pulses; and one or more optical pump sources optically connected to said modelocked fiber oscillator and said fiber amplifier to pump said fiber oscillator and fiber amplifier.
2. The pulsed fiber laser of claim 1, further comprising a pulse compressor optically coupled to receive said amplified optical pulses output from said fiber amplifier, said pulse compressor shortening the pulse width of said optical pulses output by said fiber amplifier.
3. The pulsed fiber laser of claim 2, further comprising a pre-compressor disposed in an optical path between said modelocked fiber oscillator and said fiber amplifier, said pre-compressor shortening the duration of said optical pulses introduced into said fiber amplifier such that said pulse duration of said optical pulses output by said fiber amplifier can be further shortened by said pulse compressor.
4. The pulsed fiber laser of claim 3, wherein said pre-compressor comprises a photonic crystal fiber, a photonic bandgap fiber, or a holey fiber.
5. The pulsed fiber laser of claim 3, wherein said pre-compressor is operably arranged to reduce a spectral bandwidth of said optical pulses.
6. The pulsed fiber laser of claim 3, wherein said pre-compressor comprises a dispersive optical element to differentiate between spectral components and to introduce different phase shifts to said different spectral components.
7. The pulsed fiber laser of claim 1, wherein said gain fiber comprises an angle polished core portion disposed in an angled polished housing.
8. The pulsed fiber laser of claim 7, wherein said angle polished housing is attached to said SAM.
9. The pulsed fiber laser of claim 1, wherein said gain fiber comprises a core with an expanded portion proximate to said SAM.
10. A Yb-based pulsed fiber laser amplification system comprising: a Yb passively modelocked fiber oscillator configured to output optical pulses, said Yb passively modelocked fiber oscillator comprising a saturable absorber, and an oscillator pump configured to optically pump said Yb passively modelocked fiber oscillator, wherein said saturable absorber exhibits a multi-temporal lifetime and is configured such that Q-switched mode-locking evolves at a low oscillator pump power followed by cw mode locking at a higher operational pump power that exceeds a threshold pump power for operation of said mode locked laser; a fiber Bragg grating configured to control intra-cavity dispersion and configured as a mirror of said Yb passively modelocked fiber oscillator; a fiber amplifier optically connected to said modelocked fiber oscillator via a first optical path, said fiber amplifier configured to amplify said optical pulses; and an optical pump source optically connected to said fiber amplifier.
11. The Yb-based pulsed fiber laser amplification system of claim 10, wherein said fiber Bragg grating is further configured as an output mirror of said passively modelocked fiber oscillator.
12. The Yb-based pulsed fiber laser amplification system of claim 10, wherein said saturable absorber comprises multiple quantum wells or bulk semiconductor films, and wherein said saturable absorber is configured with non-uniform ion-implantation which, in combination with one or more implantation parameters, achieves said multi-temporal lifetime in the presence of optical excitation with short optical pulses.
13. The Yb-based pulsed fiber laser amplification system of claim 10, further comprising an optical tap arranged to receive a portion of an output from said modelocked fiber oscillator.
14. The Yb-based pulsed fiber laser amplification system of claim 10, further comprising an optical tap arranged to receive a portion of an output from said fiber amplifier.
15. The Yb-based pulsed fiber laser amplification system of claim 10, wherein said saturable absorber comprises: a film of a semiconductor material implanted with high energy ions at a penetration depth which differs from the penetration depth of optical signals reflected from said saturable absorber mirror, said semiconductor material having an ion implantation depth profile selected to provide saturable absorption having a multi-temporal carrier relaxation.
16. The Yb-based pulsed fiber laser amplification system of claim 10, wherein said saturable absorber is configured with depth selective ion implantation.
17. The Yb-based pulsed fiber laser amplification system of claim 10, wherein said Yb passively modelocked fiber oscillator comprises a gain fiber, wherein an end of said gain fiber is in close contact with said saturable absorber.
18. The Yb-based pulsed fiber laser amplification system of claim 17, wherein the end of said gain fiber is butt-coupled to said saturable absorber.
19. The Yb-based pulsed fiber laser amplification system of claim 17, wherein the end of said gain fiber is disposed in a housing that is attached to said saturable absorber.
20. The Yb-based pulsed fiber laser amplification system of claim 17, wherein the end of the gain fiber and the housing are angle-polished.
21. A pulsed fiber laser comprising: a modelocked fiber oscillator comprising a gain fiber and a pair of reflective optical elements disposed with respect to said gain fiber to form a resonant cavity, said modelocked fiber oscillator comprising a semiconductor saturable absorber (SAM) optically connected to said gain fiber and arranged such that said modelocked fiber oscillator comprises a wedge-shaped area between said SAM and said gain fiber, wherein said wedge-shaped area is operably arranged to limit the finesse of an etalon formed with surfaces of said SAM and said fiber, said modelocked fiber oscillator producing a train of optical pulses having an average pulse width; a fiber amplifier optically connected to said modelocked fiber oscillator such that said optical pulses can propagate through said amplifier, said fiber amplifier amplifying said optical pulses; and one or more optical pump sources optically connected to said modelocked fiber oscillator and said fiber amplifier to pump said fiber oscillator and fiber amplifier.
22. The pulsed fiber laser of claim 21, wherein said gain fiber comprises an angle-polished portion disposed in an angle-polished housing.
23. The pulsed fiber laser of claim 22, wherein said angle-polished housing is attached to said SAM.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1)
(2)
(3)
(4)
(5)
(6)
(7)
(8)
(9)
(10)
(11)
(12)
(13)
(14)
(15)
(16)
(17)
(18)
(19)
(20)
(21)
(22)
(23)
(24)
(25)
(26)
(27)
(28)
(29)
(30)
(31)
(32)
(33)
(34)
DETAILED DESCRIPTION OF CERTAIN EMBODIMENTS
(35) These and other aspects, advantages, and novel features of the present teachings will become apparent from the following detailed description and with reference to the accompanying drawings. In the drawings, similar elements have similar reference numerals.
(36)
(37) To achieve a clean short pulse, several techniques can be included such as for example inclusion of attenuators, spectral filters, and compression elements as discussed more fully below. Use of one or more of such components can provide pulse widths of about 90 fs or less and average power of 200 mW or more.
(38) Another aspect of the present teachings relates to a modular design approach where various components can be packaged as modules and the modular components can then be connected as needed. Some modules may comprise optical elements such as bulk optics or planar waveguides packaged in a housing that shields various optical elements from the operating environment. Fiber pigtails may extend from these housing, which may include thermal insulation and may be hermetically sealed. The fiber pigtails, potentially enable seamless connection to other modules via, e.g., optical fiber fusion splices. Packaging in such casing may be particularly advantageous for modules containing bulk or physical optics and opto-mechanical elements, in contrast to fiber elements, which may not require such encasement.
(39) Such a system using fiber based components or packages having fiber inputs and outputs can benefit from the compact nature of the components, as well as effective and compact coupling afforded by splicing of the fibers. The optics within the modules preferably comprise micro-optics and fiber optics or other waveguide elements. Accordingly, the modules may be small and have reduced form factor. The modular approach may also simplify repair and alteration of laser systems as the modules can be readily substituted or replaced and re-spliced into place in the laser system.
(40) As shown in
(41) In
(42) It will be understood that this simplified description of pulse amplification is exemplary of a general process of amplifying a short pulse. It will also be understood, and as described below, that pulse conditioning can involve optical operations other than temporally stretching of the seed pulse. Other variations can be incorporated into the laser system to accommodate various design goals and operating conditions. Some of such design considerations are described below in greater detail. In some embodiments, for example, the pulse conditioner 104 and/or compressor 108 may be excluded. Other variations in the configuration and implementation of the laser system 100 are also possible.
(43) In some embodiments, the seed pulse generator 102 comprises an oscillator having a rare earth doped fiber. Dopants may include, for example, Er, Yb, Nd or combinations thereof as well as other materials. The doped fiber can be single clad or double clad and may be polarization maintaining or non-polarization maintaining. Both active and passive modelocking techniques can be used to generate short and ultra-short pulses in the rare-earth doped fiber, with the passive one simpler and intrinsically more stable. Three common passive mode-locking techniques involve a saturable absorber being part of the cavity, nonlinear polarization evolution, or a combination thereof. In certain applications, passive modelocking techniques based on saturable absorbers are preferred and permit the construction of relatively simple and reliable cavities. Additional details regarding passive mode-locking techniques are disclosed in a copending U.S. patent application Ser. No. 10/627,069 filed on Jul. 25, 2003, by M. E. Fermann, and G. C. Cho entitled Polarization Maintaining Dispersion Controlled Fiber Laser Source Of Ultrashort Pulses, which is hereby incorporated herein by reference in its entirety.
(44) The amplifier may comprise a fiber amplifier having a gain fiber such as a doped fiber. The amplifier, however, should not be limited to fiber amplifiers. Similarly, the amplifier may comprise a parabolic pulse amplifier as described in copending U.S. patent application Ser. No. 09/576,772 filed May 23, 2000, by M. E. Fermann, A. Galvanauskas, and D. Harter entitled Modular, high energy, widely-tunable ultrafast fiber source, which is hereby incorporated herein by reference in its entirety. Other types of amplifiers, however, may be employed as well.
(45)
(46) In one embodiment, the oscillator cavity fiber comprises a section of Yb-doped polarization maintaining gain fiber. The oscillator cavity fiber can further comprise an undoped polarization maintaining fiber section for controlling the total intracavity dispersion. In some embodiments, the length of this undoped portion is selected such that the undoped portion of fiber together in combination with doped fiber and the chirped fiber Bragg grating (one embodiment of the fiber grating 142) provides a zero or negative total dispersion in the cavity.
(47) In one embodiment, the cavity fiber is relatively shorter. The use of a shorter gain fiber 140 is typically associated with a high pumping rate, thus driving the gain dynamics closer to a saturation level than that associated with a longer fiber. In addition, the population variation in the ground state of Yb dopants becomes less susceptible to the environmental temperature variation. These effects enhance the operational stability of the oscillator 130 that is exposed to variation of environmental temperature. In one embodiment, oscillator output stability is demonstrated by a dependency of output on environmental fiber temperature that is less than approximately 0.5%/C, presuming that other modules are kept at a substantially constant temperature.
(48) As shown in
(49) One embodiment of the exemplary fiber oscillator in
(50)
(51) In one embodiment, the bandwidth of the filter 165 can be predetermined within approximately 1-2 nanometer accuracy by analytical or experimental analysis of the system. Another method is to use a rotatable dielectric bandpass filter and rotate the filter to a different incidence angle and utilize the associated etalon effect to provide a variation of the spectral position and width. Yet another method is to modify the spectral shape of the transmission, for example using v- or u-type coating used in the dielectric coating industry. Such a filter can substantially eliminate side lobes in the spectrum, which may originate from nonlinear phase distortion at excessive gain or from high-order soliton formation.
(52) As shown in
(53) As described above in reference to
(54)
(55) It will be appreciated that although the oscillator (130 and 150 in
(56) As described more fully below, the oscillator 130, 150 or portions thereof may be packaged in a housing that provides a substantially stable support for optical elements. Such a housing preferably offers protection from the environment and improves performance stability of the optical devices. The packages may include fiber pigtail inputs and/or fiber pigtail outputs, which may be connected to other components. These pigtails may comprise single mode polarization maintaining fiber although other types of pigtail fibers may be employed. Some of the components in the laser system may also comprise optical fiber or fiber components that are not enclosed in a housing but that are spliced to the fiber pigtails.
(57)
(58)
(59)
(60) Preferably the attenuator is a variable attenuator and has a variable transmission that can be controlled in the range of about 120 dB. Such variable attenuation can be advantageously employed in the manufacture and tuning of the laser systems.
(61) Fiber amplifiers exhibit a variation in performance from to unit to unit. As a result, different amplifiers that are incorporated into the lasers during manufacturing may require different amplitude input pulses to provide similarly operating lasers. To accommodate such variation in amplifier performance, an adjustable attenuator such as shown in
(62) Different measurements and analysis of these measurements may be employed to determine the suitable adjustment to the variable attenuator. For example, pulse power and/or pulse width may be measured or spectral measurements may be employed. Measurements may be obtained before or after the attenuator or at the output of the amplifier or the laser, or elsewhere. Other measurements may be used as well and likewise the measuring and evaluation techniques should not be limited to those recited herein. The attenuator, however, can be adjusted in response to such measurements
(63) This variable attenuator may comprise a rotatable waveplate and a polarization beamsplitter such as a MacNeille polarizer. The waveplate can be rotated to vary the distribution of light into orthogonal polarizations. The polarization beamsplitter can be used to direct a portion of the light out of the laser, depending on the state of the waveplate. Accordingly, a user, by rotating the waveplate and altering the polarization of light can control the amount of light reaching the amplifier and thereby adjust the system. Preferably, the waveplate and the MacNeille polarizer comprise micro-optics or are sufficiently small to provide for a compact laser system. These optical elements are also preferably packaged in a housing that may include fiber pigtail connections as shown in
(64) Other types of attenuator modules may alternately be employed. Variable attenuation need not be provided by a waveplate and a polarization selective optical element. Fiber or waveguide elements may be used as well. Such variable attenuation may be controlled manually or automatically. Various other designs are possible.
(65) The system configuration may be varied as well. Pulse stretching need not always be incorporated in the laser system. For example, in a fiber amplifier system with sub-microjoule pulse energy, a few picosecond of seed pulse can be sufficiently long to reduce the nonlinear phase modulation in the amplifier fiber significantly. Thus, employment of a pulse stretcher in form of a long length of fiber or chirped fiber Bragg grating in generally may not necessarily be required in such a case.
(66) In general, the preconditioning of the seed pulse property in the time-domain alone, e.g., stretching pulse width, is not always a suitable method for generating high quality amplified pulses. In a variety of cases, manipulation of the seed pulse by the seed pulse generator may readily provide sufficient degree of freedom for pulse recompression The outcome may not necessarily be the most preferred, however, depending on the target property of the recompressed pulses, such an approach significantly simplifies the technical complexity of the pulse controlling method.
(67)
(68) In general, the output pulse from an oscillator is delivered to an amplifier for higher power. As a result of the delivery fiber(s) between the oscillator and the amplifier, the pulse width may be stretched. For example, approximately 2 meters of delivery fiber may correspond to approximately 1 ps pulse width increase. A preferred seed pulse width, however, can be characterized as being less than approximately 1 ps.
(69) To obtain a clean and shorter pulse after a compressor, several techniques can be used to preferably make the seed pulse width shorter prior to reaching the amplifier. One method is to pre-compress the seed pulse before injecting it into the amplifier. In one embodiment, use of a pre-compressing component can yield a pre-compressed seed pulse having a pulse width less than about 1 ps and preferably as low as approximately 150 fs. Such a pre-compressed seed pulse fed into the amplifier can yield an amplifier output having a spectral bandwidth that is greater than approximately 30 nm due to nonlinear effect. Such an amplifier output can be compressed by a compressor to yield a final pulse having a width of approximately 100 fs.
(70) As shown in
(71)
(72)
(73) The pre-compressor may comprise bulk, fiber, or other waveguide optics. Examples of components that may comprise the pre-compressor module include a bulk grating pair, a single grating (e.g., bulk or waveguide), a prism pair, etc. Fiber components such as chirped fiber Bragg gratings may also be employed. Other fiber and non-fiber components may be employed as well. In some embodiments, the components are encapsulated in a housing that provides for substantially stable mounting therein, as well as protection from the environment. The housing may further comprises a fiber pigtail input and/or a fiber pigtail output. Such pigtail fibers can be spliced in a manner described above.
(74)
(75)
(76)
(77)
(78)
(79)
(80)
(81)
(82) The nonlinearity in the amplifier can be a result of an interplay of different factors, such as gain shaping, inhomogeneous self-phase modulation, and higher order dispersion. Such factors can be highly sensitive to the spectral position within the whole pulse spectrum. One way to control these factors and thereby control the nonlinearity in the amplifier is to manipulate the spectrum being output from the oscillator. In one embodiment, a bandpass filter is used to select a portion of the oscillator spectrum to be amplified. At the same time, the filter can shorten the pulse width of the seed.
(83) In various embodiments, bandpass, highpass, or lowpass filters may be employed to spectrally narrow and control a spectral power distribution of an optical output from the oscillator. Preferably, the filter has spectral transmission with a band edge that overlaps the spectral power distribution of the output pulses from the oscillator. The bandpass filter thereby attenuates a portion of the spectral power distribution and reduces the spectral bandwidth. The pulse width of the optical pulses coupled from the oscillator to the fiber amplifier are thereby reduced. Preferably, the resultant spectral bandwidth is between about 5 and 12 nm and preferably less than about 10 nm but may be outside this range.
(84) The spectral filter may comprise, for example, a fiber or other waveguide devices such as a planar waveguide element or may comprise bulk optics. Examples of spectral filters include gratings, etalons, thin film coatings, etc. Preferably, the filter comprises micro-optics. In various preferred embodiments, the filter comprises a fiber elements such as a fiber Bragg grating that can be readily physically connected to a fiber based system in a compact robust manner. Other types of filters and configurations for providing spectral filtering may also be employed.
(85)
(86)
(87)
(88)
(89) The position of the spectral filter is not limited to the locations shown herein. Preferably, however, the spectral filter is disposed in an optical path between the oscillator and the amplifier.
(90)
(91) As an alternative to a free space bandpass filter, a fiber band pass filter such as a long-period fiber grating can be used to select a part of the oscillator output signal in both wavelength domain and time domain. A long-period fiber grating (LPG) couples the light from a fundamental guided mode to forward-propagating cladding modes. A pair of matched LPGs can be used. One LPG couples light from the fundamental mode to the cladding mode and one LPG couples light back from the cladding mode to the fundamental mode. The cladding can thereby be used as a bypass for the resonant light while the non-resonant light propagating in the core is substantially blocked. Alternatively, by introducing a -phase shift in the approximate middle of a LPG during its fabrication, a bandpass filter can be made using only one LPG. The -phase shift in the LPG reverses the coupling direction such that light coupled into the cladding mode can return into the fundamental mode. One advantage of using an LPG as a bandpass filter is that the transmission spectrum can be conveniently designed so as to be suitable for a given amplifier operation.
(92)
(93)
(94)
(95)
(96) The spectral manipulation can be achieved with a spectral filter that provides a band selectivity and/or a spectral shape modification. The band selectivity can provide a proper selection of the seed spectrum (e.g. position and bandwidth). The position may range from about 1045 to 1055 nm and the bandwidth may range from about 5 to 12 nm in certain embodiments although these ranges should not be construed as limiting as other embodiments are possible. The selected band may be matched with the gain shaping and nonlinear phase distortion in the amplifier for an improved pulse compressibility. The proper spectral shape, such as Gaussian or flat-top or other profile, can also be tailored with a spectral shaping filter. This concept can be further extended to an actively or passively controlled pedestal flattening filter.
(97)
(98) In one embodiment of the laser system, monitoring the performance such as output power at some point(s) of the system and providing feedback to the diode pump drivers for active control can achieve a stable operation.
(99) As shown in
(100) The exemplary laser system 550 is shown to further comprise a second monitor component 574 that monitors a performance parameter of the system after the amplifier 560. The monitor 574 may similarly comprise a sensor and controller. The monitor 574 can then issue adjustment commands to a second driver 576 that implements those adjustment commands at the amplifier 560.
(101) The monitoring of the system performed by the exemplary monitors 570 and/or 574 may comprise for example an optical detector and electronics that monitors optical intensity or power or other relevant parameter such as, e.g., frequency and spectrum. In response to such measurement, the monitor and the driver may induce changes in the oscillator and/or the amplifier by for example adjusting the pump intensity and/or rate, or adjusting the operating temperature. Exemplary embodiments that include temperature control of the oscillator are described more fully below. Temperature control of the oscillator can stabilize the gain dynamics as well as frequency fluctuations. Temperature control of the amplifier can also be used to stabilize the gain dynamics.
(102) Other configurations for providing feedback to control the operation of the laser system may also be employed. For example, more or less feedback loops may be included. The loops may involve electronics that perform operations such as calculations to determine suitable adjustments to be introduced. The feedback may be obtained from other locations in the system and may be used to adjust other components as well. The embodiments described in connection with
(103) In the description of various exemplary designs presented in reference to
(104) In one embodiment, an isolator depicted, for example, in
(105) The modular design concept can also be further extended to the elements within the oscillator, amplifier, and other components comprising the laser system.
(106)
(107) In various preferred embodiments, the light in the laser is linearly polarized. The degree of the linear polarization may be expressed by the polarization extinction ratio (PER), which corresponds to a measure of the maximum intensity ratio between two orthogonal polarization component. In certain embodiments, the polarization state of the source light may be maintained by using polarization-maintaining single-mode fiber. For example, the pigtail of the individual modular device may be fabricated with a polarization-maintaining fiber pigtail. In such cases, the PER of each modular stage may be higher than about 23 dB. Ensuring a high polarization extinction ratio throughout a series of modules challenges despite the use of single mode polarization maintaining fiber. Degradation of the PER can occur at fiber ferrule, fiber holder, or fusion splice in the series of modules.
(108) Levels of PER above 23 dB may be obtained using linear-polarizing optical components in the modules, such as shown in
(109) Use of linear-polarizing components in the modules that contain polarization degrading elements such as fiber ferrule, fiber holder, or fusion splice is advantageous. The linear polarizers counter the superposition of the phase shift from each polarization degrading element. A superposed phase shift of 10 degrees may reduce the PER to about 15 dB in which case intensity fluctuation through a linear polarizer might be more than about 4%. In contrast, by embedding linear polarizers throughout the series of modules, the PER of the aggregate system can be substantially controlled such that the intensity fluctuation is below about 1%, provided that the PER of the individual module and splice is above about 20 dB.
(110) Preferably, the optical elements such as the first lenses 718, the rotatable waveplate 720, the MacNeille polarizer 722, and the saturable absorber 724 comprise micro-optics or are sufficiently small to provide for a compact module. The elements in the housing 712 are also preferably securely fastened to a base of the housing such as by laser welding. The housing 712 may be sealed and thermally insulated as well. In various preferred embodiments, these modules conform to Telcordia standards and specifications.
(111)
(112) The waveplate 740 can be rotated to vary the distribution of light into orthogonal polarizations. The polarization beamsplitter 742 can be used to direct a portion of the light out of the optical path between the first and second fiber connectors 734, 744, depending on the state of the waveplate 740. Accordingly, a user, by rotating the waveplate 740 and altering the polarization of light can control the amount of light coupled between the first and second optical fiber connectors 734, 744 and thereby adjust the level of attenuation.
(113) Preferably, the optical elements such as the first and second lenses 738, 748, the rotatable waveplate 740 and the MacNeille polarizer 742 comprise micro-optics or are sufficiently small to provide for a compact module. The elements in the housing 732 may be laser welded or otherwise securely fastened to a base of the housing. The housing 732 may be sealed and thermally insulated as well. In various preferred embodiments, these modules conform to Telcordia standards and specifications.
(114)
(115) This module 760 may further comprise a waveplate and a polarization selective optical element to assist in maintaining polarization as described in connection with the saturable absorber module 710 shown in
(116) Preferably, the optical elements such as the first and second lenses 768, 778, the isolator 770 and the prism 772 comprise micro-optics or are sufficiently small to provide for a compact module. The elements in the housing 762 may be laser welded or otherwise securely fastened to a base of the housing. The housing 762 may be sealed and thermally insulated as well. In various preferred embodiments, these modules conform to Telcordia standards and specifications.
(117) Other designs may be employed that differ from the design configurations depicted in connection with the modules 710, 730, 760 shown in
(118)
(119) The saturable absorber module 602 and/or the cavity fiber assembly module 604 may be coupled to respective temperature control components 606 and 608. In one embodiment, the temperature control components 606 and 608 comprise Peltier elements that provide a temperature control over a relatively large range of temperatures. The temperature controllers can be used, for example, to adjust the temperature of the gain fiber in the oscillator to stabilize gain and reduce noise.
(120)
(121) Optical fibers are also compact and lightweight in comparison, for example, to lens systems, although lenses and other bulk optics may be used, for example, in different modules. Components coupled in the foregoing manner can be arranged in a variety of ways. Because the optical interconnection between modular components is provided by a fiber, the modules may not need to be aligned optically and the modules can be arranged and packaged in a flexible manner.
(122)
(123) As described above, the modules may comprise one or more optical elements supported within a housing. These optical elements may be bulk optics such as lens and mirrors or other physical optics or may comprise waveguide structures such as planar waveguides. In some embodiments, fiber optic components may be included in such housings although optical fibers may be connected to the fiber pigtails extending from the housings and may not have individual housings. For example, one laser system may comprise a saturable absorber in a housing having an optical pigtail extending therefrom (such as in
(124) The modular approach described above offers many advantages. The fiber-based modular approach aids in designing, addressing limitations, and providing practical solutions for applications in medicine, industry, and other environments. In many cases, design of reliable and complex optical and laser systems is generally a difficult task involving expenditure of excessive resources and extensive amounts of time. Using modular opto-mechanical elements, an ultrashort pulse laser can be more efficiently designed for particular applications. Advantageously, the design of the system may be first simplified, which can be accomplished by dividing the system into several functional groups. The functionalities can be achieved with different modules which can be separately designed and tested. Design assessment of reliability can be achieved at much lower cost involving less time and less resources. Engineering of separate modules for product development is more manageable.
(125) The modular approach can also significantly simplify the assembly process and improve the manufacturability of the laser systems. The laser systems can be assembled with simple fusion splices without free-space alignment. Such process can decrease labor costs and increase the operation stability, reliability, and repeatability. Repair, replacement, and upgrading may also be facilitated by the modular approach as the modules may be replaceable and/or interchangeable.
(126) In various preferred embodiments, the optics within the modules comprise micro-optics elements although other types of optics are possible. Use of micro-optics and fiber optics provides compactness. Preferably, the optics are secured to the housing and the housing provides sufficient protection such that the laser systems are rugged and robust. In various embodiments, the housings may comprise thermal insulation and/or may be hermetically sealed to reduce build-up of condensation, moisture, dust, dirt, or other contamination that may interfere with the operation or reliability of the optical elements.
(127) The modular design disclosed herein provides other advantages in the design and performance of high power short pulse laser systems. Reduced form factor and mass of the components may enable a high-degree of optical stability. Environmental stability of the system can be improved also by controlling the temperature of the devices. In some embodiments, the laser system can be packaged to meet the telecommunication standards in performance and quality. In some embodiments, for example, the laser system or portions thereof can be packaged in compliance with a Telcordia reliability assurance requirements such as GR-1221-CORE and GR-468-CORE.
(128) The recent unprecedented growth of the telecom industry has resulted in the development of a mature fiber technology and reliable and cost-effective components. However, due to the nature of telecommunication requirements, the commercial fiber components are mostly limited by low power handling capability and continuous-wave (CW) operation. High average power (>200 mW) and ultrafast pulse operation involved specially designed components. Preferably, however, an ultrashort fiber laser and amplifier system may be provided that is in compliance of the applicable Telcordia reliability assurance requirements, for example, GR-468-CORE and GR-1221-CORE.
(129) Environmentally stable laser design is highly desirable for industrial application. A preferred industrial laser system can, for example, be characterized by an output power variation below 0.5 dB over an environmental temperature range from 0 to 50 degree Celsius and by compliance of vibration, thermal shock, high temperature storage and thermal cycling test criteria in Telcordia GR-468-CORE and GR-1221-CORE. This target can be achieved by functional segmentation of components and using appropriate packaging in the modules such as for example Telcordia-qualified packaging technology. Accordingly, preferably, the modules are designed and manufactured to comply with telecom standards and quality.
(130) As described above, various embodiments comprise a high power ultrashort pulses laser system having an output power over about 200 mW and a pulse width less than about 200 femtoseconds. Certain embodiments may employ a short length of gain fiber to enhance the gain stability of the oscillator against environmental temperature variation. In some embodiments, the cavity dispersion may be managed by adding undoped polarization maintaining fiber, which may be provided by a fiber pigtail integrated with the saturable absorber module. As discussed above, the saturable absorber and the optics associated with the saturable absorber may be packaged with telecommunication packaging technology to form a modular toolkit in the oscillator system. In some designs, the module can be integrated with a temperature controller.
(131) In certain preferred embodiments, the light from the oscillator may be amplified. Also, the quality of the amplified pulse, such as minimum pedestal and compressibility, may be controlled by manipulating the spectral detail of the seed pulse out of oscillator. Such manipulation may be accomplished by using a spectral filter although other designs are possible. Depending on the detail of the chirp of the pulse and nonlinear phase distortion in the amplifier, in some embodiments, a grating pair having a properly selected center wavelength and bandwidth may provide suitable balance for the chirp such that the pulse can be compressed with a sufficiently high pulse quality. Furthermore, the spectral property of the filter can be further tailored for pedestal flattening in some embodiments. A specific pedestal flattening filter, for example, can be used. In certain embodiments, a parabolic amplifier may be used to amplify the seed pulse. In case of seed spectral bandwidth larger than 10 nm, a filter-type element may be inserted in front of amplifier to shorten the seed pulse width to improve or optimize the amplification and compressibility of the amplified pulse.
(132) Other embodiments having different designs and configurations are possible and should not be limited to those described above. For example, although the various systems disclosed herein can operate in the wavelength of around 1050 nm, the concepts of the present teachings can also be applied to laser systems operating at other wavelengths.
(133) Moreover, the above description of the preferred embodiments has been given by way of example. From the disclosure given, those skilled in the art will not only understand the present invention and its attendant advantages, but will also find apparent various changes and modifications to the structures and methods disclosed. It is sought, therefore, to cover all such changes and modifications as fall within the spirit and scope of the invention, as defined by the appended claims, and equivalents thereof.
(134)
(135) An exemplary integrated fiber polarizer in accordance with the invention comprises a polarization-maintaining undoped polarizer fiber (PF), with two orthogonal polarization axes, where the loss along one polarization axis is significantly higher than the loss along the other polarization axis. Alternatively, a very short section (less than 1 cm) of non-birefringent fiber (i.e., non-polarization-maintaining fiber) can be sandwiched between two sections of polarization-maintaining fiber, where the polarization axes of the polarization-maintaining fibers are aligned with respect to each other. By side-polishing the non-birefringent fiber, e.g., down to the evanescent field of the fiber core, along one of the axes of the birefringent fiber, and coating the polished region with metal, high extinction polarization action can be obtained along one of the axes of the birefringent fiber. The design of side-polished fiber polarizers is well known in the field and not discussed further here.
(136) For optimum laser operation, the fiber polarization axes of the PF are aligned parallel to the polarization axes of the gain fiber 1101. To ensure stable modelocked operation, the polarizer preferably effectively eliminates satellite pulses generated by any misalignment between the polarization axes of the PF and the gain fiber 1101.
(137) Neglecting any depolarization in the all-fiber polarizer itself, it can be shown by applying a Jones matrix calculation method that for a misalignment of the polarization axes of gain fiber 1101 and fiber polarizer 1105 by degrees, the linear reflectivity R from the right-hand side of the cavity varies approximately between R=10.5 sin.sup.2 2 and R=1 depending on the linear phase in the gain fiber 1101. If the group delay along the two polarization axes of the gain fiber is larger than the intra-cavity pulse width, any satellite pulse is suppressed by sin.sup.4 after transmission through the polarizer. Typical fiber splicing machines can align polarization-maintaining fibers with an angular accuracy of less than 2; hence any reflectivity variation due to drifts in the linear phase between the two polarization eigenmodes of fiber 1101 can be kept down to less than 310.sup.3, whereas (for sufficiently long fibers) any satellite pulses obtained after transmission through the polarizer can be kept down to less than 610.sup.6 when using an integrated polarizer.
(138) The chirped fiber Bragg grating 1106 is preferably spliced to the PF 1105 at splice position 1108 and written in non-polarization-maintaining fiber. In order to avoid depolarization in the fiber Bragg grating, the Bragg grating pig-tails are preferably kept very short, e.g., a length smaller than 2.5 cm is preferable between splice locations 1108 and 1109. To obtain a linear polarization output, a polarization-maintaining fiber pig-tail is spliced to the left-side of the fiber Bragg grating at splice location 1109. The laser output is obtained at a first fiber (or cavity) end 1111, which is preferably angle-cleaved to avoid back-reflections into the cavity.
(139) Fiber Bragg grating 1106 serves two functions. First, it is used as an output mirror (i.e., it feeds part of the signal back to the cavity) and, second, it controls the amount of cavity dispersion. In the present implementation, the chirped fiber Bragg grating has a negative (soliton-supporting) dispersion at the emission wavelength in the wavelength region near 1060 nm and it counter-balances the positive material dispersion of the intra-cavity fiber. To produce the shortest possible pulses (with an optical bandwidth comparable to or larger than the bandwidth of the gain medium), the absolute value of the grating dispersion is selected to be within the range of 0.5-10 times the absolute value of the intra-cavity fiber dispersion. Moreover, the fiber Bragg grating is apodized in order to minimize any ripple in the reflection spectrum of the grating. Accordingly, the oscillation of chirped pulses is enabled in the cavity, minimizing the nonlinearity of the cavity and maximizing the pulse energy. Chirped pulses are characterized in having a pulse width which is longer than the pulse width that corresponds to the bandwidth limit of the corresponding pulse spectrum. For example the pulse width can be 50%, 100%, 200% or more than 1000% longer than the bandwidth limit.
(140) Alternatively, the oscillation of chirped pulses is also enabled by using negative dispersion fiber in conjunction with positive dispersion chirped fiber Bragg gratings. Pulses with optical bandwidth comparable to the bandwidth of the gain medium can also be obtained with this alternative design.
(141) A SAM 1112 at a second distal fiber end 1113 completes the cavity. In an exemplary implementation a thermally expanded core (TEC) 1110 is implemented at cavity end 1113 to optimize the modelocking performance and to allow close coupling of the SAM 1112 to the second fiber end 1113 with large longitudinal alignment tolerances. Etalon formation between the fiber end 1113 and the SAM 1112 is prevented by an anti-reflection coating deposited on fiber end 1113 (not separately shown). In the vicinity of the second fiber end 1113, fiber 1101 is further inserted into ferrule 1114 and brought into close contact with SAM 1112. Fiber 1101 is subsequently fixed to ferrule 1114 using, for example, epoxy and the ferrule itself is also glued to the SAM 1112.
(142) The pump laser 1104 is coupled into the gain fiber 1101 via a lens system comprising, for example, two lenses 1115 and 1116 and a V-groove 1117 cut into fiber 1101. Such side-coupling arrangements are described in, for example, U.S. Pat. No. 5,854,865 ('865) to L. Goldberg et al. Alternatively, fiber couplers can be used for pump light coupling.
(143) An exemplary design for a SAM in accordance with the present invention is shown in
(144) In order to cover a broad spectral range (e.g., greater than 100 nm) metallic mirrors are preferred. When using a metallic mirror it is advantageous to remove the substrate (InP) by means of etching. When using HCl as an etching solvent the etching selectivity between InGaAsP and InP can be low, depending on the compound composition of InGaAsP. An etch-stop layer is beneficial between the substrate and the InGaAsP layer. InGaAs can be a proper etch-stop layer. When adding an InGaAs layer with a band-gap wavelength shorter than 1.03 m, lattice relaxations can be avoided by keeping the thickness below 10 nm.
(145) The InGaAsP layer can further be anti-reflection coated with layer 1204 on its upper surface to optimize the performance of the SAM. Because of the saturable absorption by InGaAsP, the reflectivity of the SAM increases as a function of light intensity, which in turn favors the growth of short pulses inside the laser cavity. The absence of Al in the saturable absorber layer prevents oxidization of the semiconductor surfaces in ambient air and thus maximizes the life-time and power handling capability of the structure.
(146) Instead of InGaAsP, any other Al-free saturable semiconductor can also be used in the construction of the SAM. Alternatively, Al-containing semiconductors can be used in the SAM with appropriately passivated surface areas. Surface passivation can, for example, be accomplished by sulfidization of the semiconductor surface, encapsulating it with an appropriate dielectric or with an Al-free semiconductor cap layer. An AlGaInAs absorber layer grown lattice-matched on InP can be surface-passivated with a thin (about 10 nm range) cap layer of InP. AlGaInAs with a higher bandgap energy than the absorber layer can also be used for a semiconductor Bragg reflector in combination with InP. Among concepts for semiconductor Bragg mirrors lattice-matched to InP, an AlGaInAs/InP combination has an advantage over an InGaAsP/InP Bragg reflector due to its high refractive index contrast.
(147) Instead of a bulk semiconductor saturable absorber, a MQW saturable absorber structure as shown in
(148) The control of the response time of the saturable absorption for concomitant existence of fast and slow time constants is realized by introducing carrier trap centers with depth controlled H+ (or other ions) implantation. The implantation energy and dose are adjusted such that part of the absorbing semiconductor film contains a minimal number of trap centers. For example the semiconductor layer with the minimal number of trap centers can be selected to be at the edge of the optical penetration range of exciting laser radiation. Such a design serves only as an example and alternatively any semionductor area within the optical penetration range can be selected to contain a minimal number of trap centers. Hence distinctive bi-temporal carrier relaxation is obtained in the presence of optical excitation. As an illustration of depth selective ion implantation,
(149) The obtained bi-temporal carrier life-time obtained with the semiconductor film with a proton concentration as shown in
(150) When employing this absorber in the laser system described with respect to
(151) We emphasize that the description for
(152) The preferred implantation parameters for H+ ions in GaAs or InP related materials including MQW absorbers are as follows: The doses and the implantation energies can be selected from 10.sup.12 cm.sup.2 to 10.sup.17 cm.sub.2 and from 5 keV to 200 keV, respectively, for an optically absorbing layer thickness between 50 nm and 2000 nm. For MQW absorbers, the selective ion-implantation depth is rather difficult to measure because the shallow MQW falls into the implantation peak in
(153)
(154) Instead of TEC cores, more conventional lenses or graded index lenses can be incorporated between the fiber end and the SAM to optimize the beam diameter on the SAM. Generally, two lenses are required. A first lens collimates the beam emerging from the fiber end, and a second lens focuses the beam onto the SAM. According to present technology, even conventional lenses allow the construction of a very compact package for the second fiber end. An implementation with two separate collimation and focusing lenses is not separately shown. To minimize unwanted backreflections into the fiber cavity and to minimize the number of components, a single lens can be directly fused to the fiber end as depicted in
(155) To minimize aberrations in assembly 1306, an additional lens can also be incorporated between lens 1307 and SAM 1303. Such an assembly is not separately shown. Alternatively, a lens can be directly polished onto fiber 1304; however, such an arrangement has the disadvantage that it only allows a beam size on the SAM which is smaller than the beam size inside the optical fiber, thereby somewhat restricting the design parameters of the laser. To circumvent this problem, a lens surface can be directly polished onto the surface of a TEC; such an implementation is not separately shown. Another alternative is to exploit a graded-index lens design attached directly onto the fiber tip to vary the beam size on the SAM. In the presence of air-gaps inside the oscillator a bandpass filter 1308 can be incorporated into the cavity, allowing for wavelength tuning by angular rotation as shown, for example, in
(156) Passive modelocking of laser cavity 1100 (
(157) When pumping with an optical power of 1.0 W at a wavelength of 910 nm, the laser produced short chirped optical pulses with a full width half maximum width of 1.5 ps at a repetition rate of 50 MHz. The average output power was as high as 10 mW. The pulse bandwidth was around 2 nm and hence the pulses were more than two times longer than the bandwidth-limit which corresponds to around 800 fs.
(158) Alternatively, a fiber grating 1106 with a dispersion of 0.1 ps.sup.2, closely matching the dispersion of the intra-cavity fiber, was implemented. The fiber grating had a reflectivity of 9% and a spectral bandwidth of 22 nm centered at 1050 nm. The grating was manufactured with a phase mask with a chirp rate of 320 nm/cm. The laser then produced chirped optical pulses with a full-width half maximum width of 1.0 ps at a repetition rate of 50 MHz with an average power of 25 mW. The pulse spectral bandwidth was around 20 nm and thus the pulses were around 10 times longer than the bandwidth limit, which corresponds to around 100 fs. The generation of pulses with a pulse width corresponding to the bandwidth limit was enabled by the insertion of a pulse compressing element; such elements are well known in the state of the art and are not further discussed here. The generation of even shorter pulses can be generated with fiber gratings with a bandwidth of 40 nm (and more) corresponding to (or exceeding) the spectral gain bandwidth of Yb fibers.
(159) Shorter pulses or pulses with a larger bandwidth can be conveniently obtained by coupling the fiber output into another length of nonlinear fiber as shown in
(160) In addition to cladding pumped fiber lasers, core-pumped fiber lasers can be constructed in an integrated fashion. Such an assembly is shown in
(161) In addition to chirped fiber gratings, unchirped fiber gratings can also be used as output couplers. Such cavity designs are particularly interesting for the construction of compact Er fiber lasers. Cavity designs as discussed with respect to
(162) In the absence of a fiber grating, a mirror can be deposited or attached to one end of the fiber cavity. The corresponding cavity design 1600 is shown in
(163) A second fiber polarizer 1608 is spliced between WDM 1605 and polarization-maintaining output coupler 1609 to minimize the formation of satellite pulses, which can occur when splicing sections of polarization maintaining fiber together without perfect alignment of their respective polarization axes, as discussed in U.S. patent application Ser. No. 09/809,248. Typically, coupler 1609 has a coupling ratio of 90/10 to 50/50, i.e., coupler 1609 couples about 90-50% of the intra-cavity signal out to fiber pig-tail 1610. Pig-tail 1610 can be spliced to a fiber isolator or additional fiber amplifiers to increase the pulse power. The second cavity end is terminated by mirror 1611. Mirror 1611 can be directly coated onto the fiber end face or, alternatively, mirror 1611 can be butt-coupled to the adjacent fiber end.
(164) The increase in stability of cavity 1600 compared to a cavity where the output coupler fiber, the WDM fiber and gain fiber 1601 are directly concatenated without intra-fiber polarizing stages, can be calculated using a Jones matrix formalism even when coherent interaction between the polarization axes of each fiber section occurs.
(165) Briefly, due to the environmental sensitivity of the phase delay between the polarization eigenmodes of each fiber section, for N directly concatenated polarization-maintaining fibers the reflectivity of a fiber Fabry-Perot cavity can vary between R=1 and R=1(N).sup.2, where is the angular misalignment between each fiber section. Further, it is assumed that is small (i.e., <<10) and identical between each pair of fiber sections. Also, any cavity losses are neglected. In fact, it is advantageous to analyze the possible leakage L into the unwanted polarization state at the output of the fiber cavity. L is simply given by L=1R. For the case of N concatenated fiber sections, the maximum leakage is thus (N).sup.2.
(166) In contrast, a cavity containing N1 polarizers in-between N sections of polarization-maintaining fiber is more stable, and the maximum leakage is L=2(N1).sup.2. Here, any depolarization in the fiber polarizers itself is neglected. For instance, in a case where N=3, as in cavity 1600, the leakage L into the wrong polarization axis is 2(31)/3.sup.3=4/9 times smaller compared to a cavity with three directly concatenated fiber sections. This increase in stability is very important in manufacturing yield as well as in more reproducible modelocked operation in general.
(167) In constructing a stable laser, it is also important to consider the construction of WDM 1605 as well as output coupler 1609. Various vendors offer different implementations. An adequate optical representation of such general polarization-maintaining fiber elements is shown in
(168) In order to ensure pulse stability inside a passively modelocked laser, the group-velocity walk-off along the two polarization axes of fiber sections 1701, 1702 should then be longer than the full-width half maximum (FWHM) pulse width of the pulses generated in the cavity. For example, assuming a birefringent fiber operating at a wavelength of 1550 nm with a birefringence of 310.sup.4 corresponding to a polarization beat length of 5 mm at 1550 nm, the stable oscillation of soliton pulses with a FWHM width of 300 fs requires pig-tails with a length greater than 29 cm. For 500 fs pulses, the pig-tail length should be increased to around 50 cm.
(169) Referring back to
(170) Alternatively, a fiber-pig-tail can be butt-coupled to mirror 1611 and also be used as an output fiber pigtail. Such an implementation is shown in
(171) Similarly, a cladding pumped version of cavity 1600 can be constructed. Cavity 1900 shown in
(172) The cavity designs discussed with respect to
(173)
(174)
(175)
(176)
(177)
(178) To enable the oscillation of short pulses with a bandwidth comparable to the bandwidth of the gain medium 2402, saturable absorber mirror 2403 contains a bi-temporal saturable absorber, constructed with a bi-temporal life-time comprising a 1st short life-time of <5 ps and a 2nd long life-time of >50 ps. More preferable is a first life-time of <1 ps, to allow pulse shaping of pulses as short as 100 fs and shorter. By selecting the penetration depth of the implanted ions into the saturable absorber, even tri-temporal saturable absorbers can be constructed.
(179) The wide-bandwidth grating is preferably selected to approximately match the dispersion of the intra-cavity fibers. The wide-bandwidth grating can be made in short non-polarization maintaining fibers and it can be made also in polarization maintaining fibers. In order to suppress detrimental effects from cross coupling between the two polarization axes of the fiber grating, coupling to cladding modes in such large bandwidth fiber gratings should be suppressed. Gratings with suppressed coupling to cladding modes can be made in optical fibers with photosensitive core and cladding area, where the photosensitive cladding area is index-matched to the rest of the cladding. Such fiber designs are well known in the state of the art and can for example be manufactured with an appropriate selection of germania and fluorine doping in the core and cladding regions and such fiber designs are not further discussed here. Because of the large generated bandwidth, splicing of such polarization maintaining gratings to the rest of the cavity without coherent coupling between the linear polarization eigenmodes is no problem. Alternatively, the fiber gratings can be written directly into the photosensitive gain fiber, with an index and dopant profile that suppresses coupling to cladding modes in the fiber grating.
(180) To sustain large spectral bandwidth, fiber grating 2404 has preferably a spectral bandwidth >20 nm. A splice 2407 (or an equivalent bulk optic lens assembly) is used to connect the output of fiber laser 2401 to nonlinear fiber 2408 to be used for additional spectral broadening of the output of the fiber laser. For example fiber 2408 can comprise a highly nonlinear dispersion-flattened holey fiber. In conjunction with such fiber, smooth broad-bandwidth spectral profiles with bandwidths exceeding 100 nm can be generated. These spectral outputs can be used directly in high precision optical coherence tomography.
(181) The pulses at the output of fiber 2408 are generally chirped and a dispersion compensation module 2409 can be inserted after the output from fiber 2408 for additional pulse compression. The dispersion compensation module can be spliced directly to fiber end 2408 when optical fiber is used for dispersion compensation. Alternatively, the dispersion compensation module can comprise two (or one) bulk grating (or prism) pair(s). Such bulk optic elements for dispersion compensation are well known in the state of the art and are not further discussed here. Coupling into and out of a bulk dispersion compensating module is obtained via lenses 2410 and 2411. The pulses generated after pulse compression can be as short as 20-200 fs.
(182) An additional highly nonlinear fiber 2412 (or a number of spliced together highly nonlinear fibers) is then used for the generation of the coherent spectral continuum. These spectral continua can be subsequently used in precision frequency metrology.
(183) Note that the discussion with respect to
(184) Though the discussion of the laser system with respect to
(185) The above description of the preferred embodiments has been given by way of example. From the disclosure given, those skilled in the art will not only understand the present invention and its attendant advantages, but will also find apparent various changes and modifications to the structures and methods disclosed. It is sought, therefore, to cover all such changes and modifications as fall within the spirit and scope of the invention, as defined by the appended claims and equivalents thereof.