D flip-flop cells, with DFM-optimized M0 cuts and V0 adjacencies

09627408 ยท 2017-04-18

Assignee

Inventors

Cpc classification

International classification

Abstract

A library of a DFM-improved standard logic cells (including D flip-flop cells) that avoid pattern-degrading configurations in the M0 and/or V0 layer(s) is disclosed, along with wafers, chips and systems constructed from such cells.

Claims

1. A D flip-flop cell, implemented in a double-height standard cell form, said flip-flop comprising: three rectangular power rails, including a top rail, middle rail, and bottom rail, each of the rails formed in a first metal (M0) layer, each of the rails extending uncut, horizontally across the entire cell, each of the rails having a vertical width at least twice a minimum permitted width for M0 patterning; a plurality of at least ten parallel, evenly-spaced, minimum width gate stripes, each formed in a gate (PC) layer, and each extending vertically between the top and bottom rails, adjacent gate stripes separated by a center-to-center spacing CPP; positioned vertically between the top and middle rails, one or more first-exposure M0 track(s), each of the first-exposure M0 track(s) having the minimum permitted M0 width and extending horizontally across the cell, said first-exposure M0 track(s) patterned, in part, by portion(s) of a first-exposure M0 mask (M0_color1) and, in part, by portion(s) of a first-exposure M0 cut mask (M0CUT1); positioned vertically between the top and middle rails, one or more second-exposure M0 track(s), each of the second-exposure M0 track(s) having the minimum permitted M0 width and extending horizontally across the cell, said second-exposure M0 track(s) patterned, in part, by portion(s) of a second-exposure M0 mask (M0_color2) and, in part, by portion(s) of a second-exposure M0 cut mask (M0CUT2); positioned vertically between the bottom and middle rails, one or more first-exposure M0 track(s), each of the first-exposure M0 track(s) having the minimum permitted M0 width and extending horizontally across the cell, said first-exposure M0 track(s) patterned, in part, by portion(s) of the M0_color1 mask and, in part, by portion(s) of the M0CUT1 mask; positioned vertically between the bottom and middle rails, one or more second-exposure M0 track(s), each of the second-exposure M0 track(s) having the minimum permitted M0 width and extending horizontally across the cell, said second-exposure M0 track(s) patterned, in part, by portion(s) of the M0_color2 mask and, in part, by portion(s) of the M0CUT2 mask; a plurality of vias, patterned in a V0 (via to interconnect) layer, each of said plurality of vias instantiated on an M0 track; additional patterned features, in NW (N-well), TS (trench silicide), RX (active), CA (contact to active), GO (gate open), and M1 (first-level interconnect) layers, configured to realize the D flip-flop logical behavior of the cell; characterized in that: the separation between the V0 vias is greater than 0.8 the gap between adjacent M0 tracks.

2. The flip-flop cell of claim 1, further characterized in that: the separation between the V0 vias is greater than the gap between adjacent M0 tracks.

3. The flip-flop cell of claim 1, further characterized in that: none of the M0 cuts overlaps a gate stripe.

4. The flip-flop cell of claim 1, wherein: all M0CUT1 features are rectangular in shape, with a left edge, right edge, top edge, and bottom edge, and as between any two first and second M0CUT1 features within the cell, there is at least 1.7CPP of spacing between all points at which the left edge of the first M0CUT1 feature intersects an M0color1 feature and all points at which the left edge of the second M0CUT1 feature intersects an M0color1 feature, and there is at least 1.7CPP of spacing between all points at which the right edge of the first M0CUT1 feature intersects an M0color1 feature and all points at which the right edge of the second M0CUT1 feature intersects an M0color1 feature; and, all M0CUT2 features are rectangular in shape, with a left edge, right edge, top edge, and bottom edge, and as between any two first and second M0CUT2 features within the cell, there is at least 1.7CPP of spacing between all points at which the left edge of the first M0CUT2 feature intersects an M0color2 feature and all points at which the left edge of the second M0CUT2 feature intersects an M0color2 feature, and there is at least 1.7CPP of spacing between all points at which the right edge of the first M0CUT2 feature intersects an M0color2 feature and all points at which the right edge of the second M0CUT2 feature intersects an M0color2 feature.

5. The flip-flop cell of claim 1, wherein: each of said plurality of vias is spaced at least 0.8CPP from the nearest cut in the M0 track in which said via is instantiated, where said spacing is measured as the horizontal distance between the center of the via and the center of the cut.

6. The flip-flop cell of claim 5, wherein: each of said plurality of vias is spaced at least 0.9CPP from the nearest cut in the M0 track in which said via is instantiated, where said spacing is measured as the horizontal distance between the center of the via and the center of the cut.

7. The flip-flop cell of claim 1, instantiated on a silicon chip.

8. The flip-flop cell of claim 1, instantiated as instructions for patterning features on a silicon wafer.

9. The flip-flop cell of claim 8, wherein the instructions are contained in a non-transient, computer-readable medium in GDSII format.

10. A flip-flop cell, comprising: means for implementing the logical behavior of a D flip-flop, using: three rectangular power rails, including a top rail, middle rail, and bottom rail, each of the rails formed in a first metal (M0) layer; at least ten parallel, evenly-spaced, minimum width gate stripes, each formed in a gate (PC) layer, and each extending vertically between the top and bottom rails, adjacent gate stripes separated by a center-to-center spacing CPP; positioned vertically between the top and middle rails, one or more first-exposure M0 track(s), each of the first-exposure M0 track(s) having a minimum permitted M0 width and extending horizontally across the cell, said first-exposure M0 track(s) patterned, in part, by portion(s) of a first-exposure M0 mask (M0_color1) and, in part, by portion(s) of a first-exposure M0 cut mask (M0CUT1); positioned vertically between the top and middle rails, one or more second-exposure M0 track(s), each of the second-exposure M0 track(s) having the minimum permitted M0 width and extending horizontally across the cell, said second-exposure M0 track(s) patterned, in part, by portion(s) of a second-exposure M0 mask (M0_color2) and, in part, by portion(s) of a second-exposure M0 cut mask (M0CUT2); positioned vertically between the bottom and middle rails, one or more first-exposure M0 track(s), each of the first-exposure M0 track(s) having the minimum permitted M0 width and extending horizontally across the cell, said first-exposure M0 track(s) patterned, in part, by portion(s) of the M0_color1 mask and, in part, by portion(s) of the M0CUT1 mask; positioned vertically between the bottom and middle rails, one or more second-exposure M0 track(s), each of the second-exposure M0 track(s) having the minimum permitted M0 width and extending horizontally across the cell, said second-exposure M0 tracks patterned, in part, by portion(s) of the M0_color2 mask and, in part, by portion(s) of the M0CUT2 mask; a plurality of vias, patterned in a V0 (via to interconnect) layer, each of said plurality of vias instantiated on an M0 track; and, additional patterned features, in NW (N-well), TS (trench silicide), RX (active), CA (contact to active), GO (gate open), and M1 (first-level interconnect) layers, configured to realize the D flip-flop logical behavior of the cell; characterized in that: the separation between the V0 vias is greater than the gap between adjacent M0 tracks.

11. The flip-flop cell of claim 10, wherein the top and bottom rails are patterned using a different M0 mask than the middle rail, and each of the rails extends uncut, horizontally across the entire cell.

12. The flip-flop cell of claim 11, wherein each of the rails has a vertical width exactly three times the vertical width of the M0 tracks.

13. The flip-flop cell of claim 10, wherein: all M0CUT1 features are rectangular in shape, with a left edge, right edge, top edge, and bottom edge, and as between any two first and second M0CUT1 features within the cell, there is at least 1.7CPP of spacing between all points at which the left edge of the first M0CUT1 feature intersects an M0color1 feature and all points at which the left edge of the second M0CUT1 feature intersects an M0color1 feature, and there is at least 1.7CPP of spacing between all points at which the right edge of the first M0CUT1 feature intersects an M0color1 feature and all points at which the right edge of the second M0CUT1 feature intersects an M0color1 feature; and, all M0CUT2 features are rectangular in shape, with a left edge, right edge, top edge, and bottom edge, and as between any two first and second M0CUT2 features within the cell, there is at least 1.7CPP of spacing between all points at which the left edge of the first M0CUT2 feature intersects an M0color2 feature and all points at which the left edge of the second M0CUT2 feature intersects an M0color2 feature, and there is at least 1.7CPP of spacing between all points at which the right edge of the first M0CUT2 feature intersects an M0color2 feature and all points at which the right edge of the second M0CUT2 feature intersects an M0color2 feature.

14. The flip-flop cell of claim 10, wherein: each of said plurality of vias is spaced at least 0.8CPP from the nearest cut in the M0 track in which said via is instantiated, where said spacing is measured as the horizontal distance between the center of the via and the center of the cut.

15. The flip-flop cell of claim 14, wherein: each of said plurality of vias is spaced at least 0.9CPP from the nearest cut in the M0 track in which said via is instantiated, where said spacing is measured as the horizontal distance between the center of the via and the center of the cut.

16. The flip-flop cell of claim 10, instantiated on a silicon chip.

17. The flip-flop cell of claim 10, instantiated as instructions for patterning features on a silicon wafer.

18. The flip-flop of claim 17, wherein the instructions are contained in a non-transient, computer-readable medium in GDSII format.

19. A flip-flop cell, comprising: means for implementing the logical behavior of a D flip-flop, using: three rectangular power rails, including a top rail, middle rail, and bottom rail, each of the rails formed in a first metal (M0) layer; at least ten parallel, evenly-spaced, minimum width gate stripes, each formed in a gate (PC) layer, and each extending vertically between the top and bottom rails, adjacent gate stripes separated by a center-to-center spacing CPP; positioned vertically between the top and middle rails, at least two first-exposure M0 tracks, each of the first-exposure M0 tracks having a minimum permitted M0 width and extending horizontally across the cell, said first-exposure M0 tracks patterned, in part, by portion(s) of a first-exposure M0 mask (M0_color1) and, in part, by portion(s) of a first-exposure M0 cut mask (M0CUT1); positioned vertically between the top and middle rails, at least two second-exposure M0 tracks, each of the second-exposure M0 tracks having the minimum permitted M0 width and extending horizontally across the cell, said second-exposure M0 tracks patterned, in part, by portion(s) of a second-exposure M0 mask (M0_color2) and, in part, by portion(s) of a second-exposure M0 cut mask (M0CUT2); positioned vertically between the bottom and middle rails, at least two first-exposure M0 tracks, each of the first-exposure M0 tracks having the minimum permitted M0 width and extending horizontally across the cell, said first-exposure M0 tracks patterned, in part, by portion(s) of the M0_color1 mask and, in part, by portion(s) of the M0CUT1 mask; positioned vertically between the bottom and middle rails, at least two second-exposure M0 tracks, each of the second-exposure M0 tracks having the minimum permitted M0 width and extending horizontally across the cell, said second-exposure M0 tracks patterned, in part, by portion(s) of the M0_color2 mask and, in part, by portion(s) of the M0CUT2 mask; a plurality of vias, patterned in a V0 (via to interconnect) layer, each of said plurality of vias instantiated on an M0 track; and, additional patterned features, in NW (N-well), TS (trench silicide), RX (active), CA (contact to active), GO (gate open), and M1 (first-level interconnect) layers, configured to realize the D flip-flop logical behavior of the cell; characterized in that: none of the M0 cuts overlaps a gate stripe.

20. The flip-flop cell of claim 19, wherein the top and bottom rails are patterned using a different M0 mask than the middle rail, and each of the rails extends uncut, horizontally across the entire cell.

21. The flip-flop cell of claim 20, wherein each of the rails has a vertical width exactly three times the vertical width of the M0 tracks.

22. The flip-flop cell of claim 19, wherein: all M0CUT1 features are rectangular in shape, with a left edge, right edge, top edge, and bottom edge, and as between any two first and second M0CUT1 features within the cell, there is at least 1.7CPP of spacing between all points at which the left edge of the first M0CUT1 feature intersects an M0color1 feature and all points at which the left edge of the second M0CUT1 feature intersects an M0color1 feature, and there is at least 1.7CPP of spacing between all points at which the right edge of the first M0CUT1 feature intersects an M0color1 feature and all points at which the right edge of the second M0CUT1 feature intersects an M0color1 feature; and, all M0CUT2 features are rectangular in shape, with a left edge, right edge, top edge, and bottom edge, and as between any two first and second M0CUT2 features within the cell, there is at least 1.7CPP of spacing between all points at which the left edge of the first M0CUT2 feature intersects an M0color2 feature and all points at which the left edge of the second M0CUT2 feature intersects an M0color2 feature, and there is at least 1.7CPP of spacing between all points at which the right edge of the first M0CUT2 feature intersects an M0color2 feature and all points at which the right edge of the second M0CUT2 feature intersects an M0color2 feature.

23. The flip-flop cell of claim 19, wherein: each of said plurality of vias is spaced at least 0.8CPP from the nearest cut in the M0 track in which said via is instantiated, where said spacing is measured as the horizontal distance between the center of the via and the center of the cut.

24. The flip-flop cell of claim 23, wherein: each of said plurality of vias is spaced at least 0.9CPP from the nearest cut in the M0 track in which said via is instantiated, where said spacing is measured as the horizontal distance between the center of the via and the center of the cut.

25. The flip-flop cell of claim 19, instantiated on a silicon chip.

26. The flip-flop cell of claim 19, instantiated as instructions for patterning features on a silicon wafer.

27. The flip-flop of claim 26, wherein the instructions are contained in a non-transient, computer-readable medium in GDSII format.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) The above, as well as other, aspects, features and advantages of the present invention are illustrated in the accompanying set of figures, which are rendered to relative scale, and in which:

(2) FIG. A contains a layer legend for the A-labeled (i.e., 1A, 2A, 3A, etc.) figures;

(3) FIG. B contains a layer legend the B-labeled figures;

(4) FIG. C contains a layer legend for the C-labeled figures;

(5) FIG. D contains a layer legend for the D-labeled figures;

(6) FIGS. 1A-D depict an sdffqx1_alt cell;

(7) FIGS. 2A-D depict a mux2x1_alt cell;

(8) FIGS. 3A-D depict an an2x1 cell;

(9) FIGS. 4A-D depict an an2x2 cell;

(10) FIGS. 5A-D depict an an3x1 cell;

(11) FIGS. 6A-D depict an an3x2 cell;

(12) FIGS. 7A-D depict an an4x1 cell;

(13) FIGS. 8A-D depict an an4x2 cell;

(14) FIGS. 9A-D depict an ao21x1 cell;

(15) FIGS. 10A-D depict an ao31x1 cell;

(16) FIGS. 11A-D depict an ao211x1 cell;

(17) FIGS. 12A-D depict an aoi21x1 cell;

(18) FIGS. 13A-D depict an aoi21x2 cell;

(19) FIGS. 14A-D depict an aoi22x1 cell;

(20) FIGS. 15A-D depict an aoi22x2 cell;

(21) FIGS. 16A-D depict an aoi31x1 cell;

(22) FIGS. 17A-D depict an aoi31x2 cell;

(23) FIGS. 18A-D depict an aoi211x1 cell;

(24) FIGS. 19A-D depict an aoi222x1 cell;

(25) FIGS. 20A-D depict an bufhx6 cell;

(26) FIGS. 21A-D depict an bufx1 cell;

(27) FIGS. 22A-D depict an bufx2 cell;

(28) FIGS. 23A-D depict an bufx3 cell;

(29) FIGS. 24A-D depict an bufx4 cell;

(30) FIGS. 25A-D depict an bufx6 cell;

(31) FIGS. 26A-D depict an bufx8 cell;

(32) FIGS. 27A-D depict an ckor2lban2x1 cell;

(33) FIGS. 28A-D depict an dlyx1 cell;

(34) FIGS. 29A-D depict an fax1 cell;

(35) FIGS. 30A-D depict an hax1 cell;

(36) FIGS. 31A-D depict an iaoi21x1 cell;

(37) FIGS. 32A-D depict an ind2x1 cell;

(38) FIGS. 33A-D depict an ind2x2 cell;

(39) FIGS. 34A-D depict an ind3x1 cell;

(40) FIGS. 35A-D depict an ind3x2 cell;

(41) FIGS. 36A-D depict an inr2x1 cell;

(42) FIGS. 37A-D depict an inr2x2 cell;

(43) FIGS. 38A-D depict an inr3x1 cell;

(44) FIGS. 39A-D depict an inr3x2 cell;

(45) FIGS. 40A-D depict an invx1 cell;

(46) FIGS. 41A-D depict an invx2 cell;

(47) FIGS. 42A-D depict an invx4 cell;

(48) FIGS. 43A-D depict an invx6 cell;

(49) FIGS. 44A-D depict an invx8 cell;

(50) FIGS. 45A-D depict an ioai21x1 cell;

(51) FIGS. 46A-D depict an latqx1 cell;

(52) FIGS. 47A-D depict an mux2x1 cell;

(53) FIGS. 48A-D depict an mux2x2 cell;

(54) FIGS. 49A-D depict an muxi2x1 cell;

(55) FIGS. 50A-D depict an nd2x1 cell;

(56) FIGS. 51A-D depict an nd2x2 cell;

(57) FIGS. 52A-D depict an nd2x3 cell;

(58) FIGS. 53A-D depict an nd2x4 cell;

(59) FIGS. 54A-D depict an nd3x1 cell;

(60) FIGS. 55A-D depict an nd3x2 cell;

(61) FIGS. 56A-D depict an nd3x3 cell;

(62) FIGS. 57A-D depict an nd3x4 cell;

(63) FIGS. 58A-D depict an nd4x1 cell;

(64) FIGS. 59A-D depict an nd4x2 cell;

(65) FIGS. 60A-D depict an nr2x1 cell;

(66) FIGS. 61A-D depict an nr2x2 cell;

(67) FIGS. 61.1A-D depict an nr2x3 cell;

(68) FIGS. 62A-D depict an nr2x4 cell;

(69) FIGS. 63A-D depict an nr3x1 cell;

(70) FIGS. 64A-D depict an nr3x2 cell;

(71) FIGS. 65A-D depict an nr3x3 cell;

(72) FIGS. 66A-D depict an nr3x4 cell;

(73) FIGS. 67A-D depict an nr4x1 cell;

(74) FIGS. 68A-D depict an nr4x2 cell;

(75) FIGS. 69A-D depict an oa21x1 cell;

(76) FIGS. 70A-D depict an oa31x1 cell;

(77) FIGS. 71A-D depict an oa211x1 cell;

(78) FIGS. 72A-D depict an oai21x1 cell;

(79) FIGS. 73A-D depict an oai21x2 cell;

(80) FIGS. 74A-D depict an oai22x1 cell;

(81) FIGS. 75A-D depict an oai22x2 cell;

(82) FIGS. 76A-D depict an oai31x1 cell;

(83) FIGS. 77A-D depict an oai31x2 cell;

(84) FIGS. 78A-D depict an oai211x1 cell;

(85) FIGS. 79A-D depict an oai222x1 cell;

(86) FIGS. 80A-D depict an or2x1 cell;

(87) FIGS. 81A-D depict an or2x2 cell;

(88) FIGS. 82A-D depict an or3x1 cell;

(89) FIGS. 83A-D depict an or3x2 cell;

(90) FIGS. 84A-D depict an or4x1 cell;

(91) FIGS. 85A-D depict an or4x2 cell;

(92) FIGS. 86A-D depict an sdffqx1 cell;

(93) FIGS. 87A-D depict an sdffrsqx1 cell;

(94) FIGS. 88A-D depict an tiehix1 cell;

(95) FIGS. 89A-D depict an tielox1 cell;

(96) FIGS. 90A-D depict an xnr2x1 cell; and,

(97) FIGS. 91A-D depict an xor2x1 cell.

DESCRIPTION OF EXEMPLARY EMBODIMENT(S)

(98) FIGS. A-D show layer maps for the respective A-labeled, B-labeled, C-labeled, and D-labeled figures that follow. With reference to FIG. A, the full set of depicted layers includes: M0 (first metal), NW (N-well), TS (trench silicide), RX (active), CA (contact to active), PC (gate, a/k/a polysilicon or polyalthough the gate material in advanced processes is typically metallic), GO (gate open, a/k/a CB), V0 (via to interconnect), and M1 (first-level interconnect). Persons skilled in the art will appreciate that any of these layers may be created through multiple exposure (e.g., double, triple or quadruple patterned) processes, and/or through use of cut masks, which themselves may be multi-patterned. The A-labeled figures in this application are intended to show the resulting complete cells as clearly as possible; thus, the details of multi-patterning and cut-masking have been eliminated from these figures.

(99) Referring now to FIGS. B and C, these show the layer maps for the B-labeled and C-labeled figures, which depict the multi-patterning, cut-masked details of M0 patterning in the inventive cells. In particular, in the exemplary embodiment herein, M0 is patterned in two exposures (M0_color1 and M0_color2), each of which is patterned by its own cut mask (M0CUT1 and M0CUT2, respectively). PC is shown in both the A-labeled and B-labeled figures as a measurement reference. Persons skilled in the art will understand that variations on the M0 process are possible. For example, M0 may be triple patterned, with a separate cut mask for each exposure, and/or an additional cut mask may be provided that cuts both (or all) exposures of M0.

(100) Referring now to FIG. D, which shows a layer map for the D-labeled figures, these figures depict the V0 patterning details of the cells, with M0 and PC layers shown for reference. Persons skilled in the art will understand that variations on the V0 process are possible. For example, V0 may be double or triple patterned, with a separate cut mask for each exposure, and/or an additional cut mask may be provided that cuts all exposures.

(101) Reference is now made to FIGS. 1A-D, which depict an sdffqx1 alt cell. This cell implements the logic function of a scan-enabled, D flip-flop, in drive strength 1. This cell is an example of a state-of-the-art layout that, nevertheless, does not meet the objects of the present invention. Referring first to FIG. 1B, one can see that CPP (contacted poly pitch) can be equivalently measured as the left-edge-to-left-edge distance, center-to-center distance, or right-edge-to-right-edge distance between adjacent gate stripes. As further depicted in FIG. 1B, this cell contains several undesirable configurations in the first-exposure M0 layer: two instances of left-edge-to-left-edge first-exposure M0 cuts with spacing (1 and 3) of less than 2CPP; and an instance of right-edge-to-right-edge first-exposure M0 cuts with a spacing (2) of less than 2CPP. (Note, there may be additional violations on this layout, and others that follow in FIGS. 1C and 2B-C. The flagged examples are intended to be exemplary, not exhaustive.) Referring now to FIG. 1C, additional undesirable configurations in the second-exposure M0 layer are flagged: an instance of left-edge-to-left-edge second-exposure M0 cuts with a spacing (4) of less than 2CPP; and an instance of right-edge-to-right-edge second-exposure M0 cuts with a spacing (5) of less than 2CPP. Referring now to FIG. 1D, this cell also contains several undesirable configurations in the V0 layer: (i) four instances (11-14) of adjacent V0 vias in adjacent M0 tracks (i.e., V0 vias with a spacing less than or equal to the minimum spacing between adjacent M0 tracks); and (ii) two instances (17-18) of V0 vias in the same M0 track, separated by an M0 cut of less than one CPP.

(102) Reference is now made to FIGS. 2A-D, which depict a mux2x1_alt cell. This cell implements the logic function of a 2-input MUX, in drive strength 1. This cell is another example of a state-of-the-art layout that, nevertheless, does not meet the DFM objects of the present invention. As flagged in FIGS. 2B and 2C, this cell contains undesirable spacings between cuts in the first-exposure M0 layer (see 7 on FIG. 2B) and between cuts in the second-exposure M0 layer (see 8 and 9 in FIG. 2C). Referring now to FIG. 2D, this cell also contains several undesirable configurations in the V0 layer: (i) one instance (15) of adjacent V0 vias in adjacent M0 tracks; and (ii) three instances (19-21) of V0 vias in the same M0 track, separated by an M0 cut of less than one CPP.

(103) FIGS. 3A-D, et seq., as described below, contain examples of cells that meet the DFM objects of the present invention, and collectively comprise the exemplary, inventive library herein.

(104) Reference is now made to FIGS. 3A-D, which depict an an2x1 cell. This cell implements the logic function of a 2-input AND, in drive strength 1. This cell is 4 CPP wide.

(105) Reference is now made to FIGS. 4A-D, which depict an an2x2 cell. This cell implements the logic function of a 2-input AND, in drive strength 2. This cell is 5 CPP wide.

(106) Reference is now made to FIGS. 5A-D, which depict an an3x1 cell. This cell implements the logic function of a 3-input AND, in drive strength 1. This cell is 6 CPP wide.

(107) Reference is now made to FIGS. 6A-D, which depict an an3x2 cell. This cell implements the logic function of a 3-input AND, in drive strength 2. This cell is 7 CPP wide.

(108) Reference is now made to FIGS. 7A-D, which depict an an4x1 cell. This cell implements the logic function of a 4-input AND, in drive strength 1. This cell is 7 CPP wide.

(109) Reference is now made to FIGS. 8A-D, which depict an an4x2 cell. This cell implements the logic function of a 4-input AND, in drive strength 2. This cell is 8 CPP wide.

(110) Reference is now made to FIGS. 9A-D, which depict an ao21x1 cell. This cell implements the logic function OR(AND(a,b),c), in drive strength 1. This cell is 6 CPP wide.

(111) Reference is now made to FIGS. 10A-D, which depict an ao31x1 cell. This cell implements the logic function OR(AND(a,b,c),d), in drive strength 1. This cell is 7 CPP wide.

(112) Reference is now made to FIGS. 11A-D, which depict an ao211x1 cell. This cell implements the logic function OR(AND(a,b),c,d), in drive strength 1. This cell is 7 CPP wide.

(113) Reference is now made to FIGS. 12A-D, which depict an aoi21x1 cell. This cell implements the logic function NOT(OR(AND(a,b),c)), in drive strength 1. This cell is 4 CPP wide.

(114) Reference is now made to FIGS. 13A-D, which depict an aoi21x2 cell. This cell implements the logic function NOT(OR(AND(a,b),c)), in drive strength 2. This cell is 7 CPP wide.

(115) Reference is now made to FIGS. 14A-D, which depict an aoi22x1 cell. This cell implements the logic function NOT(OR(AND(a,b),AND(c,d))), in drive strength 1. This cell is 5 CPP wide.

(116) Reference is now made to FIGS. 15A-D, which depict an aoi22x2 cell. This cell implements the logic function NOT(OR(AND(a,b),AND(c,d))), in drive strength 2. This cell is 9 CPP wide.

(117) Reference is now made to FIGS. 16A-D, which depict an aoi31x1 cell. This cell implements the logic function NOT(OR(AND(a,b,c),d)), in drive strength 1. This cell is 5 CPP wide.

(118) Reference is now made to FIGS. 17A-D, which depict an aoi31x2 cell. This cell implements the logic function NOT(OR(AND(a,b,c),d)), in drive strength 2. This cell is 9 CPP wide.

(119) Reference is now made to FIGS. 18A-D, which depict an aoi211x1 cell. This cell implements the logic function NOT(OR(AND(a,b),c,d)), in drive strength 1. This cell is 5 CPP wide.

(120) Reference is now made to FIGS. 19A-D, which depict an aoi222x1 cell. This cell implements the logic function NOT(OR(AND(a,b),AND(c,d),AND(e,f))), in drive strength 1. This cell is 9 CPP wide.

(121) Reference is now made to FIGS. 20A-D, which depict an bufhx6 cell. This cell implements the logic function of a buffer, in drive strength 6. This cell is 10 CPP wide.

(122) Reference is now made to FIGS. 21A-D, which depict an bufx1 cell. This cell implements the logic function of a buffer, in drive strength 1. This cell is 3 CPP wide.

(123) Reference is now made to FIGS. 22A-D, which depict an bufx2 cell. This cell implements the logic function of a buffer, in drive strength 2. This cell is 4 CPP wide.

(124) Reference is now made to FIGS. 23A-D, which depict an bufx3 cell. This cell implements the logic function of a buffer, in drive strength 3. This cell is 5 CPP wide.

(125) Reference is now made to FIGS. 24A-D, which depict an bufx4 cell. This cell implements the logic function of a buffer, in drive strength 4. This cell is 7 CPP wide.

(126) Reference is now made to FIGS. 25A-D, which depict an bufx6 cell. This cell implements the logic function of a buffer, in drive strength 6. This cell is 9 CPP wide.

(127) Reference is now made to FIGS. 26A-D, which depict an bufx8 cell. This cell implements the logic function of a buffer, in drive strength 8. This cell is 12 CPP wide.

(128) Reference is now made to FIGS. 27A-D, which depict an ckor2lban2x1 cell. This cell implements the logic function of a clock-gating latch, in drive strength 1. This cell is 17 CPP wide.

(129) Reference is now made to FIGS. 28A-D, which depict an dlyx1 cell. This cell implements the logic function of a delay gate, in drive strength 1. This cell is 9 CPP wide.

(130) Reference is now made to FIGS. 29A-D, which depict an fax1 cell. This cell implements the logic function of a full adder, in drive strength 1. This double-height cell is 10 CPP wide.

(131) Reference is now made to FIGS. 30A-D, which depict an hax1 cell. This cell implements the logic function of a half adder, in drive strength 1. This double-height cell is 8 CPP wide.

(132) Reference is now made to FIGS. 31A-D, which depict an iaoi21x1 cell. This cell implements the logic function NOT(OR(AND(a,b),c)), with one of the inputs inverted, in drive strength 1. This cell is 5 CPP wide.

(133) Reference is now made to FIGS. 32A-D, which depict an ind2x1 cell. This cell implements the logic function of a 2-input NAND, with one of the inputs inverted, in drive strength 1. This cell is 4 CPP wide.

(134) Reference is now made to FIGS. 33A-D, which depict an ind2x2 cell. This cell implements the logic function of a 2-input NAND, with one of the inputs inverted, in drive strength 2. This cell is 6 CPP wide.

(135) Reference is now made to FIGS. 34A-D, which depict an ind3x1 cell. This cell implements the logic function of a 3-input NAND, with one of the inputs inverted, in drive strength 1. This cell is 5 CPP wide.

(136) Reference is now made to FIGS. 35A-D, which depict an ind3x2 cell. This cell implements the logic function of a 3-input NAND, with one of the inputs inverted, in drive strength 2. This cell is 8 CPP wide.

(137) Reference is now made to FIGS. 36A-D, which depict an inr2x1 cell. This cell implements the logic function of a 2-input NOR, with one of the inputs inverted, in drive strength 1. This cell is 4 CPP wide.

(138) Reference is now made to FIGS. 37A-D, which depict an inr2x2 cell. This cell implements the logic function of a 2-input NOR, with one of the inputs inverted, in drive strength 2. This cell is 6 CPP wide.

(139) Reference is now made to FIGS. 38A-D, which depict an inr3x1 cell. This cell implements the logic function of a 3-input NOR, with one of the inputs inverted, in drive strength 1. This cell is 5 CPP wide.

(140) Reference is now made to FIGS. 39A-D, which depict an inr3x2 cell. This cell implements the logic function of a 3-input NOR, with one of the inputs inverted, in drive strength 2. This cell is 8 CPP wide.

(141) Reference is now made to FIGS. 40A-D, which depict an invx1 cell. This cell implements the logic function of an inverter, in drive strength 1. This cell is 2 CPP wide.

(142) Reference is now made to FIGS. 41A-D, which depict an invx2 cell. This cell implements the logic function of an inverter, in drive strength 2. This cell is 3 CPP wide.

(143) Reference is now made to FIGS. 42A-D, which depict an invx4 cell. This cell implements the logic function of an inverter, in drive strength 4. This cell is 5 CPP wide.

(144) Reference is now made to FIGS. 43A-D, which depict an invx6 cell. This cell implements the logic function of an inverter, in drive strength 6. This cell is 7 CPP wide.

(145) Reference is now made to FIGS. 44A-D, which depict an invx8 cell. This cell implements the logic function of an inverter, in drive strength 8. This cell is 9 CPP wide.

(146) Reference is now made to FIGS. 45A-D, which depict an ioai21x1 cell. This cell implements the logic function NOT(AND(OR(a,b),c)), with one of the inputs inverted, in drive strength 1. This cell is 5 CPP wide.

(147) Reference is now made to FIGS. 46A-D, which depict an latqx1 cell. This cell implements the logic function of a latch, in drive strength 1. This cell is 13 CPP wide.

(148) Reference is now made to FIGS. 47A-D, which depict an mux2x1 cell. This cell implements the logic function of a 2-input MUX, in drive strength 1. This cell is 9 CPP wide.

(149) Reference is now made to FIGS. 48A-D, which depict an mux2x2 cell. This cell implements the logic function of a 2-input MUX, in drive strength 2. This cell is 9 CPP wide.

(150) Reference is now made to FIGS. 49A-D, which depict an muxi2x1 cell. This cell implements the logic function of a 2-input MUX, with one of its inputs inverted, in drive strength 1. This cell is 7 CPP wide.

(151) Reference is now made to FIGS. 50A-D, which depict an nd2x1 cell. This cell implements the logic function of a 2-input NAND, in drive strength 1. This cell is 3 CPP wide.

(152) Reference is now made to FIGS. 51A-D, which depict an nd2x2 cell. This cell implements the logic function of a 2-input NAND, in drive strength 2. This cell is 5 CPP wide.

(153) Reference is now made to FIGS. 52A-D, which depict an nd2x3 cell. This cell implements the logic function of a 2-input NAND, in drive strength 3. This cell is 7 CPP wide.

(154) Reference is now made to FIGS. 53A-D, which depict an nd2x4 cell. This cell implements the logic function of a 2-input NAND, in drive strength 4. This cell is 9 CPP wide.

(155) Reference is now made to FIGS. 54A-D, which depict an nd3x1 cell. This cell implements the logic function of a 3-input NAND, in drive strength 1. This cell is 4 CPP wide.

(156) Reference is now made to FIGS. 55A-D, which depict an nd3x2 cell. This cell implements the logic function of a 3-input NAND, in drive strength 2. This cell is 7 CPP wide.

(157) Reference is now made to FIGS. 56A-D, which depict an nd3x3 cell. This cell implements the logic function of a 3-input NAND, in drive strength 3. This cell is 10 CPP wide.

(158) Reference is now made to FIGS. 57A-D, which depict an nd3x4 cell. This cell implements the logic function of a 3-input NAND, in drive strength 4. This cell is 13 CPP wide.

(159) Reference is now made to FIGS. 58A-D, which depict an nd4x1 cell. This cell implements the logic function of a 4-input NAND, in drive strength 1. This cell is 5 CPP wide.

(160) Reference is now made to FIGS. 59A-D, which depict an nd4x2 cell. This cell implements the logic function of a 4-input NAND, in drive strength 2. This cell is 9 CPP wide.

(161) Reference is now made to FIGS. 60A-D, which depict an nr2x1 cell. This cell implements the logic function of a 2-input NOR, in drive strength 1. This cell is 3 CPP wide.

(162) Reference is now made to FIGS. 61A-D, which depict an nr2x2 cell. This cell implements the logic function of a 2-input NOR, in drive strength 2. This cell is 5 CPP wide.

(163) Reference is now made to FIGS. 61.1A-D, which depict an nr2x3 cell. This cell implements the logic function of a 2-input NOR, in drive strength 3. This cell is 7 CPP wide.

(164) Reference is now made to FIGS. 62A-D, which depict an nr2x4 cell. This cell implements the logic function of a 2-input NOR, in drive strength 4. This cell is 9 CPP wide.

(165) Reference is now made to FIGS. 63A-D, which depict an nr3x1 cell. This cell implements the logic function of a 3-input NOR, in drive strength 1. This cell is 4 CPP wide.

(166) Reference is now made to FIGS. 64A-D, which depict an nr3x2 cell. This cell implements the logic function of a 3-input NOR, in drive strength 2. This cell is 7 CPP wide.

(167) Reference is now made to FIGS. 65A-D, which depict an nr3x3 cell. This cell implements the logic function of a 3-input NOR, in drive strength 3. This cell is 10 CPP wide.

(168) Reference is now made to FIGS. 66A-D, which depict an nr3x4 cell. This cell implements the logic function of a 3-input NOR, in drive strength 4. This cell is 13 CPP wide.

(169) Reference is now made to FIGS. 67A-D, which depict an nr4x1 cell. This cell implements the logic function of a 4-input NOR, in drive strength 1. This cell is 5 CPP wide.

(170) Reference is now made to FIGS. 68A-D, which depict an nr4x2 cell. This cell implements the logic function of a 4-input NOR, in drive strength 2. This cell is 9 CPP wide.

(171) Reference is now made to FIGS. 69A-D, which depict an oa21x1 cell. This cell implements the logic function AND(OR(a,b),c), in drive strength 1. This cell is 6 CPP wide.

(172) Reference is now made to FIGS. 70A-D, which depict an oa31x1 cell. This cell implements the logic function AND(OR(a,b,c),d), in drive strength 1. This cell is 7 CPP wide.

(173) Reference is now made to FIGS. 71A-D, which depict an oa211x1 cell. This cell implements the logic function AND(OR(a,b),c,d), in drive strength 1. This cell is 7 CPP wide.

(174) Reference is now made to FIGS. 72A-D, which depict an oai21x1 cell. This cell implements the logic function NOT(AND(OR(a,b),c)), in drive strength 1. This cell is 4 CPP wide.

(175) Reference is now made to FIGS. 73A-D, which depict an oai21x2 cell. This cell implements the logic function NOT(AND(OR(a,b),c)), in drive strength 2. This cell is 7 CPP wide.

(176) Reference is now made to FIGS. 74A-D, which depict an oai22x1 cell. This cell implements the logic function NOT(AND(OR(a,b),OR(c,d)), in drive strength 1. This cell is 5 CPP wide.

(177) Reference is now made to FIGS. 75A-D, which depict an oai22x2 cell. This cell implements the logic function NOT(AND(OR(a,b),OR(c,d)), in drive strength 2. This cell is 9 CPP wide.

(178) Reference is now made to FIGS. 76A-D, which depict an oai31x1 cell. This cell implements the logic function NOT(AND(OR(a,b,c),d)), in drive strength 1. This cell is 5 CPP wide.

(179) Reference is now made to FIGS. 77A-D, which depict an oai31x2 cell. This cell implements the logic function NOT(AND(OR(a,b,c),d)), in drive strength 2. This cell is 9 CPP wide.

(180) Reference is now made to FIGS. 78A-D, which depict an oai211x1 cell. This cell implements the logic function NOT(AND(OR(a,b),c,d)), in drive strength 1. This cell is 5 CPP wide.

(181) Reference is now made to FIGS. 79A-D, which depict an oai222x1 cell. This cell implements the logic function NOT(AND(OR(a,b),OR(c,d),OR(e,f))), in drive strength 1. This cell is 9 CPP wide.

(182) Reference is now made to FIGS. 80A-D, which depict an or2x1 cell. This cell implements the logic function of a 2-input OR, in drive strength 1. This cell is 4 CPP wide.

(183) Reference is now made to FIGS. 81A-D, which depict an or2x2 cell. This cell implements the logic function of a 2-input OR, in drive strength 2. This cell is 5 CPP wide.

(184) Reference is now made to FIGS. 82A-D, which depict an or3x1 cell. This cell implements the logic function of a 3-input OR, in drive strength 1. This cell is 6 CPP wide.

(185) Reference is now made to FIGS. 83A-D, which depict an or3x2 cell. This cell implements the logic function of a 3-input OR, in drive strength 2. This cell is 7 CPP wide.

(186) Reference is now made to FIGS. 84A-D, which depict an or4x1 cell. This cell implements the logic function of a 4-input OR, in drive strength 1. This cell is 7 CPP wide.

(187) Reference is now made to FIGS. 85A-D, which depict an or4x2 cell. This cell implements the logic function of a 4-input OR, in drive strength 2. This cell is 8 CPP wide.

(188) Reference is now made to FIGS. 86A-D, which depict an sdffqx1 cell. This cell implements the logic function of a scan-enabled D flip-flop, in drive strength 1. This double-height cell is 13 CPP wide.

(189) Reference is now made to FIGS. 87A-D, which depict an sdffrsqx1 cell. This cell implements the logic function of a scan-enabled D flip-flop, with set and reset, in drive strength 1. This double-height cell is 17 CPP wide.

(190) Reference is now made to FIGS. 88A-D, which depict an tiehix1 cell. This cell implements the logic function 1, in drive strength 1. This cell is 3 CPP wide.

(191) Reference is now made to FIGS. 89A-D, which depict an tielox1 cell. This cell implements the logic function 0, in drive strength 1. This cell is 3 CPP wide.

(192) Reference is now made to FIGS. 90A-D, which depict an xnr2x1 cell. This cell implements the logic function of a 2-input XNOR, in drive strength 1. This cell is 11 CPP wide.

(193) Reference is now made to FIGS. 91A-D, which depict an xor2x1 cell. This cell implements the logic function of a 2-input XOR, in drive strength 1. This cell is 11 CPP wide.