Coherent spin field effect transistor
09620654 ยท 2017-04-11
Assignee
Inventors
Cpc classification
H10D64/691
ELECTRICITY
H01L21/02266
ELECTRICITY
H10D30/6741
ELECTRICITY
H01L21/0262
ELECTRICITY
H01L21/02631
ELECTRICITY
H10D64/512
ELECTRICITY
H10D30/47
ELECTRICITY
H10D64/665
ELECTRICITY
International classification
H01L21/02
ELECTRICITY
H01L29/423
ELECTRICITY
H01L29/49
ELECTRICITY
H01L21/04
ELECTRICITY
H01L29/786
ELECTRICITY
H01L29/16
ELECTRICITY
H01L29/66
ELECTRICITY
Abstract
A voltage switchable coherent spin field effect transistor is provided by depositing a ferromagnetic base like cobalt on a substrate. A chrome oxide layer is formed on the cobalt by MBE at room at UHV at room temperature. There was thin cobalt oxide interface between the chrome oxide and the cobalt. Other magnetic materials may be employed. A few ML field of graphene is deposited on the chrome oxide by molecular beam epitaxy, and a source and drain are deposited of base material. The resulting device is scalable, provides high on/off rates, is stable and operable at room temperature and easily fabricated with existing technology.
Claims
1. A coherent spin field effect transistor (coherent spin-FET) comprising a ferromagnetic base layer or gate, a chrome oxide layer overlaying said base layer, a layer of graphene deposited over said chrome oxide layer, a separated source and drain both in electrical contact with said graphene layer, wherein polarization of ions in layers within said chrome oxide layer overlaying said base layer and adjacent said graphene layer is ferromagnetic within the layers wherein the ferromagnetic gate has an axis of magnetic polarization that is easily switchable and has a low coercive field and is ferromagnetic at 24 C.
2. The coherent spin-FET of claim 1, wherein said coherent spin-FET is voltage switchable.
3. A coherent spin field effect transistor (coherent spin-FET) comprising a ferromagnetic base layer or gate, a chrome oxide layer overlaying said base layer, a layer of graphene deposited over said chrome oxide layer, a separated source and drain both in electrical contact with said graphene layer, wherein polarization of ions in layers within said chrome oxide layer overlaying said base layer and adjacent said graphene layer is ferromagnetic within the layers wherein said gate is comprised of cobalt deposited on a substrate, and said graphene is no more than 3 ML thick, wherein said source and drain are comprised of cobalt.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) The accompanying drawings, which are incorporated herein and constitute part of this specification, illustrate exemplary embodiments of the invention, and, together with the general description given above and the detailed description given below, serve to explain the features of the invention.
(2)
(3)
(4)
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(6)
DETAILED DESCRIPTION OF THE INVENTION
(7) Referring initially to the schematic illustration in
(8) Graphenethis film must consist of (111)-oriented, sp.sup.2 carbon (graphene), as either a single layer or several layers, as desired to control potential oxide/graphene interactions such as charge transfer [10, 11]. This layer can be deposited by molecular beam epitaxy, or possibly by chemical or physical vapor deposition.
(9) The deposition of graphene on a substrate has been described at some length in U.S. patent application Ser. No. 12/543,053, now U.S. Pat. No. 8,158,200 and U.S. patent application Ser. No. 12/980,763, now U.S. Pat. No. 8,685,802, both of which are included herein-by-reference. Additional advances in the control over few layer graphene deposition are provided in U.S. Provisional Patent Application Ser. Nos. 61/490,650, now PCT/US12/39487 and 61/497,071, now PCT/US12/42140, both of which are incorporated herein-by-reference. The controlled direct growth of graphene by MBE (layer-by-layer growth of macroscopically continuous graphene sheets on Co.sub.3O.sub.4(111) at 1000 K by carbon molecular beam epitaxy (MBE) from a graphite rod source) is described in detail in U.S. Provisional Patent Application Ser. No. 61/521,600, now U.S. Patent Publication No. US 2014/0212671. The disclosure of this pending application is incorporated herein-by-reference. Any of the methods described in the incorporated applications can be used to form the graphene field, with a preference for controlled molecular beam epitaxy.
(10) Magnetic Oxide, Source and Drain: This material electrically isolates the graphene from the ferromagnetic gate layer, and allows polarization of the graphene valence/conduction electrons via polarization of the cations in the magnetic oxide. Potential candidates include Co.sub.3O.sub.4(111), Fe.sub.3O.sub.4(111), NiO(111), and potentially spinels such as CoFe.sub.2O.sub.4(111), as well as Cr.sub.2O.sub.3(111), BaFe.sub.2O.sub.4. A critical feature is the polarization within the ion layer adjacent to the graphene (
(11) Note, since NiO(111) has the same rocksalt structure as MgO(111), deposition of graphene may result in oxide reconstruction, destroying the chemical equivalence of graphene A sites and B sites [12], removing the HOMO/LUMO equivalence at the Dirac point and opening a band gap, as set forth in U.S. Pat. No. 8,685,802. Development of bandgap potential in graphene bearing materials may provide important electronic advantages, in addition to preserving spintronic adaptability.
(12) Ferromagnetic Gate: This layer should have its axis of magnetic polarization that is easily switchable and ideally has a low coercive field for multifunction logic gates, and be ferromagnetic at room temperature. Appropriate materials include Co, Ni, or Fe.
EXAMPLES
(13) In order to prepare a coherent spin-FET of the invention, a sapphire (aluminum oxide (0001)) substrate is prepared for deposition. An electron beam evaporator may be used to reduce movement between chambers and improve productivity, switching in various targets for deposition. Thus, a fifty angstrom layer of cobalt may be deposited under conventional conditions on the substrate at 750 K in UHV. This deposition is followed by an oxidation anneal at 1000 K which results in surface segregation of dissolved oxygen and the development of a thin layer of Co.sub.3O.sub.4 (111) (may be 2-5 ML thick). Graphene (2 or 3 ML) is deposited on the Co.sub.3O.sub.4 using molecular beam epitaxy at 1000 K, yielding a macroscopically continuous graphene film of approximately 3 ML thickness. Graphene may also be deposited via CVD and PVD processes, as disclosed, but MBE is preferred, not only because of the fine control and developed information for this method, but because it is compatible with the other process steps in the formation of the coherent spin-FET of the invention. This leads to high productivity.
(14) In this example, the coherent spin-FET is finished with the application of Co source and drain, and connected in the device for use. On magnetization, it is stable and exhibits a very high on/off rate with low power consumption at temperatures substantially above room temperature. Thus, referring to
(15) It would be advantageous to be able to provide a chrome oxide layer on which to deposit the graphene. This provides a means by which the coherent spin-FET may be made voltage switchable. To parallel the above example, we need to be able to deposit chrome on cobalt, and then oxidize it (in several stages, a Cr film of substantial thickness will not oxidize all at once). Cr was deposited by MBE (molecular beam epitaxy) onto a Co (0001) film in UHV (ultra-high vacuum) at room temperature, followed by oxidation with O.sub.2 in three stages. The stack was then annealed to 1000 K in UHV. Good Auger and LEED data were obtained. Transfer to the XPS system yielded the Cr(2p) and Co(2p) XPS data set forth in in
(16) LEED data for the chromia film on cobalt is set forth in
(17) The voltage switchable coherent spin-FET with a cobalt base or gate and a chromium oxide layer there over is finished with a graphene layer and source and drain of cobalt, much as the cobalt/cobalt oxide spin-FET described above.
REFERENCES
(18) [1] H. Haugen, D. Huertas-Hernando, A. Brataas. Spin transport in proximity-induced ferromagentic graphene. Physcal Review B. 77 (2008) 115406. [2] R. Ozwaldowski, I. Zutic, A. G. Petukhov. Magnetism in closed-shell quantum dots: Emergence of magnetic bipolarons. Phys Rev Lett. 106 (2011) 177201. [3] d. R. Yakovlev, W. Ossau, G. Landwehr, R. N. Bicknell-Tassius, A. Waag, S. Schmeusser. Two dimensional exciton magnetic polaron in CdTe/Cd.sub.1-xMn.sub.xTe. Sol St Commun. 82 (1992) 29-32. [4] D. R. Yakovlev, W. Ossau, G. Landwehr, R. N. Bicknell-Tassius, A. Waag, S. Schmeusser. Two dimensional exciton magnetic polaron in CdTe/Cd.sub.1-xMn.sub.xTe quantum well structures. Sol St Commun. 82 (1992) 29-32. [5] N. Tombros, C. Jozsa, M. Popinciuc, H. T. Jonkman, B. J.v. Wees. Electronic spin transport and spin precession in single graphene layers at room temperature. Nature. (2007) 571-574. [6] S. Cho, Y. Chen, M. S. Fuhrer. Gate-tuneable graphene spin valve. Applied Physics Letters. 91 (2007) 123105. [7] W. Han, K. Pi, H. Wang, M. McCreary, Y. Li, W. Bao, P. Wei, J. Shi, C. N. Laun, R. K. Kawakami. Spin transport in graphite and graphene spin valves. Proceedings of SPIE. 7398 (2009) 739819-1. [8] B. Dlubak, P. Seneor, A. Anane, C. Barraud, C. Deranlot, D. Deneuve, B. Servet, R. Mattana, F. Petroff, A. Fert. Are Al.sub.2O.sub.3 and MgO tunnel barriers suitable for spin injection in graphene? Appl Phys Lett. 97 (2010) 092502. [9] V. E. Dorgan, M. Bae, E. Pop. Mobilty and saturation velocity in graphene on SiO.sub.2. Appl Phys Lett. 97 (2010) 082112. [10] J. A. Kelber, S. Gaddam, C. Vamala, S. Eswaran and P. A. Dowben. Proc. SPIE 8100 (2011) 8100 DY 1-13. [11] M. Zhou, F. L. Pasquale, P. A. Dowben, A. Boosalis, M. Schubert, V. Darakchieva, R. Yakimova, J. A. Kelber. Direct graphene growth on Co3O4(111) by molecular beam epitaxy. J Phys: Cond Matt. (2011) in press. [12] S. Gaddam, C. Bjelkevig, S. Ge, K. Fukutani, P. A. Dowben, J. A. Kelber. Direct graphene growth on MgO: Origin of the band gap. J Phys Cond Matt. 23 (2011) 072204.
(19) While the present invention has been disclosed both generically and with reference to specific embodiments and examples, these alternatives are not intended to be limiting unless reflected in the claims set forth below. The invention is limited only by the provisions of the claims, and their equivalents, as would be recognized by one of skill in the art to which this application is directed.