Laser device
09541721 ยท 2017-01-10
Assignee
Inventors
Cpc classification
G02B3/0056
PHYSICS
G02B6/4296
PHYSICS
G02B6/262
PHYSICS
G02B3/04
PHYSICS
G02B27/0922
PHYSICS
International classification
H01S5/183
ELECTRICITY
Abstract
A laser device is disclosed. The laser device includes a surface-emitting laser including a plurality of emission points, a lens array including a plurality of lenses arranged so as to correspond to a position of the surface-emitting laser; and a light condensing optical system that condenses a plurality of light fluxes emitted through the lens array and enters the condensed lights to an input end of an optical fiber. The light condensing optical system includes an aspheric lens having positive refractive power. Both of an incidence surface and an emission surface of the aspheric lens have aspheric shapes.
Claims
1. A laser device comprising: a surface-emitting laser including a plurality of emission points; a lens array including a plurality of lenses arranged so as to correspond to a position of the surface-emitting laser; and a light condensing optical system that condenses a plurality of light fluxes emitted through the lens array and enters the condensed lights to an input end of an optical fiber, wherein the light condensing optical system includes an aspheric lens having positive refractive power, wherein both of an incidence surface and an emission surface of the aspheric lens have aspheric shapes, wherein a refractive power of a center portion of the incidence surface of the aspheric lens is opposite to a refractive power of a peripheral portion of the incidence surface of the aspheric lens, wherein an inflection point of a surface shape is in the peripheral portion of the incidence surface of the aspheric lens, and wherein the light flux emitted from the plurality of light-emitting points of the surface-emitting laser is a divergent light flux, a center of the light flux emitted from an outermost light-emitting point of the plurality of light-emitting points enters closer to a center than the inflection point of the surface shape in the peripheral portion of the incident surface of the aspheric lens, and an outside of the light flux emitted from the outermost light-emitting point of the plurality of light-emitting points enters closer to the peripheral portion than the inflection point of the surface shape in the peripheral portion of the incidence surface of the aspheric lens.
2. The laser device according to claim 1, wherein each of the incidence surface and the emission surface of the aspheric lens has a rotational symmetry shape, and the rotational symmetry shape is configured such that a curvature of the aspheric lens has an extreme value at a height other than zero.
3. The laser device according to claim 1, wherein at least one of the incident surface and the emission surface of the aspheric lens has an inflection point of a surface shape at a height other than zero.
4. The laser device according to claim 1, further comprising alight condensing lens that satisfies a following condition (1),
h1>A1/2d3/f1(1) where a focal length of the lens array is f1, an emission area diameter per 1 channel of the surface-emitting laser is A1, a distance from the lens array to the light condensing optical system is d3, and a lens height of the surface of the light condensing optical system at the inflection point is h1, in one of the incidence surface and the emission surface of the light condensing optical system.
5. The laser device according to claim 1, wherein each of the incidence surface and the emission surface of the aspheric lens has a rotational symmetry shape, and the rotational symmetry shape is configured such that a curvature of the aspheric lens has an extreme value at a height other than zero, and wherein at least one of the incident surface and the emission surface of the aspheric lens has an inflection point of a surface shape at the height other than zero.
6. The laser device according to claim 1, further comprising a light condensing lens that satisfies a following condition (1),
h1>A1/2d3/f1(1) where a focal length of the lens array is f1, an emission area diameter per 1 channel of the surface-emitting laser is A1, a distance from the lens array, the light condensing optical system is d3, and a lens height of the surface of the light condensing optical system at the inflection point is h1, in one of the incidence surface and the emission surface of the light condensing optical system, wherein each of the incidence surface and the emission surface of the aspheric lens has a rotational symmetry shape, and the rotational symmetry shape is configured such that a curvature of the aspheric lens has an extreme value at a height other than zero.
7. The laser device according to claim 1, further comprising alight condensing lens that satisfies a following condition (1),
h1>A1/2d3/f1(1) where a focal length of the lens array is f1, an emission area diameter per 1 channel of the surface-emitting laser is A1, a distance from the lens array to the light condensing optical system is d3, and a lens height of the surface of the light condensing optical system at the inflection point is h1, in one of the incidence surface and the emission surface of the light condensing optical system, wherein at least one of the incident surface and the emission surface of the aspheric lens has an inflection point of a surface shape at a height other than zero.
8. The laser device according to claim 1, further comprising a light condensing lens that satisfies a following condition (1),
h1>A1/2d3/f1(1) where a focal length of the lens array is f1, an emission area diameter per 1 channel of the surface-emitting laser is A1, a distance from the lens array to the light condensing optical system is d3, and a lens height of the surface of the light condensing optical system at the inflection point is h1, in one of the incidence surface and the emission surface of the light condensing optical system, wherein each of the incidence surface and the emission surface of the aspheric lens has a rotational symmetry shape, and the rotational symmetry shape is configured such that a curvature of the aspheric lens has an extreme value at a height other than zero, and wherein at least one of the incident surface and the emission surface of the aspheric lens has an inflection point of a surface shape at the height other than zero.
9. The laser device according to claim 1, wherein a depth of the emission surface is greater than a depth of the incidence surface, wherein a curvature of the incidence surface at a lens center is less than the curvature of the incidence surface at the peripheral portion of the aspheric lens, and wherein a curvature of the emission surface at the lens center is greater than the curvature of the incidence surface at the lens center.
Description
BRIEF DESCRIPTION OF DRAWINGS
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DETAILED DESCRIPTION
(14) Hereinafter, according to embodiments and examples of the present invention, a laser device according to aspects of the present invention will be described in detail with reference to figures. Before describing detailed examples, a concept and a principle of the present invention will be described.
(15) The laser device according to aspects of the present invention includes a surface-emitting laser including a plurality of emission points, a lens array including a plurality of lenses arranged so as to correspond to a position of the surface-emitting laser, and a light condensing optical system that condenses a plurality of light fluxes emitted through the lens array and enters the condensed lights to an input end of an optical fiber. The light condensing optical system includes an aspheric lens having positive refractive power. Both of an incidence surface and an emission surface of the aspheric lens have aspheric shapes.
(16) The surface-emitting laser described as above is integrated easily and thus a high power laser may be achieved.
(17) Each light flux emitted from the surface-emitting laser is collimated by the micro lens array arranged to face each emission point, and is condensed on an input end of the optical fiber by the light condensing optical system.
(18) When the light condensing optical system includes the bi-aspheric lens, a curvature radius of the lens on each lens height can be appropriately arranged corresponding to light fluxes emitted from the surface-emitting laser. This is required in decreasing a light condensing diameter.
(19) In addition, the light condensing is performed more efficiently with the minimum configuration by having the single bi-aspheric lens. The light condensing diameter becomes much smaller than the diameter determined according to the magnification when using the bi-aspheric lens.
(20) It is appropriate that each of the incidence surface and the emission surface of the aspheric lens has a rotational symmetry shape, and the rotational symmetry shape is configured such that a curvature of the aspheric lens has an extreme value at a height other than zero.
(21) The refractive power on the optical axis of the lens is positive. The positive refractive power gradually decreases toward the outer side from the optical axis of the lens. The lens may have a negative refractive power in some points.
(22) By arranging the most peripheral side of the lens to have a negative refractive power, the minimum light condensing diameter can be decreased furthermore compared with the light condensing diameter of the condenser lens in which the spherical aberration is corrected.
(23) It is appropriate that at least one of the incident surface and the emission surface of the aspheric lens has an inflection point of a surface shape at a height other than zero.
(24) Since the surface-emitting laser (VCSEL) is the surface light source, the beam emitted from the micro lens necessarily becomes a diverging light flux. In order to condense the diverging light flux on the optical fiber, the positive refractive power is required.
(25) The light condensing optical system according to the present embodiment is configured to decrease the light condensing diameter as small as possible without an intention to form an image.
(26) Therefore, it is required to condense the light beam emitted from each channel of the surface-emitting laser on the same point.
(27) It is required to fit the light condensing point of the light beam around the most peripheral side channel to the light condensing point on a middle portion of the lens.
(28) An incidence angle on the most peripheral side is given by the numerical aperture (NA) of the fiber. According to the incidence angle, strength of the positive power is determined. It is appropriate to apply the strongest power on the peripheral side although the strength of the power depends on the numerical aperture NA.
(29) In the light condensing optical system, the convex shape of the lens on the optical axis is configured to gradually change the shape to be a concave shape toward the outside of the optical axis in order to condense the beam on the optical fiber. The lens has a negative curve around the most peripheral side portion. Thereby, the light condensing diameter can be decreased more compared with the general aspheric lens in which the spherical aberration is corrected.
(30) When a focal length of the lens array is f1,
(31) an emission area diameter per 1 channel of the surface-emitting laser is A1,
(32) a distance from the lens array to the light condensing optical system is d3, and
(33) a lens height of the surface of the light condensing optical system at the inflection point is hi, in one of the incidence surface or the emission surface in the light condensing optical system,
(34) it is appropriate that the condenser lens satisfies the following condition (1).
h1>A1/2d3/f1(1)
(35) It is appropriate that the inflection point of the curvature on the surface of the light condensing optical system is arranged on the outer side of the light beam incident position of the channel arranged on the optical axis.
(36) The light beam emitted from the emission point on the lens center is imaged on a predetermined position. It is appropriate to configure the lens to have the shape so that the light on the emission point on the lens center is imaged on a predetermined point, and the light emitted from the peripheral portion of the emission point enters on the optical fiber while having the smallest light condensing diameter on the surface end of the optical fiber.
(37) In order to reduce the light condensing diameter on the fiber, the light condensing diameter can be decreased by applying the negative refractive power to a part of the light beam emitted from the emission point on the peripheral side. The inflection point is arranged on the outer side of the light beam emitted from the emission point in the center for decreasing the light beam condensing diameter.
(38) In addition, in the laser device, it is appropriate that the light condensing optical system includes an aspheric glass lens having the aspheric shape on both surfaces.
(39) The laser device according to the present embodiment is a system which condenses the light on the fiber. The light emitted from the light source has a huge light amount. Accordingly, a heat quantity generated by converting the light absorbed by the lens also become large, thereby the temperature of the entire device becomes high. By providing a glass lens instead of a plastic lens as the condenser lens, it becomes possible to suppress expansion of the lens and deterioration caused by time and/or environment.
(40) Embodiment 1
(41) Next, an arrangement of a laser device according to the embodiment 1 of the present invention will be described with reference to
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(46) In
(47) Herein, the VCSEL is supplementary described. Generally, an edge emitting laser resonates light in the parallel direction to a substrate surface and emits light in the same direction. In contrast, the VCSEL is a semiconductor laser device which can resonate light in the vertical direction to the substrate surface and emit a light beam in the vertical direction to the substrate surface. The edge emitting semiconductor laser is difficult to be integrated as an array element due to a size increase caused by the one-dimensional arrangement (linear array). Thus, it is difficult to arrange the semiconductor laser to be highly integrated.
(48) On the other hand, the VCSEL can be arranged two-dimensionally. Therefore, the laser beam can be highly concentrated, compared with those in the conventional art.
(49) In the VCSEL included in the laser device according to the embodiment 1, in
(50) In
(51) The light emitted from the VCSEL emission point 11 is collimated by the micro lens array 12 having a lens surface corresponding to each VCSEL emission point 11.
(52) The micro lens array 12 is made of a synthetic silica lens with a focal length f of 0.11 mm. Each of the VCSEL emission point 11 has an area with a diameter A1 of 10 m therefore the collimated light beam does not completely become a parallel light flux but becomes a slightly divergent light flux.
(53) In
(54) In
(55) The slightly divergent light flux collimated by the micro lens array 12 is condensed by a condenser lens 13. The condenser lens 13 is a glass mold aspheric lens and represents a light condensing optical system. The nearly parallel light flux is condensed into a core 15 having a diameter A4 (diameter of 1.44 mm) of an optical fiber 14.
(56) The laser device is required to condense the high power light into the fiber having as small core diameter as possible. Accordingly, the optical system is required to condense the light flux emitted from the light source to be as small as possible.
(57) In
(58) An external arrangement of the optical fiber 14 described as above is shown in
(59) Since the optical fiber 14 transfers the light by total reflection caused by a difference of the refractive index between the core 15 and a clad 16, it is required to enter the light with an incidence angle which permits the total reflection. Since the maximum incidence angle (fiber NA) that the optical fiber can handle is predetermined, the incidence angle of the light beam entering the optical fiber needs to be smaller than the angle predetermined based on the fiber NA.
EXAMPLE 1
(60) Next, a detailed numerical value example 1 of the embodiment 1 (hereinafter simply referred to as the example 1) will be described as follows.
(61) Reference numerals and characters in the example 1 are as follows: A1 (m): diameter of emission area per 1 channel of the VCSEL emission point 11 A2 (m): interval of the VCSEL emission points 11 A3 (m): diameter of the VCSEL emission area 100 A4 (m): diameter of the core 15 of the optical fiber 14 d1 (mm): distance between the VCSEL emission point 11 and the incidence surface of the micro lens array 12 d2 (mm): length of the micro lens array 12 d3 (mm): distance between the micro lens array 12 and the incidence surface of the condenser lens 13 on the optical axis d4 (mm): thickness of the condenser lens 13 on the center of the optical axis d5 (mm): distance between the emission surface of the condenser lens 13 and the incidence surface of the optical fiber 14 on the optical axis f1 (mm): focal length of the micro lens array 12 R (mm): paraxial curvature radius of the condenser lens 13 K (mm): conic constant Bi: aspheric surface coefficient at each order (i: 1 to 14) h (mm): lens height from the optical axis
(62) The optical system data according to the example 1 is shown in the following table 1.
(63) TABLE-US-00001 TABLE 1 OPTICAL SYSTEM DATA OF EXAMPLE 1 A1 (m) 10 A2 (m) 48 A3 (mm) 8.9 A4 (mm) 1.44 d1 (mm) 0.0931 d2 (mm) 1.036 d3 (mm) 58 d4 (mm) 9.02 d5 (mm) 11.08 MAXIMUM INCIDENCE ANGLE (deg) 22.9 CURVATURE OF CONDENSER LENS 1.51633 FOCAL LENGTH OF CONDENSER 12.14 LENS (mm) FOCAL LENGTH OF MICRO 0.1 LENS ARRAY F1 (mm)
(64) The optical system data which defines the aspheric shape of the condenser lens 13 according to the example 1 is shown in the following table 2.
(65) TABLE-US-00002 TABLE 2 ASPHERIC SHAPE OF CONDENSER LENS 13 INCIDENCE SURFACE EMISSION SURFACE R 47.834 6.659 K 0 B4 9.90E04 1.08E03 B6 1.93E05 4.89E05 B8 3.44E07 5.99E07 B10 3.01E10 1.04E07 B12 8.23E11 2.17E09 B14 7.77E13 0
(66) An aspheric eccentricity amount Z(h) is defined by the following equation. In the expression (2), R indicates a paraxial curvature radius, h indicates the lens height from the optical axis, K indicates a conic constant, Bi indicates an aspheric surface coefficient at each order, and a summation index i is incremented from 1 to 14. By applying the values of the paraxial curvature radius, the conic constant, and the aspheric surface coefficient into the expression (2), the aspheric eccentricity amount Z(h) is determined.
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(69) In
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(71) The condenser lens 13 has a rotational symmetry form as its characteristic feature. The condenser lens 13 is a positive biconvex lens in which the curvature on the emission surface side is larger than that of the incidence surface side at the lens center of the condenser lens 13. The incidence surface of the condenser lens 13 has the positive refractive power at every lens height by appropriately arranging the curvature thereof. The variation f (h) of the curvature in relation to the lens height shows the inflection point at the height of 7.6.
(72) On the other hand, the emission surface of the condenser lens 13 has a positive refractive power on the lens center but the positive power of the emission surface gradually decreases toward the peripheral sides, and the curvature is changed from the positive refractive power to the negative refractive power at the height of 3.69. The minimum value (extreme value) of the negative curvature is shown at the height of 5.65 and the lens power of the emission surface gradually becomes positive toward the most peripheral side.
(73) The emission surface has the inflection point of the shape at the height of 5.1.
(74) The smallest light condensing diameter A4 of the condenser lens 13 is reduced to 1.44 mm by having the shape of the lens described as above.
(75) It is appropriate that the condenser lens 13 satisfies the following expression (1) where the focal length of the micro lens array 12 is f1, the diameter of emission area per 1 channel of the VCSEL emission area 100 representing the surface-emitting laser is A1, the distance between the micro lens array 12 and the condenser lens 13 is d3, and the lens height of the inflection point on the surface of the condenser lens 13 is h1, in the incidence and emission surfaces of the condenser lens 13.
h1>A1/2d3/f1(1)
(76) When applying the parameters shown in the table 1 that are, A1=10 m, d3=58 mm, and f1=0.1 mm to calculate the right hand side of the expression (1), the solution becomes 2.9 mm. This shows that the inflection point of the condenser lens 13 (h=5.1) is on the outer side of the light beam, which is emitted from the center of the emission area and enters into the condenser lens 13.
(77) The operational result of the laser device according to the example 1 will be described in detail comparing with a following comparative example 1 and comparative example 2.
(78) In order to show the result, the comparative example 1 and the comparative example 2 will be described. The table 3, table 4, and
(79) TABLE-US-00003 TABLE 3 BI-SPHERICAL LENS OPTICAL SYSTEM DATA OF COMPARATIVE EXAMPLE 1 A1 (m) 10 A2 (m) 48 A3 (mm) 8.9 A4 (mm) 2.97 d1 (mm) 0.0964 d2 (mm) 1.036 d3 (mm) 58 d4 (mm) 3.46 d5 (mm) 21.0 MAXIMUM INCIDENCE ANGLE (deg) 22.9 CURVATURE OF CONDENSER LENS 1.51633 FOCAL LENGTH OF 21.66 CONDENSER LENS (mm)
(80) TABLE-US-00004 TABLE 4 LENS OF COMPARATIVE EXAMPLE 1 INCIDENCE SURFACE EMISSION SURFACE R 14.968 38.906
(81) When using the spherical lens as the condenser lens 33 of the comparative example 1, the light condensing diameter A4 increases mainly due to the influence of the spherical aberration. Therefore, the aberration-corrected aspheric lens is often used in the general optical design.
(82) Next, as the comparative example 2, a laser device including an aberration corrected hemi-aspherical lens as a condenser lens 43 is shown in the table 5, table 6,
(83) TABLE-US-00005 TABLE 5 OPTICAL SYSTEM DATA OF COMPARATIVE EXAMPLE 2 A1 (m) 10 A2 (m) 48 A3 (mm) 8.9 A4 (mm) 2.6 d1 (mm) 0.0964 d2 (mm) 1.036 d3 (mm) 58 d4 (mm) 5 d5 (mm) 16.5 MAXIMUM INCIDENCE ANGLE (deg) 22.9 CURVATURE OF CONDENSER LENS 1.51633 FOCAL LENGTH OF 18.85 CONDENSER LENS (mm)
(84) TABLE-US-00006 TABLE 6 HEMI-SPHERICAL LENS INCIDENCE SURFACE R 9.6144 K 0 B4 1.53E04 B6 2.91E06 B8 1.28E07 B10 1.83E09 B12 1.14E11
(85) Since the aberration-corrected aspheric lens can correct the spherical aberration on one side of the aspheric surface, the aberration-corrected aspheric lens forms a plane-convex lens. For spherical aberration correction, it is appropriate to decrease the positive curvature (refractive power) from the lens center toward the peripheral side.
(86) By correcting the spherical aberration, the diverging or scattering of the light beam is suppressed, and the light condensing diameter can be decreased. In the aberration-corrected lens, the lens surface shape is unambiguously determined for correcting the spherical aberration. Since the incidence angle of the light beam entering into the most outside portion is defined by the numerical aperture NA of the optical fiber 44, the focal length is also unambiguously determined. When comparing the comparative example 1 with the comparative example 2, the focal length in the comparative example 2 is shorter than that of the spherical condenser lens 33 in the comparative example 1 by using the aberration-corrected hemi-aspherical lens. However, the focal length and the light condensing diameter cannot be decreased further according to the comparative example 2, compared with the example 1 of the present invention which includes the condenser lens 13 having the curvature and the inflection point of the surface shape as described above.
EXAMPLE 2
(87) Next, a laser device according to an example 2 will be explained. The laser device of example 2 is arranged on a VCSEL substrate 20. The table 7, table 8,
(88) The following table 7 shows various data of the optical system according to the example 2. The following table 8 shows the parameter of the aspheric surface which defines the surface shape of the condenser lens according to the example 2.
(89) TABLE-US-00007 TABLE 7 FIBER CORE DIAMETER AND MAXIMUM INCIDENCE ANGLE OPTICAL SYSTEM DATA OF EXAMPLE 2 A1 (m) 10 A2 (m) 48 A3 (mm) 6.6 A4 (mm) 1.05 d1 (mm) 0.911 d2 (mm) 1.036 d3 (mm) 39.7 d4 (mm) 3.593 d5 (mm) 8.182 MAXIMUM INCIDENCE ANGLE (deg) 22.9 CURVATURE OF CONDENSER LENS 1.51633 FOCAL LENGTH OF 8.86 CONDENSER LENS (mm) FOCAL LENGTH OF 0.1 MICRO LENS ARRAY F1 (mm)
(90) TABLE-US-00008 TABLE 8 CONDENSER LENS SHAPE OF EXAMPLE 2 INCIDENCE SURFACE EMISSION SURFACE R 18.038 5.623 K 0 0 B4 6.40E03 5.14E03 B6 2.38E04 3.89E04 B8 6.79E06 9.46E06 B10 1.99E07 9.66E08 B12 2.02E09 7.28E09
(91) The incidence surface of the condenser lens 23 of the example 2 has the curvature of the positive refractive power on the lens center. The positive power decreases toward the peripheral side. The curvature changes from the positive refractive power to the negative refractive power at the height of 0.89. The negative curvature has the minimum value (extreme value) at the height of 2.88, and gradually changes to be positive toward the most peripheral side. The inflection point of the surface shape is at the height of 4.99 on the incidence surface.
(92) The condenser lens 23 has such an aspheric surface so that the smallest light condensing diameter A4 of the condenser lens 23 on an optical fiber 24 becomes as small as 1.05 mm. It is appropriate that the condenser lens 23 satisfies the following condition (1).
h1>A1/2d3/f1(1)
(93) When using the parameters shown in the table 7 that are, A1=10 m, d3=39.7 mm, and f1=0.1 mm, the right side of the condition (1) equals to 1.985 mm. The condenser lens 23 according to the example 2 has the inflection point of the surface shape only on the incidence surface. This shows that the inflection point of the condenser lens 23 (h=4.99) is on the outer side of the light beam, which is emitted from the center of the emission area and enters into the condenser lens 23.
(94) According to the embodiments and examples of the present invention, the curvature radius at each lens height can be arranged appropriately according to the plurality of light fluxes emitted from the surface-emitting laser. Thereby, the light condensing diameter can be reduced to provide the laser device capable of condensing the light at high efficiency with the minimum configuration.
(95) Although the present invention has been described in terms of exemplary embodiments, it is not limited thereto. It should be appreciated that variations or modifications may be made in the embodiments described by persons skilled in the art without departing from the scope of the present invention as defined by the following claims.