MODULE AND METHOD FOR MANUFACTURING THE SAME
20230163086 ยท 2023-05-25
Inventors
- Minoru KOMIYAMA (Nagaokakyo-shi, JP)
- Tadashi NOMURA (Nagaokakyo-shi, JP)
- Yoshihito OTSUBO (Nagaokakyo-shi, JP)
- Toru KOMATSU (Nagaokakyo-shi, JP)
Cpc classification
H01L23/552
ELECTRICITY
H01L23/49811
ELECTRICITY
H05K9/0084
ELECTRICITY
International classification
H01L23/498
ELECTRICITY
H05K9/00
ELECTRICITY
Abstract
A module comprises: a substrate having a first surface; a first component and a second component mounted on the first surface; a conductive member mounted therebetween; and a resin seal disposed to cover the first surface, the first component and the second component and also seal a portion of the conductive member. The resin seal has a recess that exposes at least a portion of the conductive member, and inside the recess the resin seal and the conductive member have a side surface and a surface, respectively, covered with a first shield film. The first shield film inside the recess is covered with a second shield film smaller in thickness than the first shield film. The resin seal has a surface facing away from the first surface and covered with the second shield film.
Claims
1. A module comprising: a substrate having a first surface; a first component and a second component mounted on the first surface; a conductive member mounted on the first surface between the first component and the second component; and a resin seal disposed to cover the first surface and the first and second components and also seal a portion of the conductive member; the resin seal having a recess, the recess exposing at least a portion of the conductive member, inside the recess, the resin seal and the conductive member having a side surface and a surface, respectively, covered with a first shield film, the first shield film in the recess being covered with a second shield film less in thickness than the first shield film, a surface of the resin seal facing away from the first surface being covered with the second shield film.
2. The module according to claim 1, wherein the first shield film is interposed between the resin seal and the second shield film on the surface of the resin seal facing away from the first surface.
3. The module according to claim 1, wherein the first shield film covers a side surface of the resin seal.
4. The module according to claim 3, wherein the first shield film covers a side surface of the substrate, a ground conductor is disposed inside the substrate such that the ground conductor is exposed at the side surface of the substrate, and the first shield film is connected to the ground conductor at the side surface of the substrate.
5. The module according to claim 1, wherein the first shield film is a metal grain film.
6. The module according to claim 1, wherein the first shield film contains silver as a major ingredient.
7. The module according to claim 1, wherein the conductive member is a Cu block.
8. The module according to claim 1, wherein the substrate has a second surface as a surface opposite to the first surface, and the module comprises a third component mounted on the second surface.
9. A method for manufacturing a module comprising: preparing a substrate having a first surface, having a first component and a second component mounted on the first surface, and having a conductive member mounted between the first component and the second component; disposing a resin seal to cover the first surface, the first component, the second component, and the conductive member; forming a recess in the resin seal to expose at least a portion of the conductive member; placing a composite sheet including a laminated structure of at least two layers of a metal grain film and a resin film deposited one on the other on an upper side of the resin seal such that the metal grain film underlies the resin film, and heating and compressing the composite sheet to form a first shield film of the metal grain film so as to cover a side surface of the resin seal and a surface of the conductive member inside the recess; after forming the first shield film, removing the resin film; and after removing the resin film, forming a second shield film by sputtering to cover an inner surface of the recess.
10. The module according to claim 2, wherein the first shield film covers a side surface of the resin seal.
11. The module according to claim 2, wherein the first shield film is a metal grain film.
12. The module according to claim 3, wherein the first shield film is a metal grain film.
13. The module according to claim 4, wherein the first shield film is a metal grain film.
14. The module according to claim 2, wherein the first shield film contains silver as a major ingredient.
15. The module according to claim 3, wherein the first shield film contains silver as a major ingredient.
16. The module according to claim 4, wherein the first shield film contains silver as a major ingredient.
17. The module according to claim 5, wherein the first shield film contains silver as a major ingredient.
18. The module according to claim 2, wherein the conductive member is a Cu block.
19. The module according to claim 3, wherein the conductive member is a Cu block.
20. The module according to claim 4, wherein the conductive member is a Cu block.
Description
BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS
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DETAILED DESCRIPTION OF THE DISCLOSURE
[0028] The figures indicate a dimensional ratio, which does not necessarily provide a representation which is faithful to reality, and may be exaggerated for the sake of illustration. In the following description, when referring to a concept of being upper or lower, it does not necessarily mean being absolutely upper or lower and may instead mean being relatively upper or lower in a position shown in a figure.
First Embodiment
[0029] A module according to a first embodiment of the present disclosure will now be described with reference to
[0030] Module 101 according to the present embodiment includes a substrate 1 having a first surface 1a, first and second components 3a and 3b mounted on first surface 1a, conductive member 5, and a resin seal 6. Conductive member 5 is mounted on first surface 1a between first component 3a and second component 3b. Resin seal 6 is disposed to cover first surface 1a and first and second components 3a and 3b and also seal a portion of conductive member 5. Resin seal 6 has a recess 6r that exposes at least a portion of conductive member 5. Inside recess 6r provided in resin seal 6, resin seal 6 and conductive member 5 have a side surface and a surface, respectively, covered with first shield film 81. First shield film 81 inside recess 6r provided in resin seal 6 is covered with second shield film 82 smaller in thickness than first shield film 81. Second shield film 82 covers a surface of resin seal 6 facing away from first surface 1a. In the present embodiment, first shield film 81 is not a sputtered film.
[0031] Substrate 1 has first surface 1a and a second surface 1b. First surface 1a and second surface 1b face away from each other. A pad electrode 13 and a ground electrode 14 are disposed on substrate 1 at first surface 1a. First component 3a is mounted via pad electrode 13. A ground conductor pattern 16 is disposed inside substrate 1. Ground electrode 14 and ground conductor pattern 16 are electrically connected by a conductor via 15. Conductive member 5 is mounted so as to be electrically connected to ground electrode 14. A connection terminal 17 is disposed on substrate 1 at second surface 1b. Connection terminal 17 is used to ensure electrical connection when module 101 is mounted on a mother board or the like.
[0032] In the present embodiment, shield film 8 has a two-layer structure of first shield film 81 and second shield film 82 inside recess 6r provided in resin seal 6, and a module also capable of ensuring sufficient shielding performance in recess 6r in which the film would otherwise tend to be small in thickness can be provided. This is particularly effective when the film is formed in the recess by sputtering, as will be described hereinafter. For example, an electromagnetic wave 90 emitted from first component 3a is interrupted by shield film 8 located in recess 10. This can reduce a degree of an effect that electromagnetic wave 90 emitted from first component 3a has on second component 3b.
[0033] First shield film 81 is preferably a metal grain film. Adopting this configuration allows easy production through a process described hereinafter.
[0034] First shield film 81 preferably contains silver as a major ingredient. Adopting this configuration allows easy production through a process described hereinafter.
[0035] Conductive member 5 is preferably a Cu block. Adopting this configuration allows conductive member 5 to be easily implemented.
[0036] (Manufacturing Method)
[0037] A method for manufacturing a module according to the present embodiment will now be described with reference to
[0038] Initially, as shown in
[0039] As shown in
[0040] A film 70 shown in
[0041] Subsequently, by peeling release film 72, a structure is obtained as shown in
[0042] Although a structure for a single product has been shown and described herein, a collective substrate corresponding to a plurality of products may be used and each process may collectively be performed. In that case, for example, second shield film 82 may be sputtered after the collective substrate is divided by a size of each individual product.
Second Embodiment
[0043] Referring to
[0044] Module 102 has a basic configuration similar to that of module 101 described in the first embodiment except for a configuration of a film covering an upper surface of resin seal 6. In module 102, first shield film 81 extends to and on the upper surface of resin seal 6. On the upper surface of resin seal 6, shield film 8 has a dual structure of first shield film 81 and second shield film 82. In other words, in the present embodiment, first shield film 81 is interposed between resin seal 6 and second shield film 82 on a surface of resin seal 6 facing away from first surface 1a.
[0045] In the present embodiment, shield film 8 has a dual structure on the upper surface of resin seal 6, which allows enhanced shielding performance in a direction perpendicular to first surface 1a of substrate 1.
Third Embodiment
[0046] A module according to a third embodiment of the present disclosure will now be described with reference to
[0047] Module 103 has a basic configuration similar to that of module 102 described in the second embodiment except for a configuration of a film covering a side surface of resin seal 6. In module 103, first shield film 81 extends to and on the side surface of resin seal 6. In other words, in the present embodiment, first shield film 81 covers the side surface of resin seal 6. On the side surface of resin seal 6, shield film 8 has a dual structure of first shield film 81 and second shield film 82. Further, first shield film 81 extends to a lower end of the side surface of substrate 1. Substrate 1 also has a side surface covered with the dual structure of first shield film 81 and second shield film 82. Ground conductor pattern 16 is exposed at the side surface of substrate 1. Ground conductor pattern 16 is electrically connected to first shield film 81 at the side surface of substrate 1.
[0048] In the present embodiment, shield film 8 has a dual structure not only on the upper surface of resin seal 6 but also on the side surface thereof, which allows enhanced shielding performance not only in the direction perpendicular to first surface la of substrate 1 but also laterally thereof.
[0049] As indicated in the present embodiment, preferably, first shield film 81 covers a side surface of substrate 1 and ground conductor pattern 16 as a ground conductor is disposed inside substrate 1 such that ground conductor pattern 16 is exposed at the side surface of substrate 1, and first shield film 81 is connected to the ground conductor at the side surface of substrate 1. First shield film 81 electrically connected to ground conductor pattern 16 at the side surface of substrate 1 allows shield film 8 to be sufficiently grounded.
Fourth Embodiment
[0050] A module according to a fourth embodiment of the present disclosure will now be described with reference to
[0051] Module 104 has a basic configuration similar to that of module 103 described in the third embodiment except for a configuration of shield film 8 on a side surface of substrate 1.
[0052] In module 104, in a vicinity of an end of substrate 1, first shield film 81 is electrically connected to an upper surface of ground conductor pattern 16. Second shield film 82 is electrically connected to a side surface of ground conductor pattern 16.
[0053] The present embodiment can also be as effective as the third embodiment. In the present embodiment, first shield film 81 and second shield film 82 included in shield film 8 are both directly connected to ground conductor pattern 16, and shield film 8 can be more sufficiently grounded.
[0054] Module 104 indicated in the present embodiment can be manufactured as follows. After resin seal 6 is formed, recess 6r is formed, and furthermore, as shown in
[0055] Herein, a method for manufacturing a module can be represented as follows. The method for manufacturing the module comprises: preparing substrate 1 having first surface la, having first component 3a and second component 3b mounted on first surface 1a, and having conductive member 5 mounted between first component 3a and second component 3b; disposing resin seal 6 so as to cover first surface 1a, first component 3a, second component 3b, and conductive member 5; forming recess 6r in resin seal 6 so as to expose at least a portion of conductive member 5; placing film 70 as a composite sheet including a structure of at least two layers of a metal grain film and a resin film deposited one on the other on an upper side of resin seal 6 such that the metal grain film underlies the resin film, and heating and compressing film 70 to form first shield film 81 of the metal grain film so as to cover a side surface of resin seal 6 and a surface of conductive member 5 inside recess 6r; and after forming first shield film 81, removing the resin film, and after removing the resin film, forming second shield film 82 by sputtering so as to cover an inner surface of recess 6r. Module 104 can thus be obtained.
Fifth Embodiment
[0056] A module according to a fifth embodiment of the present disclosure will now be described with reference to
[0057] Module 105 according to the present embodiment has a so-called double-sided mounting structure. In module 105, substrate 1 has second surface 1b as a surface opposite to first surface 1a. Module 105 comprises a third component 3c mounted on second surface 1b. In module 105, a resin seal 6a is disposed so as to cover first surface 1a and first and second components 3a and 3b. A resin seal 6b is disposed so as to cover second surface 1b and third component 3c. Second shield film 82 also covers a side surface of resin seal 6b. A connection terminal 18, which is a columnar conductor, is mounted on second surface 1b. Connection terminal 18 penetrates resin seal 6b and is exposed at a lower surface of module 105. Connection terminal 18 may be covered with some conductor film. Alternatively, connection terminal 18 may be a solder bump.
[0058] Herein, while third component 3c is shown as an example to indicate that at least one component is mounted on second surface 1b, a component other than third component 3c may be mounted on second surface 1b. A plurality of components may be mounted on second surface 1b. Some of the plurality of components mounted on second surface 1b may have a lower surface exposed from resin seal 6b. While the example shown in
[0059] In the present embodiment, module 105 has a double-sided mounting structure and third component 3c is also mounted on substrate 1 at second surface 1b, and more components can thus be mounted on substrate 1 having a limited area and it is thus easy to efficiently implement a highly functional module.
[0060] Note that a plurality of the above embodiments may be combined as appropriate and employed. It should be understood that the embodiments disclosed herein are illustrative and non-restrictive in any respect. The scope of the present disclosure is defined by the terms of the claims, and is intended to include any modifications within the meaning and scope equivalent to the terms of the claims.
[0061] 1 substrate, 1a first surface, 1b second surface, 3a first component, 3b second component, 5 conductive member 6, 6a, 6b resin seal, 6r recess, 8 shield film, 10 recess, 11 trench, 13 pad electrode, 14 ground electrode, 15 conductor via, 16 ground conductor pattern, 17, 18 connection terminal, 70 film, 71 conductive film, 72 release film, 81 first shield film, 82 second shield film, 90 electromagnetic wave, 91 arrow, 101, 102, 103, 104, 105 module.