INTEGRATED SYSTEM FOR ULTRASOUND IMAGING AND THERAPY

Abstract

Ultrasound imaging and therapy with the same array of capacitive micromachined ultrasonic transducers is provided. The electronics includes a per-pixel switch for each transducer element. The switches provide an imaging mode driven completely by on-chip electronics and a therapy mode where off-chip pulsers provide relatively high voltages to the transducer elements.

Claims

1. (canceled)

2. (canceled)

3. (canceled)

4. (canceled)

5. (canceled)

6. (canceled)

7. (canceled)

8. (canceled)

9. (canceled)

10. (canceled)

11. An apparatus with a plurality of ultrasound modes, the apparatus comprising: an array of ultrasound transducer elements; imaging circuitry configured to perform ultrasound imaging with the array of ultrasound transducer elements in a first mode; a pulser configured to provide a voltage to an ultrasound transducer element of the array of ultrasound transducer elements in a second mode, wherein the array generates continuous wave ultrasound or quasi-continuous wave ultrasound in the second mode; and a switch configured to electrically connect the pulser to the ultrasound transducer of the array for the second mode and to electrically disconnect the pulser from the ultrasound transducer of the array for the first mode, the switch being on a chip, and the pulser being external to the chip such that power dissipation associated with the pulser occurs external to the chip.

12. The apparatus of claim 11, wherein the imaging circuitry is on the chip.

13. The apparatus of claim 11, further comprising: additional pulsers having phases spaced with each other; and additional switches configured to electrically connect the additional pulsers to the array in the second mode and to electrically disconnect the additional pulsers from the array in the first mode.

14. The apparatus of claim 11, wherein the pulser has a fixed connection with the switch.

15. The apparatus of claim 11, further comprising a line switch configured to selectively electrically connect the pulser to the switch.

16. The apparatus of claim 11, wherein the switch comprises transistors arranged to pass a voltage from the pulser that is greater than a gate-to-source voltage of any one of the transistors.

17. The apparatus of claim 11, wherein the ultrasound transducer elements are capacitive micromachined ultrasonic transducers.

18. The apparatus of claim 11, further comprising an inductor connected in series between the switch and the ultrasound transducer element, wherein a combination of the inductor and the ultrasound transducer element is electrically resonant at an ultrasound frequency of the second mode.

19. The apparatus of claim 11, further comprising additional switches, wherein the switch and the additional switches are included in a plurality of switches, and wherein each of the ultrasound transducer elements of the array is connected to one switch of the plurality of switches.

20. The apparatus of claim 11, wherein the array of ultrasound transducer elements comprises at least 32 ultrasound transducer elements in a first dimension and 32 ultrasound transducer elements in a second dimension.

21. An apparatus with a plurality of ultrasound modes, the apparatus comprising: an array of ultrasound transducer elements; first electronic circuitry configured to drive an ultrasound transducer of the array in a first mode; second electronic circuitry comprising a pulser configured to drive the ultrasound transducer of the array in a second mode; and mode switching circuitry configured to connect the pulser to the ultrasound transducer of the array for the second mode and to disconnect the pulser from the ultrasound transducer of the array for the first mode, the mode switching circuitry comprising transistors arranged to pass a voltage from the pulser that is greater than a gate-to-source voltage of any one of the transistors.

22. The apparatus of claim 21, wherein the array of ultrasound transducer elements is on a transducer chip, the first electronic circuitry is on a chip that is integrated with the transducer chip, and the pulser is external to the chip.

23. The apparatus of claim 22, wherein the mode switching circuitry is on the chip.

24. The apparatus of claim 21, wherein the ultrasound transducer elements are capacitive micromachined ultrasonic transducers.

25. The apparatus of claim 21, wherein the array generates continuous wave ultrasound or quasi-continuous wave ultrasound in the second mode.

26. The apparatus of claim 21, further comprising a line switch configured to connect the mode switching circuitry to a selected one of a plurality of pulsers having distinct phases, wherein the plurality of pulsers comprise the pulser.

27. A method of operating an array of ultrasound transducers in different modes, the method comprising: performing ultrasound imaging with an imaging circuit and the array of ultrasound transducers in a first mode; connecting a pulser to an ultrasound transducer of the array of ultrasound transducers for a second mode using a switch, wherein the pulser is disconnected from the ultrasound transducer of the array for the first mode, and wherein the pulser is external to a chip that includes the switch; generating, using the array of the ultrasound transducers, a continuous wave of ultrasound or a quasi-continuous wave of ultrasound in the second mode; and dissipating power associated with the pulser external from the chip in the second mode.

28. The method of claim 27, further comprising adjusting a beam transmitted from the array of ultrasound transducers for the second mode.

29. The method of claim 27, wherein the switch comprises transistors arranged to pass a voltage that is greater than a gate-to-source voltage of any one of the transistors.

30. The method of claim 27, wherein the ultrasound transducer elements are capacitive micromachined ultrasonic transducers.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0014] FIG. 1 shows an embodiment of the invention.

[0015] FIG. 2 shows a 2-D array of transducer elements.

[0016] FIG. 3 shows one of the transducer elements of the array of FIG. 2.

[0017] FIG. 4 shows circuitry to perform ultrasonic therapy with the 2-D array of transducer elements.

[0018] FIG. 5 is a more detailed view of per-pixel circuitry.

[0019] FIG. 6 shows a preferred circuit for mode switching.

[0020] FIG. 7 shows a pixel switch configured to connect or disconnect its corresponding transducer element to a selectable one of the off-chip pulsers.

[0021] FIG. 8 shows another embodiment of the invention.

[0022] FIG. 9 shows a further embodiment of the invention.

DETAILED DESCRIPTION

[0023] This work provides a novel method for integrating ultrasound imaging and therapy (or ultrasound neuromodulation) using the same ultrasound transducer array integrated with electronics. Having the same device for both purposes can be very beneficial. However, there are challenges in incorporating imaging and continuous-wave (CW) or quasi-CW ultrasound application capabilities in a single integrated chip (such as power dissipation, and area requirements). This work provides a solution to these challenges using switches in the integrated circuit that can switch between an imaging mode (Mode I) and a CW/quasi-CW mode (Mode II). The switches enable the use of external off-chip pulsers for Mode II allowing it to outsource the power dissipation to the back-end system.

[0024] A 2D CMUT array can be integrated with an IC (integrated circuit) that includes transceivers for using the integrated chip for imaging. The transceivers include transmit beam-formers that are capable of providing a high voltage (HV) pulse and receivers that signal condition the receive signals from the CMUT array. For Mode I, a single (or very short) HV pulse is used (duty cycle of the pulse is miniscule). However, for Mode II, multiple cycles of HV pulsing is desirable, to increase the time-averaged intensity of the focal spot. This leads to large power dissipation of the IC chip, if on-chip pulsers are used, since there are multiple elements pulsing. Therefore, using on-chip pulsers for Mode II applications is impractical.

[0025] This problem is alleviated by using HV switch(s) in each element, that can route the connection of the ultrasound transducer array element directly to an off-chip HV pulser. Though the overall power dissipation still remains high, the dissipation occurs at the back-end which is not near the patient. Utilizing these switches allow us to switch a single sensor array between Mode I and Mode II. Different elements can be pulsed at different phases to provide focusing in Mode II. In one implementation, we use 8 off-chip pulsers with equally spaced phases and distribute the elements amongst these 8 pulsers to enable focusing at a given spot. With such a configuration, we can use the same integrated array for Mode I as well as for Mode II, as and when desired by the physician when performing a medical procedure.

[0026] FIG. 1 shows an exemplary embodiment of the invention. In this example, a 2-D CMUT array 102 is flip chip bonded (112) to chip 104 that includes imaging electronics and the per-pixel switches. Off-chip pulsers 10S provide a high-voltage assembly 106 that is connected to chip 104 via bus 110. Bus 110 has one line for each puiser 108.

[0027] FIG. 2 is a plan view of the 2-D array of transducer elements 102. One of the transducer elements is referenced as 202. FIG. 2 shows a 6×6 array of transducers, but any other 2D array dimensions can also be used. The low on-chip power dissipation of the present approach can enable large array sizes (e.g., 32×32 or larger). FIG. 3 shows transducer element 202 in snore detail. As indicated above, the transducer elements are CMUTs. The general configuration for a CMUT is shown here, with 306 being an elastic membrane suspended above a substrate 302 by one or more support members 304.

[0028] FIG. 4 shows circuitry to perform ultrasonic therapy with the 2-D array of transducer elements. Here chip 104 is regarded as having ceils that correspond to the elements of transducer array 102. Bus 110 is shown being available ac all cells, and one of these cells is referenced as 402. FIG. 5 is a more detailed view of cell 402. Here 502 is a flip chip pad that is connected to the corresponding transducer element of transducer array 102, 504 is the per-pixel switch, 506 is on-chip imaging circuitry, and 508 is an optional inductance in series with the CMUT capacitance that is present in preferred embodiments to provide electrical resonance in the therapy mode.

[0029] Thus an exemplary embodiment of the invention is apparatus for ultrasonic imaging and therapy, where the apparatus includes:

[0030] 1) a 2-D array of transducer elements monolithically integrated on a transducer chip (102), wherein each of the transducer elements is a capacitive micromachined ultrasonic transducer (FIG. 3);

[0031] 2) first electronic circuitry (506) configured to perform ultrasonic imaging with the 2-D array of transducer elements, wherein the first electronic circuitry is integrated with the transducer chip (e.g., hybrid integration as on FIGS. 1 and 8, or monolithic integration as on FIG. 9);

[0032] 3) second electronic circuitry (106) configured to perform ultrasonic therapy with the 2-D array of transducer elements, wherein the second electronic circuitry comprises one or more off-chip pulsers (108) disposed remotely from the transducer chip; and

[0033] 4) mode switching circuitry (504) configured to switch operation of each of the transducer elements between an ultrasonic imaging mode and an ultrasonic therapy mode.

[0034] As indicated above, it is preferred that the second electronic circuitry include an inductor corresponding to each transducer element configured such that the combination of inductor and transducer element is electrically resonant at the ultrasound therapy frequency. This electrical resonance helps to compensate for the relatively low mechanical Q of the CMUT transducer elements. There are several options for the location of the series inductors. The inductors can be located inside block 504, e.g., 500 on FIG. 5. Another option is to have another die with just inductor arrays.

[0035] FIG. 6 shows a preferred circuit 504 for mode switching, without the optional inductor 503. Here 602 is the control input to the switch, 604 is an input from the corresponding off-chip pulser, and 606 is a connection to the corresponding CMUT transducer element. In the circuit of FIG. 6, devices D2, Q3, Q1 and Q2 need to be high voltage devices (i.e., capable of handling the voltages provided at input 604 by the pulser), while devices D1 and Q4 can be low voltage devices. The net effect of this circuit configuration is to allow a drive voltage to be applied to transistors Q1 and Q2 that is greater than the gate-source voltage of any single transistor in the circuit. This configuration can be regarded as a first pair of series-connected transistors and a diode having an output that drives a second pair of series-connected transistors and a reverse-biased diode.

[0036] The off-chip pulsers 108 can be configured to provide inputs having distinct electrical phase. This can provide beam control for ultrasonic therapy. In some cases each pixel switch is configured to connect or disconnect its corresponding transducer element to a predetermined one of the off-chip pulsers. FIG. 5 shows an example of this configuration. The resulting beam forming for therapy is fixed (e.g., focusing in the center of the imaging field of view). In other cases each pixel switch is configured to connect or disconnect its corresponding transducer element to a selectable one of the off-chip pulsers. FIG. 7 shows an example of this configuration, where line switch 702 selects the line of bus 110 that is connected to block 504. The resulting beam forming for therapy is adjustable. For example, the therapy beam can be brought to a focus at any selected location within the imaging field of view. As another example, the therapy beam could be configured to scan within the imaging field of view along any desired path.

[0037] Practice of the invention does not depend critically on details of how integration is performed, provided that the pulsers for the therapy mode are not integrated with the transducer chip. FIG. 1 shows a two-chip hybrid bonded configuration. In the specific example given above, both the first electronic circuitry (for imaging) and the mode control circuitry (for switching) were included in chip 104. Other two-chip configurations can be obtained by moving the imaging or switching circuitry to be monolithically integrated with transducer chip 102. In these cases, chip 104 will have only the switching circuitry or only the imaging circuitry, respectively.

[0038] Three-chip configurations are also possible. FIG. 8 shows an example, where a switch chip 802 and an imaging chip 804 are integrated with transducer array 102. Here it is assumed that mode switching circuitry 808 is on the top side of switch chip 802, and that through-chip vias 810 are used to connect mode switching circuitry 808 to imaging chip 804. Imaging chip 804 is flip chip bonded (806) to switch chip 802.

[0039] A final possibility is full monolithic integration of everything except the off-chip pulsers. FIG. 9 shows a example of this approach. Here the first electronic circuitry (for imaging), the second electronic circuitry (except for pulsers 108) and the mode switching circuitry are all monolithically integrated on transducer chip 902.