A method includes bonding a first semiconductor die and a second semiconductor die to a substrate, where a gap is disposed between a first sidewall of the first semiconductor die and a second sidewall of the second semiconductor die, performing a plasma treatment to dope top surfaces and sidewalls of each of the first semiconductor die and the second semiconductor die with a first dopant, where a concentration of the first dopant in the first sidewall decreases in a vertical direction from a top surface of the first semiconductor die towards a bottom surface of the first semiconductor die, and a concentration of the first dopant in the second sidewall decreases in a vertical direction from a top surface of the second semiconductor die towards a bottom surface of the second semiconductor die, and filling the gap with a spin-on dielectric material.

Three-dimensional (3D) memory devices and methods for forming the same are disclosed. In certain aspects, a 3D memory device includes a first semiconductor assembly, a second semiconductor assembly, and an inter-assembly bonding layer between the first semiconductor assembly and the second semiconductor assembly. The first semiconductor assembly includes a first array structure and a first periphery structure. The first array structure includes a first memory stack having a plurality of interleaved stack conductive layers and stack dielectric layers. The first periphery structure includes a plurality of first peripheral circuits electrically connected to the first memory stack. The second semiconductor assembly includes a second array structure and a second periphery structure. The second array structure includes a second memory stack having a plurality of interleaved stack conductive layers and stack dielectric layers. The second periphery structure includes a plurality of second peripheral circuits electrically connected to the second memory stack.

A glass which satisfies formulas (1) and (2), where a liquid phase temperature is denoted by T.sub.L ( C.), a Young's modulus calculated based on the composition is denoted by E (GPa), and a linear thermal expansion coefficient is denoted by (ppm/ C.),

[00001]$\begin{array}{cc}13.1E+9-T_{L}0& \left(1\right)\end{array}$$\begin{array}{cc}1923-156-T_{L}0.& \left(2\right)\end{array}$

A sensor package includes a circuit substrate, a sensor die, an electrical connection, a dielectric dam, a cover layer, and an encapsulant. The circuit substrate includes a first side, a second side opposite to the first side, and a cavity recessed from the first side toward the second side. The sensor die is disposed in the cavity and includes a first side, a sensing area on the first side, and a second side opposite to the first side and facing the circuit substrate. The electrical connection electrically connects the first sides of the sensor die and the circuit substrate. The dielectric dam is disposed on the first side of the circuit substrate and outside the cavity, and the dielectric dam partially covers the electrical connection. The encapsulant is disposed on the first side of the circuit substrate and laterally covers the dielectric dam and the cover layer.

A method for bonding semiconductor dies, resulting semiconductor devices, and associated systems and methods are disclosed. In some embodiments, the method includes depositing a first material on the first semiconductor die. The first material has a first outer surface and a first chemical composition at the first outer surface. The method also includes depositing a second material on the second semiconductor die. The second material has a second outer surface and a second chemical composition at the second outer surface that is different from the first chemical composition. The method also includes stacking the dies. The second outer surface of the second semiconductor die is in contact with the first outer surface of the first semiconductor die in the stack. The method also includes reacting the first outer surface with the second outer surface. The reaction causes the first outer surface to bond to the second outer surface.

An integrated circuit structure includes a donor carrier and a device carrier bonded to each other. The donor carrier includes a first bonding structure, a gate pattern disposed on the first bonding structure, a gate dielectric pattern disposed on the gate pattern, a silicon channel pattern disposed on the gate dielectric pattern, and at least one source contact and at least one drain contact disposed separately on the silicon channel pattern. The device carrier includes a device layer, an interconnect structure disposed on the device layer, and a second bonding structure disposed on the interconnect structure. The donor carrier is bonded to the device carrier through the first bonding structure and the second bonding structure.

A MEMS pressure sensor packaged with a molding compound. The MEMS pressure sensor features a lead frame, a MEMS semiconductor die, a second semiconductor die, multiple pluralities of bonding wires, and a molding compound. The MEMS semiconductor die has an internal chamber, a sensing component, and apertures. The MEMS semiconductor die and the apertures are exposed to an ambient atmosphere. A method is desired to form a MEMS pressure sensor package that reduces defects caused by mold flashing and die cracking. Fabrication of the MEMS pressure sensor package comprises placing a lead frame on a lead frame tape; placing a MEMS semiconductor die adjacent to the lead frame and on the lead frame tape with the apertures facing the tape and being sealed thereby; attaching a second semiconductor die to the MEMS semiconductor die; attaching pluralities of bonding wires to form electrical connections between the MEMS semiconductor die, the second semiconductor die, and the lead frame; and forming a molding compound.

A method of manufacturing a semiconductor device includes forming a cell chip including a first substrate, a source layer on the first substrate, a stacked structure on the source layer, and a channel layer passing through the stacked structure and coupled to the source layer, flipping the cell chip, exposing a rear surface of the source layer by removing the first substrate from the cell chip, performing surface treatment on the rear surface of the source layer to reduce a resistance of the source layer, forming a peripheral circuit chip including a second substrate and a circuit on the second substrate, and bonding the cell chip including the source layer with a reduced resistance to the peripheral circuit chip.

A manufacturing method of a chip-attached substrate includes preparing a stacked substrate including multiple chips, a first substrate to which the multiple chips are temporarily bonded, and a second substrate bonded to the first substrate with the multiple chips therebetween; and separating the multiple chips bonded to the first substrate and the second substrate from the first substrate to bond the multiple chips to one surface of a third substrate including a device layer.

Disclosed is a microelectronic device assembly comprising a substrate having conductors exposed on a surface thereof. Two or more microelectronic devices are stacked on the substrate and the components are connected with conductive material in preformed holes in dielectric material in the bond lines aligned with TSVs of the devices and the exposed conductors of the substrate. Methods of fabrication are also disclosed.