A process is disclosed for making CF.sub.3CF?CHF. The process involves reacting CF.sub.3CClFCCl.sub.2F with H.sub.2 in a reaction zone in the presence of a catalyst to produce a product mixture comprising CF.sub.3CF?CHF. The catalyst has a catalytically effective amount of palladium supported on a support selected from the group consisting of alumina, fluorided alumina, aluminum fluoride and mixtures thereof and the mole ratio of H.sub.2 to CF.sub.3CClFCCl.sub.2F fed to the reaction zone is between about 1:1 and about 5:1. Also disclosed are azeotropic compositions of CF.sub.3CClFCCl.sub.2F and HF and azeotropic composition of CF.sub.3CHFCH.sub.2F and HF.

A process is disclosed for making CF.sub.3CF?CHF. The process involves reacting CF.sub.3CClFCCl.sub.2F with H.sub.2 in a reaction zone in the presence of a catalyst to produce a product mixture comprising CF.sub.3CF?CHF. The catalyst has a catalytically effective amount of palladium supported on a support selected from the group consisting of alumina, fluorided alumina, aluminum fluoride and mixtures thereof and the mole ratio of H.sub.2 to CF.sub.3CClFCCl.sub.2F fed to the reaction zone is between about 1:1 and about 5:1. Also disclosed are azeotropic compositions of CF.sub.3CClFCCl.sub.2F and HF and azeotropic composition of CF.sub.3CHFCH.sub.2F and HF.

A process is disclosed for making CF.sub.3CF?CHF. The process involves reacting CF.sub.3CClFCCl.sub.2F with H.sub.2 in a reaction zone in the presence of a catalyst to produce a product mixture comprising CF.sub.3CF?CHF. The catalyst has a catalytically effective amount of palladium supported on a support selected from the group consisting of alumina, fluorided alumina, aluminum fluoride and mixtures thereof and the mole ratio of H.sub.2 to CF.sub.3CClFCCl.sub.2F fed to the reaction zone is between about 1:1 and about 5:1. Also disclosed are azeotropic compositions of CF.sub.3CClFCCl.sub.2F and HF and azeotropic composition of CF.sub.3CHFCH.sub.2F and HF.

Disclosed are processes for the production of fluorinated olefins, preferably adapted to commercialization of CF.sub.3CFCH.sub.2 (1234yf). Three steps may be used in preferred embodiments in which a feedstock such as CCl.sub.2CClCH.sub.2Cl (which may be purchased or synthesized from 1,2,3-trichloropropane) is fluorinated (preferably with HF in gas-phase in the presence of a catalyst) to synthesize a compound such as CF.sub.3CClCH.sub.2, preferably in a 80-96% selectivity. The CF.sub.3CClCH.sub.2 is preferably converted to CF.sub.3CFClCH.sub.3 (244-isomer) using a SbCl.sub.5 as the catalyst which is then transformed selectively to 1234yf, preferably in a gas-phase catalytic reaction using activated carbon as the catalyst. For the first step, a mixture of Cr.sub.2O.sub.3 and FeCl.sub.3/C is preferably used as the catalyst to achieve high selectivity to CF.sub.3CClCH.sub.2 (96%). In the second step, SbCl.sub.5/C is preferably used as the selective catalyst for transforming 1233xf to 244-isomer, CF.sub.3CFClCH.sub.3. The intermediates are preferably isolated and purified by distillation and used in the next step without further purification, preferably to a purity level of greater than about 95%.

Disclosed are processes for the production of fluorinated olefins, preferably adapted to commercialization of CF.sub.3CFCH.sub.2 (1234yf). Three steps may be used in preferred embodiments in which a feedstock such as CCl.sub.2CClCH.sub.2Cl (which may be purchased or synthesized from 1,2,3-trichloropropane) is fluorinated (preferably with HF in gas-phase in the presence of a catalyst) to synthesize a compound such as CF.sub.3CClCH.sub.2, preferably in a 80-96% selectivity. The CF.sub.3CClCH.sub.2 is preferably converted to CF.sub.3CFClCH.sub.3 (244-isomer) using a SbCl.sub.5 as the catalyst which is then transformed selectively to 1234yf, preferably in a gas-phase catalytic reaction using activated carbon as the catalyst. For the first step, a mixture of Cr.sub.2O.sub.3 and FeCl.sub.3/C is preferably used as the catalyst to achieve high selectivity to CF.sub.3CClCH.sub.2 (96%). In the second step, SbCl.sub.5/C is preferably used as the selective catalyst for transforming 1233xf to 244-isomer, CF.sub.3CFClCH.sub.3. The intermediates are preferably isolated and purified by distillation and used in the next step without further purification, preferably to a purity level of greater than about 95%.

Disclosed are a reactor and agitator useful in a high pressure process for making 1-chloro-3,3,3-trifluoropropene (1233zd) from the reaction of 1,1,1,3,3-pentachloropropane (240fa) and HF, wherein the agitator includes one or more of the following design improvements: (a) double mechanical seals with an inert barrier fluid or a single seal; (b) ceramics on the rotating faces of the seal; (c) ceramics on the static faces of seal; (d) wetted o-rings constructed of spring-energized Teflon and PTFE wedge or dynamic o-ring designs; and (e) wetted metal surfaces of the agitator constructed of a corrosion resistant alloy.

A method for producing 1,1,1,2-tetrafluoropropene and/or 1,1,1,2,3-pentafluoropropene using a single set of four unit operations, the unit operations being (1) hydrogenation of a starting material comprising hexafluoropropene and optionally recycled 1,1,1,2,3-pentafluoropropene; (2) separation of the desired intermediate hydrofluoroalkane, such as 1,1,1,2,3,3-hexafluoropropane and/or 1,1,1,2,3-pentafluoropropane; (3) dehydrofluorination of the intermediate hydrofluoroalkane to produce the desired 1,1,1,2-tetrafluoropropene and/or 1,1,1,2,3-pentafluoropropene, followed by another separation to isolate the desired product and, optionally, recycle of the 1,1,1,2,3-pentafluoropropene.

In the method of the present invention for producing a thin film, including introducing, onto a substrate, a vapor that has been obtained by vaporizing a thin-film-forming material including a molybdenum imide compound represented by the following formula (I) and that includes the molybdenum imide compound; and then forming a thin film including molybdenum on the substrate by decomposing and/or chemically reacting the molybdenum imide compound. ##STR00001##
(In the formula, R.sup.1 though R.sup.10 each represent a hydrogen atom or a linear or branched alkyl group having 1 to 5 carbon atoms, and R.sup.11 represents a linear or branched alkyl group having 1 to 8 carbon atoms.)

The present invention is a fluorohydrocarbon represented by RF wherein R represents an isobutyl group or a t-butyl group), the fluorohydrocarbon having a purity of 99.9% by volume or more and a total butenes content of 1,000 ppm by volume or less; a use of the fluorohydrocarbon as a plasma etching gas; and a plasma etching method comprising selectively subjecting an inorganic nitride film stacked on silicon or a silicon oxide film to plasma etching using the fluorohydrocarbon.

The present invention is a fluorohydrocarbon represented by RF wherein R represents an isobutyl group or a t-butyl group), the fluorohydrocarbon having a purity of 99.9% by volume or more and a total butenes content of 1,000 ppm by volume or less; a use of the fluorohydrocarbon as a plasma etching gas; and a plasma etching method comprising selectively subjecting an inorganic nitride film stacked on silicon or a silicon oxide film to plasma etching using the fluorohydrocarbon.