A relative-pressure sensor determines the pressure of a medium in relation to an atmospheric pressure. The sensor includes a housing having a measuring element located in the housing, wherein the pressure to be measured acts upon an outer surface of the measuring element. The surface is in contact with the medium. The sensor also includes a reference-pressure supply, which supplies an inner surface of the measuring element with atmospheric pressure in the form of ambient air, and an evaluation unit, which determines the pressure of the medium from a variable determined using the measuring element. A drying chamber takes-up atmospheric humidity from the ambient air that is supplied via the reference-pressure supply. The drying chamber has a drying module comprising a container and a humidity-adsorbing material that is completely surrounded by the container.

A field device for processing and automation technology includes a first and a second component that can each be mechanically connected at a joining surface by means of a joining point. Two metal surface layers are each applied at least to the joining surface of the first component and the joining surface of the second component. The metal of the surface layers is different from the metal of the first and/or the metal of the second component. A joining material is applied between the respective joining surfaces of the two components, wherein the joining material includes particles at least partially consisting of a metal that corresponds with the metal of the surface layers The joining of the two components occurs at a joining temperature below 300° C.

A pressure sensor is provided. The pressure sensor includes a housing with a control and evaluation unit. A plurality of pressure ports are arranged at the housing of the pressure sensor, with a pressure measuring cell being associated with every pressure port. The pressure measurement cells are connected to the control and evaluation unit, and the pressure sensor has at least one digital output interface. At least one pressure port is a port for inserting a pressure line, with the pressure line being installable without tools and with the pressure line being surrounded by a seal of the pressure port and being secured against being pulled out.

A measurement system includes: a vibration-driven energy harvesting unit that generates electric power from sound, vibration, or displacement; a power supply controller that controls an amount of power consumption of a power supply based on the electric power generated by the vibration-driven energy harvesting unit; a detector that is driven by electric power supplied by the power supply controller and detects an environment state quantity; and a transmitter that is driven by electric power supplied by the power supply controller and transmits information regarding the environment state quantity detected by the detector.

Pressure sensors are configured for accurate, non-position sensitive pressure measurement. They can offer microprocessor-based features for optimized measurement, control, and signaling using precision-calibrated silicon piezoresistive microelectromechanical (MEMS) sensors provisioned within a durable, versatilely mountable housing. Such sensors can be mounted readily in alternate locations, configurations, and/or positions. They can also offer real-time temperature compensation, enable selectable analog outputs (such as 2-wire mA, 3-wire mA, or 3-wire V signals), enable adjustable range or subrange selection, support uni- or bi-directional settings, and allow local (pushbutton) or remote (via dry contacts) zeroing for accuracy.

A sensor includes a detector including an element substrate, a membrane including an outer surface, an inner surface on an opposite side of the outer surface, and a diaphragm, a side wall provided on the element substrate and supporting a portion of the inner surface of the membrane outside the diaphragm, and a fixed electrode provided on the element substrate and surrounded by the side wall, facing the inner surface of the membrane with a space therebetween and having an electrostatic capacitance between the fixed electrode and the diaphragm. A first recess portion is provided in the outer surface of the membrane between the center of the diaphragm and the side wall in the thickness direction of the membrane.

A fluid device comprising a body with a membrane extending in a mean plane and showing an inner face and an outer face; a strain gauge arranged on the outer face of the membrane for measuring a deformation of the membrane when a fluid pressure is applied on the inner face thereof; wherein a bore is formed in the body, extending along an axis parallel to the mean plane of the membrane and delimiting a passage for the fluid under pressure, in fluid connection with the inner face of the membrane.

In a method for evaporating a non-gaseous starting material, the starting material is introduced into an evaporation chamber; an evaporation element heats the starting material to create a vapor; a conveying gas flow transports the vapor through a conveying channel and past a sensor, which measures the concentration or partial pressure of the vapor in the gas flow flowing through the conveying channel; and the mass flow of the vapor through the conveying channel is controlled by varying the conveying gas flow with respect to a setpoint value. To keep the vapor flow largely constant over time, a compensating gas flow is fed into the conveying channel at a mixing point disposed between the evaporator and the sensor. A second mass flow controller controls the mass flow of the compensating gas flow such that, when the conveying gas flow varies, the gas flow flowing past the sensor remains constant.

A MEMS module includes: a MEMS element provided with a substrate in which a hollow portion is formed, and including a movable portion, which is a part of the substrate, around the hollow portion, the movable portion having a thickness whose shape is changeable by an air pressure difference between an air pressure inside the hollow portion and an air pressure outside the substrate; and an electronic component, to which an output signal of the MEMS element is inputted, formed on the substrate, wherein the electronic component and the MEMS element are spaced apart from each other in a direction perpendicular to a thickness direction of the movable portion.

The present publication discloses a micromechanical structure including at least one active element, the micromechanical structure comprising a substrate, at least one layer formed on the substrate forming the at least part of the at least one active element, mechanical contact areas through which the micromechanical structure can be connected to other structures like printed circuit boards and like. In accordance with the invention the micromechanical structure includes weakenings like trenches around the mechanical contact areas for eliminating the thermal mismatch between the active element of the micromechanical structure and the other structures.