In a vacuum gauge that controls a temperature of a sensor section to a high temperature, a circuit board can be sufficiently cooled without applying air to the vacuum gauge from outside. The vacuum gauge includes a sensor section that communicates with a measurement space via a connection port and outputs an output signal according to a pressure in the measurement space, a heater provided around the sensor section to heat the sensor section, a circuit board arranged on a side opposite to the connection port with respect to the sensor section, a first inner case that accommodates the sensor section and the heater, a second inner case that accommodates the circuit board, and an outer case that surrounds the first inner case and the second inner case and forms a flow path, through which outside air flows, together with the first inner case and the second inner case.

In a vacuum gauge that controls a temperature of a sensor section to a high temperature, a circuit board can be sufficiently cooled without applying air to the vacuum gauge from outside. The vacuum gauge includes a sensor section that communicates with a measurement space via a connection port and outputs an output signal according to a pressure in the measurement space, a heater provided around the sensor section to heat the sensor section, a circuit board arranged on a side opposite to the connection port with respect to the sensor section, a first inner case that accommodates the sensor section and the heater, a second inner case that accommodates the circuit board, and an outer case that surrounds the first inner case and the second inner case and forms a flow path, through which outside air flows, together with the first inner case and the second inner case.

An ultra-low pressure, vapor analyte, and vapor pathway parameter monitoring system can include an embedded server comprising a base radio and memory. In some embodiments, the embedded server is communicatively coupled to a third-party database. The system can include a first monitoring device comprising a first ultra-low pressure sensor and a first radio communicatively coupled to the base radio. The embedded server can be remotely located with respect to the first monitoring device whereby the embedded server receives first pressure data from the first monitoring device.

An ultra-low pressure, vapor analyte, and vapor pathway parameter monitoring system can include an embedded server comprising a base radio and memory. In some embodiments, the embedded server is communicatively coupled to a third-party database. The system can include a first monitoring device comprising a first ultra-low pressure sensor and a first radio communicatively coupled to the base radio. The embedded server can be remotely located with respect to the first monitoring device whereby the embedded server receives first pressure data from the first monitoring device.

A vacuum gauge protector for deposition systems includes a body comprising an input port that is configured to couple to a vacuum chamber, and an output port configured to couple to a vacuum gauge. A deposition material filter is positioned in the body to present a tortuous path to gases comprising deposition materials entering the body where the surface area of the deposition material filter is greater than 2000 mm.sup.2. In addition, the deposition material filter restricts deposition material from passing through the body to the output port so as to reduce vacuum gauge contamination while maintaining enough gas flow through the body to the output port so that the vacuum gauge response time can be less than 10 seconds.

A vacuum gauge protector for deposition systems includes a body comprising an input port that is configured to couple to a vacuum chamber, and an output port configured to couple to a vacuum gauge. A deposition material filter is positioned in the body to present a tortuous path to gases comprising deposition materials entering the body where the surface area of the deposition material filter is greater than 2000 mm.sup.2. In addition, the deposition material filter restricts deposition material from passing through the body to the output port so as to reduce vacuum gauge contamination while maintaining enough gas flow through the body to the output port so that the vacuum gauge response time can be less than 10 seconds.

In one aspect, a calibration method for a seed meter may include controlling an air pressure source to apply an initial air pressure to a seed transport member of the seed meter defining a plurality of seed cells. The method may further include controlling the seed meter to rotate the seed transport member relative to a seed chamber of the seed meter containing a plurality of seeds. The method may additionally include performing a calibration cycle for the seed meter, which may include monitoring a first parameter indicative of a number of empty seed cells as the seed transport member rotates, iteratively adjusting the air pressure from the initial air pressure as the first parameter is being monitored, and when the first parameter crosses a first threshold, recording the associated air pressure as a minimum air pressure for the seed meter.

In one aspect, a calibration method for a seed meter may include controlling an air pressure source to apply an initial air pressure to a seed transport member of the seed meter defining a plurality of seed cells. The method may further include controlling the seed meter to rotate the seed transport member relative to a seed chamber of the seed meter containing a plurality of seeds. The method may additionally include performing a calibration cycle for the seed meter, which may include monitoring a first parameter indicative of a number of empty seed cells as the seed transport member rotates, iteratively adjusting the air pressure from the initial air pressure as the first parameter is being monitored, and when the first parameter crosses a first threshold, recording the associated air pressure as a minimum air pressure for the seed meter.

A method and an apparatus for detecting and classifying sounds around a vehicle via neural network machine learning are described. The method involves an audio recognition system that may determine the origin of the sounds being inside or outside of a vehicle and classify the sounds into different categories such as adult, child, or animal sounds. The audio recognition system may communicate with a plurality of sensors in and around the vehicle to obtain information of conditions of the vehicle. Based on information of the sounds and conditions of the vehicles, the audio recognition system may determine whether an occupant or the vehicle is at risk and send alert messages or issue warning signals.

The present invention relates to a MEMS deposition trap (10) comprising: a manifold layer having manifold inlet channels and manifold outlet channels, a microchannel layer (20) having microchannels (33), wherein the manifold layer and the microchannel layer are bonded together so as to form a fluid path, wherein a fluid is forced to pass through the microchannels (33) when flowing from the manifold inlet channels to the manifold outlet channels. Furthermore, it relates to a vacuum sensor having such a deposition trap as and to a process chamber of a manufacturing equipment, preferably used for thin-film deposition or etching processes, comprising such a vacuum sensor.