An example metrology device can include a first stage including a microelectromechanical (MEMS) device having a probe, and a second stage configured to hold a sample. The metrology device can also include a kinematic coupler for constraining the first stage in a fixed position relative to the second stage. The probe of the MEMS device can be aligned with a portion of the sample when the first stage is constrained in the fixed position relative to the second stage.

A two degree-of-freedom nano positioning stage with a parallel flexure hinge mechanism includes two driving systems respectively arranged along an X axis and a Y axis, a moving stage, a parallel flexure hinge mechanism and a base frame, wherein each of the driving systems includes a piezo actuator, a connecting block, a lever, a preloading spring, a push rod and a plurality of connecting hinges; the piezo actuator is fixed on the base frame at one end and connected with the connecting block at the other end; the lever is connected between the connecting block and the preloading spring, the connecting block is connected with the lever through one of the connecting hinges; the preloading spring is fixed on the base frame at one end and connected with the lever at the other end, and the lever is connected with the base frame through another one of the connecting hinges.

A household appliance foot comprises a hydraulic plate; a sheath, fixedly connected with the hydraulic plate; a regulating foot, arranged in the sheath and being axially movable relative to the sheath; an accommodation chamber, formed by the hydraulic plate, the sheath and the regulating foot; a hydraulic medium, in the accommodation chamber and being compressed or expanding with pressure changes to drive the regulating foot to axially move in the sheath for leveling; a communicating device, communicating between at least two household appliance feet for allowing the hydraulic medium to flow between the household appliance feet; and a throttling structure, arranged in the communicating device for slowing down a flow velocity of the hydraulic medium. The throttling structures are arranged in the communicating devices, so that the rapid flowing of the hydraulic medium among the household appliance feet is prevented, and a regulating process can be more stable.

A water jets cutting machine includes a first rotating seat driven by a first motor to rotate about a first rotation axis, a second rotating seat driven by a second motor to rotate about a second axis, a water jets cutting head, an inertial measurement unit (IMU) for detecting an inclination angle of the water jets cutting head, and a controller connecting the first and second motors and the IMU. The controller is able to control the first and second motors to instantaneously conduct compensation for angular deviation of the water jets cutting head according to attitude and position signals which are fed back to the controller by the IMU.

A water jets cutting machine includes a first rotating seat driven by a first motor to rotate about a first rotation axis, a second rotating seat driven by a second motor to rotate about a second axis, a water jets cutting head, an inertial measurement unit (IMU) for detecting an inclination angle of the water jets cutting head, and a controller connecting the first and second motors and the IMU. The controller is able to control the first and second motors to instantaneously conduct compensation for angular deviation of the water jets cutting head according to attitude and position signals which are fed back to the controller by the IMU.

A two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement. Two series flexible hinges are connected in parallel to form a moving pair. One end of the moving pair is fixed, and driving force is applied to the other end. The driving force is amplified by means of a lever to drive the moving pair to translate and rotate. The moving pair drives a first flexible hinge of a platform to rotate, thereby driving the platform to produce corresponding displacement. Four identical moving pairs and four identical first flexible hinges respectively constitute four branch hinges which are different in arrangement; two branch hinges opposite to the platform are in central symmetry and constitute one group, and the four branch hinges are divided into two groups in total. The piezoelectric driving mode can be adopted, and thus the linear displacement in the x-axis direction, the linear displacement in the y-axis direction and the angular displacement in the direction around the z-axis are generated for optical precision positioning and measurement.

A table apparatus includes a first driver applying force in a first axis direction to a table, and a second driver applying force in a second axis direction to the table. The first driver includes a first actuator generating power for moving the table in the first axis direction, and a first movable member moving along a first drive axis parallel to the first axis by actuation of the first actuator. The first movable member includes: a first linear bearing moving along the first drive axis; a first rotary bearing disposed around a first rod member fixed to the first linear bearing and rotatable relative to the first rod member; and a second linear bearing connected to the first rotary bearing and guided in the second axis direction by a second guide member fixed to an edge of the table in the first axis direction.

A two-dimensional three-degree-of-freedom micro-motion platform structure for high-precision positioning and measurement. Two series flexible hinges are connected in parallel to form a moving pair. One end of the moving pair is fixed, and driving force is applied to the other end. The driving force is amplified by means of a lever to drive the moving pair to translate and rotate. The moving pair drives a first flexible hinge of a platform to rotate, thereby driving the platform to produce corresponding displacement. Four identical moving pairs and four identical first flexible hinges respectively constitute four branch hinges which are different in arrangement; two branch hinges opposite to the platform are in central symmetry and constitute one group, and the four branch hinges are divided into two groups in total. The piezoelectric driving mode can be adopted, and thus the linear displacement in the x-axis direction, the linear displacement in the y-axis direction and the angular displacement in the direction around the z-axis are generated for optical precision positioning and measurement.

A one-dimensional large-stroke precise positioning platform includes a housing, a cross ball guiding rail, piezoelectric ceramic and an elastic member. The cross ball guiding rail includes a mover guiding rail and stator guiding rails. A first and second fixing member is movable in a containing chamber provided in the housing. In the longitudinal direction of the mover guiding rail, one end of the piezoelectric ceramic is abutted against the first fixing member, and the other end against the second fixing member. The mover guiding rail is fixed on the second fixing member, and the elastic member is fixed on the first fixing member. In the width direction of the mover guiding rail, the two sides of the elastic member are abutted against the inner side surfaces of the containing chamber, and the first fixing member is connected with the second fixing member by a flexible member.

A one-dimensional large-stroke precise positioning platform includes a housing, a cross ball guiding rail, piezoelectric ceramic and an elastic member. The cross ball guiding rail includes a mover guiding rail and stator guiding rails. A first and second fixing member is movable in a containing chamber provided in the housing. In the longitudinal direction of the mover guiding rail, one end of the piezoelectric ceramic is abutted against the first fixing member, and the other end against the second fixing member. The mover guiding rail is fixed on the second fixing member, and the elastic member is fixed on the first fixing member. In the width direction of the mover guiding rail, the two sides of the elastic member are abutted against the inner side surfaces of the containing chamber, and the first fixing member is connected with the second fixing member by a flexible member.