A semiconductor memory device according to one embodiment includes a stacked body and a semiconductor layer. The stacked body includes a plurality of control gate electrodes stacked above a substrate. The semiconductor layer extends in a first direction intersecting with the substrate and faces the plurality of control gate electrodes. The semiconductor memory device further includes a gate insulating layer disposed between the control gate electrodes and the semiconductor layer. The gate insulating layer includes zirconium oxide at a position facing the control gate electrodes.

A method for manufacturing a memory device includes forming trenches in a substrate to define an active region, filling an insulation material in the trenches, treating at least one portion of the insulation material, removing an upper portion of the insulation material from the trenches, so as to expose upper portions of side surfaces of the active region and to convert remaining portions of the insulation material in the trenches to shallow trench isolation (STI) disposed on opposite sides of the active region, forming a lower oxide layer, a middle charge trapping layer, and an upper oxide layer which cover the exposed upper portions of the side surfaces of the active region, an upper surface of the active region between the side surfaces of the active region, and the STI, and forming a gate layer on the upper oxide layer.

A high pixel density intraoral x-ray imaging sensor includes a direct conversion, fully depleted silicon detector bump bonded to a readout CMOS substrate by cu-pillar bump bonds.

Some embodiments include an integrated structure having a vertical stack of alternating insulative levels and conductive levels. Recesses extend into the conductive levels. The conductive levels have projections above and below the recesses. The projections have outer edges. An outer periphery of an individual conductive level is defined by a straight-line boundary extending from the outer edge of the projection above the recess in the individual conductive level to the outer edge of the projection below the recess in the individual conductive level. A depth of the recess is defined as a horizontal distance from the straight-line boundary to an innermost periphery of the recess. The recesses have depths of at least about 5 nm. Charge-blocking regions extend within the recesses. Charge-storage structures are along the charge-blocking regions. Gate dielectric material is along the charge-storage structures. Channel material is along the gate dielectric material.

A silicide layer on a gate electrode of a MONOS memory is prevented from being disconnected, and a property of a MISFET is improved. As means for that, when a memory cell and a MISFET formed by so-called gate-last process are mixedly mounted, a silicide layer on a source/drain region is formed by a salicide process with relatively high temperature heat treatment, and then, a silicide layer is formed on each of the control gate electrode and the memory gate electrode of the memory cell by a salicide process with relatively low temperature heat treatment.

Transistors may be manufactured with a shared drain to reduce die area consumed by circuitry. In one example, two transistors can be manufactured that include two body regions that abut a shared drain region. The two transistors can be independently operated by coupling terminals to a source and a gate for each transistor and the shared drain. Characteristics of the two transistors can be controlled by adjusting feature sizes, such as overlap between the gate and the shared drain for a transistor. In particular, two transistors with different voltage requirements can be manufactured using a shared drain structure, which can be useful in amplifier circuitry and in particular Class-D amplifiers.

A magnetic memory according to an embodiment includes: at least one memory cell, the memory cell comprising: a conductive layer including a first terminal, a second terminal, and a portion located between the first terminal and the second terminal; a magnetoresistive element including: a first magnetic layer; a second magnetic layer between the portion and the first magnetic layer; and a nonmagnetic layer between the first magnetic layer and the second magnetic layer; a diode including an anode and a cathode, one of the anode and the cathode being electrically connected to the first magnetic layer; and a transistor including third and fourth terminals and a control terminal, the third terminal being electrically connected to the first terminal.

A semiconductor device for ultra-high voltage (UHV) operation disclosed in the present invention includes a substrate having a normally-on channel, a negative capacitance material layer, an electrode, a source and a drain. The negative capacitance material layer is disposed over the substrate and capable of adjusting the threshold voltage of the semiconductor device so as to transform the normally-on channel into a normally-off channel and change the transistor characteristics of the semiconductor device from a depletion mode to an enhance mode. In addition, the semiconductor device also includes a gate dielectric layer made of high-k material between the negative capacitance material layer, a gate layer between the gate dielectric layer and the negative capacitance material layer and an ion implantation layer in the substrate under the gate. Furthermore, the aforementioned technical features or structures can be formed in a semiconductor device having a gate-recessed structure.

The present disclosure provides a semiconductor structure which comprises a semiconductive substrate and a doped region in the semiconductive substrate. The doped region has a conductivity type opposite to the semiconductive substrate. The semiconductor structure also includes a capacitor in the doped region where the capacitor comprises a plurality of electrodes and the plurality of electrodes are insulated with one another. The semiconductor structure further includes a plug in the capacitor and surrounded by the plurality of electrodes.

According to one embodiment, a method for manufacturing a semiconductor device includes forming a hole extending in a first direction in a workpiece. The method includes forming a first film on an upper surface of the workpiece and an upper portion of a side wall of the hole. The method includes forming a second film on the first film. The method includes removing portions of the first and second films from the upper surface of the workpiece so that at least a part of the first and second films formed on the upper portion remain. The method includes removing at least a part of a portion of the workpiece which is exposed through the hole using a second etchant. An etching rate of the first etchant for the first film is higher than an etching rate of the first etchant for the second film.