An alpha ion emitter apparatus, including a circuit, a fluid duct including one or more apertures, and a rail electrically connected to the circuit and operatively arranged to hold an alpha ionization material that emits alpha particles, the alpha particles creating alpha ions, wherein the circuit is operatively arranged to apply an output signal to at least one of the fluid duct and the rail.

Some implementations described herein provide techniques and apparatuses for a semiconductor processing tool including an electrostatic chuck having a voltage-regulation system to regulate an electrical potential throughout regions of a semiconductor substrate positioned above the electrostatic chuck. The voltage-regulation system may determine that an electrical potential within a region of the semiconductor substrate does not satisfy a threshold. The voltage-regulation system may, based on determining that the electrical potential throughout the region does not satisfy the threshold, position one or more electrically-conductive pins within the region. While positioned within the region, the one or more electrically-conductive pins may change the electrical potential of the region.

Provided is an indoor air cleaning device for a vehicle using a nonthermal plasma and an operation method thereof, and more particularly, to an indoor air cleaning device for a vehicle using a nonthermal plasma, in which ozone is generated by a nonthermal plasma through corona discharge and an air purifying filter is sterilized through strong oxidization action of ozone, achieving more hygienic and continuous management, static electricity of an electrostatic filter is recharged with the controlled magnitude of applied voltage to maintain the best purification performance of the filter, and negative ions beneficial for human body are generated, creating pleasant indoor air conditions.

Provided is an indoor air cleaning device for a vehicle using a nonthermal plasma and an operation method thereof, and more particularly, to an indoor air cleaning device for a vehicle using a nonthermal plasma, in which ozone is generated by a nonthermal plasma through corona discharge and an air purifying filter is sterilized through strong oxidization action of ozone, achieving more hygienic and continuous management, static electricity of an electrostatic filter is recharged with the controlled magnitude of applied voltage to maintain the best purification performance of the filter, and negative ions beneficial for human body are generated, creating pleasant indoor air conditions.

Ionization systems and methods include moving air into contact with one or more ion generators and then past an ozone removal assembly to remove at least some ozone from the air. The air may be moved by a fan and may be filtered before contacting the one or more ion generators. The amount of one or more of the following of the air may be measured: the amount of ions, particulates, temperature, humidity, and other relevant factors. The ionization amount may be adjusted based on one or more of the measured amounts. The one or more ion generators and ozone removal assembly may be constructed as part of a single unit so they can be removed and replaced easily.

Ionization systems and methods include moving air into contact with one or more ion generators and then past an ozone removal assembly to remove at least some ozone from the air. The air may be moved by a fan and may be filtered before contacting the one or more ion generators. The amount of one or more of the following of the air may be measured: the amount of ions, particulates, temperature, humidity, and other relevant factors. The ionization amount may be adjusted based on one or more of the measured amounts. The one or more ion generators and ozone removal assembly may be constructed as part of a single unit so they can be removed and replaced easily.

The present disclosure relates to an electrostatic chuck. The electrostatic chuck according to the present disclosure may include a base substrate; an electrostatic chuck plate fixed on the base substrate, the electrostatic chuck plate having an electrode therein; and an electrode part disposed in a hole in the base substrate to supply power to the electrode, wherein the electrode part may include a housing inserted into the hole in the base substrate, an electrode rod passing through the inner wall of the housing such that one end thereof is in contact with the electrode; and an elastic support body configured to support the electrode rod at multiple points on the inner wall of the housing.

An electrostatic chuck device (1) including: an electrostatic chuck part (2) which includes a base material (11) having a mounting surface (11a) on which a plate-like sample W is mounted, and an internal electrostatic attraction electrode (13) which electrostatically attracts the plate-like sample (W) to the mounting surface (11a); a cooling base part (3) which is configured to cool the electrostatic chuck part (2); and an adhesive layer (4) which is interposed therebetween, in which a shape of the mounting surface of the base material (11) includes a concave surface (23) or a convex surface, which is a curved surface that gradually curves from a center (11b) of the mounting surface (11a) toward an outer periphery (11c) of the mounting surface (11a) and includes no inflection point, and an absolute value of a difference between a height of a center of the concave surface (23) or the convex surface from a position of a main surface (3a) of the cooling base part (3) as a reference and a height of an outer periphery of the concave surface (23) or the convex surface from the position of the main surface (3a) of the cooling base part (3) as a reference is 1 μm or higher and 30 μm or lower.

An ionic wind generator and an electronic device having a heat dissipation function using the same are proposed. The ionic wind generator includes a power module; a first electrode configured to receive power from the power module by being connected to the power module to become an emitter electrode; and a second electrode spaced apart from the first electrode and grounded and at the same time connected to the power module to become a counter electrode. In addition, the first electrode is configured as a carbon brush including multiple carbon fibers. Accordingly, in the ionic wind generator, the emitter electrode is configured as the carbon brush having multiple carbon fibers.

An ionic wind generator and an electronic device having a heat dissipation function using the same are proposed. The ionic wind generator includes a power module; a first electrode configured to receive power from the power module by being connected to the power module to become an emitter electrode; and a second electrode spaced apart from the first electrode and grounded and at the same time connected to the power module to become a counter electrode. In addition, the first electrode is configured as a carbon brush including multiple carbon fibers. Accordingly, in the ionic wind generator, the emitter electrode is configured as the carbon brush having multiple carbon fibers.