Methods, systems, and devices for cross point array architecture for multiple decks are described. A memory array may include multiple decks, such as six or eight decks. The memory array may also include sockets for coupling access lines with associated decoders. The sockets may be included in sub-blocks of the array. A sub-block may be configured to include sockets for multiple access lines. A socket may intersect an access line in the middle of the access line, or at an end of the access line. Sub-blocks containing sockets for an access line may be separated by a period based on the access line.

Provided are a memory cell and a method of forming the same. The memory cell includes a first dielectric pattern, a second dielectric pattern, a first bottom electrode, a first storage pattern, and a first top electrode. The first bottom electrode is disposed between the first dielectric pattern and the second dielectric pattern, and the first bottom electrode interfaces a first sidewall of the first dielectric pattern and a sidewall of the second dielectric pattern. The first storage pattern is disposed on the first dielectric pattern, the second dielectric pattern and the first bottom electrode, wherein the first storage pattern is electrically connected to the first bottom electrode. The first storage pattern is between the first bottom electrode and the first top electrode. A semiconductor die including a memory array is also provided.

The present application provides an apparatus, including: a substrate; a first line electrode formed on the substrate; an interlayer formed on the first line electrode, a selector stack formed on the interlayer and the first line electrode; an RRAM stack formed on the selector stack; and a second line electrode formed on the RRAM stack. The interlayer comprises an upper surface and a sidewall. In some embodiments, a shape of the interlayer comprises a cylinder, a pyramid, a prism, a cone, a pillar, or a protrusion;

The present application provides an apparatus, including: a substrate; a first line electrode formed on the substrate; an interlayer formed on the first line electrode, a selector stack formed on the interlayer and the first line electrode; an RRAM stack formed on the selector stack; and a second line electrode formed on the RRAM stack. The interlayer comprises an upper surface and a sidewall. In some embodiments, a shape of the interlayer comprises a cylinder, a pyramid, a prism, a cone, a pillar, or a protrusion;

The present disclosure relates to a memory device comprising an array of memory cells arranged in a multideck configuration comprising a plurality of superimposed decks, a plurality of access lines comprising at least a first plurality of access lines arranged in a first level, a second plurality of access lines arranged in a second level, and a third plurality of access lines arranged in a third level between the first plurality of access lines and the second plurality of access lines, the third plurality of access lines being arranged between two decks of the plurality of decks, a plurality of drivers configured to drive signals to the access lines, and connection elements configured to electrically connect the access lines to the respective drivers. The connections elements and the access lines are arranged so that a single driver of the plurality of drivers is configured to drive at least one access line of each level of the at least three levels. Related memory systems and methods are also disclosed.

The present disclosure relates to a memory device comprising an array of memory cells arranged in a multideck configuration comprising a plurality of superimposed decks, a plurality of access lines comprising at least a first plurality of access lines arranged in a first level, a second plurality of access lines arranged in a second level, and a third plurality of access lines arranged in a third level between the first plurality of access lines and the second plurality of access lines, the third plurality of access lines being arranged between two decks of the plurality of decks, a plurality of drivers configured to drive signals to the access lines, and connection elements configured to electrically connect the access lines to the respective drivers. The connections elements and the access lines are arranged so that a single driver of the plurality of drivers is configured to drive at least one access line of each level of the at least three levels. Related memory systems and methods are also disclosed.

According to one embodiment, a method of manufacturing a memory device including a silicon oxide and a variable resistance element electrically coupled to the silicon oxide, includes: introducing a dopant into the silicon oxide from a first surface of the silicon oxide by ion implantation; and etching the first surface of the silicon oxide with an ion beam.

A three-dimensional memory device includes a stacking structure, memory pillars, and conductive pillars. The stacking structure includes stacking layers stacked along a vertical direction, each stacking layer including a gate layer, a gate dielectric layer, and a channel layer. The gate layer, the gate dielectric layer, and the channel layer extend along a horizontal direction, and the gate dielectric layer is disposed between the gate layer and the channel layer. The memory pillars extend along the vertical direction and are laterally separated and in contact with the channel layer of each stacking layer. Each memory pillar comprises a first electrode, a second electrode, and a switching layer between the first and second electrodes. The conductive pillars extend along the vertical direction and are laterally separated and in contact with the channel layer of each stacking layer. The memory pillars and the conductive pillars are alternately arranged along the horizontal direction.

A semiconductor structure comprises a bottom electrode contact, and a memory device comprising a bottom electrode disposed on the bottom electrode contact, at least one memory element layer disposed on the bottom electrode, and a top electrode disposed on the at least one memory element layer. A bit line contact is disposed on the top electrode and extends around sides of the memory device and of the bottom electrode contact. An encapsulation layer is disposed between the bit line contact and the sides of the memory device and of the bottom electrode contact.

A phase change memory semiconductor structure includes a substrate; a landing pad located in the substrate; a dielectric located outwardly of the substrate; a heater element located in the substrate outward of the landing pad; a stack including an inner undoped chalcogenide layer outward of the dielectric, a doped chalcogenide layer outward of the inner undoped chalcogenide layer, and an outer undoped chalcogenide layer outward of the doped chalcogenide layer; and at least one lateral conductive metal layer associated with the stack.