B
PERFORMING OPERATIONS; TRANSPORTING
B
PERFORMING OPERATIONS; TRANSPORTING
B81
MICROSTRUCTURAL TECHNOLOGY
B81
MICROSTRUCTURAL TECHNOLOGY
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate