An apparatus for measuring a pressure of battery cells includes a pressure sensor configured to measure the pressure of battery cells stacked in the interior of a battery module, the pressure sensor includes a plurality of pressure measuring units, a connection unit for connecting the plurality of pressure measuring units to each other, and an output unit connected to the connection unit and configured to output pressure values measured through the pressure measuring units, and the plurality of pressure measuring units are arranged on surfaces of the battery cells to measure the pressure of the battery cells.

According to an aspect there is provided an apparatus comprising at least one electrode and a movable sensor membrane, wherein the apparatus comprises means for: measuring a voltage or a current; determining an amount of external pressure based on the measured voltage or current; based on the determined amount of external pressure, providing electrostatic feedback force such that the movable sensor membrane is undeflected; and determining a correlation between the electrostatic force feedback and the external pressure.

A temperature sensor is a temperature sensor using a MEMS resonator, and includes: a MEMS resonator; a sweeper that sweeps a frequency of an excitation signal for a vibrator of the MEMS resonator in a predetermined sweep direction, and outputs the excitation signal swept to the MEMS resonator; a discontinuity point detector that obtains a vibration state information signal, which is a characteristic quantity expressing a vibration state of the vibrator based on the excitation signal, from the MEMS resonator, and detects a detection value that is (i) a frequency of the excitation signal when the vibration state information signal obtained changes discontinuously or (ii) a time corresponding to the frequency; and a converter that determines a physical quantity acting on the MEMS resonator based on the detection value detected.

Improvements in thin film sensors are disclosed. These can be used for aircraft applications. Dielectric isolation washers can be provided between a pressure sensor and an exterior metal housing of a sensor assembly. In this manner, high voltage inputs from a lightning strike or other source that reach the sensor housing are not transmitted to the sensor. Dielectric washers, insulators, and potting compounds can thus isolate a metal thin film pressure sensor from adjacent metal components (e.g., using non-conducting insulating materials like Torlon, zirconia and nylon). Besides their high dielectric strength, these materials exhibit compressive strength and resistance to wear, creep and corrosion. Desirable thicknesses for these components are provided. The described thin film pressure sensor embodiments can attain a dielectric rating of 1500 VAC.

A method for manufacturing a pressure detecting unit for a measuring device for measuring a pressure status value of a plant specimen. The method includes mounting a sensor unit for detecting the pressure status value at a carrier substrate, fastening a frame to the carrier substrate, the frame including a fastening surface, a contact surface oriented opposite the fastening surface and an inner surface defining an opening and extending between the fastening surface and the contact surface, the frame being situated at the carrier substrate in such a way that the fastening surface faces the carrier substrate and the inner surface surrounds the sensor unit, and filling the opening of the frame with a filling material for forming an elastic pressure coupling layer. A pressure detecting unit for a measuring device for measuring a pressure status value of a plant specimen is also described.

The present invention provides a MEMS pressure sensor and a manufacturing method. The pressure is formed by a top cap wafer, a MEMS wafer and a bottom cap wafer. The MEMS wafer comprises a frame and a membrane, the frame defining a cavity. The membrane is suspended by the frame over the cavity. The bottom cap wafer closes the cavity. The top cap wafer has a recess defining with the membrane a capacitance gap. The top cap wafer comprises a top cap electrode located over the membrane and forming, together with the membrane, a capacitor to detect a deflection of the membrane. Electrical contacts on the top cap wafer are connected to the top cap electrode. A vent extends from outside of the sensor into the cavity or the capacitance gap. The pressure sensor can include two cavities and two capacitance gaps to form a differential pressure sensor.

A sensor apparatus includes at least one substrate layer of an elastically deformable material, the substrate layer extending longitudinally between spaced apart ends thereof. A conductive layer is attached to and extends longitudinally between the spaced apart ends of the at least one substrate layer. The conductive layer includes an electrically conductive material adapted to form a strain gauge having an electrical resistance that varies based on deformation of the conductive layer in at least one direction.

A method for manufacturing a pressure-sensitive sensor includes providing an extruder that includes a cylindrical die, a mandrel arranged inside the die and having plural helical grooves on an outer circumferential surface, and an annular outlet sandwiched between the die and the mandrel, and by using the extruder, performing simultaneous extrusion-molding of an elastic insulating material and an elastic conductive material by supplying the elastic conductive material into not less than two of the grooves from the inside of the mandrel while extruding the elastic insulating material, so as to form a pressure-sensitive sensor. The sensor includes a tubular body including an elastic insulation and having a hollow portion along a longitudinal direction, and not less than two conductive ribs including an elastic conductor and helically provided along an inner circumferential surface of the hollow portion of the tubular body so as to protrude inward from the inner circumferential surface.

Some embodiments of the disclosure provides a method for preparing a sensing unit of a fiber-optic Fabry-Perot pressure sensor. The method includes the following steps. Preparing a first quartz sheet and a second quartz sheet, polishing the upper surface of the first quartz sheet, and polishing the upper surface of the second quartz sheet. Fabricating a plurality of grooves in the upper surface of the first quartz sheet. Fabricating through holes in the lower surface of the first quartz sheet, each of the through holes being coaxial with a corresponding groove and communicating with the corresponding groove. Combining the upper surface of the second quartz sheet with the upper surface of the first quartz sheet to form a laminated body. Cutting the plurality of grooves of the laminated body to obtain a plurality of sensing units.

A multi-layer electrode of a capacitive pressure sensor is manufactured by roll to roll printing a conductive layer onto a polymer layer and forming a mutual capacitance sensor layer of the capacitive pressure sensor, co-extruding a conductive polymer layer and a foam dielectric layer and forming a coextruded layer of the capacitive pressure sensor, and pressure rolling the mutual capacitance sensor layer and the coextruded layer together and forming the multi-layer electrode. The conductive polymer layer includes between about 2 wt. % to about 15 wt. % graphene and between about 0.01 wt. % and 5 wt. % of the carbon nanotubes. Also, the conductive polymer layer has a flexural modulus equal to or greater than 5,000 MPa and an electrical resistivity less than or equal to 10 Ohm/mm.sup.3, and the polymer layer and/or the conductive polymer layer is formed from recycled polyethylene terephthalate.