The present disclosure concerns probe cassette 1 for holding a probe 60 in storage to provide automated transfer of the probe to a probe mount of a scanning probe microscope. The probe cassette comprising a first vacuum chamber C1 with a volume V1, and a second vacuum chamber C2 with a volume V2, and a first and second vacuum channel 10, respectively fluidly connecting the first and second vacuum chamber to an outlet 30 fluidly connectable to an external vacuum, such that upon application of the external vacuum a mounting position of the probe relative to the cassette and a mounting position of the cassette relative to the sample stage is maintained. The probe cassette arranged to allow breaking a vacuum condition in the second chamber maintaining the mounting position of the probe before breaking a vacuum condition in the first chamber maintaining a mounting position of the probe cassette.

A probe cassette for storing, transporting and handling one or more probe devices for a probe based system, the cassette including a body having at least one probe receptacle arranged to accommodate a probe device, wherein, at the probe receptacle, a vacuum clamping member is arranged for selectively holding the probe device under a retaining force, wherein the receptacle includes at least one aperture which is, during selective holding of the probe device, connectable to a vacuum pressure through a passageway arranged in the cassette body, wherein the cassette includes a first fluid port connectable to a first source of vacuum for delivering the vacuum pressure.

A probe cassette for storing, transporting and handling one or more probe devices for a probe based system, the cassette including a body having at least one probe receptacle arranged to accommodate a probe device, wherein, at the probe receptacle, a vacuum clamping member is arranged for selectively holding the probe device under a retaining force, wherein the receptacle includes at least one aperture which is, during selective holding of the probe device, connectable to a vacuum pressure through a passageway arranged in the cassette body, wherein the cassette includes a first fluid port connectable to a first source of vacuum for delivering the vacuum pressure.

The invention relates to a probe cassette for storing, transporting and handling one or more probe devices for a probe based system, the cassette including: a cassette body having at least one probe receptacle arranged to accommodate a probe device, a lid connectable to the cassette body, and a clamping unit configured to retain the probe device at the receptacle by exerting a clamping force on said probe device when the lid is in a closed position, wherein the clamping unit includes an adjustment member for adjusting the clamping force, wherein the clamping unit is selectively operable from a first position, in which the clamping force is insufficient to provide clamping, to a plurality of second positions, in which the clamping force is sufficient to an extent at which movement of the probe device at the receptacle is prevented.

The present disclosure concerns probe cassette 1 for holding a probe 60 in storage to provide automated transfer of the probe to a probe mount of a scanning probe microscope. The probe cassette comprising a first vacuum chamber C1 with a volume V1, and a second vacuum chamber C2 with a volume V2, and a first and second vacuum channel 10, respectively fluidly connecting the first and second vacuum chamber to an outlet 30 fluidly connectable to an external vacuum, such that upon application of the external vacuum a mounting position of the probe relative to the cassette and a mounting position of the cassette relative to the sample stage is maintained. The probe cassette arranged to allow breaking a vacuum condition in the second chamber maintaining the mounting position of the probe before breaking a vacuum condition in the first chamber maintaining a mounting position of the probe cassette.

Provided is a technique for making a user analyze a sample while providing convenience to the user. An information providing system is provided with a determination unit configured to determine whether or not the part needs to be replaced, a display unit, and a display control unit configured to control the display unit. The display control unit causes the display unit to display supplier information on a supplier of the part when the part needs to be replaced.

The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.

The present invention relates to methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope. In particular, the invention relates to a method for hardening a measuring tip for a scanning probe microscope, comprising the step of: Processing the measuring tip with a beam of an energy beam source, the energy beam source being part of a scanning electron microscope.

This document is directed at a method of manufacturing a semiconductor element, the method comprising manipulating a surface of a substrate using an atomic force microscope, the atomic force microscope including a probe, the probe including a cantilever and a probe tip, the substrate including at least one or more device features embedded underneath the surface. The method comprises: imaging the embedded device features, and identifying that a position of the probe tip of the atomic force microscope is aligned with the feature; and displacing the probe tip transverse to the surface for exerting a stress for performing the step of surface manipulation, as for example contact holes. Imaging is performed by applying and obtaining an acoustic signal to and from the substrate via the probe tip, including a first and a second signal component at different frequencies. The imaging and surface manipulation are performed using said same probe and probe tip.

A sharpening method for a probe tip of an Atomic Force Microscope (AFM) includes the steps of dripping a prepared slurry on a glass slide to form a droplet on the glass slide, where particles of the prepared slurry are diamond powder; infiltrating the tip to be sharpened with the prepared slurry; setting operation mode of the AFM to tapping in the fluid and lowering the probe into droplet till the probe cantilever beam is immersed completely in the droplet; setting vibration parameters, scanning parameters, and sharpening time, performing tip sharpening; and evaluating the sharpening results, and finishing sharpening. When the AFM works in a tapping mode in fluid, the tip of the self-excited oscillating probe is sharpened under the grinding effect of the diamond particles. The method is simple and effective, and easy to implement.