Patent classifications
H
H10
H10P
14/00
H10P14/3814
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD BASED ON SEEDLESS SILICON SOURCE/DRAIN CONTACT RESISTANCE REDUCTION AND LASER PROCESS TECHNOLOGY
Disclosed are a semiconductor device based on seedless silicon (Si) source/drain contact resistance reduction and laser process technology and a method of fabricating the same. The semiconductor device includes an activated seedless Si layer formed on a substrate and at least one electrode formed on the seedless Si layer, and the seedless Si layer is crystalized through a first laser process and then activated through a second laser process.