A method of modifying a high-resistivity substrate so that the substrate may be electrostatically clamped to a chuck is disclosed. The bottom surface is implanted with a resistivity-reducing species. In this way, resistivity of the bottom surface of the substrate may be greatly reduced. In some embodiments, to implant the bottom surface, a coating is applied to the top surface. After application of the coating, the substrate is flipped so that the front surface contacts the top surface of the chuck. The ions are then implanted into the exposed bottom surface to create the low resistivity layer. The resistivity of the low resistivity layer proximate the bottom surface after implant may be less than 1000 ohm-cm. Once the bottom surface has been implanted, the substrate may be processed conventionally. The low resistivity layer may later be removed by wafer backside thinning processes.

A method for forming a diamond product. Diamond material is provided and a damage layer comprising sp.sup.2 bonded carbon is formed in the material. The presence of the damage layer defines a first diamond layer above and in contact with the damage layer and a second diamond layer below and in contact with the damage layer. The damage layer is electrochemically etched to separate it from the first layer, wherein the electrochemical etching is performed in a solution containing ions, the solution having an electrical conductivity of at least 500 μS cm.sup.−1, and wherein the ions are capable of forming radicals during electrolysis. The diamond product is also described.

A method of manufacturing a saw blade includes placing at least one tooth in an holder where at least one face of the tooth is covered and at least one face of the tooth is exposed, coating the exposed face, and after the coating, joining the tooth to a blade backer at an uncoated face.

A method for modifying carbon fibers and a product thereof are provided. Modified carbon fibers are obtained by heating prepared carbon fibers under an inert atmosphere after magnetron sputtering treatment. The magnetron sputtering treatment takes the prepared carbon fibers as a substrate material and carbon as a target material, and sputtering conditions includes: a vacuum degree of 2×10.sup.−3 Pa, a distance from the target material to the substrate material of 4 cm, a magnetron sputtering power of 150-350 W, a magnetron sputtering pressure of 0.5-1.6 Pa, a magnetron sputtering duration of 20-60 min, a high purity argon as working gas, and an argon flow rate of 80 mL/min The heating treatment is carried out under conditions including: a heating rate of 5° C./min, a heating temperature of 200-600° C., and a heating duration of 25-40 min.

A multilayer mirror for reflecting Extreme Ultraviolet (EUV) radiation and a method for producing the same are disclosed. In an embodiment a multilayer mirror includes a layer sequence having a plurality of alternating first layers and second layers, the first layers including lanthanum or a lanthanum compound and the second layers including boron, wherein the second layers are doped with carbon, and wherein a molar fraction of carbon in the second layers is 10% or less.

A valve component comprising a substrate with a sliding surface, the sliding surface being designed to be subjected to sliding against another surface during operation of the valve, wherein at least a portion of the sliding surface is coated with a coating comprising an under-layer comprising tungsten and an upper-layer deposited atop the under-layer, said upper-layer comprising diamond-like-carbon, wherein the under-layer comprises carbon and has a layer thickness of at least 11 micrometers, and the upper-layer has a lower coefficient of friction than the under-layer and has a layer thickness of at least 1.5 micrometers.

A method for preparing an ammonium thiomolybdate-porous amorphous carbon composite superlubricity film is disclosed. First, a porous amorphous carbon film is prepared by an anode layer ion source assisted plasma chemical vapor deposition method and a reactive magnetron sputtering method on a substrate. The porous amorphous carbon film is then impregnated in an ammonium thiomolybdate solution, so that the ammonium thiomolybdate is adsorbed on the porous amorphous carbon film, and the impregnated porous amorphous carbon film is air dried. During the friction process, the composited porous amorphous carbon superlubricity film prepared in the present disclosure promotes the in-situ decomposition of ammonium thiomolybdate to generate molybdenum disulfide by utilizing the friction heat at the initial stage of running-in, further to generate a graphene-like structure under the function of a catalyst, thus realizing a macroscopic super lubricity through a heterogeneous incommensurate contact between graphene and molybdenum disulfide.

In order to provide an apparatus for industrially producing a fibrous carbon nanohorn aggregate (CNB), the apparatus comprises: a target holding unit holding a carbon target in sheet form containing a metal catalyst such as Fe; a light source irradiating a laser beam on a surface of the carbon target; a movement unit moving one of the target held by the target holding unit and the light source relative to the other to move the irradiation position of the laser beam on the surface of the target; a production chamber configured to irradiate the carbon target with the laser beam in an atmosphere of non-oxidizing gas to produce a product including the fibrous carbon nanohorn aggregate; a collection mechanism collecting carbon vapor evaporated from the target by irradiation of the laser beam to collect nanocarbon including the fibrous carbon nanohorn aggregate; and a control unit controlling an operation of the movement unit or the light source so that the power density of the laser beam irradiated to the surface of the carbon target is substantially constant, and the irradiation position of the laser beam is moved to a region adjacent to a region previously irradiated by the laser beam, an interval being formed therebetween that is equal to or larger than the width of an altered region formed on the periphery of the region irradiated by the laser beam.

Described herein is a submerged-plasma process for the production of amorphous and nanocrystalline nanostructured materials, depending on processing conditions, from precursors that can be in the liquid or injected into the plasma or both.

An unchamfered piston ring that is pre-treated by grit blasting to a defined roughness, followed by PVD coating with a metal nitride to a thickness of at least 10 μm, leaving peaks and valleys in the coated piston ring. The coated piston ring is then lapped to remove the peaks without penetrating the coating, so that valleys and plateaus remain in the coated surface. The resulting piston ring exhibits superior coating retention due to the increased surface area created by the grit blasting, and yet also superior performance, as the cavities remaining increase the porosity of the coating and thus enhance the lubrication of the ring.