A multilayer mirror for reflecting Extreme Ultraviolet (EUV) radiation and a method for producing the same are disclosed. In an embodiment a multilayer mirror includes a layer sequence having a plurality of alternating first layers and second layers, the first layers including lanthanum or a lanthanum compound and the second layers including boron, wherein the second layers are doped with carbon, and wherein a molar fraction of carbon in the second layers is 10% or less.

A target is formed of a sintering-resistant material of high-melting point metal alloy, high-melting point metal silicide, high-melting point metal carbide, high-melting point metal nitride or high-melting point metal boride comprising a structure in which a material formed of a sintering-resistant material of high-melting point metal alloy, high-melting point metal silicide, high-melting point metal carbide, high-melting point metal nitride or high-melting point metal boride and a high-melting point metal plate other than the target are bonded. A production method of such a target is provided. Further the generation of cracks during the target production and high power sputtering, and the reaction of the target raw material with the die during hot pressing can be inhibited effectively, and the warpage of the target can be reduced.

The invention to which this application relates is improvements to the provision of Molybdenum and/or Tungsten containing coatings of the type which can be used to improve certain characteristics of the surface of a substrate to which the coating is applied. In one embodiment the coating also includes Ti to provide the advantages of high adhesion, high humidity and wear resistance of the coating and TiB.sub.2 to promote the formation of a relatively uniform, dense, coating, so strengthening the coating which is formed and improving the high temperature performance of the coatings.

A cutting tool comprising a base material and a coating disposed on the base material, wherein the coating comprises a first layer, the first layer consists of a MoC.sub.1-x layer formed from a compound represented by MoC.sub.1-x or a TaC.sub.1-y layer formed from a compound represented by TaC.sub.1-y, the compound represented by MoC.sub.1-x consists of a hexagonal crystal structure, the x is 0.40 or more and 0.60 or less, the compound represented by TaC.sub.1-y comprises 95% by mass or more of a hexagonal crystal structure, and the y is 0:40 or more and 0.60 or less.

A method for coating stainless steel press plates includes preparing the stainless steel press plate for coating and coating the stainless steel press plate with a diboride doped with 1%-5% by weight aluminum to produce a diboride-aluminum coating. The step of coating includes applying the diboride-aluminum coating to a stainless steel press plate using a magnetron sputter coating system.

The soft magnetic material multilayer deposition apparatus includes a circular arrangement of a multitude of substrate carriers in a circular inner space of a vacuum transport chamber. In operation the substrate carriers pass treatment stations. One of the treatment stations has a sputtering target made of a first soft magnetic material. A second treatment station includes a target made of a second soft magnetic material which is different from the first soft magnetic material of the first addressed target. A control unit controlling relative movement of the substrate carriers with respect to the treatment stations provides for more than one 360? revolution of the multitude of substrate carriers around the axis AX of the circular inner space of the vacuum transport chamber, while the first and second treatment stations are continuously operative.

A low friction top coat over a multilayer metal/ceramic bondcoat provides a conductive substrate, such as a rotary tool, with wear resistance and corrosion resistance. The top coat further provides low friction and anti-stickiness as well as high compressive stress. The high compressive stress provided by the top coat protects against degradation of the tool due to abrasion and torsional and cyclic fatigue. Substrate temperature is strictly controlled during the coating process to preserve the bulk properties of the substrate and the coating. The described coating process is particularly useful when applied to shape memory alloys.

The invention concerns a method for surface treatment of a ceramic material in powder form, wherein said method comprising the step of providing a powder formed of a plurality of particles of the ceramic material to be treated, and wherein said ceramic powder particles are subjected to an ion implantation process by directing towards an external surface of said particles a beam of singly or multiply charged ions produced by a charge of singly or multiply charged ions, for example of the electron cyclotron resonance ECR type, wherein said particles have a generally polyhedral shape.

The invention also concerns a material in powder form, formed of a plurality of particles having a ceramic external layer and a ceramic core, wherein said particles have a generally polyhedral shape.

The present invention concerns substrates coated with an Mo.sub.1-x-ySi.sub.XB.sub.Y layer, said layer comprising the T2 phase, and a method for the production thereof.

The present disclosure relates to a coated substrate with a coating deposited on at least a part of the substrate surface, said coating comprising at least one metal boron carbide layer, characterized in that the metal boron carbide layer is a ternary compound exhibiting a polycrystalline structure formed of a single phase of Hf.sub.uB.sub.vC.sub.w, wherein u+v+w=100 and 35>v>0 at. % and 35>w>0 and u60 at. %. Further a method for deposition of such a coating is provided.

Said coating comprising at least one metal boron carbide layer, characterized in that the metal boron carbide layer is a ternary compound exhibiting a polycrystalline structure formed of a single phase of hafnium, boron and carbon.