A method for manufacturing an electrostatic chuck with multiple chucking electrodes made of ceramic pieces using metallic aluminum as the joining. The aluminum may be placed between two pieces and the assembly may be heated in the range of 770 C to 1200 C. The joining atmosphere may be non-oxygenated. After joining the exclusions in the electrode pattern may be machined by also machining through one of the plate layers. The machined exclusion slots may then be filled with epoxy or other material. An electrostatic chuck or other structure manufactured according to such methods.

A method for manufacturing an electrostatic chuck with multiple chucking electrodes made of ceramic pieces using metallic aluminum as the joining. The aluminum may be placed between two pieces and the assembly may be heated in the range of 770 C to 1200 C. The joining atmosphere may be non-oxygenated. After joining the exclusions in the electrode pattern may be machined by also machining through one of the plate layers. The machined exclusion slots may then be filled with epoxy or other material. An electrostatic chuck or other structure manufactured according to such methods.

According to the present invention, there is provided a copper/ceramic bonded body including: a copper member made of copper or a copper alloy; and a ceramic member made of silicon-containing ceramics, the copper member and the ceramic member being bonded to each other, in which a maximum indentation hardness in a region is set to be in a range of 70 mgf/μm.sup.2 or more and 150 mgf/μm.sup.2 or less, the region being from 10 μm to 50 μm with reference to a bonded interface between the copper member and the ceramic member toward the copper member side.

The present disclosure relates to a novel sp.sup.2-sp.sup.3 hybrid crystalline boron nitride and its preparation process. A novel sp.sup.2-sp.sup.3 hybrid crystalline boron nitride allotrope, named Gradia BN, is synthesized using sp.sup.2 or sp.sup.3 hybridized boron nitride as raw materials under high-temperature and high-pressure. The basic structural units of Gradia BN are composed of sp.sup.2 hybridized graphite-like structural units and sp.sup.3 hybridized diamond-like structural units. Gradia BN disclosed in the present disclosure is a class of new sp.sup.2-sp.sup.3 hybrid boron nitride allotrope, whose crystal structure can vary with the widths and/or crystallographic orientation relationships of internal sp.sup.2 and/or sp.sup.3 structural units, and may have variable physical properties.

A ceramic tool material, in particular with piezoelectric effect and a preparation method thereof, and a cutting tool. The ceramic tool material includes the following raw materials by weight: 30-70 parts of matrix material, 30-70 parts of piezoelectric material, 5-10 parts of binder, and 10-20 parts of reinforcing phase and can be made into cutting tools. The cutting tool has a piezoelectric effect and excellent mechanical properties and can convert the cutting force signal into the charge signal during machining. By collecting charge signals, a cutting force can be measured and ceramic cutting tool condition can be monitored. Cutting force measurement function and high mechanical properties are integrated. A ceramic tool material with piezoelectric effect can measure the cutting force on the premise by meeting the cutting performance requirements.

A ceramic tool material, in particular with piezoelectric effect and a preparation method thereof, and a cutting tool. The ceramic tool material includes the following raw materials by weight: 30-70 parts of matrix material, 30-70 parts of piezoelectric material, 5-10 parts of binder, and 10-20 parts of reinforcing phase and can be made into cutting tools. The cutting tool has a piezoelectric effect and excellent mechanical properties and can convert the cutting force signal into the charge signal during machining. By collecting charge signals, a cutting force can be measured and ceramic cutting tool condition can be monitored. Cutting force measurement function and high mechanical properties are integrated. A ceramic tool material with piezoelectric effect can measure the cutting force on the premise by meeting the cutting performance requirements.

A cubic boron nitride sintered material includes: 0 to 85 volume % of cubic boron nitride grains; and a binder phase, wherein the binder phase includes at least one selected from a group consisting of one or more first compounds and a solid solution originated from the first compounds, the cubic boron nitride grains include, on number basis, more than or equal to 50% of cubic boron nitride grains each having an equivalent circle diameter of more than 0.5 μm, and includes, on number basis, less than or equal to 50% of cubic boron nitride grains each having an equivalent circle diameter of more than 2 μm, and when a mass of the cubic boron nitride grains is assumed as 100 mass %, a total content of lithium, magnesium, calcium, strontium, beryllium, and barium in the cubic boron nitride grains is less than 0.001 mass %.

A cubic boron nitride sintered material includes: 0 to 85 volume % of cubic boron nitride grains; and a binder phase, wherein the binder phase includes at least one selected from a group consisting of one or more first compounds and a solid solution originated from the first compounds, the cubic boron nitride grains include, on number basis, more than or equal to 50% of cubic boron nitride grains each having an equivalent circle diameter of more than 0.5 μm, and includes, on number basis, less than or equal to 50% of cubic boron nitride grains each having an equivalent circle diameter of more than 2 μm, and when a mass of the cubic boron nitride grains is assumed as 100 mass %, a total content of lithium, magnesium, calcium, strontium, beryllium, and barium in the cubic boron nitride grains is less than 0.001 mass %.

A cubic boron nitride sintered material includes: to 98 volume % of cubic boron nitride grains; and a binder phase, wherein the binder phase includes at least one selected from a group consisting of one or more first compounds and a solid solution originated from the first compounds, the cubic boron nitride grains include, on number basis, more than or equal to 50% of cubic boron nitride grains each having an equivalent circle diameter of more than 0.5 μm, and includes, on number basis, less than or equal to 50% of cubic boron nitride grains each having an equivalent circle diameter of more than 2 μm, and when a mass of the cubic boron nitride grains is assumed as 100 mass %, a total content of lithium, magnesium, calcium, strontium, beryllium, and barium in the cubic boron nitride grains is less than 0.001 mass %.

A cubic boron nitride sintered material includes: to 98 volume % of cubic boron nitride grains; and a binder phase, wherein the binder phase includes at least one selected from a group consisting of one or more first compounds and a solid solution originated from the first compounds, the cubic boron nitride grains include, on number basis, more than or equal to 50% of cubic boron nitride grains each having an equivalent circle diameter of more than 0.5 μm, and includes, on number basis, less than or equal to 50% of cubic boron nitride grains each having an equivalent circle diameter of more than 2 μm, and when a mass of the cubic boron nitride grains is assumed as 100 mass %, a total content of lithium, magnesium, calcium, strontium, beryllium, and barium in the cubic boron nitride grains is less than 0.001 mass %.