A silicon carbide flow reactor fluidic module comprises a monolithic closed-porosity silicon carbide body, a tortuous fluid passage extending through the silicon carbide body, the tortuous fluid passage having an interior surface, and one or more thermal control fluid passages also extending through the silicon carbide body, the interior surface having a surface roughness of less than 10 μm Ra. A process for forming such modules is also disclosed.

A silicon carbide flow reactor fluidic module comprises a monolithic closed-porosity silicon carbide body, a tortuous fluid passage extending through the silicon carbide body, the tortuous fluid passage having an interior surface, and one or more thermal control fluid passages also extending through the silicon carbide body, the interior surface having a surface roughness of less than 10 μm Ra. A process for forming such modules is also disclosed.

A substrate support structure includes a substrate support structure body formed from a ceramic composite and having a first surface, a second surface spaced apart from the first surface, and a periphery spanning the first surface and the second surface of the substrate support structure body. The first surface, the second surface, and the periphery of the substrate support structure body are defined by the ceramic composite. The ceramic composite includes two or more of a (a) an aluminum nitride (AlN) constituent, (b) an aluminum oxynitride (Al.sub.2.81O.sub.3.56N.sub.0.44, AlON) constituent, (c) an alpha-alumina (α-Al.sub.2O.sub.3) constituent, (d) a yttrium alumina garnet (Y.sub.3Al.sub.5O.sub.12, YAG) constituent, (e) a yttrium alumina monoclinic (Y.sub.4Al.sub.2O.sub.9, YAM) constituent, (f) a yttrium alumina perovskite (YAlO.sub.3, YAP) constituent, and (g) a yttrium oxide (Y.sub.2O.sub.3) constituent. Semiconductor processing systems and methods of making substrate support structures are also described.

A superhard material-containing object is configured to have a controlled and repeatable three-dimensional geometry and/or shape. The object further includes a desired three-dimensional spatial variation in microstructure, grain size and/or composition. The superhard material is selected from the group consisting of diamond, boron-doped diamond and cubic boron nitride. A process for production of a superhard material-containing object from a powder of a superhard material, a binder and an optional additive, includes the steps of: (a) producing a feedstock of the superhard material and a polymer binder; (b) extruding one or more filaments from a granulated superhard material-binder feedstock; (c) preparing a printed superhard material-containing object using the one or more filaments; (d) subjecting the printed object to debinding to prepare a debindered object; and (e) sintering the debindered printed object to produce the superhard material-containing object.

A method for producing a metal-ceramic substrate with electrically conductive vias includes: attaching a first metal layer in a planar manner to a first surface side of a ceramic layer; after attaching the first metal layer, introducing a copper hydroxide or copper acetate brine into holes in the ceramic layer delimiting a via, to form an assembly; converting the copper hydroxide or copper acetate brine into copper oxide; subjecting the assembly to a high-temperature step above 500° C. in which the copper oxide forms a copper body in the holes; and after converting the copper hydroxide or copper acetate brine into the copper oxide, attaching a second metal layer in a planar manner to a second surface side of the ceramic layer opposite the first surface side. The copper body produces an electrically conductive connection between the first and the second metal layers.

A metal-Si based powder contains a metal-Si based particle including a plurality of crystal phase grains. The crystal phase grains include a crystal phase containing a compound of a metal and Si. The crystal phase grains have an average grain size of, for example, 20 μm or less. The metal-Si based particle has an average particle size of, for example, 5 to 100 μm.

A cubic boron nitride sintered material tool contains a plurality of cBN grains. cBN grains located on a surface of the cutting edge contain a cubic boron nitride phase, and a hexagonal boron nitride phase. When a ratio I.sub.π*/I.sub.σ* between an intensity of a π* peak derived from a π bond of hBN in the hexagonal boron nitride phase and an intensity of a σ* peak derived from a σ bond of hBN in the hexagonal boron nitride phase and a σ bond of cBN in the cubic boron nitride phase is determined by measuring an energy loss associated with excitation of K-shell electrons of boron, the ratio I.sub.π*/I.sub.σ* of the cBN grain on the surface of the cutting edge is 0.1 to 2, and the ratio I.sub.π*/I.sub.σ* of the cBN grain at a depth position of 5 μm from the surface of the cutting edge is 0.001 to 0.1.

The present invention relates to the field of new materials technology, in particular to carbon nitride composite ceramic tool materials, preparation method and cutting tools thereof. The raw materials comprise carbon nitride, titanium carbonitride, molybdenum, nickel and cobalt, carbon nitride as the matrix phase, titanium carbonitride as the reinforcing phase are added to the carbon nitride based composite ceramic materials, with molybdenum, nickel and cobalt as a suitable sintering aid, dense composite tool material is obtained with vacuum hot press sintering method. The prepared carbon nitride based composite ceramic tool materials boast the advantages of low cost, high hardness, high bending strength and high fracture toughness, which is an important way to promote the innovation, development and popularization of carbon nitride materials.

The present invention relates to the field of new materials technology, in particular to carbon nitride composite ceramic tool materials, preparation method and cutting tools thereof. The raw materials comprise carbon nitride, titanium carbonitride, molybdenum, nickel and cobalt, carbon nitride as the matrix phase, titanium carbonitride as the reinforcing phase are added to the carbon nitride based composite ceramic materials, with molybdenum, nickel and cobalt as a suitable sintering aid, dense composite tool material is obtained with vacuum hot press sintering method. The prepared carbon nitride based composite ceramic tool materials boast the advantages of low cost, high hardness, high bending strength and high fracture toughness, which is an important way to promote the innovation, development and popularization of carbon nitride materials.

A method for producing calcium lanthanum sulfide (CLS) nano powder and optical ceramics formed therefrom. The method includes the steps of mixing a lanthanum precursor and calcium precursor in water to obtain a solution and adding a sulfide precursor to the solution. Upon adding the sulfide precursor, stirring the solution for 5-25 minutes at 55-95° C. to obtain a mixture. The mixture is then introduced into a muffle furnace, preheated at 400-600° C., and the mixture is kept for 15-50 minutes to obtain nano powder. The nano powder can be annealed and subjected to spark plasma sintering to obtain the optical ceramics.